A coating jig

Abstract

The application discloses a coating jig, which comprises a frame body and a wafer placing corner. The frame body is provided with a containing opening for placing a wafer, and containing grooves are arranged at four inner corners of the containing opening. The wafer placing corner is provided with a corner plate for bearing an outer corner of the wafer. The hardness of the corner plate of the wafer placing corner is lower than the hardness of the wafer. The wafer placing corner is detachably fixed in the containing groove, and the wafer placing corner corresponds to the containing groove one by one. According to the technical scheme, the wafer placing corner is arranged at the inner corner of the containing opening of the frame body to bear the wafer. In addition, the corner plate of the wafer placing corner is relatively soft relative to the wafer. When the wafer is placed or shakes in the coating process, the wafer is not prone to corner collapse, so that the probability of wafer corner collapse is reduced, the wafer is protected, the wafer yield is improved, and the loss rate is reduced.

Description

Technical Field

[0001] This application relates to a mask glass substrate coating apparatus, and more specifically, a coating fixture. Background Technology

[0002] Edge chipping and corner breakage of the substrate during magnetron sputtering coating is a common and critical issue affecting yield. Currently, the cost of substrates for coating ranges from several thousand to tens of thousands of yuan. Even a chipped substrate will directly lead to its scrapping, resulting not only in material waste but also in the contamination of the coating chamber by the generated dust and glass, affecting the quality of the film in subsequent production and causing defects such as particle formation or pinholes. During sputtering coating, the substrate is laid flat and fixed on the coating fixture, then rotated 90 degrees to stand it upright before sputtering. To reduce substrate obstruction, the coating fixture has a triangular area at each of the four inner corners to support the substrate. Coating fixtures are generally made of iron (such as stainless steel), while the substrate is usually made of glass. The fixture material is relatively hard, while the substrate material (usually glass or ceramic) is relatively brittle. When the substrate is placed in the fixture or during the coating process, vibrations can occur, and the outer corners of the substrate are prone to chipping at the contact points with the coating fixture. This needs to be improved. Utility Model Content

[0003] The purpose of this application is to provide a coating fixture to reduce the probability of corner chipping.

[0004] To achieve the above objectives, this application provides a coating fixture, which includes a frame and substrate placement corners. The frame is provided with a receiving opening for placing the substrate, and receiving grooves are provided at the four inner corners of the receiving opening. The substrate placement corners are provided with corner plates for supporting the outer corners of the substrate. The hardness of the corner plates of the substrate placement corners is lower than that of the substrate. The substrate placement corners are detachably fixed in the receiving grooves, and the substrate placement corners correspond one-to-one with the receiving grooves.

[0005] The technical solution of this application uses a detachable substrate placement corner set in the inner corner of the frame receiving opening to support the substrate. Moreover, the corner plate of the substrate placement corner is relatively softer than the substrate. When the substrate is placed or during the coating process, it is not easy for the substrate to chip at the corner. Therefore, the probability of substrate chipping is reduced, the protection of the substrate is improved, and it is beneficial to improve the substrate qualification rate and reduce the breakage rate.

[0006] In the optional solution, the mounting corner is made of PEEK or PTFE material in one piece.

[0007] In the optional design, the frame is made of stainless steel.

[0008] In an optional design, the substrate corner has a clearance groove at the outer corner of the corresponding substrate.

[0009] In an optional configuration, the plate corner is detachably fixed to the receiving groove by screws.

[0010] In an optional design, at least one dispensing position is provided on the upper and lower edges of the receiving port, and the dispensing position is either a through hole or a groove.

[0011] In an optional embodiment, the coating fixture also includes a movable pin that is located at the upper edge of the receiving port. When the pin is partially in the receiving port, the upper edge of the substrate in the receiving port is held in place by the pin.

[0012] In an optional embodiment, a vertically extending strip groove is provided on the outer side of the upper edge of the receiving port, and a pin is provided in the strip groove and is slidably connected to the strip groove; the pin is provided with a vertically extending strip hole, and a screw passing through the strip hole is screwed into the threaded hole of the strip groove for fixation.

[0013] In an alternative design, the lower part of the pin has a bevel facing the side of the substrate.

[0014] In the alternative design, the width of the lower part of the pin gradually decreases from top to bottom.

[0015] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application, it can be implemented according to the contents of the specification. In order to make the above and other objects, features and advantages of this application more obvious and understandable, some embodiments are listed below for detailed description. Attached Figure Description

[0016] Figure 1 This is a front view of the frame of the coating fixture according to at least one embodiment.

[0017] Figure 2 A front view of a coating fixture according to at least one embodiment.

[0018] Figure 3 A front view of the coating fixture placement angle for at least one embodiment.

[0019] Figure 4 for Figure 3 Sectional view of section AA.

[0020] Figure 5 This is a rear view of the coating fixture placement angle for at least one embodiment.

[0021] Figure 6 A front view of the pin of the coating fixture according to at least one embodiment.

[0022] Figure 7 for Figure 6 BB section sectional view.

[0023] It should be noted that the products shown in the above views have been appropriately scaled down / enlarged to fit the drawing size and ensure clarity of the views, and there is no limitation on the size of the products shown in the views. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are all within the scope of protection of this application.

[0025] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0026] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0027] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0028] One or more embodiments of this application are a coating fixture, the specific structure of which is as follows: Figures 1-7 As shown. Coating fixtures can be used for magnetron sputtering coating; the substrate fixed in the coating fixture is typically a glass or ceramic sheet. (Combined) Figure 1 and Figure 2 As shown, the coating fixture includes a frame 10 and substrate placement corners 20. The frame 10 is provided with a square receiving opening 11 for placing the substrate. The size of the receiving opening 11 is generally matched with the size of the substrate; therefore, coating fixtures with different receiving opening 11 sizes must be used for substrates of different sizes. Figure 1 and Figure 2 As shown, receiving grooves 111 are respectively provided at the four inner corners of the receiving opening 11. The receiving grooves 111 are used to place and fix the placement piece corner 20. Therefore, the shape and size of the receiving grooves 111 match the shape and size of the placement piece corner 20, so that the placement piece corner 20 is not easily loosened in the receiving grooves 111. Figure 2 and Figure 3 As shown, the substrate corner 20 is provided with a corner plate 21 for supporting the outer corner of the substrate, and the hardness of the corner plate 21 of the substrate corner 20 is lower than the hardness of the substrate. Combined with... Figure 1 and Figure 2 As shown, the substrate placement corner 20 is detachably fixed in the receiving groove 111, and the substrate placement corner 20 corresponds one-to-one with the receiving groove 111. Therefore, the coating fixture has detachable substrate placement corners 20 at the inner corners of the receiving opening 11 of the frame 10 to support the substrate. Furthermore, the corner plate 21 of the substrate placement corner 20 is relatively softer than the substrate, making it less prone to corner chipping during substrate placement or vibrations during coating process. This reduces the probability of substrate corner chipping, improves substrate protection, and helps increase substrate yield and reduce breakage rate. Simultaneously, the reduced probability of substrate corner chipping also reduces glass dust, decreases secondary contamination of the sputtering cavity, and improves coating pinholes and film particle problems, thus enhancing the quality of the coated product.

[0029] In some embodiments, the frame 10 is made of stainless steel. During the sputtering coating process, the stainless steel frame 10 is less prone to deformation under heat, and it also possesses good corrosion resistance, allowing for long-term repeated use. Furthermore, the material cost is low, which is beneficial for cost reduction and efficiency improvement. Figure 1 As shown, the frame 10 has two hollow holes 12 at the top and bottom, which mainly serve to reduce the weight of the coating fixture and improve the ease of handling.

[0030] In some embodiments, the mounting corner 20 is integrally made of PEEK or PTFE material. Both PEEK and PTFE are common engineering plastics, generally less hard than the substrate, and are readily available with low cost. These materials are also heat-resistant and resistant to thermal decomposition, maintaining their shape even under the high temperatures of sputtering deposition without melting or failing, thus supporting the substrate during the deposition process. Furthermore, since the mounting corner 20 is integrally made, and the corner plate 21 is made of the same material, it is less likely to cause chipping of the substrate when the corner plate 21 contacts the substrate. The integral design of the corner plate 21 and the mounting corner 20 saves additional assembly steps and improves the connection strength between the corner plate 21 and the mounting corner 20.

[0031] In some embodiments, such as Figure 3 As shown, the substrate corner 20 has a relief groove 22 at the outer corner of the corresponding substrate. The main function of the relief groove 22 is to avoid the outer corner of the substrate, so as to prevent mutual compression between the two corners and the substrate, which would cause the substrate to chip.

[0032] In some embodiments, combined with Figures 1 to 3 As shown, the plate holder 20 is detachably fixed to the receiving groove 111 by screws 24. Two screws 24 pass through the through hole 23 of the plate holder 20 and are screwed into the threaded hole 112 of the receiving groove 111 to form a fixation. When it is necessary to replace the plate holder 20, the screws 24 are unscrewed, the plate holder 20 is removed, and a new plate holder 20 can be installed. Figure 4 and Figure 5 As shown, the thickness of the L-shaped region 201 on the back of the placement corner 20 is less than the thickness of other parts, and the two through holes 23 are located in the L-shaped region 201. Due to the thickness difference, it is convenient for the placement corner 20 to accommodate the groove 111 ( Figure 1 Positioning within ) on the one hand, without changing the frame 10 ( Figure 1 While maintaining the overall thickness, the thickness of the threaded hole 112 at the location of the receiving groove 111 can be increased, which is beneficial to improving the stability of the threaded connection. In at least one other embodiment, the plate corner 20 can also be detachably fixed in the receiving groove 111 by other means, such as adhesive fixing, snap-fit ​​fixing, etc.

[0033] In some embodiments, such as Figure 1 As shown, the upper and lower edges of the receiving opening 11 are each provided with at least one substrate removal position 113, which is a through hole or a groove. Since the size of the receiving opening 11 is generally matched to the size of the substrate, when the substrate is placed in the receiving opening 11, the gap between the substrate and the edge of the receiving opening 11 is small, making it inconvenient to remove the substrate. When it is necessary to remove the substrate from the receiving opening 11, it needs to be removed from the substrate removal positions 113 on both sides. In at least one embodiment, as... Figure 1As shown, the upper and lower edges of the receiving port 11 are provided with two square card-taking positions 113.

[0034] In some embodiments, such as Figure 2 As shown, the coating fixture also includes a movable pin 30, which is located at the middle of the upper edge of the receiving opening 11. When the substrate is placed flat in the receiving opening 11, the pin 30 is pushed to move so that part of the pin 30 is located in the receiving opening 11. Then, the coating fixture and the substrate are rotated upwards by 90 degrees. The lower edge of the substrate will abut against the lower edge of the receiving opening 11, and the upper edge of the substrate will be held in place by the pin 30. At the same time, the four corners of the substrate are supported by the placement corners 20, so the substrate will not easily detach from the receiving opening 11, thus achieving temporary locking of the substrate. Compared with the previous solution of using spring clamps to clamp the substrate, the solution of locking the substrate by the movable pin 30 above avoids the problem of the spring clamps causing the substrate to chip at the edges, and also avoids the problem of residual imprints on the left and right sides of the substrate. This helps to reduce the breakage rate and improve the yield and coating quality of the coated products.

[0035] In some embodiments, combined with Figure 1 and Figure 2 As shown, the outer edge of the receiving opening 11 has a vertically extending strip groove 114. A pin 30 is disposed in the strip groove 114 and is slidably connected to it. The strip groove 114 restricts the pin 30's movement to the vertical direction. Figure 1 , Figure 2 and Figure 6 As shown, the pin 30 has a vertically extending slotted hole 31. A screw 32, passing through the slotted hole 31, is screwed into the threaded hole 115 of the slotted groove 114 for fixation. Therefore, the screw 32, in conjunction with the slotted hole 31, restricts the maximum downward movement of the pin 30, preventing the pin 30 from disengaging from the slotted groove 114. Furthermore, in combination with... Figure 6 and Figure 7 As shown, the slot 31 is a stepped hole, so the head of the screw 32 that passes through the slot 31 can be embedded in the slot 31 so that it does not protrude outside the slot 31.

[0036] In some embodiments, such as Figure 6 As shown, from top to bottom, the width of the lower part 301 of the pin 30 gradually decreases. The purpose of this is to reduce the contact area between the pin 30 and the substrate, so as to reduce particulate contamination generated during the friction process.

[0037] In some embodiments, such as Figure 7As shown, the lower part 301 of the pin 30 has a bevel 302 facing the substrate. When the pin 30 moves down and abuts against the substrate, the bevel 302 directly abuts against the upper edge of the substrate, rather than directly contacting the substrate surface. This prevents imprinting on the substrate surface and improves the quality of the coated product. The angle α between the bevel 302 and the vertical direction should not be too large, for example, between 5° and 20°, to avoid the situation where the upper edge of the substrate pushes the pin 30 upward through the bevel 302 when the substrate is upright, causing locking failure.

[0038] The above examples are merely illustrative of the technical content of this application to facilitate reader understanding, but do not imply that the implementation methods of this application are limited to these. Any technical extensions or re-creations made based on this application are protected by this application. The scope of protection of this application is determined by the claims.

Claims

1. A coating fixture, characterized in that, It includes: The frame has an opening for placing the substrate, and the four inner corners of the opening are provided with receiving grooves. The substrate corner is provided with a corner plate for supporting the outer corner of the substrate. The hardness of the corner plate is lower than that of the substrate. The substrate corner is detachably fixed in the receiving groove. The substrate corner and the receiving groove correspond one-to-one.

2. The coating fixture as described in claim 1, characterized in that, The placement angle is made of PEEK or PTFE material in one piece.

3. The coating fixture as described in claim 1, characterized in that, The frame is made of stainless steel.

4. The coating fixture as described in claim 1, characterized in that, The placement corner has a clearance groove at the outer corner of the corresponding substrate.

5. The coating fixture as described in claim 1, characterized in that, The placement angle is detachably fixed to the receiving groove by screws.

6. The coating fixture as described in claim 1, characterized in that, The upper and lower edges of the receiving port are each provided with at least one take-up position, which is a through hole or a groove.

7. The coating fixture as described in any one of claims 1-6, characterized in that, The coating fixture also includes a movable pin, which is located at the upper edge of the receiving port. When the pin is partially in the receiving port, the upper edge of the substrate in the receiving port is held in place by the pin.

8. The coating fixture as described in claim 7, characterized in that, The outer side of the upper edge of the receiving port is provided with a vertically extending strip groove, the pin is provided in the strip groove and the pin is slidably connected to the strip groove; the pin is provided with a vertically extending strip hole, and a screw passing through the strip hole is screwed into the threaded hole of the strip groove for fixation.

9. The coating fixture as described in claim 7, characterized in that, The lower part of the pin has an inclined surface facing the side of the substrate.

10. The coating fixture as described in claim 7, characterized in that, From top to bottom, the width of the lower part of the pin gradually decreases.

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