Low-concentration phosphine gas mixing bottle production roller

Abstract

The utility model discloses a low concentration phosphorus alkane mixed gas production is with rolling bottle machine, including base assembly, the base assembly is installed with rotating cylinder, and rotating cylinder is installed with clamping assembly, the clamping assembly is including clamping block, lift rod, spring, telescopic lever, support vertical pole and counterweight, and clamping block is connected with lift rod away from rotating cylinder horizontal centerline one side, the outside of lift rod is provided with spring, and one end of lift rod is connected with telescopic lever away from clamping block, the middle part of telescopic lever is installed with support vertical pole. Compared with the prior art ordinary rolling bottle machine, the device can utilize the centrifugal force to increase the clamping force, make the device clamping more stable, and the centrifugal force of the counterweight of the same quality is consistent, so the multi-angle clamping force of the gas cylinder can be guaranteed, and the balance is guaranteed. The device can center the rotating cylinder, and increase the stability during the operation of the device.

Description

Technical Field

[0001] This utility model relates to the field of low-concentration phosphine mixed gas technology, specifically to a rolling bottle machine for producing low-concentration phosphine mixed gas. Background Technology

[0002] The rolling bottle machine for producing low-concentration phosphine mixed gas is a specialized mixing device designed specifically for the preparation of low-concentration phosphine (PH3) mixed gas. It is based on the "rolling bottle movement" and is mainly used to achieve uniform mixing of phosphine with diluent gases (such as nitrogen N2, argon Ar, and other inert gases) and to ensure safety and stability of the mixed gas concentration during the production process. It is one of the key pieces of equipment in the production process of low-concentration phosphine mixed gas (such as for doping, vapor deposition, and other processes) required by industries such as microelectronics and semiconductors.

[0003] Existing bottle rolling machines directly place gas cylinders into the equipment during operation. This can easily cause uneven force on the cylinders during rotation, leading to center shift and affecting the operation of the equipment, thus failing to meet user needs. To address this issue, we propose technological innovations based on existing bottle rolling machines. Utility Model Content

[0004] The purpose of this invention is to provide a rolling cylinder machine for producing low-concentration phosphine mixed gas, so as to solve the problem mentioned in the background art that the general one cannot well meet people's needs.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a rolling cylinder machine for producing low-concentration phosphine mixed gas, comprising a base assembly, a rotating cylinder mounted on the base assembly, and a clamping assembly mounted on the rotating cylinder. The clamping assembly includes a clamping block, a lifting rod, a spring, a telescopic lever, a supporting vertical rod, and a counterweight. The lifting rod is connected to the side of the clamping block away from the horizontal center line of the rotating cylinder. A spring is provided on the outside of the lifting rod, and a telescopic lever is connected to the end of the lifting rod away from the clamping block. A supporting vertical rod is mounted in the middle of the telescopic lever, and a counterweight is connected to the end of the telescopic lever away from the lifting rod.

[0006] Furthermore, a front sealing assembly is installed on the upper left side of the base assembly, and an inner plate assembly is installed above the front sealing assembly. A gas cylinder is provided on the side of the clamping assembly near the center line of the rotating cylinder.

[0007] Furthermore, the base assembly includes a lower base, a rear support frame, and a motor, with the rear support frame connected to the upper right side of the lower base, and the motor installed on the right side of the rear support frame.

[0008] Furthermore, the front enclosure assembly includes a front support frame, a front support disc, and a worm gear, with the front support disc mounted on the upper end of the front support frame and the worm gear mounted on the front end of the front support disc.

[0009] Furthermore, the front enclosure assembly also includes a groove and a sliding block, and a groove is provided on the right side of the front plate, with a sliding block connected inside the groove.

[0010] Furthermore, the front enclosure assembly also includes a support rod and a rotating wheel, and the right side of the sliding block is connected to the support rod, and the right side of the support rod is connected to the rotating wheel.

[0011] Furthermore, the inner disk assembly includes a rotating disk, a gear, and a slanted groove, and the gear is provided on the outer side of the rotating disk, with the slanted groove formed on the gear.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This device can use centrifugal force to increase the clamping force, making the device clamp more stable. At the same time, the centrifugal force of the counterweight of the same mass is consistent, so it can ensure that the clamping force of the gas cylinder is the same at multiple angles, thus ensuring balance. This device can center the rotating cylinder, increasing the stability of the device during operation. 1. During operation, this utility model can rely on the centrifugal force of the counterweight to push the lifting rod with the telescopic lever, thereby making the clamping block stably clamp the gas cylinder. By using centrifugal force clamping, the clamping force can be greater as the rotation speed of the equipment increases, thus making the gas cylinder more stable and avoiding the gas cylinder from becoming eccentric due to uneven force, which would affect the operation of the equipment. 2. This utility model uses the rotation of the rotating disc to cause the support rod to drive the rotating wheel to expand outward synchronously, thereby fixing the end of the rotating cylinder. At the same time, it can also correct the rotation center line of the rotating cylinder, so that the center line of the rotating cylinder coincides with the center line of the motor, ensuring the stability of the rotating cylinder. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 2 ; Figure 3 This is an enlarged structural schematic diagram of the rotating cylinder of this utility model; Figure 4 This is an enlarged structural diagram of the front enclosure component of this utility model; Figure 5 This is an enlarged structural schematic diagram of the inner disk assembly of this utility model; Figure 6 This is an enlarged structural schematic diagram of the clamping component of this utility model.

[0014] In the diagram: 1. Base assembly; 101. Lower base; 102. Rear support frame; 103. Motor; 2. Front enclosure assembly; 201. Front support frame; 202. Support front plate; 203. Worm gear; 204. Slide groove; 205. Sliding block; 206. Support rod; 207. Rotating wheel; 3. Inner plate assembly; 301. Rotating plate; 302. Gear; 303. Inclined groove; 4. Rotating cylinder; 5. Clamping assembly; 501. Clamping block; 502. Lifting rod; 503. Spring; 504. Telescopic lever; 505. Supporting vertical rod; 506. Counterweight; 6. Gas cylinder. Detailed Implementation

[0015] like Figure 1 and Figure 6 As shown, a rolling cylinder machine for producing low-concentration phosphine mixed gas includes a base assembly 1, a rotating cylinder 4 mounted on the base assembly 1, and a clamping assembly 5 mounted on the rotating cylinder 4. The clamping assembly 5 includes a clamping block 501, a lifting rod 502, a spring 503, a telescopic lever 504, a support vertical rod 505, and a counterweight 506. The lifting rod 502 is connected to the side of the clamping block 501 away from the horizontal center line of the rotating cylinder 4. The spring 503 is provided on the outside of the lifting rod 502. The telescopic lever 504 is connected to the end of the lifting rod 502 away from the clamping block 501. The support vertical rod 505 is installed in the middle of the telescopic lever 504. The counterweight 506 is connected to the end of the telescopic lever 504 away from the lifting rod 502. The telescopic lever 504 has a telescopic structure on the side near the lifting rod 502, which can compensate for the angle change of the telescopic lever 504. The telescopic lever 504 and the supporting vertical rod 505 form a rotating structure, and the telescopic lever 504 and the lifting rod 502 are also rotatably connected. In this way, during the rotation of the rotating cylinder 4, the counterweight 506 is subjected to centrifugal force, which will pull one end of the telescopic lever 504 away from the rotating cylinder 4, so that the other end presses the lifting rod 502 downward, so that the clamping block 501 can play a stable clamping effect on the gas cylinder 6. The clamping block 501 has a small clamping force through the elastic structure formed between the spring 503 and the rotating cylinder 4, which can only play an auxiliary fixing effect on the gas cylinder 6, making it easier to start the equipment. During operation, the centrifugal force of the counterweight 506 can be used to push the lifting rod 502 through the telescopic lever 504, thereby enabling the clamping block 501 to stably clamp the gas cylinder 6. By using centrifugal force clamping, the faster the equipment rotates, the greater the clamping force, thus making the gas cylinder 6 more stable and preventing the gas cylinder 6 from becoming eccentric due to uneven force, which would affect the operation of the equipment.

[0016] like Figure 2 , Figure 3 , Figure 4 and Figure 5As shown, a front sealing assembly 2 is installed on the upper left side of the base assembly 1, and an inner plate assembly 3 is installed above the front sealing assembly 2. A gas cylinder 6 is provided on the side of the clamping assembly 5 near the center line of the rotating cylinder 4.

[0017] like Figure 1 As shown, the base assembly 1 includes a lower base 101, a rear support frame 102 and a motor 103, and the rear support frame 102 is connected to the upper right side of the lower base 101, and the motor 103 is installed on the right side of the rear support frame 102.

[0018] like Figure 4 As shown, the front enclosure assembly 2 includes a front support frame 201, a front support disc 202, and a worm gear 203. The front support frame 201 is equipped with the front support disc 202, and the front support disc 202 is equipped with the worm gear 203. The front enclosure assembly 2 also includes a slide groove 204 and a sliding block 205. The right side of the front support disc 202 has a slide groove 204, and the sliding block 205 is connected inside the slide groove 204. The front enclosure assembly 2 also includes a support rod 206 and a rotating wheel 207. The right side of the sliding block 205 is connected to the support rod 206, and the right side of the support rod 206 is connected to the rotating wheel 207. The rotation of the rotating disk 301 can cause the support rod 206 to drive the rotating wheel 207 to expand outward synchronously, thereby fixing the end of the rotating cylinder 4 and correcting the rotation center line of the rotating cylinder 4 so that the center line of the rotating cylinder 4 coincides with the center line of the motor 103, ensuring the stability of the rotation of the rotating cylinder 4.

[0019] like Figure 5 As shown, the inner disk assembly 3 includes a rotating disk 301, a gear 302 and a slanted groove 303, and the gear 302 is provided on the outer side of the rotating disk 301, and the slanted groove 303 is provided on the gear 302. The worm gear 203 is rotatably connected to the front support plate 202. During rotation, the worm gear 203 meshes with the gear 302, driving the rotating plate 301 to rotate. During the rotation of the rotating plate 301, the position of the inclined groove 303 changes, thereby pushing the support rod 206 and causing the sliding block 205 to slide inside the sliding groove 204. This causes multiple rotating wheels 207 to perform centrifugal motion, so that multiple rotating wheels 207 will support the rotating cylinder 4 synchronously, thereby achieving a positioning effect on the rotating cylinder 4 and increasing the stability of the rotating cylinder 4 during rotation.

[0020] Working principle: When using this low-concentration phosphine mixed gas production cylinder rolling machine, firstly, the worm gear 203 is rotated to drive the gear 302 to rotate, thereby moving the support rod 206 by relying on the inclined groove 303, so that multiple rotating wheels 207 are spread outward, pushing the rotating cylinder 4 and determining the center line of the rotating cylinder 4. The gas cylinder 6 is then placed into the rotating cylinder 4. At this time, the clamping block 501, through the elastic structure formed between the spring 503 and the rotating cylinder 4, squeezes and initially fixes the gas cylinder 6. Then, the motor 103 is turned on to drive the rotating cylinder 4 to rotate, thereby driving the gas cylinder 6 to rotate and performing the cylinder rolling operation. During the rotation of the rotating cylinder 4, the counterweight 506 is affected by centrifugal force, which increases the clamping force of the clamping block 501 on the gas cylinder 6, thereby fixing the gas cylinder 6 and facilitating the rotation of the rotating cylinder 4 to drive the gas cylinder 6 to rotate.

Claims

1. A bottle rolling machine for producing low-concentration phosphine mixed gas, characterized in that, The device includes a base assembly (1), on which a rotating cylinder (4) is mounted, and on which a clamping assembly (5) is mounted. The clamping assembly (5) includes a clamping block (501), a lifting rod (502), a spring (503), a telescopic lever (504), a support rod (505), and a counterweight (506). The lifting rod (502) is connected to the side of the clamping block (501) away from the horizontal center line of the rotating cylinder (4). The spring (503) is provided on the outside of the lifting rod (502), and the telescopic lever (504) is connected to the end of the lifting rod (502) away from the clamping block (501). The support rod (505) is installed in the middle of the telescopic lever (504), and the counterweight (506) is connected to the end of the telescopic lever (504) away from the lifting rod (502).

2. The bottle rolling machine for producing low-concentration phosphine mixed gas according to claim 1, characterized in that, A front sealing assembly (2) is installed on the upper left side of the base assembly (1), and an inner plate assembly (3) is installed above the front sealing assembly (2). A gas cylinder (6) is provided on the side of the clamping assembly (5) near the center line of the rotating cylinder (4).

3. The bottle rolling machine for producing low-concentration phosphine mixed gas according to claim 1, characterized in that, The base assembly (1) includes a lower base (101), a rear support frame (102) and a motor (103), and the upper right side of the lower base (101) is connected to the rear support frame (102), and the motor (103) is installed on the right side of the rear support frame (102).

4. The bottle rolling machine for producing low-concentration phosphine mixed gas according to claim 2, characterized in that, The front enclosure assembly (2) includes a front support frame (201), a front support plate (202) and a worm gear (203), and the front support plate (202) is installed on the upper end of the front support frame (201), and the worm gear (203) is installed on the front end of the front support plate (202).

5. The bottle rolling machine for producing low-concentration phosphine mixed gas according to claim 4, characterized in that, The front enclosure component (2) further includes a groove (204) and a sliding block (205), and a groove (204) is provided on the right side of the front plate (202), and the sliding block (205) is connected inside the groove (204).

6. The bottle rolling machine for producing low-concentration phosphine mixed gas according to claim 5, characterized in that, The front enclosure assembly (2) also includes a support rod (206) and a rotating wheel (207), and the right side of the sliding block (205) is connected to the support rod (206), and the right side of the support rod (206) is connected to the rotating wheel (207).

7. The bottle rolling machine for producing low-concentration phosphine mixed gas according to claim 2, characterized in that, The inner disk assembly (3) includes a rotating disk (301), a gear (302) and a slant groove (303), and the gear (302) is provided on the outer side of the rotating disk (301), and the slant groove (303) is provided on the gear (302).

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