Flange device and machining apparatus

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a flange device and a processing device, which can reduce the maintenance cost of the flange device and reduce the risk of damage to the flange device. The flange device comprises a flange body and a blowing pipe. An axial side of the flange body is provided with a sealing surface, and the sealing surface is perpendicular to the axial direction of the flange body. The blowing pipe is arranged around the circumference of the flange body and is connected with the flange body. The blowing pipe is arranged on the outer side of the radial direction of the sealing surface. The blowing pipe is provided with an air inlet and a plurality of air outlets. The air inlet is used for the blowing gas to enter. The plurality of air outlets are arranged at intervals along the circumference of the flange body. The air outlets are arranged on the inner side of the radial direction of the blowing pipe, so as to spray the blowing gas to the sealing surface. Compared with the manual wiping mode of the sealing surface, not only the labor cost is saved, the maintenance cost of the flange device is reduced, but also the damage problem of the sealing surface caused by improper manual operation is avoided, and the sealing performance of the flange device is ensured.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and more particularly to a flange device and processing equipment. Background Technology

[0002] In the semiconductor and photovoltaic industries, the temperatures during processing are generally high. To ensure the long-term stable operation of the equipment, cooling systems are typically installed on the furnace tubes. For example, to ensure the reliability of the sealing surfaces on the furnace tubes, the flanges at the ends of the furnace tubes are forcibly cooled by the cooling system. When the furnace door is opened after the process is complete, any unreacted substances and reaction byproducts remaining in the furnace tubes diffuse to the low-temperature area of ​​the flange, where they condense and crystallize, adhering to its surface and affecting the sealing performance of the flange's sealing surface. To ensure the sealing performance of the flange's sealing surface, related technologies mainly rely on manual periodic maintenance of the flange's sealing surface, such as manually wiping the sealing surface to remove the crystallized layer. This results in high maintenance costs and is prone to damaging the flange's sealing surface. Utility Model Content

[0003] In view of this, embodiments of this application provide a flange device and processing equipment to reduce the maintenance cost of the flange device and reduce the risk of damage to the flange device.

[0004] In a first aspect, one embodiment of this application provides a flange device, which includes: a flange body, a sealing surface on one axial side of the flange body, the sealing surface being perpendicular to the axial direction of the flange body; and a purge pipe, which is arranged circumferentially around the flange body and connected to the flange body, the purge pipe being disposed radially outside the sealing surface, the purge pipe having an inlet and multiple outlets, the inlet for purge gas to enter, the multiple outlets being arranged circumferentially around the flange body at intervals, and the outlets being disposed radially inside the purge pipe to spray purge gas onto the sealing surface.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the purge pipe is annular and arranged circumferentially around the flange body.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the purge tube includes a tube body and a first connector, with an air outlet located on the tube body. The first connector includes a first interface, a second interface, and a third interface. The first interface is connected to one end of the tube body, the second interface is connected to the other end of the tube body, and the third interface forms an air inlet.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the flange device further includes a connecting pipe, one end of which is connected to the air inlet, and the other end of which is used to connect to the air supply device.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the flange device further includes a second joint having a fourth interface and a fifth interface, the other end of the connecting pipe being connected to the fourth interface, and the fifth interface being used for connection to the gas supply device.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the purge pipe includes a pipe body and a connecting lug, with the outlet located on the pipe body and the connecting lug connected to the flange body.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the pipe body is disposed on the side of the flange body with the sealing surface in the axial direction of the flange body; the pipe body is disposed near the outer edge of the flange body, and the connecting lug is disposed on the inner side of the pipe body in the radial direction.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the outer edge of the pipe body is flush with the outer edge of the flange body.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the flange body and the connecting lug are detachably connected by threaded fasteners. The flange body has a first connecting hole through which the threaded fasteners pass, and the connecting lug has a second connecting hole through which the threaded fasteners pass. The second connecting hole is an oblong hole.

[0013] Secondly, one embodiment of this application provides a processing device, including: a furnace tube having a furnace opening; and a flange device disposed at the furnace opening.

[0014] The flange device provided in this embodiment uses a purge pipe arranged circumferentially around the flange body, positioned outside the sealing surface of the flange body. The purge pipe has an inlet and multiple outlets, allowing purge gas to be introduced into the inlet and then ejected from the outlets onto the sealing surface. This purge effectively removes contaminants (such as crystalline layers) from the sealing surface, achieving rapid cleaning. Compared to manual wiping, this method not only eliminates labor costs and reduces maintenance costs, but also avoids damage to the sealing surface caused by improper manual operation, ensuring the sealing performance of the flange device. Attached Figure Description

[0015] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1The image shown is a perspective view of a flange device provided in one embodiment of this application.

[0017] Figure 2 As shown Figure 1 A magnified view of a portion of point A in the middle.

[0018] Figure 3 The image shown is a perspective view of a flange device provided in one embodiment of this application from another angle.

[0019] Figure 4 As shown Figure 3 A magnified view of a section at point B.

[0020] Figure 5 The image shown is a front view of a flange device provided in an embodiment of this application.

[0021] Figure 6 The diagram shown is a schematic diagram of the connection structure between the flange body and the purge pipe in a flange device provided in an embodiment of this application.

[0022] Figure 7 yes Figure 6 A magnified view of a section at point C.

[0023] Figure label: 10. Flange assembly; 1. Flange body; 11. Sealing surface; 12. First connection hole; 2. Purge pipe; 21. Pipe body; 211. Air inlet; 212. Air outlet; 213. First pipe opening; 214. Second pipe opening; 22. First connector; 221. First interface; 222. Second interface; 223. Third interface; 23. Connecting lug; 231. Second connecting hole; 3. Connecting pipe; 4. Second connector; 5. Liquid inlet connector; 6. Liquid outlet connector. Detailed Implementation

[0024] During the processing of boron, such as in a boron diffusion process, the temperature inside the diffusion furnace can reach approximately 900°C. The diffusion furnace typically has sealing surfaces, for example, on the furnace opening flange. To ensure the sealing performance of these surfaces, liquid cooling channels are installed on the furnace opening flange. Cooling media is circulated into these channels to cool and dissipate heat from the furnace opening flange, protecting its sealing surface. During the cooling and unloading phase after the boron diffusion process, when the furnace door is opened, residual boron-carrying gases and reaction byproducts inside the furnace react with incoming air. Since the surface temperature of the furnace opening flange with the liquid cooling channels is much lower than the internal temperature of the diffusion furnace, the residual boron-carrying gases and reaction byproducts diffuse into the area of ​​the furnace opening flange with the liquid cooling channels, condensing and crystallizing on the surface of the furnace opening flange, forming a crystalline layer.

[0025] In related technologies, the main solution to this crystallization problem is to regularly perform manual cleaning and maintenance on the furnace flange. This involves on-site maintenance personnel frequently using tools to manually wipe the surface of the furnace flange to remove the crystallized layer, thereby ensuring the cleanliness of the flange sealing surface and guaranteeing the reliability of the seal in the next process. This results in high maintenance costs for the furnace flange, and manual wiping can easily damage the sealing surface. Furthermore, manual wiping of the furnace flange can easily lead to incomplete cleaning, affecting the sealing performance of the processing equipment and resulting in a low yield of products processed by the equipment.

[0026] To solve the above problems, this application provides a purge pipe that is arranged around the circumference of the flange body. The purge pipe has an inlet and multiple outlets. Purge gas is introduced into the purge pipe through the inlet and sprayed out from the outlets of the purge pipe onto the sealing surface, effectively removing residual contamination areas on the sealing surface and achieving rapid cleaning of the sealing surface.

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0028] Figure 1 The image shown is a perspective view of a flange device 10 provided in one embodiment of this application. Figure 2 As shown Figure 1 A magnified view of a portion of point A in the middle. Figure 3 The image shown is a perspective view of the flange device 10 provided in one embodiment of this application from another angle. Figure 4 As shown Figure 3 A magnified view of a section at point B.

[0029] like Figures 1 to 4 As shown, the flange assembly 10 includes a flange body 1 and a purge pipe 2. A sealing surface 11 is provided on one axial side of the flange body 1, perpendicular to the axial direction of the flange body 1. The purge pipe 2 is arranged circumferentially around and connected to the flange body 1, and is located radially outside the sealing surface 11. The purge pipe 2 has an inlet 211 and multiple outlets 212. The inlet 211 allows purge gas to enter, and the multiple outlets 212 are arranged at intervals circumferentially around the flange body 1. The outlets 212 are located radially inside the purge pipe 2 to spray purge gas onto the sealing surface 11.

[0030] The flange device 10 can be used to connect pipes or seal pipes, and it can also be used to connect equipment or seal equipment.

[0031] In this context, on a plane perpendicular to the axis of the flange body 1, the side closer to the axis of the flange body 1 is the inner side, and the side farther from the axis of the flange body 1 is the outer side. The purge pipe 2 being located radially outside the sealing surface 11 means that, on a plane perpendicular to the axis of the flange body 1, the purge pipe 2 is farther from the axis of the flange body 1 relative to the sealing surface 11.

[0032] The flange device 10 of this application embodiment uses a purge pipe 2 arranged circumferentially around the flange body 1, with the purge pipe 2 positioned radially outside the sealing surface 11 of the flange body 1. The purge pipe 2 has an inlet 211 and multiple outlets 212. When purge gas is introduced into the inlet 211 of the purge pipe 2, the purge gas can be ejected from the outlets 212 to the sealing surface 11, thus purging the sealing surface 11 of the flange body 1 and removing contaminants (such as a crystalline layer) from the surface of the sealing surface 11, achieving rapid cleaning of the sealing surface 11. Compared with manually wiping the sealing surface 11, this method not only saves labor costs and reduces the maintenance cost of the flange device 10, but also avoids damage to the sealing surface 11 caused by improper manual operation, ensuring the sealing performance of the flange device 10.

[0033] For example, the purging gas can be nitrogen, helium, or other inert gases to avoid the purging gas reacting with the material on the sealing surface 11.

[0034] For example, the sealing surface 11 is provided with a sealing ring. For instance, the sealing surface 11 is provided with a sealing ring groove, and the sealing ring engages with the sealing ring groove.

[0035] Figure 5 The image shown is a front view of a flange device 10 provided in an embodiment of this application. Figure 6The diagram shown is a schematic diagram of the connection structure between the flange body and the purge pipe in a flange device provided in an embodiment of this application. Figure 7 yes Figure 6 A magnified view of a section at point C.

[0036] In some embodiments, such as Figure 1 , Figure 3 , Figure 5 and Figure 6 As shown, the purge pipe 2 is annular and is arranged circumferentially around the flange body 1.

[0037] For example, the flange body 1 is annular, the purge pipe 2 is annular, and the center of the purge pipe 2 coincides with the center of the flange body 1.

[0038] By setting the purge pipe 2 as an annular structure, when the purge gas is ejected from multiple outlet holes, an annular air curtain can be formed and the sealing surface 11 of the flange body 1 can be purged, thereby achieving effective purging of all parts of the sealing surface 11, improving the cleaning effect of the sealing surface 11 of the flange body 1, and helping to improve the sealing performance of the flange device 10.

[0039] For example, multiple vent holes are evenly arranged at circumferential intervals along the flange body 1.

[0040] By arranging multiple air outlets evenly at intervals along the circumference of the flange body 1, the annular air curtain formed when the purging gas is ejected from the multiple air outlets is more uniform, so that the purging effect of the annular air curtain on the sealing surface 11 is more consistent, thereby further improving the cleaning effect of the sealing surface 11 of the flange body 1 and improving the sealing performance of the flange device 10.

[0041] In some embodiments, such as Figure 2 , Figure 3 and Figure 5 As shown, the purge pipe 2 includes a pipe body 21 and a first connector 22, with an air outlet 212 disposed on the pipe body 21. The first connector 22 includes a first interface 221, a second interface 222 and a third interface 223. The first interface 221 is connected to one end of the pipe body 21, the second interface 222 is connected to the other end of the pipe body 21, and the third interface 223 forms an air inlet 211.

[0042] For example, such as Figure 2As shown, the tube body 21 has a first port 213 and a second port 214. The first interface 221 is connected to the first port 213 of the tube body 21, and the second interface 222 is connected to the second port 214 of the tube body 21. In actual use, the purge gas enters the purge tube 2 through the third interface 223, and then splits into two paths in the first connector 22. One path enters the tube body 21 through the first interface 221, and the other path enters the tube body 21 through the second interface 222, realizing the split input of the purge gas in the purge tube 2. The two purge gases will cross-mix inside the tube body 21 to ensure that the purge gas can be evenly distributed in the tube body 21 and that the pressure of the purge gas in the tube body 21 is balanced.

[0043] By setting the purge pipe 2 to the above structure, it is only necessary to bend the pipe body 21 and connect the first port and the second port of the pipe body 21 to the first interface 221 and the second interface 222 of the first connector 22, which facilitates the processing and manufacturing of the purge pipe 2 and helps to reduce the cost of the flange device 10.

[0044] For example, the first connector 22 is a compression fitting tee connector to improve the sealing at the connection between the pipe body 21 and the first connector 22 and prevent the purging gas from leaking at the connection between the pipe body 21 and the first connector 22.

[0045] In some embodiments, such as Figure 1 , Figure 3 and Figure 5 As shown, the flange device 10 also includes a connecting pipe 3, one end of which is connected to the air inlet 211, and the other end of which is used to connect to the air supply device.

[0046] The other end of the connecting pipe 3 can be directly connected to the gas supply device, or it can be connected to the gas supply device through a gas supply pipeline. The gas supply device can be a gas cylinder that provides purging gas.

[0047] By setting the connecting pipe 3, the purge pipe 2 can be connected to the gas supply device, so that even when the flange device 10 is far away from the gas supply device, the purge pipe 2 can still be connected to the gas supply device through the connecting pipe 3, thus providing convenience for the assembly of the flange device 10.

[0048] In some embodiments, the connecting pipe 3 is a flexible pipe.

[0049] For example, the connecting pipe 3 is a corrugated pipe.

[0050] By making the connecting pipe 3 a flexible pipe, the connecting pipe 3 can be bent and deformed when connected to the gas supply device to avoid other equipment, making it easier to connect the connecting pipe 3 to the gas supply device, thereby facilitating the installation of the flange device 10.

[0051] In some embodiments, such as Figure 1 , Figure 3 and Figure 5 As shown, the flange device 10 also includes a second connector 4, which has a fourth interface and a fifth interface. The other end of the connecting pipe 3 is connected to the fourth interface, and the fifth interface is used to connect to the gas supply device.

[0052] By setting the fifth connector, it is possible to connect to the gas supply device, which further facilitates the connection between the connecting pipe 3 and the gas supply device, and further facilitates the installation of the flange device 10.

[0053] For example, the second connector 4 is a compression fitting straight connector to improve the sealing at the connection between the connecting pipe 3 and the second connector 4 and the connection between the second connector 4 and the gas supply device, and to prevent the purging gas from leaking at the connection between the connecting pipe 3 and the second connector 4 and the connection between the second connector 4 and the gas supply device.

[0054] In some embodiments, such as Figure 2 , Figures 4 to 7 As shown, the purge pipe 2 includes a pipe body 21 and a connecting lug 23. The air outlet 212 is located on the pipe body 21, and the connecting lug 23 is connected to the flange body 1.

[0055] By providing a connecting lug 23 on the pipe body 21 and connecting it to the flange body 1, the connection and fixation of the purge pipe 2 and the flange body 1 are facilitated, thereby facilitating the assembly of the flange device 10 and reducing the cost of the flange device 10.

[0056] In other embodiments, a snap-fit ​​interface may also be provided on the flange body 1, and the pipe body 21 may be snapped into the snap-fit ​​interface.

[0057] In some embodiments, such as Figures 3 to 7 As shown, in the axial direction of the flange body 1, the pipe body 21 is disposed on the side of the flange body 1 where the sealing surface 11 is provided. The pipe body 21 is disposed near the outer edge of the flange body 1, and the connecting lug 23 is disposed on the radial inner side of the pipe body 21.

[0058] For example, the flange body 1 has a first side and a second side disposed opposite to each other along its axial direction, and the sealing surface 11 and the pipe body 21 are both disposed on the first side.

[0059] By setting the pipe body 21 and the sealing surface 11 on the same axial side of the flange body 1, and setting the connecting lug 23 on the inner radial side of the pipe body 21, the purging gas ejected from the outlet 212 of the pipe body 21 can purge a larger area of ​​the side of the flange body 1 with the sealing surface 11, further improving the cleaning effect of the sealing surface 11 of the flange body 1, which is beneficial to improving the sealing performance of the flange device 10.

[0060] In some embodiments, such as Figure 3 , Figure 5 and Figure 6 As shown, the outer edge of the pipe body 21 is flush with the outer edge of the flange body 1.

[0061] By setting the outer edge of the pipe body 21 to be flush with the outer edge of the flange body 1, a larger area of ​​the side of the flange body 1 with the sealing surface 11 can be purged, further improving the cleaning effect of the sealing surface 11 of the flange body 1, which is conducive to improving the sealing performance of the flange device 10.

[0062] In some embodiments, such as Figure 2 and Figure 4 As shown, the flange body 1 and the connecting lug 23 are detachably connected by threaded fasteners. The flange body 1 is provided with a first connecting hole 12 for the threaded fasteners to pass through, and the connecting lug 23 is provided with a second connecting hole 231 for the threaded fasteners to pass through. The second connecting hole 231 is an oblong hole.

[0063] For example, the flange body 1 and the connecting lug 23 are detachably connected by bolts. The second connecting hole 231 is an oblong hole extending radially along the flange body 1.

[0064] By detachably connecting the flange body 1 to the connecting lug 23, the replacement and maintenance of the purge pipe 2 are facilitated. By designing the second connecting hole 231 as an oblong hole, even if there is a deviation in the relative position between the second connecting hole 231 and the first connecting hole 12 from the design, it is ensured that the second connecting hole 231 can still align with the first connecting hole 12, allowing threaded fasteners to pass through the first connecting hole 12 and the second connecting hole 231 sequentially, thus achieving the connection and fixation between the connecting lug 23 and the flange body 1. This reduces the assembly precision required between the purge pipe 2 and the flange body 1, further reducing the cost of the flange device 10.

[0065] For example, there are multiple connecting ears 23, which are evenly spaced along the circumference of the flange body 1. Correspondingly, there are also multiple first connecting holes 12 and second connecting holes 231, which correspond one-to-one, so that the purge pipe 2 is connected to the flange body 1 through multiple connecting ears 23, thereby improving the connection reliability between the purge pipe 2 and the flange body 1.

[0066] In some embodiments, the flange body 1 has a cooling channel inside, and a liquid inlet and a liquid outlet are provided on the outer circumferential surface of the flange body 1, both of which are connected to the cooling channel. A liquid inlet connector 5 is connected to the liquid inlet, and a liquid outlet connector 6 is connected to the liquid outlet.

[0067] In this embodiment of the flange device 10, the flange body 1 serves as the structural foundation for fixing and installing the purge pipe 2, and also bears the mechanical stress during the process. The purge gas ejected from the outlet on the inner side of the purge pipe 2 forms a uniform annular air curtain, which is used to purge the sealing surface 11 of the flange body 1, removing contaminants and cooling the surface of the flange body 1. By making the purge pipe 2 annular, the purge gas entering the purge pipe 2 is diverted to both ends of the pipe body 21, ensuring uniform distribution of the purge gas within the pipe body 21 and pressure balance within the pipe body 21, thereby improving the cleaning effect of the purge gas on all parts of the sealing surface 11.

[0068] The flange device 10 embodiment of this application has been described in detail above, and the processing equipment embodiment of this application is described in detail below. It should be understood that the description of the flange device 10 embodiment corresponds to the description of the processing equipment embodiment; therefore, any parts not described in detail can be referred to the flange device 10 embodiment.

[0069] The processing equipment includes a furnace tube and a flange device 10 as mentioned in any of the above embodiments. The furnace tube has a furnace opening, and the flange device 10 is disposed at the furnace opening.

[0070] For example, the processing equipment can be a boron diffusion apparatus for diffusing boron into the sheet. The sheet may include components or raw materials used to form photovoltaic modules. For example, the sheet may be a silicon wafer, a solar cell, a silicon wafer, etc.

[0071] The processing equipment of this application embodiment, by providing a purge pipe 2 on the flange device 10, allows the purge gas to be sprayed from the outlet 212 of the purge pipe 2 to the sealing surface 11 when purge gas is introduced into the inlet 211 of the purge pipe 2. This purge gas effectively removes contaminants from the sealing surface 11, achieving rapid cleaning of the sealing surface 11. This not only saves labor costs and reduces the maintenance cost of the flange device 10, but also avoids damage to the sealing surface 11 caused by improper manual operation, ensuring the sealing performance of the flange device 10.

[0072] In some embodiments, the processing equipment further includes a furnace door for sealing the furnace opening. The furnace opening is provided with an inner flange and an outer flange. When the furnace door is closed, the outer flange is disposed between the inner flange and the furnace door, and the outer flange is connected to the furnace door.

[0073] For example, the outer flange adopts the flange device 10 of the present application embodiment, and the sealing surface 11 of the outer flange is disposed on the side of the outer flange facing away from the furnace door. The inner flange adopts the flange device 10 of the present application embodiment, and the sealing surface 11 of the inner flange is disposed on the side of the inner flange facing the furnace door.

[0074] For example, the processing equipment is a boron diffusion device. After the boron diffusion process is completed, when the furnace door is opened, the gas supply device introduces purging gas into the flange device 10 through the second connector 4 and the connecting pipe 3. After being diverted by the first connector 22, the purging gas simultaneously enters both ends of the purging pipe 2. The purging gas flows inside the purging pipe 2 and is evenly sprayed out from multiple air outlets on the inner side, forming an annular air curtain. This annular air curtain directly purifies the sealing surface 11 of the flange body 1, effectively removing residual dust, steam, or heat from the surface of the flange body 1, achieving rapid cleaning or cooling of the flange device 10.

[0075] The flange device 10 and processing equipment in this application embodiment use a purging method to clean contaminants on the surface of the flange device 10, replacing traditional manual cleaning. This avoids damage to the flange device 10 caused by manual wiping, extends its service life, and also extends its maintenance cycle, for example, from several days to more than one month. By covering the surface of the flange body 1 with an annular air curtain without dead angles, the adhesion of crystalline layer contaminants is prevented from the source, eliminating sealing failure caused by the crystalline layer and improving the product yield of the processing equipment.

[0076] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0077] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0078] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0079] The above description of the disclosed parts is provided to enable any person skilled in the art to make or use this application. Various modifications to these parts will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other parts without departing from the scope of this application. Therefore, this application is not intended to be limited to the parts shown herein, but rather to be applied within the widest scope consistent with the principles and novel features disclosed herein.

[0080] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary parts and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A flange device, characterized in that, include: A flange body, wherein a sealing surface is provided on one axial side of the flange body, and the sealing surface is perpendicular to the axial direction of the flange body; A purge pipe is provided, which is circumferentially arranged around and connected to the flange body. The purge pipe is located radially outside the sealing surface. The purge pipe has an inlet and multiple outlets. The inlet is for purge gas to enter, and the multiple outlets are arranged circumferentially at intervals along the flange body. The outlets are located radially inside the purge pipe to spray purge gas onto the sealing surface.

2. The flange device according to claim 1, characterized in that, The purge pipe is annular and is arranged circumferentially around the flange body.

3. The flange device according to claim 2, characterized in that, The purge tube includes a tube body and a first connector. The air outlet is disposed on the tube body. The first connector includes a first interface, a second interface and a third interface. The first interface is connected to one end of the tube body, the second interface is connected to the other end of the tube body, and the third interface forms the air inlet.

4. The flange device according to claim 1, characterized in that, The flange device also includes a connecting pipe, one end of which is connected to the air inlet, and the other end of which is used to connect to the air supply device.

5. The flange device according to claim 4, characterized in that, The flange device further includes a second connector having a fourth interface and a fifth interface, the other end of the connecting pipe being connected to the fourth interface, and the fifth interface being used to connect to a gas supply device.

6. The flange device according to claim 1, characterized in that, The purge pipe includes a pipe body and a connecting lug, the air outlet is disposed on the pipe body, and the connecting lug is connected to the flange body.

7. The flange device according to claim 6, characterized in that, In the axial direction of the flange body, the pipe body is disposed on the side of the flange body where the sealing surface is provided; The pipe body is located near the outer edge of the flange body, and the connecting lug is located on the radial inner side of the pipe body.

8. The flange device according to claim 7, characterized in that, The outer edge of the pipe body is flush with the outer edge of the flange body.

9. The flange device according to claim 6, characterized in that, The flange body and the connecting lug are detachably connected by threaded fasteners. The flange body has a first connecting hole through which the threaded fasteners pass, and the connecting lug has a second connecting hole through which the threaded fasteners pass. The second connecting hole is an oblong hole.

10. A processing device, characterized in that, include: Furnace tube, the furnace tube having a furnace opening; A flange device, wherein the flange device is any one of claims 1-9, and the flange device is disposed at the furnace opening.

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