High-temperature tail gas treatment device and vacuum coating equipment

Abstract

The utility model discloses a kind of high-temperature tail gas treatment device and vacuum coating equipment, belong to tail gas treatment technical field.The high-temperature tail gas treatment device includes first cylinder;Second cylinder, the second cylinder is double-cavity structure, the first cylinder is sleeved in the outer periphery of the second cylinder, the second cylinder is provided with recess, the cavity of the first cylinder is communicated with the inner cavity of the second cylinder by the recess, the first cylinder and the second cylinder form labyrinth channel structure;Coil, the coil is coiled in the outer periphery of the second cylinder.The high-temperature tail gas treatment device inside forms symmetrical detour labyrinth structure, coil is coiled in the outer periphery of second cylinder, increase the passage length and contact area of high-temperature gas in tail gas treatment device, improve cooling effect and tail gas treatment effect.The first cylinder and the second cylinder are detachable structure, the residue of high-temperature gas condensation, can be cleaned by detaching the first cylinder and the second cylinder.

Description

Technical Field

[0001] This utility model relates to a high-temperature exhaust gas treatment device and a vacuum coating equipment, belonging to the field of exhaust gas treatment technology. Background Technology

[0002] Process gases need to be introduced into vacuum coating or evaporation equipment. After coating, the process gases form high-temperature exhaust gases containing a large number of impurities. The exhaust gases need to be discharged through the process pipe. Generally, they are directly discharged to a special waste gas recovery device for treatment, but the price is expensive and they need to be customized. They cannot be directly connected to the outlet of the vacuum coating equipment.

[0003] Chinese patent document CN222821639U discloses an exhaust gas treatment component and a coating equipment, which can treat the exhaust gas of the coating equipment. By setting up multiple sets of pipes, coolers, filters and negative pressure pumps, the exhaust gas is cooled down and impurities in the exhaust gas are filtered to prevent the components from clogging. However, the device has a complex structure, occupies a large space, and the filter needs to be replaced regularly, which increases the production cost.

[0004] Therefore, there is an urgent need for a high-temperature exhaust gas treatment device that is simple in structure, occupies little space, and is easy to clean condensate residue. Utility Model Content

[0005] To address the aforementioned issues, this invention provides a high-temperature exhaust gas treatment device and a vacuum coating equipment, effectively overcoming the problems of existing waste gas recovery devices being expensive, complex in structure, occupying a large space, and unable to be directly connected to the outlet of the vacuum coating equipment.

[0006] Firstly, this utility model provides a high-temperature exhaust gas treatment device, including... First cylinder; The second cylinder has a double-cavity structure. The first cylinder is sleeved on the outer periphery of the second cylinder. The second cylinder has a groove. The cavity of the first cylinder communicates with the inner cavity of the second cylinder through the groove. The first cylinder and the second cylinder form a labyrinthine channel structure. A coil is wound around the outer periphery of the second cylinder.

[0007] In one embodiment of this utility model, a connector is included, through which the first cylinder and the second cylinder are detachably connected. This facilitates the subsequent cleaning of residues condensed from high-temperature gas.

[0008] In one embodiment of the present invention, the second cylindrical body includes a first shell, the first shell being a cylindrical structure with an opening on one side, and the groove being disposed on the opening side of the first shell.

[0009] In one embodiment of the present invention, the second cylindrical body includes a second shell and a disc. The second shell is a cylindrical structure with openings on both sides. The first shell is sleeved on the outer periphery of the second shell, and the disc is sleeved on the outer periphery of the second shell and fixedly connected to the second shell. The first shell abuts against the disc.

[0010] In one embodiment of this utility model, a cavity structure communicating with the outside is formed between the first shell and the second shell.

[0011] In one embodiment of this utility model, the first cylinder includes an inlet and an outlet. The inlet and outlet are symmetrically arranged on both sides of the first cylinder and are connected to the coil.

[0012] In one embodiment of this utility model, the first cylinder includes a fixing member, which is installed on the inner wall of the first cylinder and abuts against the coil, wherein the coil is a spiral coil.

[0013] Secondly, this utility model also provides a vacuum coating equipment, including the aforementioned high-temperature exhaust gas treatment device.

[0014] In one embodiment of this invention, a cavity is further included, and the first cylinder is detachably connected to the cavity. This facilitates the subsequent cleaning of residues condensed from high-temperature gas.

[0015] In one embodiment of this invention, the cavity is provided with an exhaust port, which communicates with the first cylinder. This allows for direct connection to the exhaust port of a vacuum coating equipment, eliminating the need for additional piping and reducing production costs.

[0016] This utility model has the following beneficial effects: This invention provides a high-temperature exhaust gas treatment device and a vacuum coating equipment. The high-temperature exhaust gas treatment device, by setting up a first cylinder and a second cylinder, and designing the second cylinder as a double-cavity structure, forms a symmetrical and meandering labyrinthine structure inside the device. Coils are wound around the outer circumference of the second cylinder, increasing the passage length and contact area of ​​the high-temperature gas within the device, thus improving cooling and exhaust gas treatment effects. Both the first and second cylinders are detachable; residue condensed by the high-temperature gas can be cleaned by disassembling both cylinders, facilitating installation and cleaning. Furthermore, the device has a simple structure, occupies little space, and can be directly connected to the exhaust port of the vacuum coating equipment without adding extra piping, reducing production costs. Attached Figure Description

[0017] Figure 1 A perspective view of the high-temperature exhaust gas treatment device provided by this utility model.

[0018] Figure 2 This is a cross-sectional view of the high-temperature exhaust gas treatment device provided by this utility model.

[0019] Figure 3 A perspective view of the second cylinder provided by this utility model.

[0020] In the diagram: 1. Cavity; 11. Exhaust port; 2. First cylinder; 21. Inlet; 22. Outlet; 23. Fixing component; 3. Second cylinder; 31. First shell; 32. Second shell; 33. Groove; 34. Disc; 4. Coil; 5. Connecting component. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] In this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0024] like Figures 1 to 3As shown, this utility model provides a high-temperature exhaust gas treatment device, which includes a first cylinder 2, a second cylinder 3, a coil 4, and a connector 5. The first cylinder 2 is sleeved on the outer periphery of the second cylinder 3, and the first cylinder 2 and the second cylinder 3 are connected by the connector 5. The first cylinder 2 and the second cylinder 3 are detachably connected, making it easy to remove the first cylinder 2 and the second cylinder 3 from the vacuum coating equipment for cleaning. The coil 4 is located in the inner cavity formed by the first cylinder 2 and the second cylinder 3, and is coiled around the outer periphery of the second cylinder 3. The coil 4 is used to introduce condensate water to cool and condense the high-temperature gas, converting the high-temperature gas into solid deposition for purification. The deposited impurities adhere to the surface of the first cylinder 2 and the second cylinder 3, or the bottom of the second cylinder 3. By disassembling the first cylinder 2 and the second cylinder 3, the condensed residue can be cleaned.

[0025] In some embodiments, the first cylinder 2 is a cylindrical structure with an internal through hole and discs welded to both ends. Multiple through holes are evenly distributed on the discs. The connecting member 5 connects the first cylinder 2 to the vacuum coating equipment and the second cylinder 3 through these through holes. The first cylinder 2 includes an inlet 21, an outlet 22, and a fixing member 23. The fixing member 23 has an L-shaped structure and is fixedly installed on the inner wall of the first cylinder 2. Its other end abuts against the coil 4 to fix the coil 4. The inlet 21 and outlet 22 are located on the side of the first cylinder 2 and are respectively connected to the inlet of the coil 4 for introducing condensate to cool the high-temperature gas.

[0026] In some embodiments, the second cylinder 3 has a double-layer cavity structure, including a first shell 31 and a second shell 32. The first shell 31 is sleeved on the outside of the second shell 32, and the coil 4 is coiled around the outside of the first shell 31. The first shell 31 is a cylindrical structure with one end closed and the other end open. Multiple grooves 33 are provided on the side wall of the open end of the first shell 31, allowing gas in the first cylinder 2 to enter the second cylinder 3. The second shell 32 is a cylindrical structure with both ends open. The second cylinder 3 also has a disc 34, which is sleeved on the outer periphery of the second shell 32 and fixedly connected to it. Through holes are evenly distributed around the disc to facilitate the passage of the connector 5, connecting the first cylinder 2 and the second cylinder 3. The open end of the first shell 31 is fixedly connected to the disc 34. There is a certain distance between the closed end of the first shell 31 and the open end of the second shell 32. The gas in the first cylinder 2 enters the cavity formed by the first shell 31 and the second shell 32 through the groove 33 and is discharged from the internal through hole of the second shell 32.

[0027] Optionally, the first housing 31, the second housing 32, and the disk 34 are fixedly connected, and the three can be fixedly connected by welding.

[0028] Alternatively, connector 5 can be a bolt, which provides a secure connection, is inexpensive, and facilitates installation and subsequent disassembly and maintenance.

[0029] Optionally, the water inlet of coil 4 can be bottom-in, top-out to prevent air from being mixed into the pipe due to gravity, which would affect the cooling efficiency.

[0030] Furthermore, this utility model also provides a vacuum coating equipment, which includes the aforementioned high-temperature exhaust gas treatment device. The vacuum coating equipment also includes a cavity 1 with an exhaust port 11. A first cylinder 2 is directly connected to the cavity 1 via a connector 5, and the two are detachably connected. The exhaust port 11 communicates with the through hole of the first cylinder 2, allowing the exhaust gas generated during the vacuum coating process to directly enter the exhaust gas treatment device for condensation treatment. The direct connection between the vacuum coating equipment and the exhaust gas treatment device avoids multiple pipe connections, saves equipment space, and eliminates the need for filters, multiple sets of pipes, etc., resulting in a simpler structure and reduced production costs.

[0031] The working principle of the high-temperature exhaust gas treatment device provided by this utility model is as follows: The first cylinder 2 is detachably connected to the cavity 1 of the vacuum coating equipment through the connector 5. The exhaust port 11 of the cavity 1 is connected to the inner cavity of the first cylinder 2. The exhaust gas generated by the vacuum coating equipment during the coating process enters the cavity formed by the first cylinder 2 and the second cylinder 3 through the exhaust port 11. At the same time, condensate water is introduced into the coil 4 to cool the exhaust gas. The exhaust gas in the first cylinder 2 and the second cylinder 3 enters the cavity formed by the first housing 31 and the second housing 32 through the groove 33 on the first housing 31, and is discharged from the inner hole of the second housing 32. The high-temperature exhaust gas condenses upon cooling and is converted into solid deposits, which are deposited on the disc 34 or adhered to the inner walls of the first cylinder 2 and the second cylinder 3. By disassembling the first cylinder 2 and the second cylinder 3, the condensed residue can be cleaned after the exhaust gas treatment is completed. After cleaning, they can be put back into their original positions. The exhaust gas treatment device adopts a symmetrical and meandering labyrinth structure, which increases the passage length and contact area in the high-temperature gas exhaust gas treatment device. Moreover, the coil 4 is coiled around the outside of the second cylinder 3, which can cool the gas in both the first cylinder 2 and the second cylinder 3, thus improving the cooling effect.

[0032] In summary, this high-temperature exhaust gas treatment device has the following advantages: By setting up a first cylinder 2 and a second cylinder 3, and designing the second cylinder 3 as a double-chamber structure, a symmetrical and meandering labyrinthine structure is formed inside the high-temperature exhaust gas treatment device. The coil 4 is wound around the outer periphery of the second cylinder 3, increasing the passage length and contact area of ​​the high-temperature gas in the exhaust gas treatment device, thereby improving the cooling effect and exhaust gas treatment effect. Both the first cylinder 2 and the second cylinder 3 are detachable structures. The residue condensed by the high-temperature gas can be cleaned by disassembling the first cylinder 2 and the second cylinder 3, which facilitates installation and cleaning. Moreover, the device has a simple structure, occupies little space, and can be directly connected to the exhaust port of the vacuum coating equipment without adding extra pipes, thus reducing production costs.

[0033] This document uses specific embodiments to illustrate the principles and implementation methods of this utility model. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A high-temperature exhaust gas treatment device, characterized in that, include First cylinder (2); The second cylinder (3) has a double cavity structure. The first cylinder (2) is sleeved on the outer periphery of the second cylinder (3). The second cylinder (3) has a groove (33). The cavity of the first cylinder (2) is connected to the inner cavity of the second cylinder (3) through the groove (33). The first cylinder (2) and the second cylinder (3) form a labyrinth channel structure. The coil (4) is coiled around the outer periphery of the second cylinder (3).

2. The high-temperature exhaust gas treatment device according to claim 1, characterized in that, Includes a connector (5), and the first cylinder (2) and the second cylinder (3) are detachably connected by the connector (5).

3. The high-temperature exhaust gas treatment device according to claim 1, characterized in that, The second cylindrical body (3) includes a first shell (31), which is a cylindrical structure with an opening on one side, and the groove (33) is provided on the opening side of the first shell (31).

4. The high-temperature exhaust gas treatment device according to claim 3, characterized in that, The second cylindrical body (3) includes a second shell (32) and a disc (34). The second shell (32) is a cylindrical structure with openings on both sides. The first shell (31) is fitted around the outer periphery of the second shell (32). The disc (34) is fitted around the outer periphery of the second shell (32) and is fixedly connected to the second shell (32). The first shell (31) abuts against the disc (34).

5. A high-temperature exhaust gas treatment device according to claim 4, characterized in that, A cavity structure communicating with the outside is formed between the first housing (31) and the second housing (32).

6. The high-temperature exhaust gas treatment device according to claim 5, characterized in that, The first cylinder (2) includes an inlet (21) and an outlet (22). The inlet (21) and outlet (22) are symmetrically arranged on both sides of the first cylinder (2) and are connected to the coil (4).

7. The high-temperature exhaust gas treatment device according to claim 1, characterized in that, The first cylinder (2) includes a fixing member (23), which is installed on the inner wall of the first cylinder (2) and abuts against the coil (4), which is a spiral coil.

8. A vacuum coating apparatus, characterized in that, Includes a high-temperature exhaust gas treatment device as described in any one of claims 1-7.

9. A vacuum coating apparatus according to claim 8, characterized in that, It also includes a cavity (1), and the first cylindrical body (2) is detachably connected to the cavity (1).

10. A vacuum coating apparatus according to claim 9, characterized in that, The cavity (1) is provided with an exhaust port (11), which is connected to the first cylinder (2).

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