A magnetic levitation anti-stuck point printing conveying plate for BC battery coating process

Abstract

The utility model relates to a kind of magnetic levitation anti-jamming point printing transmission plate for BC battery coating process, including non-magnetic substrate;It further includes embedded in the permanent magnet array of non-magnetic substrate surface, piezoelectric ceramic actuator being arranged at the edge of non-magnetic substrate, gas distribution cavity integrated in the inside of non-magnetic substrate and temperature sensor and hall sensor installed on the surface of non-magnetic substrate, the permanent magnet array is provided with multiple, and the permanent magnet array is array arrangement, piezoelectric ceramic actuator is electrically connected with hall sensor by signal line, gas distribution cavity entrance is connected with external gas source, and the outlet of gas distribution cavity is communicated to the upper surface of non-magnetic substrate;The novel gas distribution cavity is equipped in non-magnetic substrate, communicates upper surface micropore array, realizes gas uniform release, cooperates with thin film thermocouple and silicon carbide heating sheet temperature control, improves film layer uniformity, inhibits thermal stress cracking.

Description

Technical Field

[0001] This utility model relates to the field of battery coating technology, specifically a magnetic levitation anti-jamming dot print transmission plate for BC battery coating process. Background Technology

[0002] The magnetic levitation anti-jamming transfer plate is a precision carrier and transfer device used in photovoltaic cell manufacturing. It is mainly used for non-contact transport of BC solar cells in coating processes such as PECVD. Through magnetic levitation technology, the transfer plate and the track are in contact without physical contact, avoiding mechanical friction and particulate contamination. Its function is to reduce surface damage, indentation or coating abnormalities caused by contact during the transfer of solar cells, prevent jamming defects, ensure the cleanliness of the front side of the solar cells and the uniformity of the film layer, improve product yield and photoelectric conversion efficiency, and is suitable for automated production environments of high-efficiency back-contact solar cells.

[0003] In practical applications, common magnetic levitation anti-jamming transfer boards often suffer from mechanical indentations on the front of the BC battery due to unreasonable load-bearing structure design, which often employs rigid support or partial contact positioning methods. This is especially problematic during start-up, shutdown, or high-speed operation when vibrations cause minor collisions. Additionally, traditional material surfaces easily adsorb process particles, which can be sputtered and deposited in plasma environments, leading to contaminant transfer. Furthermore, uneven temperature distribution on the board surface causes thermal stress deformation, further exacerbating the contact risk. These factors collectively result in a decrease in the cleanliness of the battery cell surface, forming localized obstructions or stress concentration points. This leads to unexpected film layer defects or abnormal thicknesses in subsequent coating processes, ultimately manifesting as jamming defects. The measured defect rate can reach over 3%, affecting battery conversion efficiency and product yield. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a magnetic levitation anti-jamming transfer plate for BC battery coating processes. Gas is uniformly released through a microporous array, reducing edge accumulation. Temperature is measured by a thin-film thermocouple and controlled by a silicon carbide heating element, improving film uniformity and suppressing thermal stress cracking. This solves the problems of common magnetic levitation transfer plates, such as unreasonable structure, easy mechanical contact and particulate contamination, uneven temperature leading to thermal deformation, surface defects, jamming, and affecting yield and battery efficiency.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process, comprising a non-magnetic substrate; further comprising a permanent magnet array embedded in the surface of the non-magnetic substrate, a piezoelectric ceramic actuator disposed at the edge of the non-magnetic substrate, a gas distribution cavity integrated inside the non-magnetic substrate, and a temperature sensor and a Hall sensor mounted on the surface of the non-magnetic substrate.

[0006] Multiple permanent magnet arrays are arranged in an array. The piezoelectric ceramic actuator is electrically connected to the Hall sensor via a signal line. The inlet of the gas distribution cavity is connected to an external gas source, and the outlet of the gas distribution cavity is connected to the upper surface of the non-magnetic substrate. A honeycomb microstructure is provided in the central area of ​​the upper surface of the non-magnetic substrate. An electromagnetic damping layer is provided on the side edge of the non-magnetic substrate. The electromagnetic damping layer includes a hollow copper tube and an enameled wire wound around the outer wall of the hollow copper tube. Circulating cooling water flows inside the hollow copper tube.

[0007] Furthermore, the permanent magnet array consists of multiple neodymium iron boron magnets arranged in an array, with a magnetic energy product of ≥45 MGOe.

[0008] Furthermore, the piezoelectric ceramic actuator has a ring-shaped thin-film structure with a thickness of 0.5 mm and a response frequency ≥ 1 kHz. The Hall sensor is a 49E type linear Hall element with a range of ±1 T and a sensitivity of 1.3 mV / T.

[0009] Furthermore, the gas distribution chamber is an annular microchannel with a thickness of 0.3 mm, and the outlet end of the gas distribution chamber is provided with a micropore array with a pore diameter of Φ0.5 mm and a density of 100 pores / cm².

[0010] Furthermore, the non-magnetic substrate is made of zirconia ceramic with a thickness of 2 mm and a surface roughness Ra≤0.1 μm. The honeycomb microstructure is formed by laser etching with a pore diameter of 50 μm, a depth of 20 μm, and a pore wall tilt angle of 45°.

[0011] Furthermore, the hollow copper tubes have an inner diameter of Φ2mm and are arranged in a ring along the side edge of the non-magnetic substrate with a spacing of 10mm; the enameled wire has a diameter of 0.1mm and a turn density of 20 turns / cm; the circulating cooling water has a flow rate of 2L / min.

[0012] Furthermore, the temperature sensor is a thin-film thermocouple with an accuracy of ±0.1℃; a silicon carbide heating element is also integrated inside the non-magnetic substrate.

[0013] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0014] 1. Due to the magnetic levitation of the permanent magnet array with the external track, the entire transmission plate has no physical contact with the track during operation. At the same time, the piezoelectric ceramic actuator achieves dynamic leveling to avoid abnormal contact caused by vibration or tilt. Combined with the honeycomb microstructure supporting the battery cells only at the edges or in non-critical areas, it significantly reduces mechanical indentation and particulate contamination on the front of the BC battery, thereby reducing the proportion of stuck-point defects.

[0015] 2. By integrating a gas distribution cavity inside the non-magnetic substrate and connecting the outlet to the micro-hole array on the upper surface, the process gas is uniformly released from the transfer plate body and close to the surface of the cell, reducing airflow disturbance and edge accumulation caused by long-distance delivery of the spray head, and effectively improving the lateral uniformity of the film layer.

[0016] 3. The temperature sensor is a thin-film thermocouple, distributed on the surface of the non-magnetic substrate, providing real-time temperature data feedback. Combined with the silicon carbide heating element integrated inside the non-magnetic substrate, it achieves precise localized heating. This structure keeps the lateral temperature difference of the board surface within ±1℃, avoiding thermal stress concentration and microcracks in the coating layer caused by temperature gradients.

[0017] 4. The piezoelectric ceramic actuators are distributed in a ring around the edge of the non-magnetic substrate, with a thickness of 0.5mm and a response frequency ≥1kHz. Together with the Hall sensor (range ±1T, sensitivity 1.3mV / T), they form a closed-loop feedback system. When a change in the magnetic field is detected, the system adjusts the deformation of the piezoelectric ceramics to dynamically compensate for the fluctuation of the suspension gap (≤±3μm), adapting to battery cells of different thicknesses (deviation ±50μm), and improving the stability and positioning accuracy of the transmission process.

[0018] With a high degree of overall structural integration and strong functional synergy, it can achieve continuous, stable, and non-contact transmission within a vacuum chamber, meeting the stringent requirements of IBC, HBC, and other back-contact batteries for surface cleanliness and process consistency, and helping to improve production line yield and battery conversion efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the bottom three-dimensional cross-sectional structure of this utility model;

[0021] Figure 3 This is a partial three-dimensional structural diagram of the present utility model;

[0022] Figure 4 This is a partial three-dimensional structural diagram of the present invention;

[0023] Figure 5 This is a three-dimensional enlarged structural diagram of the location of component A in this utility model.

[0024] In the figure: 1. Non-magnetic substrate; 2. Permanent magnet array; 3. Piezoelectric ceramic actuator; 4. Gas distribution cavity; 5. Temperature sensor; 6. Hall sensor; 7. Honeycomb microstructure; 8. Electromagnetic damping layer. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] It should be added that an electromagnetic damping layer 8 is provided on the edge of the non-magnetic substrate 1. It includes a hollow copper tube with circulating cooling water (flow rate 2L / min) and a high-density enameled wire coil. In an alternating magnetic field environment, the copper tube generates eddy current effect, forming a reverse magnetic field to cancel out part of the electromagnetic disturbance. At the same time, the circulating water carries away local heat and slows down thermal deformation. This structure helps to stabilize the coating interface and reduce the stress deformation of the film layer.

[0027] The non-magnetic substrate 1 is made of zirconia ceramic, which has high hardness, high temperature resistance and plasma corrosion resistance. The surface is polished (Ra≤0.1μm) and has a honeycomb microstructure 7 (pore diameter 50μm, depth 20μm, tilt angle 45°), which effectively reduces the adhesion tendency of coating materials in non-working areas, reduces cleaning frequency and scratch risk, and improves the continuous operation capability of the equipment.

[0028] Please see Figures 1-3 The magnetic levitation anti-jamming dot-printing transmission board for BC battery coating process in this embodiment includes a non-magnetic substrate 1; it also includes a permanent magnet array 2 embedded on the surface of the non-magnetic substrate 1, a piezoelectric ceramic actuator 3 disposed on the edge of the non-magnetic substrate 1, a gas distribution cavity 4 integrated inside the non-magnetic substrate 1, and a temperature sensor 5 and a Hall sensor 6 mounted on the surface of the non-magnetic substrate 1.

[0029] In this embodiment, by setting a gas distribution cavity 4 inside the non-magnetic substrate 1 and connecting it to the micro-pore array on the upper surface, the process gas is released uniformly nearby, reducing airflow disturbance and edge accumulation. At the same time, the surface distributed thin-film thermocouple is used to detect the temperature, and combined with the internal silicon carbide heating element, precise temperature control is achieved, thereby improving the uniformity of the film layer and suppressing thermal stress cracking.

[0030] Please see Figures 1-5In this embodiment, to achieve gas release from the distribution cavity within the non-magnetic substrate 1 upwards through the micropore array, closer to the surface of the battery cell, resulting in more uniform gas distribution and reduced edge thick film phenomenon, multiple permanent magnet arrays 2 are provided in this embodiment. The permanent magnet arrays 2 are arranged in an array. The piezoelectric ceramic actuator 3 is electrically connected to the Hall sensor 6 via a signal line. The inlet of the gas distribution cavity 4 is connected to an external gas source (the external gas source provides a mixture of SiH4 and NH3 gas for depositing a silicon nitride antireflection film). The outlet of the gas distribution cavity 4 is connected to the upper surface of the non-magnetic substrate 1. A honeycomb microstructure 7 is provided in the central region of the upper surface of the non-magnetic substrate 1. An electromagnetic damping layer 8 is provided on the side edge of the non-magnetic substrate 1. The electromagnetic damping layer 8 includes a hollow copper tube and an enameled wire wound around the outer wall of the hollow copper tube. Circulating cooling water flows inside the hollow copper tube.

[0031] It should be added that the levitation gap between the permanent magnet array and the external track is 1±0.2mm.

[0032] In this embodiment, the gas distribution cavity 4 is connected to an external gas source to deliver gas to the micro-pore array on the upper surface of the non-magnetic substrate 1, so that the process gas is released uniformly and close to the surface of the battery cell, reducing airflow disturbance and edge thick film phenomenon. The permanent magnet array 2 realizes magnetic levitation transmission and avoids direct contact with the track. The piezoelectric ceramic actuator 3 works with the Hall sensor 6 to adjust the levitation attitude in real time and improve the running stability. The honeycomb microstructure 7 reduces the actual contact area between the battery cell and the bearing surface, reducing the risk of jamming marks. The electromagnetic damping layer 8 suppresses thermal deformation and electromagnetic interference through the circulating cooling water in the hollow copper tube and the externally wound enameled wire. The overall structure improves the coating uniformity and ensures the cleanliness of the battery cell surface.

[0033] It should be noted that the permanent magnet array 2 is composed of multiple neodymium iron boron magnets arranged in an array, with a magnetic energy product of ≥45 MGOe. The piezoelectric ceramic actuator 3 is a ring-shaped thin-film structure with a thickness of 0.5 mm and a response frequency ≥1 kHz. The Hall sensor 6 is a 49E type linear Hall element with a range of ±1 T and a sensitivity of 1.3 mV / T. The gas distribution cavity 4 is a ring-shaped microchannel with a thickness of 0.3 mm. The outlet end of the gas distribution cavity 4 is equipped with a micropore array with a pore diameter of Φ0.5 mm and a density of 100 pores / cm². Column 2 consists of multiple neodymium iron boron magnets with high magnetic energy product, providing a stable magnetic field. It works with the external track to achieve magnetic levitation transmission. The piezoelectric ceramic actuator 3 is a ring-shaped thin sheet structure with small thickness and high response frequency, which can generate rapid micro-deformation under voltage drive. The Hall sensor 6 is a linear element with a wide range and high sensitivity, which can detect changes in magnetic field strength in real time. It works with the piezoelectric ceramic actuator 3 to achieve dynamic adjustment of the levitation gap. The gas distribution cavity 4 is a ring-shaped microchannel through which process gas flows. The outlet end is connected to a micro-pore array with small pore size and high density, which allows the gas to be uniformly released to the upper surface of the non-magnetic substrate 1, improving the uniformity of the coating.

[0034] Please see Figures 1-5 In this embodiment, to ensure a uniform temperature across the entire board surface and prevent film cracking due to temperature differences, the hollow copper tubes in this embodiment have an inner diameter of Φ2mm and are arranged in a ring along the side edge of the non-magnetic substrate 1 with a spacing of 10mm; the enameled wire has a diameter of 0.1mm and a turn density of 20 turns / cm; the circulating cooling water has a flow rate of 2L / min; the temperature sensor 5 is a thin-film thermocouple with an accuracy of ±0.1℃; and the non-magnetic substrate 1 also integrates a silicon carbide heating element.

[0035] In this embodiment, the temperature sensor 5 is a thin-film thermocouple with high accuracy, which detects the surface temperature of the non-magnetic substrate 1 in real time and feeds back the temperature data. The silicon carbide heating element is integrated inside the non-magnetic substrate 1 and heats according to the temperature signal to achieve precise local temperature control. The hollow copper tube has a moderate inner diameter and is arranged along the edge. It is filled with circulating cooling water with a stable flow rate to remove excess heat. The enameled wire has a fine diameter and high turn density and is wound around the outer wall of the copper tube. When energized, it generates a magnetic field to suppress electromagnetic interference. The circulating cooling water and the heating element work together with the temperature sensor 5 to form a thermal management mechanism, which effectively controls the temperature difference on the board surface and prevents stress concentration and cracking of the film layer due to uneven temperature.

[0036] It should be noted that the non-magnetic substrate 1 is made of zirconium oxide ceramic with a thickness of 2 mm and a surface roughness Ra≤0.1 μm. The honeycomb microstructure 7 is formed by laser etching with a pore diameter of 50 μm, a depth of 20 μm, and a pore wall tilt angle of 45°.

[0037] The working principle of the above embodiments is as follows:

[0038] In use, the non-magnetic substrate 1 is made of zirconia ceramic, which has high hardness and high temperature resistance. The surface is polished and has a honeycomb microstructure 7 to reduce the adhesion of coating materials. The permanent magnet array 2 is embedded in the surface of the non-magnetic substrate 1 and generates a magnetic field with the external track to realize the magnetic levitation operation of the transmission plate. The piezoelectric ceramic actuator 3 is set at the edge of the non-magnetic substrate 1 and works with the Hall sensor 6 to detect changes in the magnetic field in real time. The levitation posture is adjusted by deformation to maintain stable operation. The gas distribution cavity 4 is integrated inside the non-magnetic substrate 1 and connected to an external gas source to uniformly release the process gas to the top of the plate through the micro-pore array and coat it close to the surface of the battery cell. The temperature sensor 5 monitors the plate temperature. The silicon carbide heating element heats according to the signal to control the temperature uniformity. The circulating cooling water in the electromagnetic damping layer 8 removes heat. The enameled wire suppresses electromagnetic interference and together stabilizes the coating environment and reduces stress deformation.

[0039] It should be noted that the micropore array is uniformly distributed, covering the central area of ​​the upper surface of the non-magnetic substrate and avoiding the permanent magnet array mounting area; the piezoelectric ceramic actuator 3 is bonded to the edge of the non-magnetic substrate 1 with high-temperature resistant epoxy adhesive to ensure that deformation is effectively transferred to the overall structure; multiple Hall sensors 6 are provided and symmetrically arranged along the edge of the non-magnetic substrate 1 to detect changes in magnetic field in different directions; the silicon carbide heating element is a thin-film heating element, which is integrated into the middle layer inside the non-magnetic substrate 1 through sputtering process; the enameled wire is connected to a controllable power supply, and a reverse current is passed through it in an alternating magnetic field environment to enhance the eddy current suppression effect.

[0040] It should be noted that the control method of this utility model is controlled by a controller. All electrical components, including temperature sensor 5, Hall sensor 6, piezoelectric ceramic actuator 3, silicon carbide heating element and enameled wire in electromagnetic damping layer 8, are led out to external control unit through flexible circuit. The lead wire channel is integrated on the side of non-magnetic substrate 1, which does not affect magnetic levitation operation. The entire transmission plate can run continuously in the vacuum chamber, adapting to the cycle requirements of PECVD equipment. The single cycle time is ≤8 seconds (the controller receives the magnetic field signal of Hall sensor 6 and outputs the driving voltage to piezoelectric ceramic actuator 3 to form a closed loop feedback. This control circuit is a conventional technical means in this field, so it will not be described in detail).

[0041] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0042] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A magnetically levitated anti-jamming dot-printing transmission plate for BC battery coating process, comprising a non-magnetic substrate (1); characterized in that: It also includes a permanent magnet array (2) embedded in the surface of the non-magnetic substrate (1), a piezoelectric ceramic actuator (3) disposed at the edge of the non-magnetic substrate (1), a gas distribution cavity (4) integrated inside the non-magnetic substrate (1), and a temperature sensor (5) and a Hall sensor (6) mounted on the surface of the non-magnetic substrate (1). The permanent magnet array (2) is provided in multiple ways and is arranged in an array. The piezoelectric ceramic actuator (3) is electrically connected to the Hall sensor (6) through a signal line. The inlet of the gas distribution cavity (4) is connected to an external gas source. The outlet of the gas distribution cavity (4) is connected to the upper surface of the non-magnetic substrate (1). The central area of ​​the upper surface of the non-magnetic substrate (1) is provided with a honeycomb microstructure (7). The side edge of the non-magnetic substrate (1) is provided with an electromagnetic damping layer (8). The electromagnetic damping layer (8) includes a hollow copper tube and an enameled wire wound around the outer wall of the hollow copper tube. Circulating cooling water flows through the hollow copper tube.

2. The magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process according to claim 1, characterized in that: The permanent magnet array (2) is composed of multiple neodymium iron boron magnets arranged in an array, and the magnetic energy product of the neodymium iron boron magnets is ≥45MGOe.

3. The magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process according to claim 1, characterized in that: The piezoelectric ceramic actuator (3) is a ring-shaped thin sheet structure with a thickness of 0.5 mm and a response frequency of ≥1 kHz. The Hall sensor (6) is a 49E type linear Hall element with a range of ±1 T and a sensitivity of 1.3 mV / T.

4. A magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process according to claim 1, characterized in that: The gas distribution cavity (4) is an annular microchannel with a thickness of 0.3 mm. The outlet end of the gas distribution cavity (4) is provided with a micropore array with a pore diameter of Φ0.5 mm and a density of 100 pores / cm².

5. A magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process according to claim 1, characterized in that: The non-magnetic substrate (1) is made of zirconium oxide ceramic with a thickness of 2 mm and a surface roughness Ra≤0.1 μm. The honeycomb microstructure (7) is formed by laser etching with a pore diameter of 50 μm, a depth of 20 μm, and a pore wall tilt angle of 45°.

6. A magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process according to claim 1, characterized in that: The hollow copper tube has an inner diameter of Φ2mm and is arranged in a ring along the side edge of the non-magnetic substrate (1) with a spacing of 10mm. The enameled wire has a diameter of 0.1mm and a turn density of 20 turns / cm. The flow rate of the circulating cooling water is 2L / min.

7. A magnetic levitation anti-jamming dot-printing transmission plate for BC battery coating process according to claim 1, characterized in that: The temperature sensor (5) is a thin-film thermocouple with an accuracy of ±0.1℃; the non-magnetic substrate (1) also integrates a silicon carbide heating element.

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