A mobile cart for ion implanter gray zone control operation platform
Patent Information
- Application Number
- CN202522581154.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-04
- Publication Date
- 2026-10-20
- Estimated Expiration
- 2035-12-04
AI Technical Summary
车间一般分为白区（晶圆流水线区）这个区域对空气中的颗粒要求一般在100级，另外设备除了操作界面和上下片在白区，设备主体都位于灰区（这个区域主要是设备维护保养检修等）所以净化级别一般在1000级（级别意思就是每立方米的空气中含有的超过0.1微米的颗粒个数，数字越小级别越高），所以白区和灰区之间都是无尘墙板隔离，固定位置会预留人员前后进入的隔离门，由于机台操作系统都在白区，所以机台检修等就需要白区有人员操作，灰区有人员检查，或者来回走动检修，效率很低，且有误操做导致检修工程师受伤的风险
1、 本实用新型装置内设置移动结构，通过驱动调节电机带动两个定位块内的调节双向丝杆转动，促使调节双向丝杆带动两个导向座相互靠近，促使两个导向座上的调节杆带动套环上的导向板相互转动，使其两组导向板带动安装座上的顶板通过外壁的导向块在导向槽内滑动配合限位，从而对四个万向轮进行伸缩将操作平台进行支撑起，有利于对操作平台便捷移动的同时提高其支撑稳定性，便于移动推车移动相对灵活，能够在短时间内到达离子注入机台周边的任何位置，大大提高了移动效率；
Smart Images
Figure CN224872235U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of ion implantation equipment technology, and in particular to a mobile trolley for a gray zone control operation platform of an ion implantation equipment. Background Technology
[0002] Wafer fabrication workshops have extremely high requirements for air quality, and all equipment is housed in cleanrooms. The workshop is generally divided into a white zone (wafer production line area), where the particulate matter level is typically Class 100. Apart from the operating interfaces and wafer loading / unloading areas, the main equipment is located in the gray zone (primarily for equipment maintenance and repair), where the cleanliness level is generally Class 1000 (the class refers to the number of particles larger than 0.1 micrometers per cubic meter of air; the lower the number, the higher the class). Therefore, the white and gray zones are separated by cleanroom walls, and designated access doors are provided for personnel to enter from both sides. Since the machine operating systems are located in the white zone, machine maintenance requires personnel to operate in the white zone and inspect in the gray zone, or personnel to move back and forth for maintenance, which is very inefficient and carries the risk of injury to maintenance engineers due to misoperation.
[0003] Although ion implantation equipment is crucial in semiconductor manufacturing, current gray area control operation platforms for ion implantation equipment suffer from numerous shortcomings in mobility. These issues severely impact the operational efficiency and overall performance of ion implantation equipment. The existing mobile trolleys used for gray area control operation platforms exhibit poor stability. Since ion implantation equipment typically operates in complex industrial environments with varying ground flatness, they are prone to shaking or even tipping over during movement. This not only damages the equipment on the gray area control operation platform, affecting its lifespan, but can also lead to operational interruptions, reduced production efficiency, and increased production costs. Therefore, a mobile trolley for gray area control operation platforms of ion implantation equipment is proposed to address these problems. Utility Model Content
[0004] The purpose of this invention is to provide a mobile trolley for controlling the gray zone of an ion implantation machine, so as to solve the problems mentioned in the background art.
[0005] To solve the above problems, the following technical solution is provided: a mobile trolley for controlling the gray zone of an ion implantation machine, comprising an operating platform frame, a bracket fixedly installed on the upper end of the operating platform frame and a display screen body fixedly installed on the outer wall of the bracket, an operating keyboard provided inside the operating platform frame, and foot supports fixedly installed at the four corners of the bottom of the operating platform frame, a movable structure provided inside the operating platform frame, the movable structure comprising two positioning blocks fixedly installed inside the operating platform frame, an adjusting bidirectional screw installed inside the two positioning blocks, two guide seats symmetrically threaded to the outer wall of the adjusting bidirectional screw, and equidistant adjusting rods fixedly installed on both sides of the outer wall of the two guide seats, a collar rotatably installed on the outer wall of each of the two sets of adjusting rods, and a guide plate fixedly installed on the outer wall of the collar, a top plate provided below the two sets of guide plates, and universal wheels rollingly connected to the four corners below the top plate.
[0006] As a preferred embodiment of the above technical solution, the operating platform frame is slidably connected to a storage box, and the bottom of each of the four foot supports is fixedly installed with an anti-slip pad. One end of the adjusting bidirectional screw is fixedly connected to an adjusting motor, and the adjusting motor is fixedly installed on the outer wall of one of the positioning blocks.
[0007] As a preferred embodiment of the above technical solution, each of the two sets of guide plates has a connecting shaft fixedly installed at one end, and the connecting shaft is rotatably installed on the limiting rod. The four limiting rods are respectively fixedly installed inside the four mounting seats, and the bottom of the mounting seats is fixedly installed on the top of the top plate.
[0008] As a preferred embodiment of the above technical solution, the inner wall of the operating platform frame is symmetrically provided with two sets of guide grooves, and guide blocks are fixedly installed on the front and rear sides of the outer wall of the top plate, and the guide blocks are slidably connected inside the guide grooves.
[0009] As a preferred embodiment of the above technical solution, a mounting bracket is fixedly provided on the outer side of the universal wheel, and a mounting sleeve is fixedly installed on the upper end of the mounting bracket, and a damping rod is fixedly provided inside the mounting sleeve.
[0010] As a preferred embodiment of the above technical solution, the outer wall of the damping rod is fitted with a buffer spring and one end of the damping rod is fixedly connected to a support block, which is fixedly installed at the bottom of the top plate.
[0011] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model device is equipped with a moving structure. By driving the adjusting motor to rotate the adjusting bidirectional screw in the two positioning blocks, the adjusting bidirectional screw causes the two guide seats to move closer to each other. This causes the adjusting rod on the two guide seats to drive the guide plate on the collar to rotate relative to each other. The two sets of guide plates drive the top plate on the mounting base to slide and engage in limiting position in the guide groove through the guide block on the outer wall. This allows the four universal wheels to extend and retract, supporting the operating platform. This facilitates convenient movement of the operating platform while improving its support stability. It also makes the mobile trolley relatively flexible and can reach any position around the ion implantation machine in a short time, greatly improving the movement efficiency. Meanwhile, a damping rod is installed inside the sleeve on the outer wall of the mounting bracket on the outside of the caster wheel. The damping rod and the buffer spring work together to buffer the impact, thus effectively cushioning the bumps that occur when the caster wheel moves. This helps to make the operating platform relatively stable when it moves, and can effectively reduce the vibration caused by uneven ground. It provides a more stable operating environment for the gray area control operating platform and protects the equipment on the platform from vibration.
[0012] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be employed. It should be understood that the embodiments of the present invention are not limited in scope. Within the spirit and scope of the appended claims, the embodiments of the present invention include many changes, modifications, and equivalents. Attached Figure Description
[0013] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the overall structure of a mobile trolley for controlling the gray zone of an ion implanter according to the present invention; Figure 2 This is a partial cross-sectional schematic diagram of a mobile trolley for controlling the gray zone of an ion implanter according to the present invention. Figure 3 for Figure 2 Diagram of the split structure; Figure 4 for Figure 3 A partial enlarged diagram of the split structure; Figure 5 for Figure 4 A magnified diagram of the partially disassembled structure.
[0014] In the diagram: 1. Operating platform frame; 11. Guide groove; 2. Display screen body; 3. Bracket; 4. Operating keyboard; 5. Foot support; 51. Anti-slip mat; 6. Storage box; 7. Moving structure; 70. Top plate; 701. Guide block; 71. Positioning block; 72. Adjusting motor; 73. Adjusting two-way lead screw; 74. Guide seat; 75. Adjusting rod; 76. Collar; 77. Guide plate; 78. Connecting shaft; 79. Mounting seat; 8. Casters; 81. Mounting bracket; 82. Support block; 83. Damping rod; 84. Buffer spring; 85. Mounting sleeve. Detailed Implementation
[0015] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.
[0016] like Figures 1 to 5 As shown in the figure, this embodiment provides a mobile trolley for controlling the gray zone of an ion implantation machine, including an operating platform frame 1. A bracket 3 is fixedly installed on the upper end of the operating platform frame 1, and a display screen body 2 is fixedly installed on the outer wall of the bracket 3. An operating keyboard 4 is provided inside the operating platform frame 1, and foot supports 5 are fixedly installed at the four corners of the bottom of the operating platform frame 1. A moving structure 7 is provided inside the operating platform frame 1. The moving structure 7 includes two positioning blocks 71 fixedly installed inside the operating platform frame 1. An adjusting bidirectional screw 73 is installed inside the two positioning blocks 71. Two guide seats 74 are symmetrically threaded on the outer wall of the adjusting bidirectional screw 73, and equidistant adjusting rods 75 are fixedly installed on both sides of the outer wall of the two guide seats 74. A collar 76 is rotatably installed on the outer wall of the two sets of adjusting rods 75, and a guide plate 77 is fixedly installed on the outer wall of the collar 76. A top plate 70 is provided below the two sets of guide plates 77, and universal wheels 8 are rolledly connected at the four corners below the top plate 70.
[0017] like Figures 3 to 4 As shown, a storage box 6 is slidably connected inside the operating platform frame 1. Anti-slip pads 51 are fixedly installed on the bottom of each of the four foot supports 5. An adjusting motor 72 is fixedly connected to one end of the adjusting two-way screw 73, and the adjusting motor 72 is fixedly installed on the outer wall of one of the positioning blocks 71. A connecting shaft 78 is fixedly installed on one end of each of the two sets of guide plates 77, and the connecting shaft 78 is rotatably installed on the limit rod. The four limit rods are fixedly installed inside the four mounting seats 79, and the bottom of the mounting seats 79 is fixedly installed on the top plate 70. Two sets of guide grooves 11 are symmetrically opened on the inner wall of the operating platform frame 1. Guide blocks 701 are fixedly installed on the front and rear sides of the outer wall of the top plate 70, and the guide blocks 701 are slidably connected inside the guide grooves 11.
[0018] The four collars 76 rotate on the adjusting rod 75, thereby driving the connecting shafts 78 on the four guide plates 77 to rotate and engage with the limiting rods in the mounting base 79, so that the universal wheels 8 at the bottom of the top plate 70 can be raised and lowered stably. At the same time, when the top plate 70 moves, the guide block 701 slides in the guide groove 11, thereby improving the relative stability of the top plate 70 when it drives the universal wheels 8 to rise and fall.
[0019] like Figure 5 As shown, a mounting bracket 81 is fixedly installed on the outside of the caster wheel 8, and a mounting sleeve 85 is fixedly installed on the upper end of the mounting bracket 81. A damping rod 83 is fixedly installed inside the mounting sleeve 85. A buffer spring 84 is sleeved on the outer wall of the damping rod 83, and a support block 82 is fixedly connected to one end of the damping rod 83. The support block 82 is fixedly installed at the bottom of the top plate 70.
[0020] When the caster wheel 8 shakes due to uneven ground during movement, the damping rod 83 and buffer spring 84 are installed in the mounting sleeve 85 to disperse and buffer the pressure, making the operation platform relatively stable during movement and thus improving the accurate monitoring of the operating parameters of the ion implantation machine.
[0021] The working principle and process of this utility model are as follows: When the control platform needs to be moved, the internal adjusting motor 72 drives the adjusting bidirectional screw 73 in the two positioning blocks 71 to rotate, causing the adjusting bidirectional screw 73 to drive the two guide seats 74 to move closer to each other. This causes the adjusting rod 75 on the two guide seats 74 to drive the guide plate 77 on the collar 76 to rotate relative to each other. The two sets of guide plates 77 drive the top plate 70 on the mounting base 79 to slide and be limited in the guide groove 11 through the guide block 701 on the outer wall. This allows the four universal wheels 8 to extend and retract, supporting the operating platform. This facilitates the movement of the control platform for the gray area of the ion implantation machine. When it is moved to the appropriate position, the universal wheels 8 are retracted according to the same principle, and then supported by the four foot supports 5. This achieves convenient movement of the operating platform while improving its support stability. A damping rod 83 is set in the sleeve 85 on the outer wall of the mounting bracket 81 outside the universal wheel 8. The damping rod 83 and the buffer spring 84 work together to buffer the movement of the universal wheel 8, effectively cushioning the bumps that occur when the universal wheel 8 moves.
[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0023] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
Claims
1. A mobile trolley for controlling the gray zone of an ion implanter, characterized in that, The system includes an operating platform frame (1), on which a bracket (3) is fixedly installed at the upper end and a display screen body (2) is fixedly installed on the outer wall of the bracket (3). An operating keyboard (4) is provided inside the operating platform frame (1), and foot supports (5) are fixedly installed at the four corners of the bottom of the operating platform frame (1). A movable structure (7) is provided inside the operating platform frame (1), and the movable structure (7) includes two positioning blocks (71) fixedly installed inside the operating platform frame (1). An adjustable two-way screw (73) is installed inside. The outer wall of the adjustable two-way screw (73) is symmetrically threaded with two guide seats (74). Both sides of the outer wall of the two guide seats (74) are fixedly installed with equidistant adjusting rods (75). The outer walls of the two sets of adjusting rods (75) are rotatably installed with collars (76), and the outer walls of the collars (76) are fixedly installed with guide plates (77). A top plate (70) is provided below the two sets of guide plates (77), and universal wheels (8) are rolled at the four corners below the top plate (70).
2. The mobile trolley for controlling the gray zone of an ion implanter as described in claim 1, characterized in that, The operating platform frame (1) has a storage box (6) slidably connected inside. The bottom of each of the four foot supports (5) is fixedly installed with anti-slip pads (51). One end of the adjusting bidirectional screw (73) is fixedly connected to an adjusting motor (72), and the adjusting motor (72) is fixedly installed on the outer wall of one of the positioning blocks (71).
3. The mobile trolley for controlling the gray zone of an ion implanter according to claim 2, characterized in that, Both sets of guide plates (77) have a connecting shaft (78) fixedly installed at one end, and the connecting shaft (78) is rotatably installed on the limiting rod. The four limiting rods are respectively fixedly installed inside the four mounting seats (79), and the bottom of the mounting seats (79) is fixedly installed on the top plate (70).
4. The mobile trolley for controlling the gray zone of an ion implanter as described in claim 3, characterized in that, The inner wall of the operating platform frame (1) is symmetrically provided with two sets of guide grooves (11). The front and rear sides of the outer wall of the top plate (70) are fixedly installed with guide blocks (701), and the guide blocks (701) are slidably connected inside the guide grooves (11).
5. A mobile trolley for controlling the gray zone of an ion implanter according to claim 1, characterized in that, The universal wheel (8) is fixedly provided with a mounting bracket (81) on the outside and a mounting sleeve (85) is fixedly installed on the upper end of the mounting bracket (81). A damping rod (83) is fixedly provided inside the mounting sleeve (85).
6. A mobile trolley for controlling the gray zone of an ion implanter according to claim 5, characterized in that, The damping rod (83) is fitted with a buffer spring (84) on its outer wall and a support block (82) is fixedly connected to one end of the damping rod (83). The support block (82) is fixedly installed at the bottom of the top plate (70).