Vacuum multi-arc ion plating control device

Abstract

The utility model discloses a kind of vacuum multi-arc ion plating film control equipment, comprising: vacuum furnace body;Fine extraction valve, fine extraction valve is installed in one side of vacuum furnace body, the beneficial effects of the utility model are: the combination design of bypass pipe and bypass valve, when the load of main extraction path is too high or need fast pre-extraction vacuum, switch to bypass path by coarse extraction pump independent work, avoid main system pressure fluctuation, the filter of coarse extraction pump output end can intercept the particle impurity discharged, prevent polluting vacuum furnace body internal environment, to ensure that plating process is not interfered by impurity, improve the stability of plating quality;Vacuum furnace body inner part area sets up multiple heating pipes, can be accurate temperature control to different material plating process requirement, room temperature detector monitors furnace temperature in real time and feedback to control system, form closed loop temperature control, avoid temperature too high and lead to target material or workpiece deformation, multiple magnetron target synchronous work can improve ion plating efficiency, shorten process cycle.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, specifically a vacuum multi-arc ion plating control device. Background Technology

[0002] Coating technology is crucial and widely used in the field of material surface treatment, improving material performance and lifespan, and is indispensable in many industries. Traditional coating methods include chemical vapor deposition (CVD), evaporation coating, and sputtering coating. With increasing requirements, multi-arc ion plating technology has emerged. It combines arc discharge and ion plating technology, and has advantages such as low-temperature coating, strong film-substrate adhesion, and the ability to deposit composite films. However, the main pumping path of some equipment is prone to pressure fluctuations when the load is too high or when rapid pre-vacuuming is required, which affects the pumping efficiency and vacuum stability, and thus leads to a decrease in coating quality. Utility Model Content

[0003] The purpose of this invention is to provide a vacuum multi-arc ion plating control device to solve the problem mentioned in the background art that the main pumping path of some devices is prone to pressure fluctuations when the load is too high or rapid pre-vacuuming is required, which affects the pumping efficiency and the stability of the vacuum degree, and thus leads to a decrease in the coating quality.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a vacuum multi-arc ion plating control device, comprising:

[0005] Vacuum furnace body;

[0006] A fine extraction valve is installed on one side of the vacuum furnace body. A molecular pump is installed at the bottom of the fine extraction valve. Multiple No. 1 vent pipes are provided at the output end of the molecular pump. No. 2 vent pipes are provided on both sides of the fine extraction valve. The No. 1 vent pipes and the No. 2 vent pipes are connected to each other.

[0007] A centralized air tube is placed on one side of the fine extraction valve, and the second air tube is connected to the centralized air tube.

[0008] A first connecting pipe is installed on the central gas pipe, a pre-valve is installed on the first connecting pipe, and a second connecting pipe is installed on the pre-valve.

[0009] The No. 3 connecting pipe is fixed to one end of the No. 2 connecting pipe. A connecting pipe is installed on the fine extraction valve, and a coarse extraction valve is installed at one end of the connecting pipe. The coarse extraction valve is connected to the No. 3 connecting pipe.

[0010] As a preferred embodiment of this utility model: a bypass pipe is provided on one side of the No. 3 connecting pipe, a bypass valve is installed on the bypass pipe, the bypass valve is connected to the No. 3 connecting pipe through a pipeline, a coarse pump is installed at one end of the bypass pipe, and a filter is provided at the output end of the coarse pump.

[0011] As a preferred embodiment of this utility model: the interior of the vacuum furnace body is provided with multiple sets of heating tubes, the top of the vacuum furnace body is provided with a room temperature detector, and the top of the vacuum furnace body is provided with multiple magnetron targets.

[0012] As a preferred embodiment of this utility model: a Roots pump is provided on one side of the fine extraction valve, one end of the No. 3 connecting pipe is connected to the Roots pump, one end of the bypass pipe is connected to the Roots pump, a maintenance pump is provided on one side of the Roots pump, and the maintenance pump and the molecular pump are connected by a gas pipe.

[0013] As a preferred embodiment of this utility model: a closed door is provided on one side of the vacuum furnace body, a water inlet pipe is provided inside the vacuum furnace body, and a water outlet pipe is provided inside the vacuum furnace body.

[0014] As a preferred embodiment of this utility model: an arc head is provided inside the vacuum furnace body, an arc-initiating plate is provided inside the vacuum furnace body, a control cabinet is provided on one side of the vacuum furnace body, an arc source body is provided on one side of the control cabinet, and an arc control cabinet and an arc source cabinet are provided inside the arc source body.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: Through the combined design of bypass pipe and bypass valve, this utility model can switch to the bypass path and let the coarse pump work independently when the main pumping path is overloaded or needs rapid pre-vacuuming, avoiding pressure fluctuations in the main system. The filter at the output end of the coarse pump can intercept the discharged particulate impurities, preventing contamination of the internal environment of the vacuum furnace, thereby ensuring that the coating process is not affected by impurities and improving the stability of coating quality. Multiple heating tubes are set in different areas inside the vacuum furnace, which can accurately control the temperature according to the coating process requirements of different materials. The room temperature detector monitors the temperature inside the furnace in real time and feeds it back to the control system to form a closed-loop temperature control, avoiding the deformation of the target material or workpiece due to excessive temperature. The simultaneous operation of multiple magnetron targets can improve the efficiency of ion plating and shorten the process cycle. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a top view of the present invention;

[0018] Figure 3 This is a right view of the present invention;

[0019] Figure 4 This is a bottom view of the present invention.

[0020] In the diagram: 1. Vacuum furnace body; 2. Water inlet pipe; 3. Water outlet pipe; 4. Fine extraction valve; 5. No. 1 vent pipe; 6. No. 2 vent pipe; 7. Sealing door; 8. Centralized gas pipe; 9. No. 1 connecting pipe; 10. Pre-valve; 11. No. 2 connecting pipe; 12. No. 3 connecting pipe; 13. Coarse extraction valve; 14. Connecting pipe; 15. Room temperature detector; 16. Heating tube; 17. Molecular pump; 18. Arc head; 19. Arc ignition plate; 20. Roots pump; 21. Bypass pipe; 22. Bypass valve; 23. Coarse extraction pump; 24. Filter; 25. Maintaining pump; 26. Control cabinet; 27. Magnetically controlled target; 28. Arc source body. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1 to 4 This utility model provides a technical solution: a vacuum multi-arc ion plating control device, comprising: a vacuum furnace body 1; a fine extraction valve 4 installed on one side of the vacuum furnace body 1, a molecular pump 17 installed at the bottom of the fine extraction valve 4, a plurality of first-level air pipes 5 provided at the output end of the molecular pump 17, and second-level air pipes 6 provided on both sides of the fine extraction valve 4, the first-level air pipes 5 and the second-level air pipes 6 being connected; a centralized air pipe 8 placed on one side of the fine extraction valve 4, the second-level air pipes 6 being connected to the centralized air pipe 8; a first-level connecting pipe 9 fixedly connected to the centralized air pipe 8, a pre-valve 10 installed on the first-level connecting pipe 9, and a second-level connecting pipe 11 installed on the pre-valve 10; a third-level connecting pipe 12 fixedly connected to one end of the second-level connecting pipe 11, a connecting pipe 14 installed on the fine extraction valve 4, a coarse extraction valve 13 installed at one end of the connecting pipe 14, and the coarse extraction valve 13 being connected to the third-level connecting pipe 12.

[0023] It should be noted that in this embodiment, the vacuum pumping system consists of a coarse pumping stage and a fine pumping stage, achieving a rapid transition from atmospheric pressure to high vacuum in the vacuum furnace 1 through staged pumping. Coarse pumping stage: Coarse pump 23 starts and connects to the vacuum chamber via coarse pumping valve 13 to perform initial pumping. Roots pump 20, acting as an accelerator pump, is installed after coarse pump 23 and connected to coarse pumping valve 13 via connecting pipe 12 to increase the pumping speed during the coarse pumping stage. Bypass valve 22 and bypass pipe 21 form a backup path. When the main pumping path is overloaded or requires rapid pre-vacuuming, the bypass valve opens, and the coarse pump operates independently via the bypass pipe, avoiding pressure fluctuations in the main system. The pipeline charging valve automatically opens when the coarse pump stops, charging the pipeline with atmospheric air to balance the pressure. Fine pumping valve 4 opens, connecting molecular pump 17 to the vacuum chamber. The molecular pump draws gas to the centralized gas pipe 8 via vent pipe 5 and vent pipe 6, and then discharges it via pre-valve 10 and connecting pipe 9. The maintenance pump 25 is connected to the molecular pump via a gas pipe to maintain a low-pressure environment inside the furnace when the molecular pump stops, preventing air backflow and oxidation contamination. The low vacuum stage is indicated by a resistance gauge, and the high vacuum stage is indicated by an ionization gauge. The coating system evaporates the target material through arc discharge, generating plasma which is then deposited on the substrate surface to achieve the coating process. The arc head 18 is installed at the top of the vacuum chamber and contains the target material. The arc source body 28 provides power to the arc head, and the arc energy is concentrated through the arc ignition plate 19 to drive the arc ignition needle to "ignite" the arc on the target surface. The arc discharge causes the target material to evaporate and sputter, generating target particles, which are then deposited on the substrate after ionization, excitation, or reaction. The mass flow valve controls the flow rate of the working gas and the reaction gas to control the coating composition and structure. The rotating frame inside the vacuum furnace body 1 is driven by a variable frequency motor and achieves rotation through a planetary gear mechanism, ensuring uniform coating of the workpiece. The electrical control system achieves automated equipment operation and precise adjustment of process parameters through the coordinated control of the main control cabinet, arc control cabinet, and arc source cabinet. Manual mode: Equipment such as the roughing pump, Roots pump, and molecular pump are started sequentially via buttons, and valve opening and closing and process parameters are manually controlled. Automatic mode: PLC combined with a touchscreen control automatically runs the coating process according to preset procedures, including stages such as evacuation, heating, coating, and gas filling. A composite vacuum gauge monitors the vacuum level of the pipeline and vacuum chamber in real time, feeding back to the control system for closed-loop control. Arc control cabinet: Monitors the current of each arc head 18 in real time; the arc source key switches the arc head power on / off, the arc ignition key manually ignites the arc, and the power key adjusts the arc source current. Arc source cabinet: Provides an independent power supply for each arc source; its modular design facilitates maintenance and upgrades.

[0024] Turn on the main power, enter the password to access the operation page, start the cooling tower, check the cooling water and compressed air, start the sustaining pump 25, preheat the molecular pump 17 for about 20 minutes, observe that the speed reaches the standard, then turn on the arc source main power and gas cylinder switch, place the workpiece and close the sealing door 7, start the roughing pump 23 and roughing valve 13, and the vacuum degree reaches 3.0×10 2When the pressure reaches 3.0 Pa, the Roots pump 20 is turned on, and the vacuum degree reaches 3.0~5.0×10. 0 When the pressure reaches 10 Pa, close the coarse extraction valve 13 and open the pre-valve 10 and fine extraction valve 4 to achieve a vacuum level of 2.0–2.5 × 10⁻⁶. -2 At Pa, the coating stage begins. Argon gas is introduced to coat the bottom layer. After 1 minute, nitrogen gas is switched to coat the top layer. The arc power supply and gas path are turned off to complete the coating. Molecular pump 17 is turned off. After evacuating for 5 minutes, the roughing valve 13 and roughing pump 23 are turned off. The automatic shutdown time is set, and the system automatically shuts down the maintenance pump 25 and the cooling tower.

[0025] In one embodiment, such as Figures 1 to 4 As shown, a bypass pipe 21 is provided on one side of the third connecting pipe 12. A bypass valve 22 is installed on the bypass pipe 21. The bypass valve 22 is connected to the third connecting pipe 12 through a pipe. A coarse pump 23 is installed at one end of the bypass pipe 21. A filter 24 is provided at the output end of the coarse pump 23.

[0026] It should be noted that, in this embodiment, the combination design of bypass pipe 21 and bypass valve 22 can switch to the bypass path when the main pumping path is overloaded or when rapid pre-vacuuming is required, so that the coarse pump 23 can work independently, thus avoiding pressure fluctuations in the main system. The filter 24 can intercept particulate impurities discharged by the coarse pump 23, preventing contamination of the internal environment of the vacuum furnace 1 and improving the stability of coating quality.

[0027] In one embodiment, such as Figures 1 to 4 As shown, the vacuum furnace body 1 has multiple sets of heating tubes 16 inside, a room temperature detector 15 on the top of the vacuum furnace body 1, and multiple magnetron targets 27 on the top of the vacuum furnace body 1.

[0028] It should be noted that in this embodiment, multiple sets of heating tubes 16 can control the furnace temperature in zones to adapt to the coating process requirements of different materials. The room temperature detector 15 monitors the furnace temperature in real time and feeds it back to the control system to achieve closed-loop temperature control and avoid the deformation of the target material or workpiece due to excessive temperature. The simultaneous operation of multiple magnetron targets 27 can improve the efficiency of ion plating and shorten the process cycle. At the same time, composite film deposition can be achieved through the combination of multiple target materials.

[0029] In one embodiment, such as Figures 1 to 4 As shown, a Roots pump 20 is installed on one side of the fine extraction valve 4. One end of the No. 3 connecting pipe 12 is connected to the Roots pump 20, and one end of the bypass pipe 21 is connected to the Roots pump 20. A maintenance pump 25 is installed on one side of the Roots pump 20. The maintenance pump 25 is connected to the molecular pump 17 through a gas pipe.

[0030] It should be noted that in this embodiment, the Roots pump 20, as a medium vacuum pump, can connect the pumping capacity of the rough pump 23 and the molecular pump 17 to form a three-stage pumping system, which significantly shortens the vacuuming time. The maintenance pump 25 is connected to the molecular pump 17 through a gas pipe, which can maintain a low-pressure environment in the furnace when the molecular pump 17 is stopped, prevent air backflow and oxidation pollution, and at the same time reduce the load when the molecular pump 17 is restarted, thus extending the equipment life.

[0031] In one embodiment, such as Figures 1 to 4 As shown, a closed door 7 is provided on one side of the vacuum furnace body 1, a water inlet pipe 2 is provided inside the vacuum furnace body 1, and a water outlet pipe 3 is provided inside the vacuum furnace body 1.

[0032] It should be noted that in this embodiment, the water inlet pipe 2 and the water outlet pipe 3 constitute a circulating cooling system, which can force-cool the high-temperature components inside the furnace to avoid thermal stress causing equipment deformation or damage, while maintaining the uniformity of temperature inside the furnace.

[0033] In one embodiment, such as Figures 1 to 4 As shown, an arc head 18 is provided inside the vacuum furnace body 1, an arc ignition plate 19 is provided inside the vacuum furnace body 1, a control cabinet 26 is provided on one side of the vacuum furnace body 1, an arc source body 28 is provided on one side of the control cabinet 26, and an arc control cabinet and an arc source cabinet are provided inside the arc source body 28.

[0034] It should be noted that in this embodiment, the arc head 18 and the arc-starting plate 19 cooperate to form an arc discharge channel. The arc energy is concentrated by the arc-starting plate 19 to improve the evaporation efficiency of the target material and stabilize the arc combustion. The control cabinet 26 integrates functions such as power management, vacuum monitoring, and temperature control to realize the automated operation of the equipment. The arc source body 28 is divided into an arc control cabinet and an arc source cabinet. The modular design facilitates maintenance and upgrades. At the same time, the density and adhesion of the coating layer are optimized by independently controlling the arc intensity and frequency.

[0035] In the description of this utility model, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "side", "top", "inner", "front", "center", "both ends", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] Furthermore, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include at least one of those features.

[0037] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "setting", "connection", "fixing", "screw connection", etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components or the interaction between two components. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum multi-arc ion plating control device, characterized in that, include: Vacuum furnace body (1); Fine extraction valve (4) is installed on one side of vacuum furnace body (1). A molecular pump (17) is installed at the bottom of the fine extraction valve (4). Multiple No. 1 ventilation pipes (5) are provided at the output end of the molecular pump (17). No. 2 ventilation pipes (6) are provided on both sides of the fine extraction valve (4). The No. 1 ventilation pipes (5) and the No. 2 ventilation pipes (6) are connected to each other. Centralized air pipe (8) is placed on one side of the fine extraction valve (4), and the second air pipe (6) is connected to the centralized air pipe (8); A first connecting pipe (9) is installed on a central gas pipe (8). A pre-valve (10) is installed on the first connecting pipe (9), and a second connecting pipe (11) is installed on the pre-valve (10). The No. 3 connecting pipe (12) is fixed to one end of the No. 2 connecting pipe (11). A connecting pipe (14) is installed on the fine extraction valve (4). A coarse extraction valve (13) is installed at one end of the connecting pipe (14). The coarse extraction valve (13) is connected to the No. 3 connecting pipe (12).

2. The vacuum multi-arc ion plating control equipment according to claim 1, characterized in that: A bypass pipe (21) is provided on one side of the No. 3 connecting pipe (12), and a bypass valve (22) is installed on the bypass pipe (21). The bypass valve (22) is connected to the No. 3 connecting pipe (12) through a pipeline. A coarse pump (23) is installed at one end of the bypass pipe (21), and a filter (24) is provided at the output end of the coarse pump (23).

3. The vacuum multi-arc ion plating control equipment according to claim 1, characterized in that: The vacuum furnace body (1) is equipped with multiple sets of heating tubes (16) inside, a room temperature detector (15) is installed on the top of the vacuum furnace body (1), and multiple magnetron targets (27) are installed on the top of the vacuum furnace body (1).

4. The vacuum multi-arc ion plating control equipment according to claim 2, characterized in that: A Roots pump (20) is provided on one side of the fine extraction valve (4). One end of the No. 3 connecting pipe (12) is connected to the Roots pump (20). One end of the bypass pipe (21) is connected to the Roots pump (20). A maintenance pump (25) is provided on one side of the Roots pump (20). The maintenance pump (25) is connected to the molecular pump (17) through a gas pipe.

5. The vacuum multi-arc ion plating control equipment according to claim 1, characterized in that: A closed door (7) is provided on one side of the vacuum furnace body (1), a water inlet pipe (2) is provided inside the vacuum furnace body (1), and a water outlet pipe (3) is provided inside the vacuum furnace body (1).

6. The vacuum multi-arc ion plating control equipment according to claim 1, characterized in that: An arc head (18) is provided inside the vacuum furnace body (1), an arc-initiating plate (19) is provided inside the vacuum furnace body (1), a control cabinet (26) is provided on one side of the vacuum furnace body (1), an arc source body (28) is provided on one side of the control cabinet (26), and an arc control cabinet and an arc source cabinet are provided inside the arc source body (28).

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