Thin film deposition apparatus

Abstract

The utility model provides a kind of thin film deposition equipment, it is related to the field of coating, thin film deposition equipment includes carrier plate, swing mechanism and synchronous mechanism. Carrier plate is used to place workpiece;Swing mechanism has transport plane, and transport plane can bear carrier plate;Synchronous mechanism includes locking piece, locking piece is detachably connected on carrier plate located on transport plane, to make locking piece can be driven along with carrier plate and swing mechanism and move to and fro in first direction, or separate from carrier plate;First direction is parallel to horizontal direction. Thin film deposition equipment in the utility model embodiment, can reduce the skidding phenomenon of carrier plate in high-speed to and fro movement, and then improve the process stability of thin film deposition.

Description

Technical Field

[0001] This utility model relates to the field of coating, specifically to thin film deposition equipment. Background Technology

[0002] The spatial method involves moving the workpiece so that it receives precursors at different positions, enabling continuous deposition of multilayer thin films. Some techniques use rollers to drive a carrier plate back and forth within a process chamber, allowing the workpiece placed on the carrier plate to deposit the film. However, with high-speed roller-driven reciprocating movement, the carrier plate is prone to slippage relative to the rollers, thus affecting the deposition process. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a thin film deposition apparatus that can reduce slippage of the carrier plate during high-speed reciprocating movement, thereby improving the process stability of thin film deposition.

[0004] A thin film deposition apparatus according to a first aspect embodiment of the present invention includes: Carrier plate, used to place workpieces; The swing mechanism has a transport plane capable of supporting the carrier plate. The synchronization mechanism includes a locking member, which is detachably connected to the carrier plate located on the transport plane, so that the locking member can move the carrier plate back and forth along a first direction with the swing mechanism, or separate from the carrier plate; the first direction is parallel to the horizontal direction.

[0005] The thin film deposition apparatus according to the present invention has at least the following beneficial effects: the carrier plate connected to the locking member can be driven by the locking member and the swing mechanism to move back and forth in the first direction. The locking member can reduce the sliding of the carrier plate relative to the swing mechanism by connecting with the carrier plate, thereby improving the stability of the carrier plate's back and forth movement and improving the process stability of thin film deposition.

[0006] According to some embodiments of the present invention, the synchronization mechanism further includes a movable member, which is capable of reciprocating along the first direction and has a through hole that extends in the vertical direction; The locking member includes a locking rod that extends vertically and passes through the through hole. The carrier plate has locking holes that all extend vertically. The locking rod can extend vertically into the locking hole relative to the moving member to connect with the carrier plate, and can disengage vertically from the locking hole relative to the moving member to separate from the carrier plate.

[0007] According to some embodiments of the present invention, the synchronization mechanism further includes a first driving member, the locking rod has a first position in the first direction, the first driving member is located above the first position, and is detachably connected to the locking rod located at the first position, so that the locking rod is separated from the first driving member and extends downward into the locking hole, or drives the locking rod upward away from the locking hole.

[0008] According to some embodiments of the present invention, the first driving member includes a telescopic rod and a magnetic attractor. The magnetic attractor is connected to the lower end of the telescopic rod, and the lower end of the telescopic rod can move vertically relative to the upper end. The magnetic attractor can magnetically attract the locking rod located at the first position.

[0009] According to some embodiments of the present invention, the synchronization mechanism further includes a second driving member, which includes a fixing part and a driving part. The fixing part is connected to the moving part, and the driving part is connected to the locking rod and can drive the locking rod to move vertically relative to the moving part.

[0010] According to some embodiments of the present invention, the thin film deposition apparatus has a support surface, the support surface is horizontally arranged and supports the moving member, the moving member includes a plurality of teeth, the plurality of teeth are arranged on the side of the moving member opposite to the support surface; The synchronization mechanism further includes a third driving member and a gear, which are arranged along the first direction. The gear is connected to the third driving member and meshes with the teeth of the moving member. The third driving member can drive the gear to rotate about an axis perpendicular to the first direction.

[0011] According to some embodiments of the present invention, the thin film deposition apparatus includes a deposition chamber, the deposition chamber having a deposition cavity, the swing mechanism being housed in the deposition cavity, and the deposition chamber also having an input port located on one side of the swing mechanism in the first direction, and both being in communication with the deposition cavity; On a plane perpendicular to the first direction, the projection of the transport plane is contained within the projection of the contour of the input port.

[0012] According to some embodiments of the present invention, the carrier plate has a downwardly recessed receiving groove for placing the workpiece.

[0013] According to some embodiments of the present invention, the swing mechanism includes a plurality of conveying rollers, which are arranged in parallel and along the first direction, and the tops of the plurality of conveying rollers together form the transport plane.

[0014] According to some embodiments of the present invention, the swing mechanism includes a conveyor belt and two rotating members. The two rotating members are arranged along the first direction, and the rotation axes of the two rotating members are parallel to each other and perpendicular to the first direction and the vertical direction. The conveyor belt is wrapped around the outside of the two rotating members and can move with the rotation of the rotating members. The conveyor belt has the transport plane.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is an overall schematic diagram of a thin film deposition apparatus according to some embodiments of the first aspect of this utility model; Figure 2 for Figure 1 A top view of a thin film deposition equipment; Figure 3 for Figure 2 A cross-sectional view shown at point AA; Figure 4 for Figure 3 A magnified view shown at point C; Figure 5 for Figure 2 A cross-sectional view shown at point BB; Figure 6 for Figure 5 A magnified view shown at point D; Figure 7 for Figure 5 A magnified view shown at point E in the middle; Figure 8 This is a cross-sectional schematic diagram of a thin film deposition apparatus according to some embodiments of the second aspect of this utility model.

[0017] Figure label: Thin film deposition equipment 10; Carrier plate 100, locking hole 110, receiving groove 120; 200 swing mechanism, 210 transport plane, 220 conveyor roller; Synchronization mechanism 300, locking member 310, locking rod 311, moving member 320, through hole 321, first driving member 330, telescopic rod 331, magnetic suction member 332, second driving member 340, fixing part 341, driving part 342, third driving member 350, gear 360; Support surface 400; Deposition chamber 500, deposition chamber 510, inlet 520. Detailed Implementation

[0018] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0019] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0021] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0022] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0023] In existing technologies, spatial deposition methods involve moving the workpiece to different positions. Various precursors at these positions react with substances on the workpiece surface, leading to the formation of a thin film. The speed of film formation is related to the workpiece's moving speed; the faster the workpiece moves, the faster the film forms. However, existing thin film deposition equipment is prone to carrier slippage during high-speed reciprocating movement, causing the carrier to detach from its original position. This prevents the workpiece on the carrier from contacting the precursors, affecting the deposition process.

[0024] In view of this, please refer to Figures 1 to 8 As shown, this utility model proposes a thin film deposition apparatus 10, which is used to deposit a thin film on the surface of a workpiece, and includes a carrier plate 100, a swing mechanism 200 and a synchronization mechanism 300.

[0025] Please refer to Figure 3 , Figure 4 As shown, the carrier plate 100 of this invention is used to place workpieces. The swing mechanism 200 has a transport plane 210, which can support the carrier plate 100. The synchronization mechanism 300 includes a locking member 310, which is detachably connected to the carrier plate 100 located on the transport plane 210, so that the locking member 310 can move back and forth along a first direction with the swing mechanism 200, or separate from the carrier plate 100; the first direction is parallel to the horizontal direction.

[0026] The swing mechanism 200 of this invention can drive the carrier plate 100 to move back and forth along a first direction. When multiple precursors are provided in the first direction, the carrier plate 100 driven by the swing mechanism can also make the workpiece contact the precursors located at different positions in the first direction during its reciprocating movement in the first direction, thereby causing the workpiece to form a thin film. The locking member 310 connected to the carrier plate 100 can work together with the swing mechanism 200 to drive the carrier plate 100 to move back and forth in the first direction, thereby reducing the slippage of the carrier plate 100 relative to the swing mechanism 200, thereby improving the stability of the reciprocating movement of the carrier plate 100 and improving the process stability of thin film deposition.

[0027] After the carrier plate 100 is separated from the locking member 310, the operator can transfer the carrier plate 100 to other equipment for the next process.

[0028] Without departing from the inventive concept of this utility model, those skilled in the art can manually transfer the carrier plate 100 to other equipment for the next process after the workpiece on the carrier plate 100 has been deposited, or they can use existing conveying mechanisms to transfer the carrier plate 100.

[0029] As a preferred option, please refer to Figure 7As shown, in some embodiments, the thin film deposition apparatus 10 includes a deposition chamber 500 having a deposition chamber 510, a swing mechanism 200 being housed in the deposition chamber 510, and the deposition chamber 500 also having an inlet 520 for allowing a carrier plate 100 to pass through, located on one side of the swing mechanism 200 in a first direction and communicating with the deposition chamber 510; on a plane perpendicular to the first direction, the projection of the transport plane 210 is housed within the projection of the outline of the inlet 520.

[0030] The deposition chamber 510 is used to introduce precursors. The swing mechanism 200 housed in the deposition chamber 510 can drive the carrier plate 100 to move back and forth in the deposition chamber 510 along a first direction, thereby contacting different precursors in the deposition chamber 510 to form a thin film. Since the projection of the transport plane 210 on a plane perpendicular to the first direction is contained within the projection of the outline of the inlet 520, the carrier plate 100 located on the transport plane 210 can be sent out from the inlet 520 to the outside by the drive of the swing mechanism 200, realizing the transfer of the carrier plate 100. On the other hand, the carrier plate 100 can also enter the deposition chamber 510 from the inlet 520 through the swing mechanism 200.

[0031] Based on the inventive concept of this utility model, those skilled in the art can additionally add a synchronization mechanism 300 to the existing thin film deposition equipment 10 to reduce the sliding of the carrier plate 100 relative to the oscillation mechanism 200. The above solution can avoid adjusting the structure of the oscillation mechanism 200, further reduce the slippage phenomenon in the existing thin film deposition equipment 10, and improve the process stability of the existing thin film deposition equipment 10.

[0032] Without departing from the inventive concept of this utility model, those skilled in the art can adjust the specific structure of the swing mechanism 200 so that the swing mechanism 200 can drive the carrier plate 100 to move back and forth in the first direction.

[0033] For example, please refer to Figure 3 , Figure 5 , Figure 7 As shown, in some embodiments, the swing mechanism 200 includes multiple conveying rollers 220, which are arranged in parallel and along a first direction. The tops of the multiple conveying rollers 220 together form a transport plane 210. Through the above scheme, the multiple conveying rollers 220 can jointly support the carrier plate 100 and drive the carrier plate 100 to move along the first direction, realizing the reciprocating movement of the carrier plate 100 in the first direction.

[0034] In some embodiments, the oscillating mechanism 200 includes a conveyor belt and two rotating members. The two rotating members are arranged along a first direction, and their rotation axes are parallel to each other and perpendicular to both the first direction and the vertical direction. The conveyor belt is wrapped around the outside of the two rotating members and can move along with the rotation of the rotating members. The conveyor belt has a transport plane 210. With this configuration, the two rotating members drive the conveyor belt to rotate during its rotation, and the carrier plate 100 placed on the transport plane 210 of the conveyor belt can move back and forth along the first direction during the rotation of the conveyor belt.

[0035] Further, please refer to Figure 7 As shown, the carrier plate 100 has a downwardly recessed receiving groove 120 for placing a workpiece. With this design, the workpiece placed in the receiving groove is restrained by the inner wall of the groove during movement, thus moving more stably and synchronously with the carrier plate 100, which is beneficial for improving the process stability of thin film deposition.

[0036] Without departing from the inventive concept of this utility model, those skilled in the art can further adjust the structure of the synchronization mechanism 300 to achieve a detachable connection between the locking member 310 and the carrier plate 100. Exemplarily, in some embodiments, the locking member 310 and the carrier plate 100 are fixed by threaded connection or snap-fit ​​connection.

[0037] As a preferred option, please refer to Figure 4 , Figure 6 As shown, in some embodiments, the synchronization mechanism 300 further includes a movable member 320, which is capable of reciprocating along a first direction and has a through hole 321 extending vertically. The locking member 310 includes a locking rod 311 extending vertically and passing through the through hole 321. The carrier plate 100 has locking holes 110, all extending vertically. The locking rod 311 can extend vertically into the locking hole 110 relative to the movable member 320 to connect with the carrier plate 100, and can disengage vertically from the locking hole 110 relative to the movable member 320 to separate from the carrier plate 100.

[0038] Limited by the inner wall of the through hole 321 in the first direction, the locking rod 311, which passes through the through hole 321, can move along with the moving member 320 in the first direction. Since the locking rod 311 can extend vertically into the locking hole 110 of the carrier plate 100, when the locking rod 311 moves along the first direction with the moving member 320, it can drive the carrier plate 100 to move by abutting against the inner wall of the locking hole 110, thereby causing the locking member 310 and the swing mechanism 200 to jointly drive the carrier plate 100 to move along the first direction. After the locking rod 311 disengages vertically from the locking hole 110, the locking member 310 separates from the carrier plate 100, and the operator can transfer the carrier plate 100 to other equipment for the next process.

[0039] For the specific method of vertical movement of the locking lever 311, please refer to the following as a preferred embodiment. Figure 8 As shown, in some embodiments, the synchronization mechanism 300 further includes a second driving member 340. The second driving member 340 includes a fixed part 341 and a driving part 342. The fixed part 341 is connected to the moving part 320, and the driving part 342 is connected to the locking rod 311 and can drive the locking rod 311 to move vertically relative to the moving part 320. Through this scheme, the second driving member 340 can drive the locking rod 311 connected to the driving part 342 to move vertically relative to the fixed part 341, thereby allowing the locking rod 311 to enter the locking hole 110 vertically and disengage from the locking hole 110. After the locking rod 311 enters the locking hole 110 vertically, the moving part 320 can drive the second driving member 340 to move when moving in the first direction, thereby driving the locking rod 311 and the carrier plate 100 to move in the first direction, thus enabling the locking member 310 and the swing mechanism 200 to jointly drive the carrier plate 100 to move back and forth in the first direction.

[0040] As another preferred option, please refer to Figure 3 , Figure 4 , Figure 6 As shown, where Figure 3 , Figure 4 , Figure 6In some embodiments, the synchronization mechanism 300 further includes a first driving member 330, where the locking rod 311 is located in a first position in a first direction. The first driving member 330 is located above the first position and is detachably connected to the locking rod 311 in the first position, so that the locking rod 311 can separate from the first driving member 330 and extend downward into the locking hole 110, or drive the locking rod 311 upward out of the locking hole 110. With the above scheme, when the locking rod 311 is in the first position and extends into the locking hole 110, the first driving member 330 can be connected to the locking rod 311 and drive the locking rod 311 upward, causing the locking rod 311 to disengage from the locking hole 110 and the locking member 310 to separate from the carrier plate 100. When the locking rod 311 is in the first position, the first driving member 330 can separate from the locking rod 311, the locking rod 311 extends downward in the vertical direction into the locking hole 110, and the moving member 320 can drive the locking rod 311 to move through the inner wall of the through hole 321, thereby driving the carrier plate 100 to move.

[0041] Based on the above embodiments, those skilled in the art can adjust the structure of the first driving member 330 to achieve a detachable connection and drive between the first driving member 330 and the locking rod 311.

[0042] As a preferred option, please refer to Figure 4 , Figure 6 As shown, in some embodiments, the first driving member 330 includes a telescopic rod 331 and a magnetic attractor 332. The magnetic attractor 332 is connected to the lower end of the telescopic rod 331, and the lower end of the telescopic rod 331 can move vertically relative to its upper end. The magnetic attractor 332 can magnetically attract the locking rod 311 located at the first position. With this scheme, when the magnetic attractor 332 and the locking rod 311 are magnetically attracted, the lower end of the telescopic rod 331 can move upward relative to its upper end, thereby causing the locking rod 311 to disengage upward from the locking hole 110, and the locking member 310 to separate from the carrier plate 100. The first driving member 330 can also directly release the magnetic attraction between the magnetic attractor 332 and the locking rod 311, thereby allowing the locking rod 311 to enter the locking hole 110 vertically.

[0043] In some embodiments, the first driving member 330 includes a telescopic rod 331 and a suction cup. The suction cup is connected to the lower end of the telescopic rod 331, and the lower end of the telescopic rod 331 can move vertically relative to its upper end. The magnetic suction member 332 can attract the locking rod 311 located at the first position. With this scheme, when the suction cup attracts the locking rod 311, the lower end of the telescopic rod 331 can move upward relative to its upper end, thereby causing the locking rod 311 to disengage upward from the locking hole 110, and the locking member 310 to separate from the carrier plate 100. The first driving member 330 can also directly release the suction cup, thereby allowing the locking rod 311 to enter the locking hole 110 vertically.

[0044] Without departing from the inventive concept of this utility model, those skilled in the art can further adjust the structure of the moving member 320 to achieve movement along the first direction. In some embodiments, the moving member 320 is connected to a linear motor, which can directly drive the moving member 320 to move along the first direction.

[0045] As a preferred method, please refer to Figure 4 , Figure 6 As shown, where Figure 4 , Figure 6 The teeth of the moving member 320 and the gear 360 are not shown. In some embodiments, the thin film deposition apparatus 10 has a support surface 400, which is horizontally arranged and supports the moving member 320. The moving member 320 includes multiple teeth located on the side of the moving member 320 opposite to the support surface 400. The synchronization mechanism 300 further includes a third drive member 350 and a gear 360, arranged along a first direction. The gear 360 is connected to the third drive member 350 and meshes with the teeth of the moving member 320. The third drive member 350 can drive the gear 360 to rotate about an axis perpendicular to the first direction. Through the above scheme, the gear 360 can be driven by the third drive member 350 to rotate about an axis perpendicular to the first direction, thereby driving the meshing moving member 320 to move along the first direction.

[0046] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A thin film deposition apparatus, characterized in that, include: Carrier plate, used to place workpieces; The swing mechanism has a transport plane capable of supporting the carrier plate. The synchronization mechanism includes a locking member, which is detachably connected to the carrier plate located on the transport plane, so that the locking member can move the carrier plate back and forth along a first direction with the swing mechanism, or separate from the carrier plate; the first direction is parallel to the horizontal direction.

2. The thin film deposition apparatus according to claim 1, characterized in that, The synchronization mechanism further includes a movable component that can move back and forth along the first direction and has a through hole that extends vertically. The locking member includes a locking rod that extends vertically and passes through the through hole. The carrier plate has locking holes that all extend vertically. The locking rod can extend vertically into the locking hole relative to the moving member to connect with the carrier plate, and can disengage vertically from the locking hole relative to the moving member to separate from the carrier plate.

3. The thin film deposition apparatus according to claim 2, characterized in that, The synchronization mechanism further includes a first driving member, the locking rod has a first position in the first direction, the first driving member is located above the first position, and is detachably connected to the locking rod located at the first position, so that the locking rod is separated from the first driving member and extends downward into the locking hole, or drives the locking rod upward away from the locking hole.

4. The thin film deposition apparatus according to claim 3, characterized in that, The first driving component includes a telescopic rod and a magnetic attractor. The magnetic attractor is connected to the lower end of the telescopic rod, and the lower end of the telescopic rod can move vertically relative to the upper end. The magnetic attractor can magnetically attract the locking rod located at the first position.

5. The thin film deposition apparatus according to claim 2, characterized in that, The synchronization mechanism further includes a second driving member, which includes a fixed part and a driving part. The fixed part is connected to the moving part, and the driving part is connected to the locking rod and can drive the locking rod to move vertically relative to the moving part.

6. The thin film deposition apparatus according to claim 2, characterized in that, The thin film deposition apparatus has a support surface, which is horizontally arranged and supports the moving part. The moving part includes a plurality of teeth, which are located on the side of the moving part away from the support surface. The synchronization mechanism further includes a third driving member and a gear, which are arranged along the first direction. The gear is connected to the third driving member and meshes with the teeth of the moving member. The third driving member can drive the gear to rotate about an axis perpendicular to the first direction.

7. The thin film deposition apparatus according to claim 1, characterized in that, The thin film deposition apparatus includes a deposition chamber having a deposition cavity, a swing mechanism being housed in the deposition cavity, and an inlet for the carrier plate to pass through, the inlet being located on one side of the swing mechanism in the first direction and communicating with the deposition cavity. On a plane perpendicular to the first direction, the projection of the transport plane is contained within the projection of the contour of the input port.

8. The thin film deposition apparatus according to claim 1, characterized in that, The carrier plate has a downwardly recessed receiving groove for placing the workpiece.

9. The thin film deposition apparatus according to claim 1, characterized in that, The swing mechanism includes multiple conveying rollers, which are arranged in parallel and along the first direction, and the tops of the multiple conveying rollers together form the transport plane.

10. The thin film deposition apparatus according to claim 1, characterized in that, The swing mechanism includes a conveyor belt and two rotating members. The two rotating members are arranged along the first direction, and the rotation axes of the two rotating members are parallel to each other and perpendicular to the first direction and the vertical direction. The conveyor belt is wrapped around the outside of the two rotating members and can move with the rotation of the rotating members. The conveyor belt has the transport plane.

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