CVD rotating gas inlet device

Abstract

The utility model provides a kind of CVD rotary gas inlet device.The CVD rotary gas inlet device includes first gas cylinder, drive system being mounted on the first gas cylinder, and second gas cylinder being arranged in the first gas cylinder, the bottom of the first gas cylinder is equipped with multiple air ducts, the second gas cylinder includes multiple layers of gas distribution plate being spaced apart above the air duct and support table being fixed to the inner wall of the first gas cylinder, the gas distribution plate at the top is rotatably connected to the support table, and the drive system is drivingly connected with the gas distribution plate at the top.The utility model drives the gas distribution plate at the top to rotate smoothly and uniformly by drive system, so that process gas can be fully collided and mixed, the efficiency of process gas molecular diffusion and mixing is significantly improved, and the quality of thin film growth is improved.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition technology, and in particular to a CVD rotary air intake device. Background Technology

[0002] Chemical vapor deposition (CVD) is a technique that uses one or more gaseous compounds or elements containing the target coating element to chemically react on a substrate surface using methods such as heating, plasma excitation, or light radiation to form a thin film. How the process gas enters the reaction chamber and reaches the substrate surface for the chemical reaction directly affects the quality of the deposited film. Existing equipment typically uses a gas inlet pipe directly connected to the reaction chamber, or it enters the reaction chamber directly through a simple gas mixing structure.

[0003] Process gases contain various gaseous compounds. Under gravity, low pressure, and laminar flow conditions, molecular diffusion is slow. A single gas mixing structure cannot achieve sufficient mixing of multiple gaseous compounds, which will seriously affect the quality of the deposited thin film. If the process gas undergoes a chemical reaction before reaching the substrate surface, particulate matter will be carried into the reaction chamber by the process gas and may even fall onto the substrate surface, severely affecting the film growth quality. Thin film growth cycles are relatively long. Premature chemical reactions within the inlet pipe can easily lead to the accumulation of solid deposits, which can, in severe cases, block the inlet, forcing an interruption of the thin film growth process. This results in waste of substrate, raw materials, and semiconductor materials, significantly increasing production costs. Utility Model Content

[0004] The purpose of this invention is to provide a CVD rotary air intake device to solve the problem of insufficient mixing of process gases.

[0005] The technical solution of this utility model is: a CVD rotary air intake device, including a first air distribution cylinder, a drive system installed on the first air distribution cylinder, and a second air distribution cylinder disposed inside the first air distribution cylinder. The bottom of the first air distribution cylinder is provided with multiple air guide pipes. The second air distribution cylinder includes multiple air distribution plates spaced above the air guide pipes and a support platform fixed on the inner wall of the first air distribution cylinder. The top air distribution plate is rotatably connected to the support platform. The drive system is drivenly connected to the top air distribution plate.

[0006] Preferably, except for the top air distribution plate, the remaining air distribution plates are all installed on the bottom of the first air distribution cylinder through support pipes.

[0007] Preferably, the support platform is annular, with a groove on its upper surface and a slide rail on the lower surface of the top air distribution plate. The slide rail and the groove are positioned correspondingly, and ball bearings are fitted in the slide rail and the groove.

[0008] Preferably, each layer of the air distribution plate is provided with air distribution holes, and the diameter and density of the air distribution holes on each layer of the air distribution plate are different.

[0009] Preferably, the drive system includes a hollow shaft magnetofluid mounted on the first air distribution cylinder and a rotating shaft rotatably disposed in the hollow shaft magnetofluid. The lower end of the rotating shaft is connected to the air distribution plate located on the top layer, and the upper part of the rotating shaft is connected to a synchronous wheel drive.

[0010] Preferably, the rotating shaft is a hollow shaft with a water guide pipe inside. A cooling chamber is formed between the water guide pipe and the rotating shaft. A water pipe seat is provided at the upper end of the rotating shaft. An inlet and a return water outlet are formed on the water pipe seat. The inlet, the water guide pipe, the cooling chamber, and the return water outlet are connected in sequence.

[0011] Preferably, the hollow shaft magnetofluid is provided with a clamp for defining the axial position of the rotating shaft.

[0012] Preferably, the lower end of the rotating shaft is a meshing gear shaft, and the top air distribution plate is provided with a meshing tooth hole that is adapted to the meshing gear shaft.

[0013] Preferably, the first air distribution cylinder includes a cylinder body, a top cover covering the upper end of the cylinder body, and a bottom plate connected to the lower end of the cylinder body. The top cover is provided with at least one air inlet pipe seat, the drive system is installed on the top cover, and the air guide pipe is provided on the bottom plate.

[0014] Preferably, the top cover is hollow to form a first water cavity, and the cylinder is hollow to form a second water cavity.

[0015] Compared with related technologies, the beneficial effects of this utility model are as follows: I. This utility model drives the top gas distribution plate to rotate smoothly and at a constant speed through a drive system, which allows the process gas to fully collide and mix, significantly improving the efficiency of process gas molecule diffusion and mixing, and improving the quality of thin film growth. II. This utility model is equipped with a multi-layer gas distribution plate, and the multi-layer gas distribution plate is set at intervals between the upper and lower parts, so that the multi-layer graphite soft felt and hard felt are stacked alternately, which effectively isolates heat, reduces the temperature in the gas distribution cylinder and the gas guide pipe, avoids the process gas from undergoing a chemical reaction in advance to generate particulate matter, contaminates the reaction chamber, avoids the accumulation and blockage of particulate matter at the gas guide pipe opening, and avoids interruption of the thin film growth process. Attached Figure Description

[0016] Figure 1 A schematic diagram of the internal structure of the CVD rotary air intake device provided by this utility model; Figure 2 This is a schematic diagram of the structure of the first air distribution plate; Figure 3This is a partial exploded structural diagram of the first air distribution plate, ball bearings, and support platform; Figure 4 This is a schematic diagram of the second air distribution plate.

[0017] In the attached diagram: 100, drive system; 101, water inlet; 102, water outlet; 103, water pipe seat; 105, rotating shaft; 1051, meshing gear shaft; 106, cooling chamber; 107, synchronous pulley; 108, hollow shaft magnetohydrodynamic; 109, clamp; 200, first air distributor; 201, mounting shaft seat; 202, top cover; 203, first water chamber; 204, cylinder body; 205, second water chamber; 206, air inlet pipe seat; 207, bottom plate; 300, second air distributor; 301, support platform; 3011, slide groove; 302, ball bearing; 303, first air distributor plate; 3031, meshing gear hole; 3032, first air distributor hole; 3033, slide rail; 304, second air distributor plate; 305, support pipe; 306, air guide pipe; 307, air distributor plate. Detailed Implementation

[0018] The present invention will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present invention can be combined with each other. For ease of description, the terms "upper," "lower," "left," and "right" appearing below only indicate that they correspond to the upper, lower, left, and right directions in the accompanying drawings and do not limit the structure.

[0019] like Figure 1 As shown, the CVD rotary air intake device provided in this embodiment includes a drive system 100, a first air distributor 200, and a second air distributor 300.

[0020] The drive system 100 includes an inlet 101, an outlet 102, a water pipe seat 103, a water guide pipe 104, a rotating shaft 105, a cooling chamber 106, a synchronous pulley 107, a hollow shaft magnetofluid 108, and a clamp 109.

[0021] The rotating shaft 105 is a hollow shaft with a water guide pipe 104 inside. A cooling chamber 106 is formed between the water guide pipe 104 and the rotating shaft 105. A water pipe seat 103 is provided at the upper end of the rotating shaft 105. A water inlet 101 and a water outlet 102 are formed on the water pipe seat 103. The water inlet 101, the water guide pipe 104, the cooling chamber 106, and the water outlet 102 are connected in sequence. The rotating shaft 105 has a cooling circulation structure inside, which can prevent the rotating shaft 105 from deforming due to high temperature and affecting the mechanical transmission, and can also prevent the rotating shaft 105 from decomposing at high temperature and releasing metal impurities that contaminate the reaction chamber.

[0022] Cooling water enters through inlet 101, passes through water guide pipe 104, and enters cooling chamber 106. The length of water guide pipe 104 is almost the same as the depth of cooling chamber 106, ensuring that cooling water must fill cooling chamber 106 before flowing back, preventing heat accumulation at the bottom of rotating shaft 105. The returning water returns to the water cooling system through return port 102 installed on water pipe seat 103.

[0023] The synchronous pulley 107 is driven by the rotating shaft 105. The synchronous pulley 107 is externally connected to a drive motor and a reducer, enabling the rotating shaft 105 to move at a uniform speed. To ensure airtightness between the rotating shaft 105 and the chamber, a hollow shaft magnetofluid 108 is installed between the rotating shaft 105 and the first air distribution cylinder 200. The hollow shaft magnetofluid 108 is bolted to the mounting bearing 201 of the first air distribution cylinder 200. The rotating shaft 105 and the hollow shaft magnetofluid 108 are clamped together by a clamp 109, facilitating the disassembly and maintenance of the drive system 100. The hollow shaft magnetofluid 108 achieves a rotational seal between the rotating shaft 105 and the first air distribution cylinder 200.

[0024] The lower end of the rotating shaft 105 is a meshing gear shaft 1051.

[0025] The first gas distributor 200 includes a mounting shaft seat 201, a top cover 202, a first water cavity 203, a cylinder body 204, a second water cavity 205, an air inlet seat 206, and a base plate 207. The top cover 202 is positioned over the upper end of the cylinder body 204, and the base plate 207 is connected to the lower end of the cylinder body 204. The mounting shaft seat 201 penetrates the top cover 202, and the two are fixedly connected. The top cover 202 is a double-layered structure, hollow inside to form the first water cavity 203. Multiple air inlet seats 206 are evenly arranged circumferentially on the top cover 202, through which process gas enters the interior of the first gas distributor 200. The cylinder body 204 is a double-layered structure, hollow inside to form the second water cavity 205.

[0026] The base plate 207 is annular and has multiple steps for mounting multi-layer gas distribution plates 307. An mounting plate (unlabeled) for installing the gas guide pipe 306 is placed in the inner hole of the annular base plate 207. Below the gas guide pipe 306 is the reaction chamber.

[0027] The second air distribution cylinder 300 includes multiple layers of air distribution plates 307 spaced above the air guide pipe 306 and a support platform 301 fixed to the inner wall of the first air distribution cylinder 200. The top layer of air distribution plate 307 is rotatably connected to the support platform 301, and the drive system 100 is drivenly connected to the top layer of air distribution plate 307. Except for the top layer of air distribution plate 307, the remaining air distribution plates 307 are all installed on the bottom of the first air distribution cylinder 200 through support pipes 305. The support pipes 305 of each layer are correspondingly placed on the first step of the base plate 207.

[0028] In this embodiment, the air distribution plate 307 includes a first air distribution plate 303 and a second air distribution plate 304. For example... Figure 1 , Figure 3 As shown, the support platform 301 is annular, with a groove 3011 on its upper surface. The lower surface of the first air distribution plate 303 is provided with a slide rail 3033, which corresponds to the groove 3011, and ball bearings 302 are fitted within the slide rail 3033 and groove 3011. The ball bearings 302 slide smoothly within the space formed by the slide rail 3033 and groove 3011. The second air distribution plate 304 is positioned below the first air distribution plate 303 via a support tube 305.

[0029] like Figure 2 , Figure 4 As shown, the first air distribution plate 303 has a plurality of first air distribution holes 3032 evenly distributed on it, and the second air distribution plate 304 has a plurality of second air distribution holes 3041 evenly distributed on it. The density of the first air distribution holes 3032 is less than the density of the second air distribution holes 3041; the diameter of the first air distribution holes 3032 is larger than the diameter of the second air distribution holes 3041. The first air distribution plate 303 is provided with meshing tooth holes 3031 adapted to the meshing toothed shaft 1051, so that the rotating shaft 105 meshes and drives with the first air distribution plate 303.

[0030] The drive motor drives the rotating shaft 105 to rotate via the synchronous pulley 107, thereby causing the first gas distribution plate 303 to rotate smoothly and at a constant speed. The process gas undergoes initial and thorough collision and mixing within the space formed by the first gas distribution cylinder 200 and the first gas distribution plate 303. The gas then enters the second gas distribution cylinder 300 through the first gas distribution hole 3032 on the first gas distribution plate 303. The second gas distribution cylinder 300 contains a second gas distribution plate 304, where the process gas undergoes further thorough collision and mixing. Finally, it is evenly dispersed through the second gas distribution hole 3041 into the gas guide pipe 306 and enters the reaction chamber.

[0031] In other embodiments, the gas distribution plate 307 can be provided in 3-5 layers. To ensure that the process gas is fully mixed in the second gas distribution cylinder 300 and evenly distributed to each gas guide pipe 306, the aperture and position of the gas distribution holes on each layer of the gas distribution plate 307 are arranged according to the results of fluid dynamics analysis. For example, the position of the first gas distribution hole 3032 needs to avoid the multiple circumferentially arranged gas inlet pipe seats 206, and also needs to prevent the process gas from directly and quickly passing through the first gas distribution hole 3032 into the second gas distribution plate 304 during rotation. By adjusting the number of layers of the gas distribution plate 307 and the size of the gas distribution holes, the flow rate of the process gas can be varied, allowing the process gas to fully collide and mix.

[0032] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A CVD rotary air intake device, comprising a first air distribution cylinder (200) and a drive system (100) mounted on the first air distribution cylinder (200), characterized in that, It also includes a second air distribution cylinder (300) located inside the first air distribution cylinder (200). The bottom of the first air distribution cylinder (200) is provided with a plurality of air guide pipes (306). The second air distribution cylinder (300) includes a multi-layer air distribution plate (307) spaced above the air guide pipes (306) and a support platform (301) fixed on the inner wall of the first air distribution cylinder (200). The top air distribution plate (307) is rotatably connected to the support platform (301). The drive system (100) is drivenly connected to the top air distribution plate (307).

2. The CVD rotary air intake device according to claim 1, characterized in that, Except for the top air distribution plate (307), the remaining air distribution plates (307) are all installed on the bottom of the first air distribution cylinder (200) through support pipes (305).

3. The CVD rotary air intake device according to claim 1, characterized in that, The support platform (301) is annular, and its upper surface is provided with a groove (3011). The lower surface of the top air distribution plate (307) is provided with a slide rail (3033). The slide rail (3033) corresponds to the groove (3011) and ball bearings (302) are adapted in the slide rail (3033) and the groove (3011).

4. The CVD rotary air intake device according to claim 1, characterized in that, Each layer of the air distribution plate (307) is provided with air distribution holes, and the diameter and density of the air distribution holes on each layer of the air distribution plate (307) are different.

5. The CVD rotary air intake device according to claim 1, characterized in that, The drive system (100) includes a hollow shaft magnetofluid (108) mounted on the first air distribution cylinder (200) and a rotating shaft (105) rotatably disposed in the hollow shaft magnetofluid (108). The lower end of the rotating shaft (105) is connected to the air distribution plate (307) located on the top layer, and the upper part of the rotating shaft (105) is driven connected to the synchronous wheel (107).

6. The CVD rotary air intake device according to claim 5, characterized in that, The rotating shaft (105) is a hollow shaft with a water guide pipe (104) inside. A cooling chamber (106) is formed between the water guide pipe (104) and the rotating shaft (105). A water pipe seat (103) is provided at the upper end of the rotating shaft (105). An inlet (101) and a return water port (102) are formed on the water pipe seat (103). The inlet (101), the water guide pipe (104), the cooling chamber (106) and the return water port (102) are connected in sequence.

7. The CVD rotary air intake device according to claim 5, characterized in that, The hollow shaft magnetofluid (108) is provided with a clamp (109) for defining the axial position of the rotating shaft (105).

8. The CVD rotary air intake device according to claim 5, characterized in that, The lower end of the rotating shaft (105) is a meshing gear shaft (1051), and the top air distribution plate (307) is provided with a meshing tooth hole (3031) that is adapted to the meshing gear shaft (1051).

9. The CVD rotary air intake device according to claim 1, characterized in that, The first air distribution cylinder (200) includes a cylinder body (204), a top cover (202) covering the upper end of the cylinder body (204), and a bottom plate (207) connected to the lower end of the cylinder body (204). The top cover (202) is provided with at least one air inlet pipe seat (206). The drive system (100) is installed on the top cover (202), and the air guide pipe (306) is provided on the bottom plate (207).

10. The CVD rotary air intake device according to claim 9, characterized in that, The top cover (202) is hollow to form a first water cavity (203), and the cylinder (204) is hollow to form a second water cavity (205).

Images