Uniform coating evaporation device

Abstract

The application relates to the field of coating, in particular to a uniform coating evaporation equipment, which comprises a coating box, an evaporation heater, an evaporation boat, a spiral pipe, a clamping assembly and a coating rack; the evaporation heater is installed at the bottom end inside the coating box, the evaporation boat is used for loading evaporation materials and is installed above the evaporation heater, one end of the spiral pipe is provided with a horn air inlet device, the other end is communicated with a plurality of connecting pipes, the horn air inlet device is sleeved on the evaporation boat, a plurality of the connecting pipes are arranged in a circumferential equidistant manner and are arranged in a decreasing manner from the periphery to the middle, the coating rack is fixedly installed at the top end of the coating box, the clamping assembly is fixedly installed on the coating rack, and the clamping assembly is used for clamping target pieces. The application has the effects of improving coating efficiency and quality.

Description

Technical Field

[0001] This application relates to the field of coating, and more particularly to a uniform coating vapor deposition apparatus. Background Technology

[0002] Evaporation deposition technology refers to a process in which, under vacuum conditions, a specific heating and evaporation method is used to vaporize the coating material, and the vaporized particles are deposited onto the surface of a substrate or device to condense and form a film. It primarily uses evaporation equipment to spray the coating material in vapor form onto the substrate or device to form a film layer on its surface.

[0003] Some vapor deposition equipment typically includes a vapor deposition source and a coating umbrella frame positioned above the vapor deposition source to support the substrate. During vapor deposition, the coating umbrella frame rotates to ensure uniform film thickness across the substrates distributed throughout the frame. However, due to the higher concentration of evaporants directly above the vapor deposition source, the film thickness on the substrates in the middle ring of the coating umbrella frame directly opposite the source is thicker, while the film thickness on the substrates in the upper ring (near the center of the umbrella frame) and the lower ring (near the edge of the umbrella frame) is thinner. Therefore, vapor deposition equipment usually also includes a coating correction plate positioned between the coating umbrella frame and the vapor deposition source to block the evaporants directly above the vapor deposition source, thereby reducing the film thickness on the substrates directly opposite the source and correcting the thickness differences in film thickness across the substrates in different rings of the coating umbrella frame.

[0004] However, using a correction plate to shield and ensure uniform vapor deposition results in the vaporized material adhering to the correction plate, reducing deposition efficiency and wasting material. Furthermore, even with a correction plate, the evaporated film, lacking external constraint and exhibiting disordered movement, still produces a rough, uneven film of poor quality. Utility Model Content

[0005] To improve coating efficiency and quality, this application provides a uniform coating vapor deposition apparatus.

[0006] The uniform film deposition equipment provided in this application adopts the following technical solution: A uniform coating vapor deposition apparatus includes a coating chamber, an evaporation heater, an evaporation boat, a spiral tube, a clamping assembly, and a coating rack. The evaporation heater is installed at the bottom of the coating chamber. The evaporation boat is used to load the vapor deposition material and is installed above the evaporation heater. One end of the spiral tube is equipped with a horn-shaped air inlet, and the other end is connected to multiple connecting pipes. The horn-shaped air inlet is sleeved on the evaporation boat. The multiple connecting pipes are arranged equidistantly in a circle, decreasing in size from the periphery to the center. The coating rack is fixedly installed at the top of the coating chamber, and the clamping assembly is fixedly installed on the coating rack. The clamping assembly is used to clamp the target part.

[0007] Optionally, the coating box includes a box body and a box cover, the box cover is detachably installed on the top of the box body, and the coating rack is fixedly installed on the bottom of the box cover.

[0008] Optionally, the bottom end of the coating rack is provided with a receiving groove, and two sets of clamping assemblies are provided. The two sets of clamping assemblies are respectively installed on two opposite groove walls of the receiving groove. The clamping assembly includes a telescopic motor, a connecting plate, a rotating motor, and a clamping plate. The telescopic motor is horizontally fixedly installed on the groove wall of the receiving groove. The connecting plate is fixedly installed on the output end of the telescopic motor. The rotating motor is fixedly installed on the end of the connecting plate away from the telescopic motor. The clamping plate is fixedly installed on the output end of the rotating motor. The clamping plate is provided with a sliding groove.

[0009] Optionally, an auxiliary plate is installed at the top of the spiral tube, and the auxiliary plate has multiple connection holes, one connection hole corresponding to one connection tube. A nozzle is threadedly installed at the connection hole, and the nozzle is connected to the connection tube.

[0010] Optionally, the housing is connected to a vacuum pump.

[0011] Optionally, the nozzle located at the center is vertically upward, and the tilt angle of the other nozzles gradually increases from the center outwards, wherein the tilt angle is the angle between the nozzle's spray direction and the vertical line.

[0012] Optionally, it also includes a solenoid valve, a controller, and a display screen. Multiple solenoid valves are provided, and each of the multiple solenoid valves is installed on a connecting pipe. The controller is electrically connected to the display screen and the solenoid valves respectively.

[0013] Optionally, both the spiral tube and the nozzle are made of high-temperature resistant materials.

[0014] In summary, this application includes at least one of the following beneficial technical effects: 1. Based on the size of the target part, adjust the distance between the two clamping plates using a telescopic motor to achieve the appropriate position. Place the target part between the two sliding grooves, then assemble the lid and body of the container. After assembly, evacuate the inside of the container using a vacuum pump. Then, guide the flow of the vaporized deposition material in the evaporation boat through a spiral tube, thus changing the disordered movement of the vaporized deposition material into directional movement. Simultaneously, the spiral tube's small diameter increases the flow rate of the vaporized deposition material. Guiding the vaporized deposition material to directionally deposit a more uniform film, while increasing the flow rate of the vaporized deposition material accelerates the deposition efficiency.

[0015] 2. This utility model does not use a correction plate, which can reduce the loss of vapor-deposited materials. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a uniform coating vapor deposition apparatus according to an embodiment of this application.

[0017] Figure 2 This is a cross-sectional view of a uniform film deposition apparatus according to an embodiment of this application.

[0018] Figure 3 This is a schematic diagram of the clamping component of a uniform film deposition apparatus according to an embodiment of this application.

[0019] Figure 4 This is a schematic diagram of the spiral tube of a uniform coating vapor deposition apparatus according to an embodiment of this application.

[0020] Figure 5 This is a system diagram of a uniform film deposition equipment according to an embodiment of this application.

[0021] Explanation of reference numerals in the attached drawings: 1. Coating chamber; 11. Chamber body; 12. Chamber cover; 2. Evaporation heater; 3. Evaporation boat; 4. Spiral tube; 41. Horn-shaped air inlet; 42. Connecting pipe; 43. Auxiliary plate; 431. Connecting hole; 44. Nozzle; 5. Clamping assembly; 51. Telescopic motor; 52. Connecting plate; 53. Rotating motor; 54. Clamping plate; 541. Slide groove; 6. Coating rack; 61. Receiving tank; 7. Solenoid valve; 8. Controller; 9. Display screen; 10. Vacuum pump. Detailed Implementation

[0022] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0023] This application discloses a uniform film deposition equipment.

[0024] Reference Figures 1 to 5 A uniform coating vapor deposition device includes a coating box 1, an evaporation heater 2, an evaporation boat 3, a spiral tube 4, a clamping assembly 5, a coating rack 6, a solenoid valve 7, a controller 8, and a display screen 9.

[0025] The coating box 1 includes a box body 11 and a box cover 12. The box cover 12 is detachably installed on the top of the box body 11. The box cover 12 is equipped with a lifting device (not shown) for raising the box cover 12 so as to separate the box cover 12 from the box body 11 and then place the target part.

[0026] The coating rack 6 is fixedly installed at the bottom of the box cover 12. The bottom of the coating rack 6 is provided with a receiving groove 61. Two sets of clamping components 5 are provided. The two sets of clamping components 5 are respectively installed on the left and right groove walls of the receiving groove 61. The clamping components 5 are used to clamp the target part.

[0027] A clamping assembly 5 includes a telescopic motor 51, a connecting plate 52, a rotating motor 53, and a clamping plate 54. The telescopic motor 51 is horizontally fixedly mounted on the wall of the receiving groove 61. The connecting plate 52 is fixedly mounted on the output end of the telescopic motor 51. The rotating motor 53 is fixedly mounted on the end of the connecting plate 52 opposite to the telescopic motor 51. The clamping plate 54 is fixedly mounted on the output end of the rotating motor 53. A sliding groove 541 is formed on the clamping plate 54, and the target part is placed between the sliding grooves 541 on the two clamping plates 54. It should be noted that the sliding grooves 541 do not penetrate through the clamping plates 54.

[0028] The telescopic motor 51 moves the clamping plate 54 according to the size of the target part, and the rotating motor 53 rotates the clamping plate 54 according to the double-sided coating of the target part. Since the slide groove 541 does not penetrate the clamping plate 54, the target part will not fall off during the rotation of the rotating motor 53.

[0029] The evaporator heater 2 is fixedly installed at the bottom of the chamber 11. The evaporation boat 3 is used to load the vapor deposition material and is installed above the evaporator heater 2. One end of the spiral tube 4 is equipped with a horn-shaped air inlet 41, and the other end is connected to multiple connecting pipes 42. The horn-shaped air inlet 41 is sleeved on the evaporation boat 3. The multiple connecting pipes 42 are arranged in a circumferentially equidistant pattern, decreasing in size from the periphery to the center. It should be noted that the spiral tube 4 is used to accelerate the flow rate and uniformly mix the vaporized vapor deposition material.

[0030] An auxiliary plate 43 is installed at the top of the spiral tube 4. Multiple connection holes 431 are provided on the auxiliary plate 43, each corresponding to a connecting pipe 42. A nozzle 44 is threadedly installed at each connection hole 431 and is connected to the connecting pipe 42. It should be noted that the central nozzle 44 is vertically upward, while the inclination of the other nozzles 44 gradually increases from the center outwards. The inclination is the angle between the nozzle 44's spray direction and the vertical line. This structure avoids high concentrations of evaporants directly above the vapor deposition source, resulting in a more uniform coating on the target part.

[0031] It is also worth noting that both the spiral tube 4 and the nozzle 44 are made of high-temperature resistant materials.

[0032] Multiple solenoid valves 7 are provided, and each solenoid valve 7 is installed on the connecting pipe 42. The controller 8 is electrically connected to the display screen 9 and the solenoid valves 7 respectively. Depending on the size of the target part, the operator can control the number of solenoid valves 7 to open and close via the controller 8 on the display screen 9, which can reduce the waste of vapor deposition material.

[0033] The controller 8 is also connected to the telescopic motor 51 and the rotary motor 53 for controlling the telescopic motor 51 and the rotary motor 53.

[0034] The chamber 11 is connected to a vacuum pump 10, which is used to evacuate the coating chamber 1 before the coating process. It should be noted that evacuation is a basic process in vapor deposition, which can prevent the coating process from being disturbed by air.

[0035] The implementation principle of a uniform coating vapor deposition device according to this application embodiment is as follows: Based on the size of the target part, the distance between the two clamping plates 54 is adjusted by the telescopic motor 51 to achieve a suitable position. The target part is then placed between the two sliding grooves 541. Subsequently, the cover 12 and the box body 11 are assembled. After assembly, a vacuum pump 10 is used to evacuate the inside of the box body 11. Then, the vaporized vapor deposition material in the evaporation boat 3 is guided to flow through the spiral tube 4, thereby changing the disordered movement of the vaporized vapor deposition material into directional movement. Simultaneously, the spiral tube 4, with its small diameter, increases the flow rate of the vaporized vapor deposition material. Guiding the vaporized vapor deposition material to directionally deposit a more uniform film layer, while increasing the flow rate of the vaporized vapor deposition material, improves the coating efficiency.

[0036] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A uniform film deposition equipment, characterized in that: The coating includes a coating box (1), an evaporation heater (2), an evaporation boat (3), a spiral tube (4), a clamping assembly (5), and a coating rack (6). The evaporation heater (2) is installed at the bottom inside the coating box (1). The evaporation boat (3) is used to load the evaporation material and is installed above the evaporation heater (2). One end of the spiral tube (4) is equipped with a horn-shaped air inlet (41), and the other end is connected to multiple connecting pipes (42). The horn-shaped air inlet (41) is sleeved on the evaporation boat (3). The multiple connecting pipes (42) are arranged equidistantly in a circle and decrease in size from the periphery to the center. The coating rack (6) is fixedly installed at the top of the coating box (1). The clamping assembly (5) is fixedly installed on the coating rack (6) and is used to clamp the target part.

2. The uniform film deposition equipment according to claim 1, characterized in that: The coating box (1) includes a box body (11) and a box cover (12). The box cover (12) is detachably installed on the top of the box body (11), and the coating rack (6) is fixedly installed on the bottom of the box cover (12).

3. The uniform film deposition equipment according to claim 1, characterized in that: The coating rack (6) has a receiving groove (61) at its bottom end. The clamping assembly (5) is provided in two sets. The two sets of clamping assemblies (5) are respectively installed on two opposite groove walls of the receiving groove (61). The clamping assembly (5) includes a telescopic motor (51), a connecting plate (52), a rotating motor (53), and a clamping plate (54). The telescopic motor (51) is horizontally fixedly installed on the groove wall of the receiving groove (61). The connecting plate (52) is fixedly installed on the output end of the telescopic motor (51). The rotating motor (53) is fixedly installed on the end of the connecting plate (52) away from the telescopic motor (51). The clamping plate (54) is fixedly installed on the output end of the rotating motor (53). The clamping plate (54) has a sliding groove (541).

4. The uniform coating vapor deposition equipment according to claim 1, characterized in that: An auxiliary plate (43) is installed at the top of the spiral tube (4). The auxiliary plate (43) has multiple connecting holes (431). Each connecting hole (431) corresponds to a connecting tube (42). A nozzle (44) is threadedly installed at the connecting hole (431). The nozzle (44) is connected to the connecting tube (42).

5. The uniform film deposition equipment according to claim 2, characterized in that: The housing (11) is connected to a vacuum pump (10).

6. The uniform film deposition equipment according to claim 4, characterized in that: The nozzle (44) located at the center is vertically upward, and the inclination of the other nozzles (44) gradually increases from the center to the surrounding areas. The inclination is the angle between the nozzle (44) and the vertical line.

7. The uniform film deposition equipment according to claim 1, characterized in that: It also includes a solenoid valve (7), a controller (8) and a display screen (9). Multiple solenoid valves (7) are provided, and the multiple solenoid valves (7) are respectively installed on the connecting pipe (42). The controller (8) is electrically connected to the display screen (9) and the solenoid valves (7).

8. The uniform coating vapor deposition equipment according to claim 4, characterized in that: Both the spiral tube (4) and the nozzle (44) are made of high-temperature resistant materials.

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