Double sealing structure of evaporation coating cavity

Abstract

The utility model discloses a kind of double sealing structure of evaporation coating cavity, it is related to sealing structure technical field, including overall equipment base, the upper end of overall equipment base is fixedly connected with cavity base, the upper end of cavity base is fixedly connected with hollow sandwich matching outer ring, the inner end of hollow sandwich matching outer ring is clamped with ring-shaped clamping seat, the upper end of ring-shaped clamping seat is fixedly connected with transparent cover body, the upper end of transparent cover body is fixedly connected with reinforcing top plate, the inner and outer ends of ring-shaped clamping seat are both provided with annular groove docking interface, the upper end of the cavity base of the design is fixed hollow sandwich matching outer ring, its inner side wall both sides symmetrically set sealing annular outer matching ring, electric valve mouth is annular equidistant distribution and is communicated with inflatable tight gasbag, gas fills in and makes inflatable tight gasbag swell, its outer side elastic outer layer and annular groove docking interface outer side wall closely adhere, the reinforcing inner layer of inside ensures that gasbag structure is stable, forms first resealing.

Description

Technical Field

[0001] This utility model relates to the field of sealing structure technology, and in particular to a double-sealed structure for an evaporation coating cavity. Background Technology

[0002] In the field of coating technology, the sealing performance of the cavity directly affects the coating quality, material utilization rate, and equipment operational safety. The evaporation coating cavity is the core spatial carrier of the evaporation coating equipment, and its essence is a sealed cavity that can maintain a high vacuum environment. In the evaporation coating process, the cavity reduces the internal gas pressure through a vacuum system, causing the evaporation source (such as metal, compound, etc.) to be heated and evaporated. Under conditions without significant air molecule collisions, gaseous particles can deposit onto the surface of the substrate (such as glass, silicon wafer, metal substrate, etc.) in a linear motion, forming a uniform thin film.

[0003] A vacuum coating apparatus, patent number CN209178468U, relates to the field of vacuum coating technology. This invention includes a coating chamber for a coating machine. A support is fixed to the bottom of the inner wall of the coating chamber, and a lower hemispherical evaporation chamber is fixed to the top of the support. A support clamp is fixed to the inner surface of the lower hemispherical evaporation chamber. A vacuum pump is fixed to the bottom of the inner wall of the coating chamber and is connected to the lower hemispherical evaporation chamber via a vacuum pipe. A lifting mechanism is fixed to the top of the inner wall of the coating chamber. This invention, through its hemispherical evaporation chamber design, allows the substrate workpiece to be loaded first, and then the evaporation chamber to be closed. By setting the target material within the spherical chamber for all-around evaporation coating, the coating is more uniform, and excess evaporated material re-adheres to the target surface, reducing material loss and preventing contamination of the evaporation chamber. This lowers production and equipment maintenance costs and extends the service life of the coating chamber.

[0004] Existing equipment mostly uses rigid mechanical seals, such as flange seals and O-ring seals. Although sealing is achieved by bolting the flanges together, leakage is prone to occur after long-term use due to bolt loosening or sealing ring aging. This risk of seal failure increases significantly, especially under high temperature and high pressure conditions. In addition, the disassembly and maintenance of mechanical seals consumes a lot of time, affecting equipment operating efficiency. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a double-sealed structure for an evaporation coating chamber, thus solving the problems mentioned in the background section.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution: It includes an integral equipment base, with a cavity base fixedly connected to the upper end of the integral equipment base. A hollow sandwich matching outer ring is fixedly connected to the upper end of the cavity base. A ring-shaped seat is engaged at the inner end of the hollow sandwich matching outer ring. A transparent cover is fixedly connected to the upper end of the ring-shaped seat. A reinforcing top plate is fixedly connected to the upper end of the transparent cover. Both the inner and outer ends of the ring-shaped seat have annular groove interfaces. Two sealing annular matching rings are symmetrically fixedly connected to the inner sidewalls of the hollow sandwich matching outer ring. The two sealing annular matching rings are matched with their corresponding annular groove interfaces. An expandable and tight-fitting airbag is fixedly connected to the outer side of the sealing annular matching ring. Two sets of electrical valve ports are fixedly connected inside the hollow sandwich matching outer ring. Corresponding sets of electrical valve ports are arranged in a ring-shaped equidistant arrangement. Multiple electrical valve ports are interconnected with their corresponding expandable and tight-fitting airbags. A drive pump is externally connected to the multiple electrical valve ports via flexible hoses.

[0007] As a further technical solution of this utility model, an electromagnetic inner arc ring is fixedly connected to the inner wall of the annular groove interface, and a metal particle covering surface is fixedly connected to the outer end of the expandable and tight airbag, with a magnetic connection between the metal particle covering surface and the electromagnetic inner arc ring.

[0008] As a further technical solution of this utility model, an elastic outer layer is fixedly connected to the outer wall of the expandable tight airbag, a reinforced inner layer is fixedly connected to the inner wall of the expandable tight airbag, and an electrical control box is fixedly connected to the upper end of the overall equipment base.

[0009] As a further technical solution of this utility model, the power control box is located on the right side of the cavity base, the upper end of the power control box is fixedly connected to the control panel, and the front and rear ends of the cavity base are symmetrically fixedly connected to valve pipes.

[0010] As a further technical solution of this utility model, the end of the valve pipe away from the cavity base is fixedly connected to a connecting pipe, and the control panel is electrically connected to the drive pump, the electric valve port, and the electromagnetic inner arc ring through wires.

[0011] As a further technical solution of this utility model, a hollow maintenance chamber is fixedly connected to the inner end of the overall equipment base, a drive pump is installed inside the hollow maintenance chamber, and a maintenance chamber door is hinged to the front end of the hollow maintenance chamber.

[0012] This invention provides a double-sealed structure for an evaporation coating chamber, which has the following advantages compared with the prior art: 1. The upper end of the cavity base of this design is fixed with a hollow sandwich matching outer ring, and sealing annular matching rings are symmetrically arranged on both sides of its inner sidewall. The ring-shaped bracket engages with the inner end of the hollow sandwich matching outer ring, and the annular groove interface at its inner and outer ends precisely matches the sealing annular matching ring. The transparent cover is fixed to the upper end of the ring-shaped bracket, and the top is reinforced with a top plate to enhance the structural strength, forming the main space of the coating cavity, providing a stable working environment for the coating process. When the sealing structure needs to be activated, the control panel issues a command to drive the pump to deliver gas to the two sets of electrical valve ports inside the hollow sandwich matching outer ring through a hose. The electrical valve ports are distributed in a ring shape at equal intervals and are connected to the expandable tight airbag. The gas fills the expandable tight airbag, and its outer elastic outer layer fits tightly with the outer wall of the annular groove interface, while the inner reinforced inner layer ensures the stability of the airbag structure, forming the first layer of sealing.

[0013] 2. The electromagnetic inner arc ring in this design generates magnetism when energized, attracting the metal particles covering the outer end of the expanded and tightly sealed airbag. This further compresses the airbag within the annular groove interface, enhancing the sealing effect through magnetic force and forming a second seal. This dual sealing mechanism effectively prevents external gases from entering the cavity or causing leakage of internal coating material vapor, ensuring the equipment's sealing performance. During operation, the control panel allows real-time adjustment of the pump's inflation pressure and the electromagnetic inner arc ring's magnetic strength to adapt to the vacuum requirements of different coating processes, enabling the equipment to flexibly handle various working scenarios. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall equipment base structure of this utility model; Figure 2 This is a schematic diagram of the hollow sandwich matching outer ring exploded structure of this utility model; Figure 3 This is a schematic diagram of the partially truncated explosion structure of the expandable compact airbag of this utility model; Figure 4 This is a schematic diagram of the cross-sectional structure of the expandable and compact airbag of this utility model.

[0015] In the diagram: 1. Overall equipment base; 2. Power control box; 3. Cavity base; 4. Connecting pipes; 5. Hollow sandwich matching outer ring; 6. Expandable tight airbag; 7. Ring-shaped seat; 8. Annular groove interface; 9. Transparent cover; 10. Reinforced top plate; 11. Electrical valve port; 12. Metal particle covering surface; 13. Electromagnetic inner arc ring; 14. Drive pump; 15. Control panel; 16. Sealing annular outer matching ring; 17. Elastic outer layer; 18. Reinforced inner layer; 19. Valve pipe; 20. Hollow maintenance inner chamber; 21. Maintenance chamber door. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0017] Please see Figures 1-3 This utility model provides a double-sealed structure technical solution for an evaporation coating cavity: It includes an integral equipment base 1, characterized in that a cavity base 3 is fixedly connected to the upper end of the integral equipment base 1, a hollow sandwich matching outer ring 5 is fixedly connected to the upper end of the cavity base 3, a ring-shaped retainer 7 is engaged at the inner end of the hollow sandwich matching outer ring 5, a transparent cover 9 is fixedly connected to the upper end of the ring-shaped retainer 7, a reinforcing top plate 10 is fixedly connected to the upper end of the transparent cover 9, and an annular groove interface 8 is provided at both the inner and outer ends of the ring-shaped retainer 7. A sealing annular outer matching ring 16 is symmetrically fixedly connected to both sides of the inner wall of 5. The two sealing annular outer matching rings 16 are matched with the corresponding annular groove interface 8. An expandable tight airbag 6 is fixedly connected to the outer side of the sealing annular outer matching ring 16. Two sets of electric valve ports 11 are fixedly connected inside the hollow sandwich matching outer ring 5. The corresponding sets of electric valve ports 11 are arranged in a ring at equal intervals. Multiple electric valve ports 11 are interconnected with the corresponding expandable tight airbag 6. Multiple electric valve ports 11 are connected to a drive pump 14 through a hose.

[0018] Working principle: When the sealing structure needs to be activated, the control panel 15 issues a command to drive the pump 14 to deliver gas through the hose to the two sets of electrical valve ports 11 inside the hollow jacket matching outer ring 5. The electrical valve ports 11 are distributed in a ring at equal intervals and are connected to the expandable tight airbag 6. The gas fills the expandable tight airbag 6, causing it to expand. The outer elastic outer layer 17 of the airbag fits tightly against the outer wall of the annular groove interface 8, and the inner reinforced inner layer 18 ensures the stability of the airbag structure, forming the first layer of sealing.

[0019] Please see Figure 2-3 An electromagnetic inner arc ring 13 is fixedly connected to the inner wall of the annular groove and the outer end of the expandable tight airbag 6 is fixedly connected to a metal particle covering surface 12, and the metal particle covering surface 12 is magnetically connected to the electromagnetic inner arc ring 13.

[0020] Working principle: When the electromagnetic inner arc ring 13 is energized, it generates magnetism, attracting the metal particles covering the outer end of the expandable and compact airbag 6, further pressing the airbag into the annular groove interface 8. The magnetic force enhances the sealing effect, forming a second seal. This double sealing mechanism effectively prevents external gas from entering the cavity or causing vapor leakage of the internal coating material, ensuring the equipment's sealing performance. Please see Figures 3-4 An elastic outer layer 17 is fixedly connected to the outer wall of the expandable tight airbag 6, and a reinforced inner layer 18 is fixedly connected to the inner wall of the expandable tight airbag 6.

[0021] Working principle: The outer elastic outer layer 17 fits tightly against the outer wall of the annular groove interface 8, and the inner reinforced inner layer 18 ensures the stability of the airbag structure. Please see Figure 2 The upper end of the overall equipment base 1 is fixedly connected to the power control box 2, and the upper end of the power control box 2 is fixedly connected to the control panel 15. The front and rear ends of the cavity base 3 are symmetrically fixedly connected to the valve pipes 19. The end of the valve pipe 19 away from the cavity base 3 is fixedly connected to the connecting pipe 4. The control panel 15 is electrically connected to the drive pump 14, the electric valve port 11, and the electromagnetic inner arc ring 13 through wires. The inner end of the overall equipment base 1 is fixedly connected to the hollow maintenance chamber 20. The drive pump 14 is installed in the hollow maintenance chamber 20. The front end of the hollow maintenance chamber 20 is hinged to the maintenance chamber door 21.

[0022] Working principle: During equipment operation, the control panel 15 can adjust the inflation pressure of the drive pump 14 and the magnetic strength of the electromagnetic inner arc ring 13 in real time to adapt to the vacuum requirements of different coating processes, enabling the equipment to flexibly cope with various working scenarios. When maintenance is required, the maintenance chamber door 21, which is hinged at the front end of the overall equipment base 1, can be opened to enter the hollow maintenance chamber 20 to maintain the drive pump 14 installed therein, ensuring the continuous and stable operation of the sealing structure and facilitating the daily maintenance and troubleshooting of the equipment.

[0023] The working principle of this utility model is as follows: The overall equipment base 1 serves as a basic support component, with the upper end fixedly connected to the cavity base 3. The valve pipes 19 at both ends of the cavity base 3 are connected to the connecting pipes 4 for the flow of gas or materials between the cavity and the outside. The power control box 2 is fixed on the right side of the overall equipment base 1, and the control panel 15 at its upper end serves as the electrical control center. It is electrically connected to the drive pump 14, the electric valve port 11, and the electromagnetic inner arc ring 13 through wires to realize the automated control of the sealing structure. The upper end of the cavity base 3 is fixed with a hollow core. The hollow interlayer matching outer ring 5 has symmetrically arranged sealing annular outer matching rings 16 on both sides of its inner sidewall. The annular retainer 7 is engaged with the inner end of the hollow interlayer matching outer ring 5. The annular groove interface 8 at both its inner and outer ends precisely matches the sealing annular outer matching ring 16. The transparent cover 9 is fixed to the upper end of the annular retainer 7. The top is reinforced by a top plate 10 to enhance the structural strength, forming the main space of the coating cavity. When the sealing structure needs to be activated, the control panel 15 issues a command to drive the pump 14 through a hose to the two sets of electric valves inside the hollow interlayer matching outer ring 5. Gas is supplied through port 11. The electric valve ports 11 are equidistantly distributed in a ring and communicate with the expandable and tight-fitting airbag 6. Gas is introduced, causing the expandable and tight-fitting airbag 6 to inflate. The outer elastic outer layer 17 of the airbag fits tightly against the outer wall of the annular groove interface 8. The inner reinforced inner layer 18 ensures the stability of the airbag structure, forming the first layer of sealing. At the same time, the electromagnetic inner arc ring 13 is energized to generate magnetism, attracting the metal particle covering surface 12 at the outer end of the expandable and tight-fitting airbag 6, further pressing the airbag into the annular groove interface 8. This is enhanced by magnetic force. The sealing effect forms a second seal, and the double sealing mechanism effectively prevents external gas from entering the cavity or the internal coating material vapor from leaking. During the operation of the equipment, the control panel 15 can adjust the inflation pressure of the drive pump 14 and the magnetic strength of the electromagnetic inner arc ring 13 in real time to adapt to the vacuum requirements of different coating processes. When maintenance is required, the maintenance chamber door 21, which is hinged at the front end of the overall equipment base 1, can be opened to enter the hollow maintenance chamber 20 to maintain the drive pump 14 installed therein, ensuring that the sealing structure continues to work stably.

[0024] The above are merely preferred embodiments of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model are implemented according to conventional methods in the art, unless otherwise specified or limited.

Claims

1. A double-sealed structure for an evaporation coating chamber, comprising an integral equipment base (1), characterized in that, The upper end of the overall equipment base (1) is fixedly connected to a cavity base (3), and the upper end of the cavity base (3) is fixedly connected to a hollow sandwich matching outer ring (5). The inner end of the hollow sandwich matching outer ring (5) is engaged with a ring-shaped seat (7). The upper end of the ring-shaped seat (7) is fixedly connected to a transparent cover (9), and the upper end of the transparent cover (9) is fixedly connected to a reinforcing top plate (10). Both the inner and outer ends of the ring-shaped seat (7) are provided with annular groove interfaces (8). The inner sidewalls of the hollow sandwich matching outer ring (5) are symmetrically fixedly connected with sealing annular outer rings. Matching ring (16), the two sealing annular matching rings (16) are matched with the corresponding annular groove interface (8), the outer side of the sealing annular matching ring (16) is fixedly connected to an expandable tight airbag (6), the hollow sandwich matching outer ring (5) is fixedly connected to two sets of electrical valve ports (11), the corresponding sets of electrical valve ports (11) are arranged in a ring at equal intervals, the multiple electrical valve ports (11) are interconnected with the corresponding expandable tight airbag (6), and the multiple electrical valve ports (11) are connected to a drive pump (14) through a hose.

2. The double-sealed structure of the evaporation coating chamber according to claim 1, characterized in that, An electromagnetic inner arc ring (13) is fixedly connected to the inner wall of the annular groove interface (8), and a metal particle covering surface (12) is fixedly connected to the outer end of the expandable tight airbag (6). The metal particle covering surface (12) and the electromagnetic inner arc ring (13) are magnetically connected.

3. The double-sealed structure of the evaporation coating chamber according to claim 1, characterized in that, The outer wall of the expandable tight airbag (6) is fixedly connected with an elastic outer layer (17), the inner wall of the expandable tight airbag (6) is fixedly connected with a reinforced inner layer (18), and the upper end of the overall equipment base (1) is fixedly connected with an electrical control box (2).

4. The double-sealed structure of the evaporation coating chamber according to claim 3, characterized in that, The power control box (2) is located on the right side of the cavity base (3). The upper end of the power control box (2) is fixedly connected to the control panel (15), and the front and rear ends of the cavity base (3) are symmetrically fixedly connected to valve pipes (19).

5. The double-sealed structure of the evaporation coating chamber according to claim 4, characterized in that, The valve tube (19) is fixedly connected to a connecting pipe (4) at one end away from the cavity base (3). The control panel (15) is electrically connected to the drive pump (14), the electric valve port (11), and the electromagnetic inner arc ring (13) through wires.

6. The double-sealed structure of the evaporation coating chamber according to claim 1, characterized in that, The inner end of the overall equipment base (1) is fixedly connected to a hollow maintenance compartment (20), the drive pump (14) is installed inside the hollow maintenance compartment (20), and the front end of the hollow maintenance compartment (20) is hinged to a maintenance compartment door (21).

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