Gas mixing and introducing structure and coating equipment

Abstract

The utility model discloses a kind of gas mixing introduction structure and coating equipment, belong to coating equipment technical field.The gas mixing introduction structure includes: gas mixing tank, the coil pipe and hole are arranged in the gas mixing tank, the hole is evenly distributed on the coil pipe;Pipeline, the pipeline includes second pipeline and fourth pipeline, the second pipeline and the fourth pipeline are connected with the coil pipe;Diaphragm valve, the diaphragm valve is installed on the pipeline;Mass flowmeter, the mass flowmeter is installed on the pipeline on the side of the diaphragm valve away from the gas mixing tank.The gas mixing introduction structure's gas mixing tank is installed with mutually crossing, spiral coil pipe, and multiple holes are set on coil pipe, so that gas mixed into gas mixing tank is more uniform.First pipeline and fifth pipeline are single gas pipeline, by controlling the opening and closing of diaphragm valve in other pipeline, single gas not needing mixing can be directly into cavity, satisfy multiple process requirements.

Description

Technical Field

[0001] This utility model relates to a gas mixing and introduction structure and a coating equipment, belonging to the technical field of coating equipment. Background Technology

[0002] In PECVD coating or evaporation equipment, it is often necessary to introduce different process gases and control their respective proportions to meet different process requirements. Some special processes also require the introduction of a sufficient quantity of gas A and a small amount of gas B. Currently, most methods involve directly introducing the gases separately, allowing them to mix directly in the process chamber and react with the coating product. However, due to the limitations of the gas inlets' positions, uneven mixing of the process gases can occur, making it impossible to guarantee a specific ratio for reaction with the coating product, thus affecting the coating effect.

[0003] Chinese patent document CN218573579U discloses a gas mixing device. This device mixes gases in a mixing tank in proportion by setting up multiple branches, and then introduces them into a reaction tank. The gas is diffused by the inlet pressure and mixed evenly. However, this method has a slow mixing speed and cannot guarantee that the gas in the tank can be emptied. When a single gas needs to be introduced, it will carry a small amount of other residual gases, which will affect the quality of the coated product. Utility Model Content

[0004] To address the aforementioned issues, this invention provides a gas mixing and introduction structure and a coating equipment, which effectively overcomes the problems of slow mixing speed, inability to guarantee the exhaust of gas from the tank, and the presence of a small amount of residual other gases when a single gas is introduced, thus affecting the quality of the coated product.

[0005] Firstly, this utility model provides a gas mixing introduction structure, including... A mixing tank, wherein a coil and holes are provided inside the mixing tank, and the holes are evenly distributed on the coil; The pipeline includes a second pipe and a fourth pipe, the second pipe and the fourth pipe being connected to the coil; Diaphragm valve, the diaphragm valve being installed on the pipeline; A mass flow meter is installed on the pipe on the side of the diaphragm valve away from the mixing tank.

[0006] In one embodiment of this utility model, at least two coils are provided, and the coils are spiral coils, which are installed crosswise in the mixing tank.

[0007] In one embodiment of this invention, the gas mixing tank includes an outer wall and a heating structure, the heating structure being installed on the outer side of the outer wall. This allows for heating of the gas mixing tank, accelerating gas diffusion and resulting in more uniform gas mixing.

[0008] In one embodiment of this utility model, the outer wall is a double-layer shell structure, and the heating structure is a heating wire wound inside the shell of the outer wall.

[0009] In one embodiment of this utility model, the pipeline includes a first pipeline and a fifth pipeline, one end of the first pipeline is connected to the second pipeline, and one end of the fifth pipeline is connected to the fourth pipeline.

[0010] In one embodiment of this invention, the pipeline includes a third pipe, one end of which is connected to the mixing tank. This allows unused gas to be extracted from the mixing tank.

[0011] In one embodiment of this utility model, the pipeline further includes a sixth pipeline, one end of which is connected to the mixing tank.

[0012] In one embodiment of this utility model, a diaphragm valve is installed on each of the pipelines.

[0013] Secondly, this utility model also provides a coating device, including the aforementioned gas mixing and introduction structure.

[0014] In one embodiment of this utility model, a cavity is further included, and the first pipeline, the fifth pipeline and the sixth pipeline are connected to the cavity.

[0015] This utility model has the following beneficial effects: The gas mixing and coating equipment provided by this utility model has the following advantages: 1. This gas mixing and introduction structure is equipped with a mixing tank containing intersecting, spiral coils with multiple holes to ensure more uniform gas mixing. A heating structure is also installed on the outer wall of the mixing tank to accelerate gas mixing. Furthermore, a mass flow meter is installed on the pipeline to precisely control the flow rate of various gases, ensuring they are mixed in a specific ratio before being introduced into the cavity to react with the coating product, thus guaranteeing the coating effect.

[0016] 2. This gas mixing and introduction structure has multiple pipelines. The first and fifth pipelines are single-gas pipelines. By controlling the opening and closing of the diaphragm valves in the other pipelines, single gases that do not need to be mixed can be directly introduced into the cavity, meeting various process requirements and avoiding the problem of single gas introducing small amounts of residual other gases, which could affect the quality of the coated product. Moreover, when the mixed gas does not need to be introduced into the cavity, the gas in the mixing tank can be extracted through the third pipeline without having to be discharged through the cavity. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the gas mixing and introduction structure provided by this utility model.

[0018] Figure 2 This is a cross-sectional view of the mixing tank provided by this utility model.

[0019] In the diagram: 1. Mixing tank; 11. Outer wall; 12. Coil; 13. Hole; 14. Heating structure; 2. Diaphragm valve; 3. Pipeline; 31. First pipeline; 32. Second pipeline; 33. Third pipeline; 34. Fourth pipeline; 35. Fifth pipeline; 36. Sixth pipeline; 4. Mass flow meter; 5. Cavity. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0021] In this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0022] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0023] like Figures 1 to 2 As shown, this utility model provides a gas mixing introduction structure, which includes a mixing tank 1, a pipeline 3, a diaphragm valve 2, and a flow meter 4. There are multiple pipelines 3, some of which are connected to the mixing tank 1. The diaphragm valve 2 is installed on the pipeline 3 to control the opening and closing of the pipeline 3. Each pipeline 3 is provided with a diaphragm valve 2. The flow meter 4 is installed on the pipeline 3 and can directly measure the mass flow rate of the fluid.

[0024] In some embodiments, pipeline 3 is provided with six pipes, including a first pipe 31, a second pipe 32, a third pipe 33, a fourth pipe 34, a fifth pipe 35, and a sixth pipe 36. Each pipe is equipped with a diaphragm valve 2 for controlling the opening and closing of each pipe. One end of the first pipe 31 is connected to one end of the second pipe 32, and a mass flow meter 4 is installed on the confluence of the two pipes. The other end of the second pipe 32 is connected to the mixing tank 1, and the other end of the first pipe 31 is connected to the cavity 5. One end of the third pipe 33 is connected to the mixing tank 1, while the other end is suspended, allowing for the extraction of unused gas from the mixing tank 1. One end of the fourth pipe 34 is connected to one end of the fifth pipe 35, and a mass flow meter 4 is also installed on the confluence of the two pipes to control the mass flow rate of the incoming gas. The other end of the fourth pipe 34 is connected to the mixing tank 1, and the other end of the fifth pipe 35 is connected to the cavity 5. The sixth pipeline 36 is connected to the mixing tank 1 and the cavity 5 at both ends, allowing the uniformly mixed gas in the mixing tank 1 to be introduced into the cavity 5. When two gases need to be mixed in a specific ratio, simply close the diaphragm valves 2 on the first pipeline 31, the third pipeline 33, the fifth pipeline 35, and the sixth pipeline 36, and open the diaphragm valves 2 on the second pipeline 32 and the fourth pipeline 34. Calculate the required flow rates of the two gases according to the desired ratio, and control the gas flow rate into the mixing tank 1 using two mass flow meters 4. Once the preset value is reached, close the diaphragm valves 2 on the second pipeline 32 and the fourth pipeline 34. After the gases are fully mixed, open the diaphragm valve 2 on the sixth pipeline 36 to introduce the mixed gas into the mixing tank 1. If no mixing is required and only one gas needs to be introduced, the diaphragm valves 2 on the other pipelines can be closed, and only the diaphragm valve 2 on the first pipeline 31 or the fifth pipeline 35 needs to be opened.

[0025] In some embodiments, the mixing tank 1 includes an outer wall 11, coils 12, holes 13, and a heating structure 14. The coils 12 are installed inside the outer wall 11. Multiple holes 13 are evenly distributed on the coils 12. There are two coils 12, spirally wound in a crisscross pattern within the mixing tank 1. The two coils 12 are respectively connected to a second pipe 32 and a fourth pipe 34. Gas from the two pipes is introduced into the two coils 12 in a certain proportion and diffuses outward from the holes 13 and the bottom openings of the coils 12, making the gas mixing more uniform. The heating structure 14 is installed on the outer side of the outer wall 11. The heating structure 14 can be a heating wire or heating plate, etc., installed on the outer side of the outer wall 11; or the outer wall 11 can be made into a double-shell structure, with the heating structure installed inside the shell of the outer wall 11. This allows for heating of the mixing tank 1, accelerating the gas diffusion rate and making the gas mixing more uniform.

[0026] Furthermore, this utility model also provides a coating device, which includes the aforementioned gas mixing and introduction structure. The coating device includes a cavity 5, which serves as the processing chamber for the coated product. The cavity 5 is connected to the first pipeline 31, the fifth pipeline 35, and the sixth pipeline 36. Alternatively, a four-way valve can be used on the pipeline connecting the diaphragm valve 2 on the sixth pipeline 36 to the cavity 5, allowing the gases to first converge and then enter the cavity 5 through the same inlet, ensuring that the gas is always introduced from the same inlet. Moreover, the two gases are first uniformly mixed in the mixing tank 1 before being introduced into the cavity 5 through the inlet, allowing the two gases to react with the coated product in a certain proportion, thus guaranteeing the coating effect.

[0027] The working principle of the gas mixing and introduction structure provided by this utility model is as follows: When only a single gas needs to be introduced into the cavity 5, simply open the diaphragm valve 2 on the first pipeline 31 or the fifth pipeline 35, and close the diaphragm valves 2 on other pipelines to introduce a single gas into the cavity 5, allowing it to react with the coated product. When it is necessary to introduce a gas mixed in a certain proportion into the cavity 5, the diaphragm valves 2 on the second pipeline 32 and the fourth pipeline 34 need to be opened, the diaphragm valves on other pipelines need to be closed, and the required mass of the two gases needs to be calculated according to the proportion. The mass of the gas introduced into the mixing tank 1 is controlled by the mass flow meter 4. The two gases enter the mixing tank 1 through the intersecting spiral coils 12 and the holes 13 on the coils 12, and are fully mixed. Simultaneously, heating structure 4 is opened to heat the gas in mixing tank 1, which accelerates the gas mixing speed. After the two gases are mixed in mixing tank 1, diaphragm valves 2 on other pipelines are closed, and diaphragm valve 2 on the sixth pipeline 36 is opened, allowing the mixed gas to enter cavity 5 and react with the coating product. Moreover, if the mixed gas does not need to be introduced into cavity 5, or if a different ratio of mixed gas needs to be changed, diaphragm valves 2 on other pipelines can be closed, and diaphragm valve 2 on the third pipeline 33 can be opened to extract the gas and remix it with a different ratio, without having to discharge it through cavity 5.

[0028] This document uses specific embodiments to illustrate the principles and implementation methods of this utility model. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A gas mixing introduction structure, characterized in that, include A mixing tank (1) is provided with a coil (12) and holes (13) inside the mixing tank (1), and the holes (13) are evenly distributed on the coil (12); Pipeline (3), the pipeline (3) includes a second pipeline (32) and a fourth pipeline (34), the second pipeline (32) and the fourth pipeline (34) being connected to the coil (12); Diaphragm valve (2), said diaphragm valve (2) is installed on said pipe (3); Mass flow meter (4), which is installed on the pipe (3) on the side of the diaphragm valve (2) away from the mixing tank (1).

2. The gas mixing and introduction structure according to claim 1, characterized in that, The number of coils (12) is at least two, and the coils (12) are spiral coils, which are installed in the mixing tank (1) in a cross manner.

3. The gas mixing and introduction structure according to claim 2, characterized in that, The mixing tank (1) includes an outer wall (11) and a heating structure (14), the heating structure (14) being installed on the outside of the outer wall (11).

4. The gas mixing and introduction structure according to claim 3, characterized in that, The outer wall (11) is a double-layer shell structure, and the heating structure (14) is a heating wire wrapped inside the shell of the outer wall (11).

5. The gas mixing and introduction structure according to claim 1, characterized in that, The pipeline (3) includes a first pipeline (31) and a fifth pipeline (35). One end of the first pipeline (31) is connected to the second pipeline (32), and one end of the fifth pipeline (35) is connected to the fourth pipeline (34).

6. The gas mixing and introduction structure according to claim 5, characterized in that, The pipeline (3) includes a third pipeline (33), one end of which is connected to the mixing tank (1).

7. The gas mixing and introduction structure according to claim 6, characterized in that, The pipeline (3) also includes a sixth pipeline (36), one end of which is connected to the mixing tank (1).

8. The gas mixing and introduction structure according to claim 7, characterized in that, Each of the pipes (3) is equipped with a diaphragm valve (2).

9. A coating apparatus, characterized in that, Includes a gas mixing introduction structure as described in any one of claims 1-8.

10. A coating apparatus according to claim 9, characterized in that, It also includes a cavity (5), to which the first pipe (31), the fifth pipe (35) and the sixth pipe (36) are connected.

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