A CVD pyrolytic graphite coating assembly combination support jig

Abstract

The utility model relates to a CVD pyrolytic graphite coating equipment combined support jig belongs to pyrolytic graphite coating equipment field, solve the problem of high procurement cost and inconvenient production site management caused by the variety of support jigs of the existing pyrolytic graphite coating equipment, technical scheme: including bottom plate and a plurality of different shape specifications' support mechanism, the same shape specification's support mechanism is provided with at least one, and one support mechanism can detachably connect with at least one support base, the side opposite to support base on support mechanism is used for placing coating product, and one coating product is supported by at least one same shape specification's support mechanism, and the coating product is compatible with the support mechanism where the coating product is, a plurality of support bases are also detachably connected with the bottom plate, and a plurality of support bases are respectively matched with a plurality of different shape specifications' support mechanism to support a plurality of different shape specifications' coating products, the utility model is applied to pyrolytic graphite coating equipment.

Description

Technical Field

[0001] This utility model relates to the field of pyrolytic graphite coating equipment technology, specifically to a combined support fixture for CVD pyrolytic graphite coating equipment. Background Technology

[0002] Pyrolytic graphite coatings prepared by CVD (chemical vapor deposition) play a key role in many fields due to their unique properties of high purity, density, excellent thermal stability, and chemical inertness: In monocrystalline silicon manufacturing, their high temperature resistance and high purity can avoid silicon material contamination, helping to improve the purity and quality of monocrystalline silicon; in the field of OLED manufacturing equipment, they can provide a clean and stable high-temperature environment to ensure the manufacturing quality of display devices; and in the aerospace field, they can meet the stringent requirements of high temperature resistance, thermal shock resistance, and high purity in extreme environments.

[0003] With the rapid development of fields such as monocrystalline silicon manufacturing, OLED manufacturing, and aerospace, my country's demand for pyrolytic graphite coated products continues to grow. As the core equipment for preparing these products, the market for pyrolytic graphite coating equipment has shown rapid growth in recent years.

[0004] Due to their wide range of applications, pyrolytic graphite coated products come in a rich variety of types and shapes, including round, ring-shaped, square, and cylindrical. Different types of coated products require dedicated support fixtures, and multiple shapes of products can be placed in the same equipment. This results in a large variety of support fixtures, which increases procurement costs and causes inconvenience to production site management. Utility Model Content

[0005] To address the technical problems of high procurement costs and inconvenient production site management caused by the wide variety of support fixtures in existing pyrolytic graphite coating equipment, this utility model proposes a combined support fixture for CVD pyrolytic graphite coating equipment.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a CVD pyrolytic graphite coating equipment combination support fixture, including a base plate and several support devices of different shapes and specifications, with at least one support device of the same shape and specification. A support device is detachably connected to at least one support base, and the side of the support device opposite to the support base is used to place the coated product. A coated article is supported by at least one support device of the same shape and specifications, and the coated article is adapted to the support device on which the coated article is located; Multiple support bases are detachably connected to the base plate, and each support base cooperates with multiple support devices of different shapes and specifications to support coated products of various shapes and specifications.

[0007] Furthermore, the base plate has several first support holes arranged in an array. The first support holes are clearance-fitted with the first positioning boss fixedly connected to the support base to achieve a detachable connection between the support base and the base plate. The support base includes a base, on which a first positioning boss is fixedly connected. The first positioning boss corresponds one-to-one with the first support hole and is fitted with a clearance. The base is also provided with a first groove, which is in clearance fit with the second positioning boss on the support device.

[0008] Furthermore, the support device includes a support body, a second positioning boss is disposed on the support body, and a support member is disposed on the end face of the support body opposite to the second positioning boss. The support member is used to support the coated product.

[0009] Furthermore, there are two support components, and the two support components are arranged opposite to each other.

[0010] Furthermore, the support component has a triangular prism structure, with its outer wall fixedly connected to the support body, and coated products of corresponding shape and specifications placed on the side edges of the support component.

[0011] Furthermore, the support component has a triangular plate-like structure, and the main support body and the two support components form a concave structure. A certain space is reserved between the coated product of the corresponding shape and size supported by the support component and the main support body.

[0012] Furthermore, an arc-shaped groove is provided on the end face of the support member away from the support body. The arc-shaped groove is used to place coated products of corresponding shapes and specifications.

[0013] Furthermore, the support device includes a support body, a second positioning boss is disposed on the support body, a support stop is disposed on the end face of the support body opposite to the second positioning boss, and the coated product is placed on the support body between the two support stops.

[0014] Furthermore, several adjustable auxiliary support frames can be detachably connected to the base plate. The adjustable auxiliary support frames are provided with adjustment holes for linear adjustment. Adjustment components are slidably connected in the adjustment holes. Positioning stops are installed on the adjustment components. The adjustment holes, adjustment components and positioning stops cooperate with each other to fix the adjustment components at any target position in the adjustment holes. The adjustment components abut against the coated products supported on the support device, and the adjustment components provide auxiliary support for the coated products.

[0015] Furthermore, the adjustable auxiliary support frame is also fixedly connected with a third positioning boss, and the multiple third positioning bosses correspond one-to-one with the multiple second support holes opened on the base plate and are fitted with clearance. Along the length of the base plate, the first support holes and the second support holes are arranged alternately in columns or rows.

[0016] The advantages of this utility model over the prior art are as follows: 1. The support base, base plate, and support device of this utility model can all be detachably connected. The support device is equipped with support components that are compatible with coating products of different shapes and specifications, which realizes the deposition of coating products of different shapes and specifications in the same deposition furnace, greatly expanding the application scope of the fixture of this utility model, and facilitating assembly, maintenance, and production management.

[0017] 2. The adjustable auxiliary support frame and support components of this utility model work together to strengthen the fixation of target coated products with thin walls, thereby enhancing the stability of the coated products.

[0018] 3. The structure of this utility model is simple, which reduces the procurement cost of the CVD pyrolytic graphite coating equipment combination support fixture and facilitates mass production. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the structure of the base plate in one embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the support base according to one embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a support member according to one embodiment of the present invention. Figure 1 ; Figure 4 This is a schematic diagram of the structure of a support member according to one embodiment of the present invention. Figure 2 ; Figure 5 This is a schematic diagram of the structure of a support member according to one embodiment of the present invention. Figure 3 ; Figure 6 This is a schematic diagram of the structure of a support member according to one embodiment of the present invention. Figure 4 ; Figure 7 This is a schematic diagram of the adjustable auxiliary support frame according to one embodiment of the present invention. Figure 1 ; Figure 8 This is a schematic diagram of the adjustable auxiliary support frame according to one embodiment of the present invention. Figure 2 ; Figure 9 This is a schematic diagram of the structure of the base plate, support base, support component, adjustable auxiliary support frame and coated product of this utility model; Figure 10 for Figure 9 The main view.

[0020] In the diagram: 1 is the base plate, 2 is the support base, 3 is the support device, 4 is the adjustable auxiliary support frame, 5 is the coated product, 10 is the first support hole, 11 is the second support hole, 20 is the first positioning boss, 21 is the base, 22 is the first groove, 30 is the second positioning boss, 31 is the support body, 32 is the support component, 33 is the support stop, 34 is the arc-shaped groove, 40 is the third positioning boss, 41 is the adjustment hole, 42 is the nut, 43 is the screw, and 44 is the positioning stop. Detailed Implementation

[0021] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] like Figures 1 to 10 As shown, this utility model provides a combined support fixture for CVD pyrolytic graphite coating equipment, including a base plate 1 and several support devices 3 of different shapes and specifications, with at least one support device 3 of the same shape and specification. A support device 3 is detachably connected to at least one support base 2, and the side of the support device 3 opposite to the support base 2 is used to place the coated product 5; A coated article 5 is supported by at least one support device 3 of the same shape and specifications, and the coated article 5 is adapted to the support device 3 on which the coated article 5 is located. Multiple support bases 2 are also detachably connected to the base plate 1, and the multiple support bases 2 cooperate with multiple support devices 3 of different shapes and specifications to support coating products 5 of various shapes and specifications.

[0024] The base plate 1 has a plurality of first support holes 10 arranged in an array. The first support holes 10 are in clearance fit with the first positioning boss 20 fixedly connected to the support base 2, so as to realize the detachable connection between the support base 2 and the base plate 1.

[0025] The support base 2 includes a base 21, on which a first positioning boss 20 is fixedly connected. The first positioning boss 20 corresponds one-to-one with the first support hole 10 and is clearance-fitted. A first groove 22 is also provided on the base 21, which is clearance-fitted with a second positioning boss 30 on the support device 3 to achieve a detachable connection between the support device 3 and the support base 2. The second positioning boss 30 has a square structure.

[0026] In one embodiment, such as Figure 3 As shown, the support device 3 includes a support body 31, on which a second positioning boss 30 and two opposing support members 32 are integrally formed. The support members 32 have a triangular prism structure, that is, the cross-section of the support member 32 is triangular. The two opposing support members 32 are adapted to the square-structured coated product 5 to support the square-structured coated product 5. Specifically, the outer wall of the support member 32 is fixedly connected to the support body 31, and the coated product 5 is placed on the side edge of the support member 32.

[0027] In one embodiment, such as Figure 4 As shown, the support device 3 includes a support body 31. The cross-section of the support body 31 is trapezoidal, specifically, the support body 31 is a frustum structure. Two opposing second positioning bosses 30 are integrally formed on the support body 31. The second positioning bosses 30 are located on the lower bottom surface of the support body 31. Two opposing support stops 33 are fixedly connected to the upper bottom surface of the support body 31 opposite to the lower bottom surface of the second positioning bosses 30. The upper bottom surface of the support body 31 is used to place the cylindrical coated product 5. The cylindrical coated product 5 is placed on the support body 31 between the two support stops 33. The support stops 33 are used to prevent the cylindrical coated product 5 from rolling off.

[0028] In one embodiment, such as Figure 5 As shown, the support device 3 includes a support body 31 with a square cross-section. One end face of the support body 31 is integrally formed with two opposing second positioning bosses 30. The other end face of the support body 31, opposite to the end face of the second positioning bosses 30, is integrally formed with two opposing support members 32. The support members 32 are triangular plate-shaped structures. The support body 31 and the two support members 32 form a concave structure. The two support members 32 are used to support the prism structure coated product 5. A certain space is reserved between the supported prism structure coated product 5 and the support body 31 to ensure the uniformity of coating deposition on the coated product 5.

[0029] In one embodiment, such as Figure 6As shown, the support device 3 includes a support body 31 with a square cross-section. One end face of the support body 31 is integrally formed with a second positioning boss 30. The other end face of the support body 31 opposite to the end face of the second positioning boss 30 is integrally formed with two opposing support members 32. The end face of the support member 32 away from the support body 31 is provided with an arc-shaped groove 34. The arc-shaped groove 34 is used to place the coated product 5 with a ring structure or a disc structure.

[0030] Several adjustable auxiliary support frames 4 can also be detachably connected to the base plate 1. The adjustable auxiliary support frames 4 are square in structure, and each of the multiple adjustable auxiliary support frames 4 corresponds to and cooperates with a number of second support holes 11 opened on the base plate 1. The second support holes 11 are square in structure, and the multiple second support holes 11 are arranged in a matrix array. Along the length of the base plate 1, the first support holes 10 and the second support holes 11 are arranged alternately in columns (or rows), that is, after the first support hole 10 is arranged in a column (or row), the second support hole 11 is arranged in the adjacent column (or row), and so on in a cycle.

[0031] The adjustable auxiliary support frame 4 has an adjustment hole 41 for linear adjustment. The adjustment hole 41 is an elongated hole, and an adjusting element is fitted inside the adjustment hole 41 with clearance. The adjusting element can slide smoothly along the length of the adjustment hole 41. A positioning stop 44 is mounted on the adjusting element, and the positioning stop 44 abuts against the outer wall of the adjustable auxiliary support frame 4, which can fix the adjusting element at any target position in the adjustment hole 41. The adjusting element abuts against the coated product 5, and the adjusting element provides auxiliary support for the coated product 5. In one embodiment, the adjusting element is a bolt, which includes a nut 42 and a screw 43 fixedly connected to the nut 42. The nut 42 is engaged with the outer wall of the adjustable auxiliary support frame 4, and the screw 43 extends through the elongated hole toward the target coated product 5.

[0032] The adjustable auxiliary support frame 4 is also fixedly connected with a third positioning boss 40. The third positioning boss 40 has a square structure. Multiple third positioning bosses 40 correspond one-to-one with multiple second support holes 11 opened on the base plate 1, and the third positioning bosses 40 and the second support holes 11 opened on the base plate 1 are in clearance fit.

[0033] The working principle of this utility model: In use, first, assemble multiple support bases 2 into the first support holes 10 on the base plate 1. Then, insert the support device 3 of the corresponding shape and specification into the first groove 22 on the support base 2. Finally, place the target coated product 5 on the support device 3 of the corresponding shape and specification. If the target coated product 5 has a thin wall thickness, an adjustable auxiliary support frame 4 can be installed on the base plate 1 to abut against the target coated product 5 with a thin wall thickness to strengthen the fixation. The support device 3 of the corresponding shape and specification can be disassembled and replaced according to the different shape and specification of each batch of coated products 5, so as to support coated products 5 of multiple shapes and specifications at the same time.

[0034] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A CVD pyrolytic graphite coating equipment support fixture, characterized in that: It includes a base plate (1) and several support devices (3) of different shapes and specifications, with at least one support device (3) of the same shape and specification; A support device (3) is detachably connected to at least one support base (2), and the side of the support device (3) opposite to the support base (2) is used to place the coated product (5). A coated article (5) is supported by at least one support device (3) of the same shape and specifications, and the coated article (5) is adapted to the support device (3) where the coated article (5) is located; Multiple support bases (2) are also detachably connected to the base plate (1), and multiple support bases (2) cooperate with multiple support devices (3) of different shapes and specifications to support coating products (5) of different shapes and specifications.

2. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 1, characterized in that: The base plate (1) has several first support holes (10), and the multiple first support holes (10) are arranged in an array. The first support holes (10) are in clearance fit with the first positioning boss (20) fixedly connected to the support base (2) so as to realize the detachable connection between the support base (2) and the base plate (1). The support base (2) includes a base (21), on which a first positioning boss (20) is fixedly connected. The first positioning boss (20) corresponds one-to-one with the first support hole (10) and is fitted with a clearance. The base (21) is also provided with a first groove (22), which is in clearance fit with the second positioning boss (30) on the support device (3).

3. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 2, characterized in that: The support device (3) includes a support body (31), a second positioning boss (30) is disposed on the support body (31), and a support member (32) is disposed on the end face of the support body (31) opposite to the second positioning boss (30). The support member (32) is used to support the coated product (5).

4. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 3, characterized in that: There are two support members (32), and the two support members (32) are arranged opposite to each other.

5. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 4, characterized in that: The support member (32) has a triangular prism structure. The outer wall of the support member (32) is fixedly connected to the support body (31). Coated products (5) of corresponding shape and specifications are placed on the side edge of the support member (32).

6. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 4, characterized in that: The support member (32) has a triangular plate structure. The support body (31) and the two support members (32) form a concave structure. A certain space is reserved between the coated product (5) of the corresponding shape and specification supported by the support member (32) and the support body (31).

7. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 4, characterized in that: An arc-shaped groove (34) is provided on the end face of the support member (32) away from the support body (31). The arc-shaped groove (34) is used to place coated products (5) of corresponding shape and specifications.

8. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 2, characterized in that: The support device (3) includes a support body (31), a second positioning boss (30) is disposed on the support body (31), and a support stop (33) is disposed on the end face of the support body (31) opposite to the second positioning boss (30). The coated product (5) is placed on the support body (31) between the two support stops (33).

9. The CVD pyrolytic graphite coating equipment combination support fixture according to claim 1, characterized in that: Several adjustable auxiliary support frames (4) can be detachably connected to the base plate (1). The adjustable auxiliary support frame (4) is provided with an adjustment hole (41) for linear adjustment. An adjustment component is slidably connected in the adjustment hole (41). A positioning stop (44) is mounted on the adjustment component. The adjustment hole (41), the adjustment component and the positioning stop (44) cooperate with each other to fix the adjustment component at any target position of the adjustment hole (41). The adjustment component abuts against the coated product (5) supported on the support device (3). The adjustment component provides auxiliary support for the coated product (5).

10. A CVD pyrolytic graphite coating equipment support fixture according to claim 2, characterized in that: The adjustable auxiliary support frame (4) is also fixedly connected with a third positioning boss (40). The multiple third positioning bosses (40) correspond one-to-one with the multiple second support holes (11) opened on the base plate (1) and are fitted with a clearance. Along the length of the base plate (1), the first support hole (10) and the second support hole (11) are arranged alternately in columns or rows.

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