A gas supply system for a chemical vapor deposition furnace

Abstract

The utility model relates to a kind of gas supply systems for chemical vapor deposition furnace, belong to chemical vapor deposition equipment field;Solve the deposition quality of the workpiece to be deposited in the furnace body reaction chamber, the problem of low reaction gas utilization rate;Technical scheme: the system includes gas source cabinet, gas source cabinet is equipped with fast filling gas inlet pipeline and multi-path gas inlet main pipeline, fast filling gas inlet pipeline and each gas inlet main pipeline are connected with first flowmeter and first regulating valve, fast filling gas inlet pipeline includes first fast filling gas source pipeline and second fast filling gas source pipeline, second fast filling gas source pipeline includes first main fast filling pipeline, first main fast filling pipeline is connected with first fast filling branch pipeline, the gas outlet of first fast filling branch pipeline and the gas outlet of each gas inlet main pipeline are connected in gas mixing tank gas inlet;The gas outlet of gas mixing tank is connected with the multiple branch pipes of float cabinet, each branch pipe is connected in the gas inlet of furnace body bottom by second regulating valve, second flowmeter;The utility model is applied to chemical vapor deposition furnace.

Description

Technical Field

[0001] This utility model relates to the technical field of chemical vapor deposition equipment, specifically to a gas supply system for a chemical vapor deposition furnace. Background Technology

[0002] A vapor deposition furnace is a key piece of equipment used for material surface modification and thin film preparation. It is widely used in semiconductors, optical coatings, tool coatings and other fields. In the semiconductor field, it can be used to prepare dielectric layers for integrated circuits and metal wiring. In the field of optical devices, it can be used to prepare antireflective coatings and reflective coatings. In the field of tool coating, it can be used to prepare hard layers (TiN, DLC) to improve the wear resistance of tools / molds. In the new energy field, it can be used to prepare transparent conductive materials (ITO) for photovoltaic cells and lithium battery materials.

[0003] However, the following problems exist: 1. Inaccurate control of the gas inlet velocity and volume leads to uneven density of the deposited layer; 2. The reaction gas does not contact the workpieces distributed at different locations evenly, resulting in uneven thickness of the deposited layer on the workpieces. 3. If the pressure outside the reaction chamber is less than or equal to the pressure inside the reaction chamber, substances inside the reaction chamber will enter the outside of the reaction chamber, affecting the lifespan of the heater. 4. When venting, air is introduced from outside the reaction chamber to inside the reaction chamber. If the speed and flow rate of the air entering the reaction chamber are greater than those outside the reaction chamber, it will cause residues inside the reaction chamber to enter outside the reaction chamber, which will affect the next operation of the heater. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model proposes a gas supply system for a chemical vapor deposition furnace.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a gas supply system for a chemical vapor deposition furnace, including a gas source cabinet, which is equipped with a fast-charging gas inlet pipeline and a multi-channel gas inlet main pipeline. The fast-charging gas inlet pipeline and each gas inlet main pipeline are connected to a first flow meter and a first regulating valve for controlling the gas flow rate. The fast charging air intake pipeline includes a first fast charging air source pipeline and a second fast charging air source pipeline. The first fast charging air source pipeline and the second fast charging air source pipeline are interconnected to form a "U" shaped structure. The second fast-charging air source pipeline includes a first main fast-charging pipeline, a first fast-charging branch pipeline connected to the first main fast-charging pipeline, and a first regulating valve connected to the first fast-charging air source pipeline, the first main fast-charging pipeline, and the first fast-charging branch pipeline. The outlet of the first fast-supplement branch pipeline and the outlet of each main intake pipeline are connected to the inlet of the mixing tank. The outlet of the mixing tank is connected to the inlet of the float cabinet. The end of the inlet away from the outlet of the mixing tank is connected to a gas distribution welding pipe. Multiple branch pipes are connected to the gas distribution welding pipe. Each branch pipe is connected to the inlet at the bottom of the furnace body after passing through a second regulating valve and a second flow meter.

[0006] Furthermore, the main intake pipeline is provided with three main intake pipes, namely the first intake pipe, the second intake pipe and the third intake pipe, and a purging pipe is connected between the second intake pipe and the third intake pipe.

[0007] Furthermore, one-way valves are connected between the first air intake pipe, the second air intake pipe, the third air intake pipe, the first fast-fully-filled branch pipe, and the air inlet of the mixing tank.

[0008] Furthermore, a precision filter and a first pressure reducing valve are connected to both the first and third air intake pipes. The two first pressure reducing valves are located at the first air intake port on the first air intake pipe and the third air intake port on the third air intake pipe, respectively. The precision filter on the first air intake pipe is located between the first pressure reducing valve and the first air intake port on the first air intake pipe, and the precision filter on the third air intake pipe is located between the first pressure reducing valve and the third air intake port on the third air intake pipe.

[0009] Furthermore, the second intake pipe includes a second main intake pipe, a second intake branch pipe is connected to the second main intake pipe, and a first flow meter and a first regulating valve are connected to both the second main intake pipe and the second intake branch pipe. The second main intake pipe is connected to a second intake port, and the ends of the second main intake pipe and the second intake branch pipe that are furthest from the second intake port are both connected to the intake port of the mixing tank.

[0010] Furthermore, the third intake pipe includes a first main intake pipe, a first intake branch pipe connected to the first main intake pipe, a first flow meter and a first regulating valve connected to both the first main intake pipe and the first intake branch pipe, the third intake port being located on the first main intake pipe, and the outlet of the first main intake pipe being connected to the inlet of the mixing tank.

[0011] Furthermore, a precision filter, a manual valve, and a second pressure reducing valve are sequentially connected to the second main intake pipe. The second pressure reducing valve is located at the second air inlet on the second main intake pipe, and the precision filter on the second main intake pipe is located between the second pressure reducing valve and the second air inlet on the second main intake pipe.

[0012] Furthermore, the first main air intake pipe has a "U" shaped structure, and the first main air intake pipe is also connected to the main upper air outlet, which is connected to the outer side wall of the furnace reaction chamber through an air filling pipe.

[0013] Furthermore, the first fast charging air source pipe of the fast charging air intake pipe is connected to a fast charging air inlet, and the first fast charging air source pipe is also connected to a fast charging upper air outlet. The fast charging upper air outlet is connected to the outer side wall of the furnace reaction chamber through an air charging pipe.

[0014] The advantages of this utility model over the prior art are as follows: 1. This utility model, by installing a first flow meter and a first regulating valve on the fast-charging air inlet pipeline and each main air inlet pipeline in the gas source cabinet, can accurately control the air intake speed and volume of the gas entering each pipeline, and control the type of gas entering the furnace reaction chamber. At the same time, a second regulating valve and a second flow meter are installed on each branch pipe in the float cabinet, which can work together with the first flow meter and the first regulating valve to further accurately control the air intake speed and volume of the reaction gas entering the furnace reaction chamber, and finally achieve full contact between the reaction gas and the workpiece to be deposited in the furnace reaction chamber, effectively improving the uniformity of deposition.

[0015] 2. This utility model, through the cooperation of the first fast gas supply pipeline and the second fast gas supply pipeline, can quickly balance the pressure inside and outside the furnace reaction chamber, which can not only improve the utilization rate of the reaction gas entering the furnace reaction chamber, but also extend the service life of the heater inside the furnace.

[0016] 3. The purging pipeline of this utility model can purge residual toxic and harmful reactive gases in the second air inlet pipe. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a structural schematic diagram of the various pipelines and their connections within the gas source cabinet of the present invention. Figure 2 This is a schematic diagram of the fast-charging air intake pipe of the present invention. Figure 3 This is a structural diagram of the multi-channel intake main pipeline and its connection relationship of the present invention; Figure 4 This is a front view of the pipes and their connections inside the float cabinet of the present invention. Figure 5 A top view of the pipes and their connections inside the float cabinet of this utility model system; Figure 6 This is a structural diagram of the multiple pipes and their connection relationships in the system of this utility model.

[0018] In the diagram: 1 is a precision filter, 2 is a manual valve, 3 is the first pressure reducing valve, 4 is a pneumatic solenoid valve, 5 is the first regulating valve, 6 is a mass flow meter, 7 is a check valve, 9 is the first air inlet, 10 is the second air inlet, 11 is the third air inlet, 12 is a mixing tank, 13 is a purge pipeline, 14 is the main upper air outlet, 15 is an extension welded pipe, 16 is a digital flow meter, 18 is the air inlet end, 19 is the gas distribution welded pipe, 20 is the second regulating valve, and 21 is a rotor flow meter. 22 is a pressure transmitter three-way valve, 23 is a connecting flange, 24 is a fast charging air inlet, 25 is a fast charging upper air outlet, 27 is the first main air inlet pipeline, 28 is the first air inlet branch pipeline, 29 is the second main air inlet pipeline, 30 is the second air inlet branch pipeline, 31 is the second pressure reducing valve, 32 is the air source cabinet, 33 is the first air inlet pipe, 34 is the first fast charging air source pipeline, 35 is the first main fast charging pipeline, 36 is the first fast charging branch pipeline, and 37 is the float cabinet. Detailed Implementation

[0019] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0020] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0021] like Figures 1 to 6As shown, this utility model provides a gas supply system for a chemical vapor deposition furnace, including a gas source cabinet 32. The gas source cabinet 32 ​​is equipped with a fast-charging gas inlet pipeline and a multi-channel gas inlet main pipeline. The fast-charging gas inlet pipeline and each gas inlet main pipeline are connected to a first flow meter and a first regulating valve 5. The gas inlet speed and gas inlet volume of each pipeline are input to control the type of gas entering the furnace reaction chamber. The fast-charging air intake pipeline includes a first fast-charging air source pipeline 34 and a second fast-charging air source pipeline. The first and second fast-charging air source pipelines are interconnected to form a "U"-shaped structure, meaning the entire fast-charging air intake pipeline has a "U"-shaped structure. Multiple first regulating valves 5 are connected to both the first and second fast-charging air source pipelines. Specifically, the first fast-charging air source pipeline 34 has one first regulating valve 5, and the second fast-charging air source pipeline has two first regulating valves 5. The second fast-charging air source pipeline includes a first main fast-charging pipeline 35, which is connected to a first fast-charging branch pipeline 36. The first fast-charging branch pipeline 36 has one first regulating valve 5 connected to it, and the first main fast-charging pipeline 35 has one first regulating valve 5 connected to it. The first regulating valve 5 connected to the first main fast-charging pipeline 35 is located at the connection between the first fast-charging branch pipeline 36 and the first main fast-charging pipeline 35, and is used to control the gas flow rate in the second fast-charging air source pipeline.

[0022] In this embodiment, the first flow meter connected to the fast charging air intake pipe is a digital flow meter 16, and the first regulating valve 5 connected to the fast charging air intake pipe is a high-vacuum ball valve. Specifically, the digital flow meter 16 is connected to the first fast charging air source pipe 34, and the high-vacuum ball valve is connected to the second fast charging air source pipe. Both the digital flow meter 16 and the high-vacuum ball valve are positioned between the first regulating valve 5 connected to the first fast charging air source pipe 34 and the first regulating valve 5 connected to the first main fast charging pipe 35. The digital flow meter 16 enables real-time monitoring of the gas flow rate entering the fast charging air intake pipe, while the high-vacuum ball valve enables manual control of the gas entry status.

[0023] The first fast-charging air source pipe 34 of the fast-charging air intake pipe is connected to a fast-charging air inlet 24, and the first fast-charging air source pipe 34 is also connected to a fast-charging upper air outlet 25. The fast-charging upper air outlet 25 is connected to the outer side wall of the furnace reaction chamber through the air charging pipe. After the gas enters the first fast-charging air source pipe 34 from the fast-charging air inlet 24, part of it is distributed to the outer side wall of the furnace reaction chamber through the fast-charging upper air outlet 25 connected to the second fast-charging air source pipe, and part of it enters the furnace reaction chamber through the first fast-charging branch pipe 36 to balance the pressure inside and outside the furnace reaction chamber.

[0024] In this embodiment, the gas filled into the fast charging air intake pipe is nitrogen. Therefore, the fast charging air intake port 24 of the fast charging air intake pipe is connected to the air outlet of the nitrogen supply device.

[0025] The main intake pipeline has at least three lines. In this embodiment, there are three lines. The types of gas input into each main intake pipeline are different. The three main intake pipelines are the first intake pipe 33, the second intake pipe, and the third intake pipe. The second intake pipe and the third intake pipe are connected by a purge pipe 13. The gases input into the three main intake pipelines are propane, methane, and nitrogen, respectively.

[0026] The outlets of the first intake pipe 33, the second intake pipe, the third intake pipe, and the first fast-charging branch pipe 36 are all connected to the inlet of the mixing tank 12. Gases from the first intake pipe 33, the second intake pipe, the third intake pipe, and the first fast-charging branch pipe 36 of the fast-charging intake pipe enter the mixing tank 12 to form a mixed gas. A one-way valve 7 is connected between the first intake pipe 33, the second intake pipe, the third intake pipe, the first fast-charging branch pipe 36, and the inlet of the mixing tank 12 to prevent backflow of the mixed gas within the mixing tank 12.

[0027] The first flow meter connected to each of the three main intake pipes is a mass flow meter 6, the first regulating valve 5 connected to each of the three main intake pipes is a high vacuum ball valve, and each of the three main intake pipes is also connected to a pneumatic solenoid valve 4. The high vacuum ball valve and the pneumatic solenoid valve 4 work together to control the flow rate of the gas in the three main intake pipes.

[0028] A precision filter 1 and a first pressure reducing valve 3 are connected to both the first intake pipe 33 and the third intake pipe. The two first pressure reducing valves 3 are located at the first air inlet 9 on the first intake pipe 33 and the third air inlet 11 on the third intake pipe, respectively. The precision filter 1 on the first intake pipe 33 is located between the first pressure reducing valve 3 and the first air inlet 9, and the precision filter 1 on the third intake pipe is located between the first pressure reducing valve 3 and the third air inlet 11. The first pressure reducing valve 3 is a dual-gauge pressure reducing valve.

[0029] The gas introduced into the first intake pipe 33 is propane.

[0030] The gas introduced into the third air intake pipe is nitrogen.

[0031] The third air intake pipe includes a first main air intake pipe 27, which is connected to a first air intake branch pipe 28. A first flow meter and a first regulating valve 5 are connected to both the first main air intake pipe 27 and the first air intake branch pipe 28. The first main air intake pipe 27 has a "U" shaped structure. The third air intake port 11 is located on the first main air intake pipe 27. The air outlet of the first air intake branch pipe 28 is connected to the air inlet of the mixing tank 12. The first main air intake pipe 27 is also connected to a main upper air outlet 14, which is connected to the outer side wall of the furnace reaction chamber through an air filling pipe.

[0032] After the gas enters the first main intake pipe 27 through the third intake port 11, part of the gas enters the mixing tank 12 through the first intake branch pipe 28, and the other part of the gas is distributed on the outer side wall of the furnace reaction chamber after passing through the main upper outlet 14.

[0033] The second intake pipe includes a second main intake pipe 29, to which a second intake branch pipe 30 is connected. A first flow meter and a first regulating valve 5 are connected to both the second main intake pipe 29 and the second intake branch pipe 30. A second intake port 10 is connected to the second main intake pipe 29. The ends of both the second main intake pipe 29 and the second intake branch pipe 30 furthest from the second intake port 10 are connected to the intake port of the mixing tank 12. The second intake branch pipe 30 is a backup pipe.

[0034] A precision filter 1, a manual valve 2, and a second pressure reducing valve 31 are sequentially connected to the second main intake pipe 29. The second pressure reducing valve 31 is located at the second intake port 10 on the second main intake pipe 29. The precision filter 1 on the second main intake pipe 29 is located between the second pressure reducing valve 31 and the second intake port 10 on the second main intake pipe 29. The gas filled into the second intake pipe is methane.

[0035] The outlet of the mixing tank 12 is connected to an extension welded pipe 15, and the end of the extension welded pipe 15 away from the outlet of the mixing tank 12 is fixedly connected to the inlet end 18 of the float cabinet 37. The end of the inlet pipe furthest from the extended welded pipe 15 is connected to a gas distribution welded pipe 19. Multiple branch pipes are connected to the gas distribution welded pipe 19, each branch pipe being sequentially connected to a second regulating valve 20, a second flow meter, a pressure transmitter three-way valve 22, and a connecting flange 23. The connecting flange 23 is a compression fitting reducing flange. The second regulating valve 20 is positioned close to the gas distribution welded pipe 19. The end of the connecting flange 23 furthest from the pressure transmitter three-way valve 22 is connected to the inlet at the bottom of the furnace reaction chamber via a stainless steel gas pipe. The second flow meter connected to the branch pipe is a rotor flow meter 21. The other end of the pressure transmitter three-way valve 22 is connected to a pressure transmitter (not shown in the figure), which is used to monitor the gas pressure in each branch pipe.

[0036] Multiple first regulating valves 5 and first flow meters cooperate with second regulating valves 20 and second flow meters to further precisely control the intake speed and volume of the reaction gas entering the furnace reaction chamber, ultimately achieving full contact between the reaction gas and the workpiece to be deposited in the furnace reaction chamber, effectively improving the deposition uniformity. The reaction gas is the gas input into the reaction chamber through the first intake pipe 33, second intake pipe, and third intake pipe. In this embodiment, the gases input into the mixing tank 12 through the first intake pipe 33, second intake pipe, and third intake pipe are propane, methane, and nitrogen, respectively.

[0037] In this embodiment, fourteen sub-pipes are provided. Those skilled in the art can adjust the number of sub-pipes according to actual needs.

[0038] The working principle of this utility model: The air intake process of the fast charging air intake pipeline (taking nitrogen as an example): During the cooling and venting stages, nitrogen enters the first fast charging air source pipeline 34 through the fast charging air intake port 24. A portion of the nitrogen is dispersed around the outer wall of the furnace reaction chamber through the fast charging upper air outlet 25 connected to the second fast charging air source pipeline. Another portion of the nitrogen enters the furnace reaction chamber through the first fast charging branch pipeline 36, the mixing tank 12, and the branch pipe. The two work together to quickly balance the internal and external pressure of the furnace reaction chamber.

[0039] The reaction gas inlet process (taking propane, methane, and nitrogen as an example): Propane, methane, and nitrogen enter the mixing tank 12 through the first inlet pipe 33, the second inlet pipe, and the third inlet pipe, respectively, and are mixed evenly according to a preset ratio to form a mixed gas. The mixed gas is then transported to the furnace reaction chamber through branch pipes. The entire process is precisely controlled through the following methods: Adjust the opening of the regulating valves on the first intake pipe 33, the second intake pipe, and the third intake pipe to control the intake volume of propane, methane, and nitrogen, respectively. With the help of the second regulating valve 20 and the second flow meter, the flow rate of the mixed gas in each branch pipe is precisely controlled; The pressure of the mixed gas in each branch pipe is adjusted by a pressure transmitter.

[0040] Ultimately, all the first regulating valves 5, the first flow meter, the second regulating valve 20, and the second flow meter work together to achieve precise control of the air intake volume and speed of each gas path, and to ensure that the reaction gas in the reaction chamber is in full and uniform contact with all workpieces.

[0041] The process of removing toxic and harmful gases from the second intake pipe (taking methane as an example): Close the control valve on the third intake pipe, open the control valve on the second intake pipe, and nitrogen enters the first main intake pipe 27 from the third intake port 11, and then enters the second intake pipe through the purging pipe 13 to flush out the residual methane gas in the second intake pipe.

[0042] The first regulating valve 5, the first flow meter, the second regulating valve 20, and the second flow meter are all monitored and controlled by a PLC controller.

[0043] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A gas supply system for a chemical vapor deposition furnace, characterized in that: It includes an air source cabinet (32), which is equipped with a fast-charging air intake pipeline and a multi-way air intake main pipeline. The fast-charging air intake pipeline and each air intake main pipeline are connected to a first flow meter and a first regulating valve (5). The fast charging air intake pipeline includes a first fast charging air source pipeline (34) and a second fast charging air source pipeline. The first fast charging air source pipeline (34) and the second fast charging air source pipeline are interconnected to form a "U" shaped structure. The second fast charging air source pipeline includes a first main fast charging pipeline (35), and a first fast full charging branch pipeline (36) is connected to the first main fast charging pipeline (35). A first regulating valve (5) is connected to the first fast charging air source pipeline (34), the first main fast charging pipeline (35) and the first fast full charging branch pipeline (36). The outlet of the first fast sufficient branch pipeline (36) and the outlet of each main intake pipeline are connected to the inlet of the mixing tank (12); The outlet of the mixing tank (12) is connected to the inlet end (18) of the float cabinet (37). The end of the inlet end (18) away from the outlet of the mixing tank (12) is connected to the gas distribution welding pipe (19). Multiple branch pipes are connected to the gas distribution welding pipe (19). Each branch pipe is connected to the inlet at the bottom of the furnace body after passing through the second regulating valve (20) and the second flow meter.

2. The gas supply system for a chemical vapor deposition furnace according to claim 1, characterized in that: The main intake pipeline is provided with three main intake pipes, namely the first intake pipe (33), the second intake pipe and the third intake pipe. The second intake pipe and the third intake pipe are connected by a purge pipe (13).

3. The gas supply system for a chemical vapor deposition furnace according to claim 2, characterized in that: One-way valves (7) are connected between the first air inlet pipe (33), the second air inlet pipe, the third air inlet pipe, the first fast full branch pipe (36) and the air inlet of the mixing tank (12).

4. The gas supply system for a chemical vapor deposition furnace according to claim 2, characterized in that: A precision filter (1) and a first pressure reducing valve (3) are connected to both the first intake pipe (33) and the third intake pipe. The two first pressure reducing valves (3) are located at the first air inlet (9) on the first intake pipe (33) and the third air inlet (11) on the third intake pipe, respectively. The precision filter (1) on the first intake pipe (33) is located between the first pressure reducing valve (3) and the first air inlet (9) on the first intake pipe (33). The precision filter (1) on the third intake pipe is located between the first pressure reducing valve (3) and the third air inlet (11) on the third intake pipe.

5. The gas supply system for a chemical vapor deposition furnace according to claim 4, characterized in that: The second intake pipe includes a second main intake pipe (29), and a second intake branch pipe (30) is connected to the second main intake pipe (29). A first flow meter and a first regulating valve (5) are connected to both the second main intake pipe (29) and the second intake branch pipe (30). The second main intake pipe (29) is connected to the second intake port (10). The ends of the second main intake pipe (29) and the second intake branch pipe (30) that are away from the second intake port (10) are both connected to the intake port of the mixing tank (12).

6. The gas supply system for a chemical vapor deposition furnace according to claim 2, characterized in that: The third intake pipe includes a first main intake pipe (27), which is connected to a first intake branch pipe (28). A first flow meter and a first regulating valve (5) are connected to both the first main intake pipe (27) and the first intake branch pipe (28). The third intake port (11) is located on the first main intake pipe (27), and the outlet of the first main intake pipe (27) is connected to the inlet of the mixing tank (12).

7. The gas supply system for a chemical vapor deposition furnace according to claim 5, characterized in that: A precision filter (1), a hand valve (2), and a second pressure reducing valve (31) are connected sequentially on the second main intake pipe (29). The second pressure reducing valve (31) is located at the second air inlet (10) on the second main intake pipe (29). The precision filter (1) on the second main intake pipe (29) is located between the second pressure reducing valve (31) and the second air inlet (10) on the second main intake pipe (29).

8. A gas supply system for a chemical vapor deposition furnace according to claim 6, characterized in that: The first main air intake pipe (27) has a "U" shaped structure. The first main air intake pipe (27) is also connected to the main upper air outlet (14). The main upper air outlet (14) is connected to the outer side wall of the furnace reaction chamber through the air filling pipe.

9. A gas supply system for a chemical vapor deposition furnace according to claim 2, characterized in that: The fast charging air inlet (24) is connected to the first fast charging air source pipe (34) of the fast charging air inlet pipe. The fast charging upper air outlet (25) is also connected to the first fast charging air source pipe (34). The fast charging upper air outlet (25) is connected to the outer side wall of the furnace reaction chamber through the air charging pipe.

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