Pipe connection assembly and semiconductor process equipment

Abstract

The utility model belongs to the technical field of semiconductor process equipment, specifically discloses a pipe connecting assembly and semiconductor process equipment, pipe connecting assembly includes fixed sleeve, first sealing ring, intermediate ring, second sealing ring and pressure structure that abut in proper order, pressure structure is configured for providing the force that will first sealing ring, intermediate ring, second sealing ring are pressed in the second end of fixed sleeve, to make first sealing ring and second sealing ring utilize deformation and press tightly on the air inlet pipe. The utility model provides a pipe connecting assembly, and the air inlet pipe forms the support point at first sealing ring and second sealing ring, and the air inlet pipe can keep good positional stability relative to the fixed sleeve through the support of two support points, which is favorable to reduce the vibration amplitude of the air inlet pipe relative to the fixed sleeve due to the fluctuation of the inlet airflow.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process equipment technology, and in particular to a tube connection component and semiconductor process equipment. Background Technology

[0002] Semiconductor process equipment is the core equipment used for processes such as oxidation, annealing, or thin film deposition on wafers, including oxidation and annealing equipment and thin film deposition equipment. The process chamber of semiconductor process equipment receives process gases through inlet pipes.

[0003] In related technologies, the intake pipe is typically mounted on semiconductor process equipment via a pipe connection assembly. When process gas is introduced into the intake pipe, the airflow within the pipe fluctuates, causing the intake pipe to vibrate. Over time, this vibration can loosen the pipe connection assembly. When the connection is loose, the intake pipe may deviate from its original position within the process chamber due to vibration, affecting the uniform distribution of process gas within the chamber and consequently impacting the consistency of wafers processed in different batches. Furthermore, if the intake pipe deviates significantly from its original position within the process chamber, it may interfere with the wafer and the wafer within the chamber. Utility Model Content

[0004] One objective of this invention is to provide a pipe connection assembly that helps reduce the vibration amplitude of the intake pipe caused by fluctuations in the incoming airflow, thereby reducing the risk of loose connections.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A pipe connection assembly is provided, configured for connecting an inlet pipe for introducing process gas into a reaction chamber of a process cavity, wherein the outlet end of the inlet pipe extends into the reaction chamber. The pipe connection assembly includes a fixed sleeve, a first sealing ring, an intermediate ring, a second sealing ring, and a clamping structure that are sequentially abutted against each other.

[0007] The fixed sleeve, the first sealing ring, the intermediate ring, and the second sealing ring are all configured to be sleeved on the air inlet pipe, and the fixed sleeve is connected to the process chamber, with the first end of the fixed sleeve communicating with the reaction chamber of the process chamber.

[0008] The clamping structure is connected to the second end of the fixed sleeve, and the clamping structure is configured to provide a force to press the first sealing ring, the intermediate ring, and the second sealing ring onto the second end of the fixed sleeve, so that the first sealing ring and the second sealing ring are pressed onto the intake pipe by deformation.

[0009] Optionally, the second end of the fixing sleeve is provided with a first concave annular surface, which abuts against the first sealing ring;

[0010] The first end of the intermediate ring is provided with a second concave annular surface, and the second end of the intermediate ring is provided with a third concave annular surface. The second concave annular surface abuts against the first sealing ring, and the third concave annular surface abuts against the second sealing ring.

[0011] The clamping structure has a fourth concave annular surface, which abuts against the second sealing ring.

[0012] Optionally, the clamping structure is threadedly connected to the second end of the fixing sleeve.

[0013] Optionally, the clamping structure includes:

[0014] The pipe fitting includes a first pipe section and a second pipe section connected to each other. The outer diameter of the first pipe section is larger than the outer diameter of the second pipe section, and an annular platform is formed between the outer peripheral surfaces of the first pipe section and the outer peripheral surfaces of the second pipe section. The first pipe section is configured to be fitted onto the intake pipe, and the end of the first pipe section abuts against the second sealing ring.

[0015] A first compression sleeve is fitted onto the first pipe section, the second sealing ring, the intermediate ring, the first sealing ring, and the fixed sleeve. The first end of the first compression sleeve is threadedly connected to the fixed sleeve. A pressure ring portion is protruding on the inner circumferential surface of the second end of the first compression sleeve. The pressure ring portion abuts against the annular platform surface and is configured to provide a force for the first pipe section to press the second sealing ring against the fixed sleeve.

[0016] Optionally, the first end of the intermediate ring abuts against the second end of the fixed sleeve, and the second end of the intermediate ring abuts against the end of the first pipe segment.

[0017] Optionally, the pipe fitting further includes a third pipe section, the outer diameter of which is smaller than that of the second pipe section, and the third pipe section is configured to connect to a gas source pipe.

[0018] Optionally, the clamping structure further includes a second clamping sleeve, which is sleeved on the second pipe section and threadedly connected to at least a portion of the second pipe section, and one end of the second clamping sleeve abuts against the second end of the first clamping sleeve.

[0019] Optionally, a first gap is formed between the inner circumferential surface of the fixed sleeve and the outer circumferential surface of the air intake pipe, and a second gap is formed between the inner circumferential surface of the intermediate ring and the outer circumferential surface of the air intake pipe, and a lever fulcrum is formed between the fixed sleeve and the air intake pipe.

[0020] The pipe connection assembly further includes an adjusting member connected to the clamping structure, the adjusting member abutting against the intermediate ring radially, and the adjusting member being configured to be radially adjustable along the intermediate ring to adjust the deflection angle of the intake pipe relative to the lever arm fulcrum by means of the deformation of the first sealing ring and the second sealing ring.

[0021] Optionally, a limiting ring is protruding on the inner circumferential surface of the fixed sleeve, the inner diameter of the limiting ring being larger than the outer diameter of the air intake pipe, and the fixed sleeve and the air intake pipe forming the lever arm fulcrum on the limiting ring.

[0022] Another objective of this utility model is to provide a semiconductor process apparatus, comprising: a process chamber, an air inlet pipe, and a pipe connection assembly as described in any one of the above, wherein the air inlet pipe is disposed on the process chamber via the pipe connection assembly.

[0023] Optionally, the process chamber includes a chamber body and a manifold located at the bottom of the chamber body. The chamber body has a reaction chamber, and the manifold is connected to the reaction chamber. The manifold has a perforation around its periphery. The first end of the fixing sleeve of the pipe connection assembly is fixedly connected to the manifold, and the fixing sleeve is connected to the perforation. The outlet end of the air inlet pipe extends into the reaction chamber, and the inlet end of the air inlet pipe is provided with the fixing sleeve of the pipe connection assembly, a first sealing ring, an intermediate ring, and a second sealing ring.

[0024] The beneficial effects of this utility model are as follows: When the fixed sleeve, first sealing ring, intermediate ring, and second sealing ring are fitted onto the inlet pipe, the clamping structure presses the first sealing ring, intermediate ring, and second sealing ring onto the second end of the fixed sleeve. This causes the first and second sealing rings to deform and press against the inlet pipe, thus creating support points for the inlet pipe at both the first and second sealing rings. When the fixed sleeve is connected to the process chamber, with its first end communicating with the reaction chamber of the process chamber, and the outlet end of the inlet pipe extending into the reaction chamber, the inlet pipe maintains good positional stability relative to the fixed sleeve through the support of the two support points. This helps reduce the vibration amplitude of the inlet pipe relative to the fixed sleeve caused by airflow fluctuations, reducing the risk of loosening of the connection between the clamping structure and the fixed sleeve. This further reduces the risk of the inlet pipe deviating from its original position within the reaction chamber and the risk of interference with objects within the reaction chamber (such as crystal boats and wafers), ensuring a good and consistent distribution of process gas within the reaction chamber and ensuring good consistency among wafers processed in different batches. In addition, the clamping structure is connected to the second end of the fixed sleeve, which facilitates assembly and provides stable pressure for the first sealing ring, the intermediate ring and the second sealing ring to be pressed against the second end of the fixed sleeve.

[0025] The semiconductor process equipment provided by this utility model has an air inlet pipe mounted on the process cavity via a pipe connection assembly. This helps to reduce the vibration amplitude of the air inlet pipe relative to the fixed sleeve due to airflow fluctuations, reduces the risk of loosening of the pipe connection assembly, and further reduces the risk of the air inlet pipe deviating from its original position within the process cavity and the risk of interference with objects within the process cavity (such as crystal boats and wafers). This ensures a good and consistent distribution of process gases within the process cavity, resulting in good consistency among wafers processed in different batches. Attached Figure Description

[0026] Figure 1 This is an exploded view of the pipe connection assembly with an air source pipe and an air inlet pipe provided by this utility model.

[0027] Figure 2 This is a schematic diagram of the pipe connection assembly with an air intake pipe installed according to the present invention;

[0028] Figure 3 This utility model provides Figure 2 Sectional view at EE;

[0029] Figure 4 This utility model provides Figure 3 Enlarged view of the structure at point A in the diagram;

[0030] Figure 5 This is a schematic diagram of the structure of the semiconductor process equipment provided by this utility model;

[0031] Figure 6 This is a schematic diagram of the structure of the air intake pipe provided by this utility model;

[0032] Figure 7 This is a schematic diagram of the pipe connector provided by this utility model;

[0033] Figure 8 This is a schematic diagram of the structure of the first clamping sleeve provided by this utility model;

[0034] Figure 9 This is a schematic diagram of the structure of the manifold with an intake pipe provided by this utility model.

[0035] In the picture:

[0036] 10. Pipe connection assembly; 20. Process chamber; 21. Chamber body; 22. Manifold; 23. Exhaust pipe; 30. Intake pipe; 31. Intake pipe section; 32. Exhaust pipe section; 40. Air source pipe;

[0037] 100. Fixed sleeve; 110. First concave annular surface; 120. Limiting ring portion;

[0038] 200. First sealing ring;

[0039] 300, intermediate ring; 310, second concave annular surface; 320, third concave annular surface;

[0040] 400. Second sealing ring;

[0041] 500, clamping structure; 501, fourth concave annular surface; 510, pipe joint; 511, first pipe section; 512, second pipe section; 513, annular platform; 514, third pipe section; 520, first clamping sleeve; 521, clamping ring part; 522, adjusting hole; 530, second clamping sleeve;

[0042] 600. Adjustment components. Detailed Implementation

[0043] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0044] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0045] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0046] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0047] like Figures 1 to 5As shown, this utility model provides a pipe connection assembly 10, which is configured to connect an inlet pipe 30 for introducing process gas into the reaction chamber of the process chamber 20. The outlet end of the inlet pipe 30 extends into the reaction chamber.

[0048] The pipe connection assembly 10 includes a fixed sleeve 100, a first sealing ring 200, an intermediate ring 300, a second sealing ring 400, and a clamping structure 500, which are sequentially abutted against each other. The fixed sleeve 100, the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 are all configured to be fitted onto the intake pipe 30. The fixed sleeve 100 is connected to the process chamber 20, and its first end communicates with the reaction chamber of the process chamber 20. The clamping structure 500 is connected to the second end of the fixed sleeve 100 and is configured to provide a force that presses the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 against the second end of the fixed sleeve 100, so that the first sealing ring 200 and the second sealing ring 400 are compressed onto the intake pipe 30 through deformation. It is understood that the pipe connection assembly 10 provides support for the intake pipe 30 on the process chamber 20 through the fixed sleeve 100.

[0049] When the fixed sleeve 100, the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 are fitted onto the intake pipe 30, the pressing structure 500 presses the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 onto the second end of the fixed sleeve 100. This causes the first sealing ring 200 and the second sealing ring 400 to deform and press against the intake pipe 30, thereby creating support points on the intake pipe 30 at both the first sealing ring 200 and the second sealing ring 400. When the fixed sleeve 100 is connected to the process chamber 20, with the first end of the fixed sleeve 100 communicating with the reaction chamber of the process chamber 20 and the outlet end of the inlet pipe 30 extending into the reaction chamber, the inlet pipe 30 can maintain good positional stability relative to the fixed sleeve 100 through the support of two support points. This helps reduce the vibration amplitude of the inlet pipe 30 relative to the fixed sleeve 100 caused by airflow fluctuations, reducing the risk of loosening of the connection between the clamping structure 500 and the fixed sleeve 100. This further reduces the risk of the inlet pipe 30 deviating from its original position within the reaction chamber and the risk of interference with objects within the reaction chamber (such as the crystal boat and wafers), ensuring a good and consistent distribution of process gas within the reaction chamber, and ensuring good consistency of wafers processed in different batches. Furthermore, the connection between the clamping structure 500 and the second end of the fixed sleeve 100 facilitates assembly and provides stable pressure for the clamping structure 500 to press the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 onto the second end of the fixed sleeve 100.

[0050] For example, combined Figure 6As shown, the intake pipe 30 includes an intake pipe section 31 and an outlet pipe section 32 that are perpendicular to each other. The intake pipe section 31 extends along the X direction, and the outlet pipe section 32 extends along the Y direction. A fixed sleeve 100, a first sealing ring 200, an intermediate ring 300, and a second sealing ring 400 are fitted onto the intake pipe section 31, and the outlet pipe section 32 extends into the reaction chamber. It can be understood that the intake pipe section 31, supported by two support points, can reduce the deflection vibration amplitude of the outlet pipe section 32 along the X direction. Furthermore, the first sealing ring 200 and the second sealing ring 400, through deformation and pressing against the intake pipe section 31, under the action of friction, help reduce the deflection vibration amplitude of the outlet pipe section 32 along the Z direction and reduce the risk of permanent deflection of the outlet pipe section 32 along the Z direction. Specifically, the exhaust pipe section 32 undergoes a permanent deflection along the Z-direction, which can be understood as the intake pipe section 31 undergoing circumferential sliding relative to the first sealing ring 200 and the second sealing ring 400. The X, Y, and Z directions are perpendicular to each other.

[0051] In some embodiments, refer to Figure 3 and Figure 4 As shown, the second end of the fixed sleeve 100 is provided with a first concave annular surface 110, which abuts against the first sealing ring 200. The first end of the intermediate ring 300 is provided with a second concave annular surface 310, and the second end of the intermediate ring 300 is provided with a third concave annular surface 320. The second concave annular surface 310 abuts against the first sealing ring 200, and the third concave annular surface 320 abuts against the second sealing ring 400. The pressing structure 500 is provided with a fourth concave annular surface 501, which abuts against the second sealing ring 400. It can be understood that the first sealing ring 200 is sandwiched between the first concave annular surface 110 and the second concave annular surface 310. The first concave annular surface 110 and the second concave annular surface 310 can press the first sealing ring 200 towards the intake pipe 30 so that the first sealing ring 200 is pressed tightly onto the intake pipe section 31. It is understandable that the second sealing ring 400 is sandwiched between the third concave annular surface 320 and the fourth concave annular surface 501. The third concave annular surface 320 and the fourth concave annular surface 501 can squeeze the second sealing ring 400 toward the intake pipe 30 so that the second sealing ring 400 is pressed tightly onto the intake pipe section 31.

[0052] For example, the first concave annular surface 110 includes, but is not limited to, an inner chamfered surface and a circular arc surface.

[0053] For example, the second concave annular surface 310 includes, but is not limited to, an inner chamfered surface and a circular arc surface.

[0054] For example, the third concave annular surface 320 includes, but is not limited to, an inner chamfered surface and a circular arc surface.

[0055] For example, the fourth concave annular surface 501 includes, but is not limited to, an inner chamfered surface and a circular arc surface.

[0056] In some embodiments, the clamping structure 500 is threadedly connected to the second end of the fixing sleeve 100 for easy assembly. Of course, the clamping structure 500 and the second end of the fixing sleeve 100 can also be connected by snap-fit, welding, or other methods.

[0057] In some embodiments, refer to Figure 3 , Figure 7 and Figure 8 As shown, the clamping structure 500 includes a pipe connector 510 and a first clamping sleeve 520. The pipe connector 510 includes a first pipe section 511 and a second pipe section 512 connected to each other. The outer diameter of the first pipe section 511 is larger than the outer diameter of the second pipe section 512, and an annular platform 513 is formed between the outer circumferential surfaces of the first pipe section 511 and the second pipe section 512. The first pipe section 511 is configured to be fitted onto the intake pipe 30, and the end of the first pipe section 511 abuts against the second sealing ring 400. The first clamping sleeve 520 is fitted onto the first pipe section 511. The first sealing ring 520 is threadedly connected to the first end of the first compression sleeve 520 and the second end of the first compression sleeve 520. A pressure ring portion 521 protrudes from the inner circumferential surface of the second end of the first compression sleeve 520. The pressure ring portion 521 abuts against the annular platform 513 and is configured to provide a force for the first pipe segment 511 to press against the fixed sleeve 100 against the second sealing ring 400. It is understood that, compared to the pressure ring portion 521 directly abutting against the second sealing ring 400, having the end of the first pipe segment 511 abut against the second sealing ring 400 and the pressure ring portion 521 abutting against the annular platform 513 reduces the probability of wear on the first sealing ring 200 and the second sealing ring 400 due to the screwing of the first compression sleeve 520. It is understandable that when the first clamping sleeve 520 is tightened, the pressure ring 521 presses against the annular platform 513, so that the first pipe section 511 presses against the fixed sleeve 100 to compress the second sealing ring 400. During this process, the pipe joint 510 rotates at a small angle, which helps to reduce the sliding of the first sealing ring 200 and the second sealing ring 400, thereby reducing the probability of wear due to sliding friction.

[0058] For example, a fourth concave annular surface 501 is provided at the end of the first pipe segment 511.

[0059] In one feasible implementation, the first end of the intermediate ring 300 abuts against the second end of the fixed sleeve 100, and the second end of the intermediate ring 300 abuts against the end of the first pipe section 511, so as to stabilize the constraint on the first sealing ring 200 and the second sealing ring 400, which is beneficial to improve the stability of the first sealing ring 200 and the second sealing ring 400 pressed on the intake pipe 30.

[0060] In one feasible embodiment, the pipe connector 510 further includes a third pipe section 514, the outer diameter of which is smaller than the outer diameter of the second pipe section 512. The third pipe section 514 is configured to connect to the gas source pipe 40. The gas source pipe 40 is used to supply process gas to the inlet pipe 30, and the third pipe section 514 of the pipe connector 510 facilitates the supply of gas to the inlet pipe 30. The gas source pipe 40 can be a flexible hose with a connector.

[0061] For example, the central channel of the pipe connector 510 is stepped, and the large end of the central channel is fitted onto the air intake end of the air intake pipe 30.

[0062] In one feasible embodiment, the clamping structure 500 further includes a second clamping sleeve 530, which is sleeved on the second pipe section 512 and threadedly connected to at least a portion of the second pipe section 512, with one end of the second clamping sleeve 530 abutting against the second end of the first clamping sleeve 520. The first clamping sleeve 520 and the second clamping sleeve 530 are pre-tightened against each other, which can generate a continuous frictional force, thus helping to prevent the connection from loosening.

[0063] Exemplarily, the central hole of the second clamping sleeve 530 may be stepped, and the small end of the central hole of the second clamping sleeve 530 has an internal thread. It is understood that the first end of the second clamping sleeve 530 abuts against the second end of the first clamping sleeve 520, and the internal thread of the central hole of the second clamping sleeve 530 is located at the second end of the second clamping sleeve 530. In some embodiments, the second clamping sleeve 530 may be a nut, such as a hexagonal nut.

[0064] In some embodiments, refer to Figure 3 and Figure 4 As shown, a first gap is formed between the inner circumferential surface of the fixed sleeve 100 and the outer circumferential surface of the air inlet pipe 30, and a second gap is formed between the inner circumferential surface of the intermediate ring 300 and the outer circumferential surface of the air inlet pipe 30. It can be understood that the clamping structure 500 presses the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 onto the second end of the fixed sleeve 100, sealing the first and second gaps to reduce the risk of the reaction chamber of the process cavity 20 communicating with the outside world through the first and second gaps.

[0065] In one feasible embodiment, a lever arm fulcrum is formed between the fixed sleeve 100 and the intake pipe 30. The pipe connection assembly 10 further includes an adjusting member 600 connected to the clamping structure 500. The adjusting member 600 abuts against the intermediate ring 300 radially, and is configured to be radially adjustable to adjust the deflection angle of the intake pipe 30 using the deformation of the first sealing ring 200 and the second sealing ring 400 relative to the lever arm fulcrum. It is understood that the first gap provides clearance for the movement of the intake pipe 30, and the second gap provides clearance for the movement of the intermediate ring 300.

[0066] For example, the adjustment member 600 is configured to be position-adjustable along the Y direction. The inlet pipe section 31 (i.e., the outlet pipe section 32 along the X direction) is adjusted to a preset angle by the adjustment member 600 so that the inlet pipe 30 maintains a predetermined position. This is beneficial for maintaining the stable uniformity and consistency of the process gas in the reaction chamber of the process chamber 20. This ensures that the outlet end of the inlet pipe 30 is in a uniform preset position during each wafer reaction in the process chamber 20, thus guaranteeing the quality of wafer processing.

[0067] Understandably, a first lever arm L1 is formed between the first sealing ring 200 and the lever arm fulcrum, and a second lever arm L2 is formed between the second sealing ring 400 and the lever arm fulcrum. The intermediate ring 300 separates the first sealing ring 200 and the second sealing ring 400, which helps to increase the size of the second lever arm, increase the torque exerted by the second sealing ring 400 relative to the lever arm fulcrum on the intake pipe 30, and reduce the vibration amplitude of the intake pipe 30 relative to the fixed sleeve 100 due to the fluctuation of the incoming airflow. Understandably, when the airflow fluctuation entering the intake pipe 30 is the same, the larger the first lever arm L1 and the second lever arm L2 are, the smaller the deformation of the first sealing ring 200 and the second sealing ring 400, and the smaller the vibration amplitude of the intake pipe 30 relative to the fixed sleeve 100.

[0068] For example, the adjusting member 600 is set as a set screw, and the first clamping sleeve 520 has an adjusting hole 522 on its periphery, and the adjusting member 600 is threadedly connected to the adjusting hole 522.

[0069] In one feasible implementation, a limiting ring 120 is protruding from the inner circumferential surface of the fixed sleeve 100. The inner diameter of the limiting ring 120 is larger than the outer diameter of the intake pipe 30, for example, the inner diameter of the limiting ring 120 is larger than the outer diameter of the intake pipe section 31. The fixed sleeve 100 and the intake pipe 30 form a lever fulcrum on the limiting ring 120. It is understood that the setting of the limiting ring 120 is beneficial to design a larger pipe diameter in the pipe section of the fixed sleeve 100 where the limiting ring 120 is not provided, making it easier to insert the intake pipe 30 into the fixed sleeve 100, which helps to increase the adjustment range of the deflection angle of the intake pipe 30 and improves its applicability.

[0070] For example, the limiting ring 120 is provided at the second end of the fixed sleeve 100, which helps to improve the adjustment range of the deflection angle of the intake pipe 30.

[0071] In this embodiment, the pipe connection assembly 10 includes at least one adjusting member 600, for example, three or four are provided around the first clamping sleeve 520, which is more conducive to adjusting the deflection angle of the intake pipe 30. Moreover, the arrangement of multiple adjusting members 600 can prevent the intermediate ring 300 from radially shifting relative to the fixed sleeve 100 due to airflow fluctuations in the intake pipe 30, thereby further reducing the vibration amplitude of the intake pipe 30 relative to the fixed sleeve 100 caused by airflow fluctuations.

[0072] In some embodiments, an intermediate ring 300 and a second sealing ring 400 are configured as a set. The pipe connection assembly 10 includes at least one set of intermediate rings 300 and second sealing rings 400. The fixed sleeve 100, the first sealing ring 200, the at least one set of intermediate rings 300 and second sealing rings 400, and the clamping structure 500 abut against each other in sequence, which helps to reduce the vibration amplitude of the intake pipe 30 relative to the fixed sleeve 100 caused by the fluctuation of the incoming airflow. Adjacent second sealing rings 400 are separated by an intermediate ring 300. In this embodiment, one intermediate ring 300 corresponds to the adjusting member 600. Exemplarily, when the pipe connection assembly 10 includes two sets of intermediate rings 300 and second sealing rings 400, the fixed sleeve 100, the first sealing ring 200, the intermediate ring 300, the second sealing ring 400, the intermediate ring 300, the second sealing ring 400, and the clamping structure 500 abut against each other in sequence.

[0073] like Figure 3 , Figure 5 and Figure 9 As shown, this utility model provides a semiconductor process apparatus, which includes a process chamber 20, an inlet pipe 30, and the aforementioned pipe connection assembly 10. The inlet pipe 30 is disposed on the process chamber 20 via the pipe connection assembly 10. In this embodiment, the semiconductor process apparatus utilizes the aforementioned pipe connection assembly 10, thus achieving all the beneficial effects of the aforementioned pipe connection assembly 10. For example, the inlet pipe 30 being disposed on the process chamber 20 via the pipe connection assembly 10 helps reduce the vibration amplitude of the inlet pipe 30 relative to the fixed sleeve 100 due to fluctuations in the incoming airflow, reducing the risk of loosening of the pipe connection assembly 10, thereby reducing the risk of the inlet pipe 30 deviating from its original position within the process chamber 20 and the risk of interference with objects (such as crystal boats and wafers) within the process chamber 20. This ensures a good and consistent distribution of process gas within the process chamber 20, resulting in good consistency among wafers processed in different batches.

[0074] In some embodiments, the process chamber 20 includes a chamber body 21 and a manifold 22 disposed at the bottom of the chamber body 21. The chamber body 21 has a reaction chamber, and the manifold 22 is connected to the reaction chamber. A perforation (not shown) is provided around the periphery of the manifold 22. The first end of the fixing sleeve 100 of the pipe connection assembly 10 is fixedly connected to the manifold 22, and the fixing sleeve 100 is connected to the perforation. The outlet end of the air inlet pipe 30 extends into the reaction chamber, and the inlet end of the air inlet pipe 30 passes through the fixing sleeve 100, the first sealing ring 200, the intermediate ring 300, and the second sealing ring 400 of the pipe connection assembly 10. The process chamber 20 is designed in a split manner, which is convenient for molding. The manifold 22 facilitates the distribution, switching, and mixing of process gases. The fixing sleeve 100 is disposed on the manifold 22, which facilitates the assembly of the process chamber 20 with the air inlet pipe 30 through the pipe connection assembly 10.

[0075] For example, the manifold 22 is also provided with an exhaust pipe 23 that communicates with the reaction chamber. The process gas entering the reaction chamber through the intake pipe 30 can be discharged through the exhaust pipe 23. The process gas in the reaction chamber can be extracted by a vacuum pump through the exhaust pipe 23.

[0076] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A pipe connection assembly, characterized in that, A gas inlet pipe configured to connect to a reaction chamber for introducing process gas into a process cavity is provided, the outlet end of the gas inlet pipe extending into the reaction chamber. The pipe connection assembly includes a fixed sleeve, a first sealing ring, an intermediate ring, a second sealing ring, and a clamping structure arranged in sequence, all abutting each other. The fixed sleeve, the first sealing ring, the intermediate ring, and the second sealing ring are all configured to be sleeved on the air inlet pipe, and the fixed sleeve is connected to the process chamber, with the first end of the fixed sleeve communicating with the reaction chamber of the process chamber. The clamping structure is connected to the second end of the fixed sleeve, and the clamping structure is configured to provide a force to press the first sealing ring, the intermediate ring, and the second sealing ring onto the second end of the fixed sleeve, so that the first sealing ring and the second sealing ring are pressed onto the intake pipe by deformation.

2. The pipe connection assembly according to claim 1, characterized in that, The second end of the fixed sleeve is provided with a first concave annular surface, which abuts against the first sealing ring; The first end of the intermediate ring is provided with a second concave annular surface, and the second end of the intermediate ring is provided with a third concave annular surface. The second concave annular surface abuts against the first sealing ring, and the third concave annular surface abuts against the second sealing ring. The clamping structure has a fourth concave annular surface, which abuts against the second sealing ring.

3. The pipe connection assembly according to claim 1, characterized in that, The clamping structure is threadedly connected to the second end of the fixed sleeve.

4. The pipe connection assembly according to any one of claims 1-3, characterized in that, The clamping structure includes: The pipe fitting includes a first pipe section and a second pipe section connected to each other. The outer diameter of the first pipe section is larger than the outer diameter of the second pipe section, and an annular platform is formed between the outer peripheral surfaces of the first pipe section and the outer peripheral surfaces of the second pipe section. The first pipe section is configured to be fitted onto the intake pipe, and the end of the first pipe section abuts against the second sealing ring. A first compression sleeve is fitted onto the first pipe section, the second sealing ring, the intermediate ring, the first sealing ring, and the fixed sleeve. The first end of the first compression sleeve is threadedly connected to the fixed sleeve. A pressure ring portion is protruding on the inner circumferential surface of the second end of the first compression sleeve. The pressure ring portion abuts against the annular platform surface and is configured to provide a force for the first pipe section to press the second sealing ring against the fixed sleeve.

5. The pipe connection assembly according to claim 4, characterized in that, The first end of the intermediate ring abuts against the second end of the fixed sleeve, and the second end of the intermediate ring abuts against the end of the first pipe segment.

6. The pipe connection assembly according to claim 4, characterized in that, The pipe joint also includes a third pipe section, the outer diameter of which is smaller than that of the second pipe section, and the third pipe section is configured to connect to a gas source pipe.

7. The pipe connection assembly according to claim 4, characterized in that, The clamping structure further includes a second clamping sleeve, which is sleeved on the second pipe section and threadedly connected to at least a portion of the second pipe section, with one end of the second clamping sleeve abutting against the second end of the first clamping sleeve.

8. The pipe connection assembly according to any one of claims 1-3, characterized in that, A first gap is formed between the inner circumferential surface of the fixed sleeve and the outer circumferential surface of the air intake pipe, and a second gap is formed between the inner circumferential surface of the intermediate ring and the outer circumferential surface of the air intake pipe, and a lever fulcrum is formed between the fixed sleeve and the air intake pipe. The pipe connection assembly further includes an adjusting member connected to the clamping structure, the adjusting member abutting against the intermediate ring radially, and the adjusting member being configured to be radially adjustable along the intermediate ring to adjust the deflection angle of the intake pipe relative to the lever arm fulcrum by means of the deformation of the first sealing ring and the second sealing ring.

9. The pipe connection assembly according to claim 8, characterized in that, A limiting ring is protruding on the inner circumferential surface of the fixed sleeve. The inner diameter of the limiting ring is larger than the outer diameter of the air intake pipe. The fixed sleeve and the air intake pipe form the lever arm fulcrum on the limiting ring.

10. Semiconductor process equipment, including: The process chamber, the air inlet pipe, and the pipe connection assembly as described in any one of claims 1-9, wherein the air inlet pipe is disposed on the process chamber via the pipe connection assembly.

11. The semiconductor process equipment according to claim 10, characterized in that, The process chamber includes a main body and a manifold located at the bottom of the main body. The main body has a reaction chamber, and the manifold is connected to the reaction chamber. The manifold has a perforation around its periphery. The first end of the fixing sleeve of the pipe connection assembly is fixedly connected to the manifold, and the fixing sleeve is connected to the perforation. The outlet end of the air inlet pipe extends into the reaction chamber, and the inlet end of the air inlet pipe is provided with the fixing sleeve of the pipe connection assembly, a first sealing ring, an intermediate ring, and a second sealing ring.

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