A quartz furnace for rapid cooling of quartz products

Abstract

The utility model relates to the technical field of quartz product production, and specifically discloses a quartz furnace for rapid cooling of quartz product production, which comprises a furnace body with an open structure on the upper side and a plurality of quartz tubes, a plurality of sealing bearings in a circumferential array are arranged through the bottom end of the inner wall of the furnace body, a positioning rod is fixedly connected inside each of the plurality of sealing bearings and penetrates the corresponding quartz tube, and the outer wall of each of the plurality of positioning rods is fixedly connected with a check ring abutting against the lower end of the corresponding quartz tube; the booster pump delivers the coolant to the annular pipe, the coolant is distributed to each vertical pipe through the distribution pipe, and then sprayed from the uniformly distributed spray heads to form a uniform spray field; the continuously rotating quartz tube enables each part of the outer wall to fully contact the coolant for heat exchange, thereby significantly improving the cooling uniformity, ensuring the consistency of the cooling rate of each part, effectively eliminating the risk of deformation and cracking of the quartz tube caused by local thermal stress concentration, and ultimately achieving the purpose of improving the product qualification rate.

Description

Technical Field

[0001] This utility model relates to the field of quartz product manufacturing technology, and specifically discloses a quartz furnace for rapid cooling in quartz product manufacturing. Background Technology

[0002] Quartz, a key basic material with stable physical and chemical properties, excellent light transmission, high temperature resistance, and a low coefficient of thermal expansion, is widely used in industries such as semiconductors, optical communications, photovoltaics, optical instruments, and high-end lighting. Quartz tubes are among the most basic and important product forms, commonly used as high-temperature reaction vessels, semiconductor process tubes, and gas delivery tubes. These applications place extremely stringent requirements on the geometric dimensions, optical uniformity, and mechanical strength of quartz tubes. Therefore, in the production of quartz tubes, the quality of the cooling and shaping process directly determines the yield and performance of the final product.

[0003] In existing technologies, after the quartz tube is processed, it needs to be cooled to suppress quartz crystallization and fix its microstructure. Currently, water cooling is generally used to cool the quartz tube, that is, the coolant is directly sprayed onto the outer wall of the quartz tube by a spraying device for heat exchange. However, during the spray cooling process, the quartz tube is usually in a static state. This static cooling method is very likely to cause uneven distribution of coolant on the outer wall of the quartz tube, resulting in different cooling rates in different parts of the quartz tube. This uneven cooling not only increases the risk of deformation or even cracking of the quartz tube due to local thermal stress concentration, leading to a decrease in product qualification rate, but also makes it difficult to ensure the consistency of the circumferential performance of the quartz tube.

[0004] Therefore, a quartz furnace for rapid cooling in the production of quartz products is needed to solve the above problems. Utility Model Content

[0005] This invention proposes a rapid cooling quartz furnace for the production of quartz products, which can improve the uniformity of cooling of quartz tubes and ensure that the cooling rate of each part is consistent, thereby effectively eliminating the risk of deformation and cracking of quartz tubes caused by local thermal stress concentration, and ultimately achieving the goal of improving the product qualification rate.

[0006] This utility model is implemented as follows: a quartz furnace for rapid cooling in the production of quartz products includes a furnace body with an open upper side and multiple quartz tubes. Multiple sealed bearings arranged in a circumferential array are provided through the bottom of the inner wall of the furnace body. Positioning rods that pass through the interior of the corresponding quartz tubes are fixedly connected inside the multiple sealed bearings. Retaining rings that abut against the lower end of the corresponding quartz tubes are fixedly connected to the outer walls of the multiple positioning rods. A driving mechanism is provided on the lower side of the furnace body. Each of the quartz tubes has a vertical pipe on its outer side, and each of the vertical pipes has a number of evenly distributed nozzles connected to its outer wall. Each of the vertical pipes has a distribution pipe that penetrates the furnace body. An annular pipe connected to the distribution pipe is provided on the outside of the furnace body. A booster pump with its outlet end connected to the annular pipe is installed on the outer wall of the furnace body. A pressure-applying mechanism is provided on the upper side of each of the quartz tubes.

[0007] As a preferred embodiment of the rapid cooling quartz furnace for quartz product manufacturing according to this utility model, the pressure applying mechanism includes a mounting frame fixedly connected to the upper end of the furnace body. A protective box is installed inside the mounting frame. A servo electric actuator is mounted on the upper end of the mounting frame. The output end of the servo electric actuator passes through the upper end of the mounting frame and is fixedly connected to a pressure sensor between it and the protective box. A rotating shaft is rotatably connected to the lower end of the protective box. A servo motor with an electromagnetic brake is installed inside the protective box, its output end fixedly connected to the rotating shaft. A connecting plate is fixedly connected to the lower end of the rotating shaft. A compression sleeve that abuts against the upper end of the corresponding quartz tube is sleeved on the outer wall of each of the multiple positioning rods. Multiple connecting plates are fixedly connected to the outer wall of the connecting plate. Each connecting plate is rotatably connected to the corresponding compression sleeve via bearings. Two guide rods that pass through the mounting frame and are slidably connected to the upper end of the protective box are fixedly connected to it.

[0008] As a preferred embodiment of the rapid cooling quartz furnace for quartz product manufacturing according to this utility model, the driving mechanism includes a housing fixedly connected to the lower end of the furnace body, a drive motor installed at the lower end of the housing, the output end of the drive motor extending into the interior of the housing and fixedly connected to a drive gear, and the lower ends of the plurality of positioning rods being fixedly connected to driven gears meshing with the drive gear.

[0009] As a preferred embodiment of the rapid cooling quartz furnace for quartz product manufacturing according to this utility model, the outer wall of the furnace body is connected to a drain pipe.

[0010] As a preferred embodiment of the rapid cooling quartz furnace for quartz product manufacturing according to this utility model, the upper ends of the plurality of positioning rods are provided with conical guide heads.

[0011] As a preferred embodiment of the rapid cooling quartz furnace for quartz product manufacturing according to this utility model, the outer wall of the furnace body is fixedly connected to a connecting frame, and the outer wall of the connecting frame is equipped with an operation panel and a controller.

[0012] In a preferred embodiment of the rapid cooling quartz furnace for quartz product manufacturing according to this utility model, multiple vertical tubes are fixedly connected to the bottom of the furnace body.

[0013] The beneficial effects of this utility model are: The quartz tube is fitted onto the positioning rod and supported by the retaining ring. The pressure mechanism then clamps the quartz tube stably. Subsequently, the drive mechanism drives all positioning rods and the quartz tube to rotate synchronously and uniformly. At the same time, the booster pump delivers coolant to the annular pipe, which is then distributed to each vertical pipe through the distribution pipe and sprayed out from evenly distributed nozzles to form a uniform spray field. The continuously rotating quartz tube ensures that all parts of its outer wall can fully contact the coolant for heat exchange, thereby significantly improving the cooling uniformity, ensuring that the cooling rate of each part is consistent, effectively eliminating the risk of deformation and cracking of the quartz tube caused by local thermal stress concentration, and ultimately achieving the goal of improving the product qualification rate. Attached Figure Description

[0014] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0015] Figure 1 This is a front sectional view of the quartz furnace for rapid cooling in the production of quartz products according to this utility model. Figure 2 This is a structural diagram of the annular tube of this utility model; Figure 3 This is a structural diagram of the connecting disc of this utility model; Figure 4 For the present utility model Figure 1 Enlarged view of point A in the middle.

[0016] The markings in the diagram are: 1. Furnace body; 2. Sealed bearing; 3. Positioning rod; 4. Retaining ring; 5. Quartz tube; 6. Housing; 7. Driven gear; 8. Drive motor; 9. Drive gear; 10. Annular tube; 11. Vertical tube; 12. Nozzle; 13. Distribution pipe; 14. Booster pump; 15. Drain pipe; 16. Mounting bracket; 17. Servo electric actuator; 18. Pressure sensor; 19. Protective box; 20. Servo motor; 21. Rotating shaft; 22. Connecting plate; 23. Connecting plate; 24. Bearing; 25. Extrusion sleeve. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and specific embodiments to aid in understanding its content. Unless otherwise specified, the methods used in this invention are conventional methods; the raw materials and apparatus used, unless otherwise specified, are conventional commercially available products.

[0018] Please see Figure 1-4A quartz furnace for rapid cooling in the production of quartz products includes a furnace body 1 with an open upper side and multiple quartz tubes 5. Multiple sealed bearings 2 arranged in a circumferential array are provided through the bottom of the inner wall of the furnace body 1. Positioning rods 3 that pass through the corresponding quartz tubes 5 are fixedly connected inside the multiple sealed bearings 2. Retaining rings 4 that abut against the lower end of the corresponding quartz tubes 5 are fixedly connected to the outer wall of the multiple positioning rods 3. A driving mechanism is provided on the lower side of the furnace body 1. A vertical pipe 11 is provided on the outside of multiple quartz tubes 5. Multiple nozzles 12 are connected to the outer wall of multiple vertical pipes 11. A distribution pipe 13 that penetrates the furnace body 1 is connected to the outer wall of multiple vertical pipes 11. An annular pipe 10 connected to multiple distribution pipes 13 is provided on the outside of the furnace body 1. A booster pump 14 with its water outlet connected to the annular pipe 10 is installed on the outer wall of the furnace body 1. A pressure-applying mechanism is provided on the upper side of multiple quartz tubes 5.

[0019] In this embodiment: multiple quartz tubes 5 are respectively fitted onto corresponding positioning rods 3, with the lower end of the quartz tube 5 supported by a retaining ring 4, thereby positioning the quartz tube 5 by the positioning rods 3 and the retaining rings 4. Subsequently, a pressure mechanism is used to stably clamp all the quartz tubes 5, ensuring that the quartz tubes 5 rotate together with the positioning rods 3.

[0020] After clamping and fixing, the drive mechanism drives all positioning rods 3 to rotate simultaneously, which in turn drives all quartz tubes 5 to rotate at a uniform speed. At the same time, the booster pump 14 starts working, pumping coolant into the annular pipe 10. The coolant is distributed to each vertical pipe 11 through the distribution pipe 13, and finally sprayed out from multiple nozzles 12 evenly distributed on the vertical pipes 11, forming a uniform spray field. Since the quartz tubes 5 are rotating continuously, every part of their outer wall can be evenly covered by coolant, achieving efficient heat exchange.

[0021] In summary, this improves the uniformity of cooling the quartz tube 5, ensures consistent cooling rates across all parts, effectively eliminates the risk of deformation and cracking of the quartz tube 5 caused by localized thermal stress concentration, and ultimately improves the product qualification rate.

[0022] As a technical optimization of this utility model, the pressure applying mechanism includes a mounting frame 16 fixedly connected to the upper end of the furnace body 1. A protective box 19 is provided inside the mounting frame 16. A servo electric actuator 17 is installed at the upper end of the mounting frame 16. The output end of the servo electric actuator 17 passes through the upper end of the mounting frame 16 and is fixedly connected to a pressure sensor 18 between the servo electric actuator 17 and the protective box 19. A rotating shaft 21 is rotatably connected to the lower end of the protective box 19. A servo motor 20 with an electromagnetic brake is installed inside the protective box 19. A connecting plate 22 is fixedly connected to the lower end of the rotating shaft 21. A compression sleeve 25 that abuts against the upper end of the corresponding quartz tube 5 is sleeved on the outer wall of a plurality of positioning rods 3. A plurality of connecting plates 23 are fixedly connected to the outer wall of the connecting plate 22. The plurality of connecting plates 23 are rotatably connected to the corresponding compression sleeves 25 through bearings 24. Two guide rods that pass through the mounting frame 16 and are slidably connected to the upper end of the protective box 19 are fixedly connected to the upper end of the protective box 19.

[0023] In this embodiment: the servo motor 20 drives the rotating shaft 21 to rotate the connecting plate 22 by a certain angle, causing all the pressing sleeves 25 to rotate to the position directly above the positioning rod 3. The servo electric actuator 17 is then activated, pushing the protective box 19, rotating shaft 21, connecting plate 22, and multiple connecting plates 23 downwards. This causes all the pressing sleeves 25 to press down synchronously until all the pressing sleeves 25 abut against the upper ends of each quartz tube 5, thus stably clamping the quartz tube 5 between the retaining ring 4 and the pressing sleeve 25, ensuring that the quartz tube 5 rotates together with the positioning rod 3. During this process, the pressure sensor 18 monitors the pressure data in real time and transmits the signal to the controller. The controller controls the action of the servo electric actuator 17 to ensure that the clamping force on the quartz tube 5 is appropriate. Two vertical guide rods are also used to ensure that the movement of the protective box 19 is stable and without deviation.

[0024] As a technical optimization of this utility model, the drive mechanism includes a housing 6 fixedly connected to the lower end of the furnace body 1. A drive motor 8 is installed at the lower end of the housing 6. The output end of the drive motor 8 extends into the interior of the housing 6 and is fixedly connected to a drive gear 9. The lower ends of multiple positioning rods 3 are all fixedly connected to driven gears 7 that mesh with the drive gear 9.

[0025] In this embodiment: after the drive motor 8 starts, it drives the drive gear 9 at its output end to rotate. The drive gear 9 meshes with all the driven gears 7 at the same time. Since the driven gears 7 are fixedly installed at the bottom of the positioning rod 3, the power is synchronously transmitted to all the positioning rods 3, driving multiple positioning rods 3 to rotate at the same time.

[0026] As a technical optimization of this utility model, the outer wall of the furnace body 1 is connected to a drain pipe 15.

[0027] In this embodiment, the drain pipe 15 installed on the outer wall of the furnace body 1 enables the smooth discharge of waste liquid generated during the cooling process.

[0028] As a technical optimization of this utility model, the upper ends of the multiple positioning rods 3 are provided with tapered guide heads.

[0029] In this embodiment, the tapered surface structure of the tapered guide head has a guiding function, which makes it easy to fit the quartz tube 5 and the extrusion sleeve 25 onto the outer wall of the positioning rod 3.

[0030] As a technical optimization of this utility model, a connecting frame is fixedly connected to the outer wall of the furnace body 1, and an operation panel and controller are installed on the outer wall of the connecting frame.

[0031] In this embodiment, the operator can input commands through the operation panel, and the controller receives the commands and controls the operation of the drive motor 8, the booster pump 14, the servo electric actuator 17 and the servo motor 20.

[0032] As a technical optimization of this utility model, multiple vertical pipes 11 are fixedly connected to the bottom of the furnace body 1.

[0033] In this embodiment: Since multiple vertical pipes 11 are fixedly connected to the bottom of the furnace body 1, the stability of the installation of multiple vertical pipes 11 is improved.

[0034] The working principle and usage process of this utility model are as follows: In the initial state, the multiple extrusion sleeves 25 connected to the connecting plate 23 are staggered with the multiple positioning rods 3, so that multiple quartz tubes 5 can be respectively sleeved on the corresponding positioning rods 3. The lower end of the quartz tube 5 is supported by the retaining ring 4, and the position of the quartz tube 5 is positioned by the positioning rods 3 and the retaining rings 4. Subsequently, the servo motor 20 drives the rotating shaft 21 to rotate the connecting plate 22 by a certain angle, so that all the extrusion sleeves 25 rotate to the position directly above the positioning rods 3. The servo electric actuator 17 is activated to push the protective box 19, the rotating shaft 21, the connecting plate 22, and the multiple connecting plates 23 to move downward, thereby driving all the extrusion sleeves 25 to press down synchronously until all the extrusion sleeves 25 abut against the upper end of each quartz tube 5, thereby stably clamping the quartz tube 5 between the retaining ring 4 and the extrusion sleeve 25, ensuring that the quartz tube 5 rotates together with the positioning rod 3. During this process, the pressure sensor 18 monitors the pressure data in real time and transmits the signal to the controller, which then controls the action of the servo electric actuator 17 to ensure that the clamping force on the quartz tube 5 is appropriate.

[0035] After clamping and fixing, the drive motor 8 starts, driving the drive gear 9 to rotate, which in turn drives all the driven gears 7 to rotate synchronously. Since the driven gears 7 are fixedly connected to the bottom end of the positioning rod 3, and the positioning rod 3 is supported on the furnace body 1 by the sealed bearing 2, all the positioning rods 3 will drive the corresponding quartz tubes 5 to rotate at a uniform speed. At the same time, the booster pump 14 starts to work, pumping the coolant into the annular pipe 10. The coolant is distributed to each vertical pipe 11 through the distribution pipe 13, and finally sprayed out from multiple nozzles 12 evenly distributed on the vertical pipes 11, forming a uniform spray field. Since the quartz tubes 5 are continuously rotating, every part of their outer wall can be evenly covered by the coolant, achieving efficient heat exchange.

[0036] In summary, this improves the uniformity of cooling the quartz tube 5, ensures consistent cooling rates across all parts, effectively eliminates the risk of deformation and cracking of the quartz tube 5 caused by localized thermal stress concentration, and ultimately improves the product qualification rate.

[0037] In the description of this utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0038] However, the above description is only a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.

Claims

1. A quartz furnace for rapid cooling in the production of quartz products, comprising a furnace body (1) with an open upper side and a plurality of quartz tubes (5), characterized in that: The bottom of the inner wall of the furnace body (1) is provided with a plurality of sealed bearings (2) arranged in a circular array. The interior of each of the sealed bearings (2) is fixedly connected with a positioning rod (3) that passes through the interior of the corresponding quartz tube (5). The outer wall of each of the positioning rods (3) is fixedly connected with a retaining ring (4) that abuts against the lower end of the corresponding quartz tube (5). A driving mechanism is provided on the lower side of the furnace body (1). Each of the quartz tubes (5) has a vertical tube (11) on its outer side. Each of the vertical tubes (11) has a number of evenly distributed nozzles (12) connected to its outer wall. Each of the vertical tubes (11) has a distribution pipe (13) that penetrates the furnace body (1) on its outer wall. An annular pipe (10) connected to the distribution pipes (13) is provided on the outside of the furnace body (1). A booster pump (14) with its outlet end connected to the annular pipe (10) is installed on the outer wall of the furnace body (1). A pressure-applying mechanism is provided on the upper side of each of the quartz tubes (5).

2. The quartz furnace for rapid cooling in quartz product manufacturing according to claim 1, characterized in that: The pressure applying mechanism includes a mounting bracket (16) fixedly connected to the upper end of the furnace body (1). A protective box (19) is provided inside the mounting bracket (16). A servo electric actuator (17) is installed at the upper end of the mounting bracket (16). The output end of the servo electric actuator (17) passes through the upper end of the mounting bracket (16) and is fixedly connected to the protective box (19) with a pressure sensor (18). A rotating shaft (21) is rotatably connected to the lower end of the protective box (19). An output end of the protective box (19) is fixedly connected to the rotating shaft (21) and equipped with an electromagnetic sensor is installed inside the protective box (19). The servo motor (20) of the brake has a connecting disc (22) fixedly connected to the lower end of the rotating shaft (21). The outer walls of the multiple positioning rods (3) are fitted with extrusion sleeves (25) that abut against the upper end of the corresponding quartz tubes (5). The outer walls of the connecting disc (22) are fixedly connected with multiple connecting plates (23). The multiple connecting plates (23) are rotatably connected to the corresponding extrusion sleeves (25) through bearings (24). The upper end of the protective box (19) is fixedly connected with two through mounting brackets (16) and guide rods that are slidably connected to the mounting brackets (16).

3. The quartz furnace for rapid cooling in quartz product manufacturing according to claim 1, characterized in that: The drive mechanism includes a housing (6) fixedly connected to the lower end of the furnace body (1), a drive motor (8) is installed at the lower end of the housing (6), the output end of the drive motor (8) extends into the housing (6) and is fixedly connected to a drive gear (9), and the lower ends of the plurality of positioning rods (3) are fixedly connected to driven gears (7) meshing with the drive gear (9).

4. The quartz furnace for rapid cooling in quartz product manufacturing according to claim 1, characterized in that: The outer wall of the furnace body (1) is connected to a drain pipe (15).

5. A rapid cooling quartz furnace for quartz product manufacturing according to claim 1, characterized in that: The upper ends of the multiple positioning rods (3) are provided with tapered guide heads.

6. A rapid cooling quartz furnace for quartz product manufacturing according to claim 1, characterized in that: A connecting frame is fixedly connected to the outer wall of the furnace body (1), and an operation panel and controller are installed on the outer wall of the connecting frame.

7. A rapid cooling quartz furnace for quartz product manufacturing according to claim 1, characterized in that: Multiple vertical pipes (11) are fixedly connected to the bottom of the furnace body (1).

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