Furnace structure and tunnel furnace

Abstract

The application relates to a furnace body structure and a tunnel furnace. The furnace body structure comprises: an inner container module, a vacuum cavity formed by surrounding arrangement, and a transmission port and an inspection port, both of which are in communication with the vacuum cavity. The transmission port comprises two transmission ports located at two ends of the inner container module in a first direction. The inspection port comprises two inspection ports located at at least one end of the inner container module in a second direction intersecting the first direction. Two furnace doors are arranged in the inner container module. Two heat preservation doors are arranged in the inner container module. Two heat preservation members are arranged in the inner container module. Thus, compared with the overall welding mode of the traditional furnace door structure, each of the above-mentioned furnace body structures can be produced and manufactured individually, which can not only reduce the production cost, but also can replace the damaged parts individually if the furnace body structure is damaged, thereby being beneficial to the installation and maintenance of the furnace body structure.

Description

Technical Field

[0001] This application relates to the field of photovoltaic cell manufacturing technology, and in particular to a furnace structure and a tunnel furnace. Background Technology

[0002] Perovskite annealing refers to the process of growing perovskite grains in a perovskite film by heating and controlling the temperature, removing some impurities and defects. It is a key factor affecting the quality of perovskite solar cells, and annealing requires a fast heating rate and good temperature uniformity.

[0003] Currently, conventional large-area perovskite solar cell annealing can be completed using a tunnel furnace. The substrate is heated inside the tunnel furnace by infrared lamps and circulating hot air. However, the current tunnel furnace has problems such as high cost and difficult installation and maintenance. Utility Model Content

[0004] Therefore, it is necessary to provide a furnace body structure and a tunnel furnace to address the problems of high cost and difficult installation and maintenance of current tunnel furnaces.

[0005] A furnace body structure, the furnace body structure comprising:

[0006] The inner liner module is provided to form a vacuum cavity, and a transmission port and an inspection port are both connected to the vacuum cavity. The transmission port includes two ports, which are located at both ends of the inner liner module in a first direction. The inspection port includes two ports, which are located at at least one end of the inner liner module in a second direction intersecting the first direction.

[0007] Two furnace doors are provided on the inner liner module and located at both ends of the vacuum chamber in the first direction. Each furnace door is used to close and open one of the transmission ports.

[0008] Two insulated doors are provided on the inner liner module and located at both ends of the vacuum chamber in the second direction. Each insulated door is used to open and close one of the inspection ports.

[0009] Two insulation components are provided on the inner liner module and located at both ends of the vacuum cavity in a third direction that intersects with both the first and second directions.

[0010] In one embodiment, the inner liner module includes a frame structure, a support structure, and an air intake structure. The support structure includes two supports, which are spaced apart on the frame structure along the second direction. At least one support structure is provided with the inspection port. The air intake structure is located on the two supports at the end of the third support structure away from the frame structure. The frame structure, the support structure, and the air intake structure surround and form the vacuum cavity and the transmission port.

[0011] In one embodiment, the support structure includes a first structural member and a second structural member. The first structural member comprises two members, which are spaced apart along the third direction. The second structural member comprises two members, each of which is connected to the two first structural members at both ends of the third direction. The two second structural members are located at the two ends of the first structural member in the first direction.

[0012] In one embodiment, the support structure further includes a reinforcing member, which is connected to two of the first structural members at both ends in the third direction and is located between two of the second structural members.

[0013] In one embodiment, the air intake structure includes an air intake body and a baffle. The air intake body is disposed on two of the support structures and has an air intake port that communicates with the vacuum chamber.

[0014] The baffle is located on one side of the air intake body in the vacuum chamber and surrounds the air intake. The surface of the baffle has multiple baffle holes, and each baffle hole is connected to the air intake.

[0015] In one embodiment, the air intake body has a diffusion cavity, the air inlet is located at the end of the diffusion cavity that is away from the vacuum cavity in a third direction, and the air intake body has a connecting port on the side close to the vacuum cavity, the connecting port connecting the vacuum cavity and the diffusion cavity;

[0016] In a cross-section perpendicular to the third direction, the cross-sectional area of ​​the diffusion cavity gradually decreases in the direction away from the vacuum cavity in the third direction.

[0017] In one embodiment, the air intake structure further includes a flow divider that covers the communication port and has multiple flow divider holes, each of which connects the diffusion cavity and the vacuum cavity.

[0018] In one embodiment, the frame structure is further provided with a vacuum port, which is connected to the vacuum chamber.

[0019] In one embodiment, the inner liner module is further provided with a transmission port, which is connected to the vacuum chamber.

[0020] A tunnel furnace, comprising the furnace body structure as described in any of the preceding claims.

[0021] The furnace body structure described above can be divided into several components, including an inner liner module, a furnace door, an insulation door, and insulation components. Each component is individually welded or assembled, and then the furnace door, insulation door, and insulation components are installed on the inner liner module to form the furnace body structure. In this way, compared with the traditional method of welding the entire furnace door structure, each component of the furnace body structure can be manufactured separately, which not only reduces production costs, but also allows for the replacement of damaged components if the furnace body structure is damaged, thus facilitating the installation and maintenance of the furnace body structure. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the furnace body structure in some embodiments of this application.

[0023] Figure 2 for Figure 1 A schematic diagram of the furnace body structure from another perspective in the embodiment.

[0024] Figure 3 for Figure 1 A schematic diagram of the inner liner module in the furnace body structure of the embodiment.

[0025] Figure 4 for Figure 3 A schematic diagram of the supporting structure in the inner liner module in the embodiment.

[0026] Figure 5 for Figure 4 A schematic diagram of the support structure in the embodiment from another perspective.

[0027] Figure 6 for Figure 4 A schematic diagram of the air intake structure in the inner liner module in the embodiment.

[0028] Figure 7 for Figure 6 A schematic diagram of the intake structure from another perspective in the embodiment.

[0029] Figure 8 for Figure 6 A cross-sectional schematic diagram of the air intake structure in the embodiment.

[0030] Figure 9 for Figure 6 A schematic diagram of the diffuser in the embodiment.

[0031] Figure 10 for Figure 3 A top view of the rack in the embodiment.

[0032] Explanation of reference numerals in the attached figures:

[0033] Inner liner module 10; Vacuum chamber 11; Transmission port 12; Inspection port 13;

[0034] Furnace door 20; Insulation door 21; Insulation component 22; Circumvention opening 23;

[0035] Frame structure 30; Vacuum port 31; Transmission port 32;

[0036] Support structure 40; First structural component 41; Second structural component 42; Reinforcing component 43;

[0037] 50. Intake structure; 51. Intake port; 52. Intake body; 53. Baffle; 54. Baffle hole; 55. Diffuser cavity; 56. Connecting port; 57. Flow divider;

[0038] First direction X; second direction Y; third direction Z. Detailed Implementation

[0039] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0040] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0041] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0042] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0043] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0044] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0045] See Figure 1 and Figure 2 , Figure 1 A schematic diagram of the furnace body structure in one embodiment of this application is shown. The furnace body structure provided in one embodiment of this application includes: an inner liner module 10, a furnace door 20, a heat insulation door 21, and a heat insulation component 22. The inner liner structure serves as the main support structure 40 of the furnace body structure. The furnace door 20, the heat insulation door 21, and the heat insulation component 22 are all located in the inner liner module 10, so that the furnace body structure can be divided into multiple individual components.

[0046] Among them, see Figure 3The inner liner module 10 surrounds a vacuum cavity 11, and also forms a transmission port 12 and an inspection port 13, both of which are connected to the vacuum cavity 11. There are two transmission ports 12 located at both ends of the inner liner module 10 in the first direction X. There are two inspection ports 13 located at at least one end of the inner liner module 10 in the second direction Y, which intersects the first direction X.

[0047] Two furnace doors 20 are included, each located on the inner liner module 10 and at both ends of the vacuum chamber 11 in the first direction X. Each furnace door 20 is used to close and open one of the transfer ports 12. Two insulation doors 21 are included, each located on the inner liner module 10 and at both ends of the vacuum chamber 11 in the second direction Y. Each insulation door 21 is used to open and close one of the inspection ports 13.

[0048] In actual use, the vacuum chamber 11 is equipped with heating devices such as infrared lamps. A conveyor belt, traveling along the first direction X, allows materials to enter the vacuum chamber 11 through one of its transfer ports 12 and exit through the other. The conveyor belt transports glass substrates awaiting processing. After the substrate enters the vacuum chamber 11 via the conveyor belt, the conveyor belt pauses transporting the substrate. Then, the two furnace doors 20 and two insulation doors 21 are closed, allowing the vacuum chamber 11 to heat the substrate using the heating devices within. Once the substrate is processed, the conveyor belt resumes its movement, and with the opening of the furnace doors 20, the processed substrate is expelled from the vacuum chamber 11.

[0049] When the workpiece to be processed is a glass substrate, a perovskite coating is provided on the surface of the glass substrate. The perovskite coating is irradiated with infrared light of the wavelength with the maximum absorption of light energy by the perovskite through a heating device. This allows most of the heat to be concentrated in the perovskite coating on the glass surface, enabling the perovskite coating to crystallize quickly and reducing the impact of unexpected temperature fluctuations of the perovskite coating on the crystallization.

[0050] When the workpiece is being processed inside the vacuum chamber 11, if equipment malfunctions or defects occur due to processing errors, the insulation door 21 can be opened to allow for repair or replacement of the internal components through the inspection port 13, or to remove the defective workpiece from the conveyor belt. Simultaneously, the insulation door 21 not only opens and closes the inspection port 13, but also insulates the vacuum chamber 11 on both sides in the second direction Y, reducing heat loss within the vacuum chamber 11.

[0051] Furthermore, both insulation components 22 are disposed on the inner liner module 10 and located at both ends of the vacuum cavity 11 in the third direction Z, which intersects both the first direction X and the second direction Y. Thus, the two insulation components 22 can insulate the vacuum cavity 11 at both ends in the third direction Z. Combined with the two insulation doors 21 and the two furnace doors 20, the entire periphery of the vacuum cavity 11 can be insulated, reducing heat loss within the vacuum cavity 11 and lowering production costs. Optionally, each insulation component 22 is fixed to the inner liner module 10 by bolts.

[0052] The furnace body structure described above can be divided into multiple components, including an inner liner module 10, a furnace door 20, an insulation door 21, and insulation components 22. After each component is individually welded or assembled, the furnace door 20, insulation door 21, and insulation components 22 are installed on the inner liner module 10 to form the furnace body structure. In this way, compared with the traditional overall welding method of the furnace door 20 structure, each of the above furnace body structures can be manufactured separately, which not only reduces production costs, but also allows for the replacement of damaged components if the furnace body structure is damaged, thus facilitating the installation and maintenance of the furnace body structure.

[0053] It should be noted that the method by which the furnace door 20 opens and closes the transmission port 12, and the method by which the insulation door 21 opens and closes the maintenance port 13, are not limited here; they can be implemented using any existing method. Specifically... Figure 1 In this embodiment, the furnace door 20 opens and closes the transmission port 12 by moving up and down, and the heat preservation door 21 is hinged to the inner liner module 10 so that the heat preservation door 21 can rotate relative to the inner liner module 10, thereby realizing the opening and closing of the heat preservation door 21.

[0054] In some embodiments of this application, see [reference] Figure 3 The inner liner module 10 includes a frame structure 30, a support structure 40, and an air intake structure 50. The support structure 40 includes two supports, which are spaced apart on the frame structure 30 along the second direction Y. At least one support structure 40 is provided with an inspection port 13. The air intake structure 50 is provided on the end of the two support structures 40 away from the frame structure 30 in the third direction Z. The frame structure 30, the support structure 40, and the air intake structure 50 surround and form a vacuum chamber 11 and a transmission port 12.

[0055] The frame structure 30, support structure 40, and air intake structure 50 are all made of steel plates welded or bolted together. The frame structure 30, support structure 40, and air intake structure 50 can also be welded or bolted together with each other, so that the entire inner liner module 10 is a steel structure. Compared with the traditional use of insulation layer to make furnace cavity, the inner liner module 10 formed by steel plate can make the furnace structure have sufficient strength and will not deform due to external pressure difference. It can also make a larger vacuum chamber 11.

[0056] In some embodiments, see Figure 4 and Figure 5 The support structure 40 includes a first structural member 41 and a second structural member 42. There are two first structural members 41, which are arranged at intervals along the third direction Z. There are two second structural members 42, each of which is connected to the two first structural members 41 at both ends of the third direction Z. The two second structural members 42 are located at both ends of the first structural members 41 in the first direction X. The two first structural members 41 and the two second structural members 42 surround and form an inspection port 13.

[0057] Thus, the two first structural members 41 and the two second structural members 42 are spliced ​​together to form a rectangular support structure 40, thereby ensuring good stability after the support structure 40 is installed on the frame structure 30. Each first structural member 41 has multiple mounting holes, through which bolts are inserted to mount one of the first structural members 41 onto the frame structure 30, or to connect another first structural member 41 to the air intake structure 50.

[0058] Furthermore, the supporting structure 40 also includes a reinforcing member 43. The reinforcing member 43 is connected to two first structural members 41 at both ends in the third direction Z and is located between two second structural members 42. The reinforcing member 43 provides structural reinforcement to the middle part of the supporting structure 40, thereby enabling the supporting structure 40 to form an I-shaped structure. Optionally, the first structural members 41, the second structural members 42, and the reinforcing member 43 are all interconnected by welding.

[0059] In some embodiments of this application, see [reference] Figure 6 , Figure 7 and Figure 8 The air intake structure 50 includes an air intake body 52 and a baffle 53. The air intake body 52 is mounted on two support structures 40 and has an air intake port 51 that communicates with the vacuum chamber 11. The baffle 53 is located on one side of the air intake body 52 in the vacuum chamber 11 and surrounds the air intake port 51. The surface of the baffle 53 has multiple baffle holes 54, each of which communicates with the air intake port 51.

[0060] In actual use, the air inlet 51 is used to introduce heated clean air to create a uniform, low-speed, high-temperature convective airflow within the vacuum chamber 11, thereby accelerating the heating effect on the workpiece. After the air enters through the air inlet 51, it first enters the baffle 53 and diffuses through multiple baffle holes 54 on the baffle 53, allowing the gas to diffuse evenly onto the workpiece within the vacuum chamber 11.

[0061] Optionally, see Figure 9 The baffle 53 is barrel-shaped. The opening of the baffle 53 is located at the air inlet 51. Baffle holes 54 are provided on the circumferential side wall of the baffle 53 and on the end of the baffle 53 away from the air inlet 51. After the air from the air inlet 51 enters the interior of the baffle 53, it will be discharged through each baffle hole 54, so that the air is evenly diffused around the baffle 53, thereby allowing the air to be evenly diffused onto the workpiece to be processed in the vacuum chamber 11.

[0062] In some embodiments, see Figure 8 The intake body 52 has a diffusion cavity 55, and the air inlet 51 is located at the end of the diffusion cavity 55 that is furthest from the vacuum cavity 11 in the third direction (Z). The intake body 52 has a connecting port 56 on the side close to the vacuum cavity 11, which connects the vacuum cavity 11 and the diffusion cavity 55. A baffle 53 is disposed inside the diffusion cavity 55, and the connecting port 56 faces the workpiece to be processed located inside the vacuum cavity 11. The air diffused by the baffle 53 will be evenly distributed inside the diffusion cavity 55 and finally diffused to the workpiece to be processed through the connecting port 56.

[0063] In the section perpendicular to the third direction Z, the cross-sectional area of ​​the diffusion cavity 55 gradually decreases in the direction away from the vacuum cavity 11 in the third direction Z. Thus, the diffusion cavity 55 presents a cone shape that is narrow at the top and wide at the bottom. The baffle 53 is set at the tip of the cone shape of the diffusion cavity 55. The air diffused by the baffle 53 will undergo secondary diffusion in the cone-shaped diffusion cavity 55, thereby making the air flowing out from the connecting port 56 more uniform.

[0064] Furthermore, the air intake structure 50 also includes a flow divider 57, which covers the connecting port 56. The flow divider 57 has multiple flow divider holes, each connecting the diffusion chamber 55 and the vacuum chamber 11. Thus, the gas in the diffusion chamber 55 undergoes secondary diffusion through the flow divider 57, further improving the uniformity of the air diffused onto the workpiece. Optionally, the flow divider 57 is a 200µm fine-mesh steel wire mesh, where each mesh opening can serve as a flow divider hole.

[0065] In some embodiments, see Figure 10 The frame structure 30 is also provided with a vacuum port 31, which is connected to the vacuum chamber 11. The vacuum chamber 11 is also connected to an external vacuum device so that the air passing through the vacuum chamber 11 can be removed by pumping air. Combined with the air input from the air inlet 51, the vacuum chamber 11 can form convective gas, so that there is uniformly convective hot air in the vacuum chamber 11.

[0066] In some embodiments, the air inlet is further provided with a transmission port 32, which penetrates the frame structure 30, thereby connecting the vacuum chamber 11 and the outside of the vacuum chamber 11. In actual use, the transmission port 32 is used for the passage of a transmission mechanism or adjustment mechanism. The transmission mechanism connects the device inside the vacuum chamber 11 to a power source outside the vacuum chamber 11, allowing the power source to be located outside the vacuum chamber 11. Optionally, the transmission mechanism is a guide rod, which passes through the transmission port 32. One end of the guide rod outside the vacuum chamber 11 is connected to a motor, and the other end is connected to a heating device. When the motor operates, it drives the heating device to move in the Z-direction via the guide rod, thereby driving the heating device closer to or further away from the workpiece to achieve different heating powers.

[0067] Furthermore, two heating devices are installed inside the vacuum chamber 11, located on the upper and lower sides of the workpiece to be processed, respectively, to achieve simultaneous heating of both sides of the workpiece. Each heating device is connected to an external motor via a guide rod to adjust the distance between each heating device and the workpiece. For this purpose, the air inlet and the frame structure 30 are also provided with transmission ports 32 to accommodate the guide rods of the two heating devices.

[0068] It should be noted that one of the insulation components 22 is installed on the air intake component, and the other insulation component 22 is installed on the frame structure 30. In order to avoid the air intake port 51 and transmission port 32 on the air intake component, the insulation component 22 does not cover the corresponding positions of the air intake port 51 and transmission port 32. Similarly, the insulation component 22 installed on the frame structure 30 will not cover the vacuum port 31 and transmission port 32 on the frame structure 30.

[0069] Alternatively, in a specific embodiment, see [reference]. Figure 1 Each insulation component 22 is provided with multiple clearance ports 23. The clearance ports 23 of the insulation component 22 provided on the air inlet are connected to the transmission port 32 or the air inlet 51 on the air inlet. The clearance ports 23 of the insulation component 22 provided on the frame mechanism are connected to the vacuum port 31 or the transmission port 32 on the frame mechanism. In this way, air or guide rods can pass through the clearance ports 23 and enter the air inlet 51 or the transmission port 32.

[0070] This application also provides a tunnel furnace, including the furnace body structure as described in any of the above claims. The tunnel furnace further includes a conveyor belt and a heating device disposed within the furnace body structure. The conveyor belt is used to transport and output the workpieces to be processed, and the heating device is used to heat the workpieces to be processed entering the furnace body structure. Since this tunnel furnace includes all the technical features of the aforementioned furnace body structure, it possesses all the technical effects of the aforementioned furnace body structure, and will not be elaborated further here.

[0071] The above-mentioned furnace structure has at least the following advantages:

[0072] The vacuum cavity is divided into multiple components, each of which is welded or assembled separately, and finally assembled into the entire furnace inner liner. Compared with a single welded furnace body structure, this method significantly reduces costs and facilitates installation and maintenance. Furthermore, the components of the inner liner module 10 are made of steel plates. Compared to the traditional method of using insulation layers for the furnace body, the steel plate inner liner module 10 provides sufficient structural strength to prevent cavity deformation due to external pressure differences, and also allows for the fabrication of larger inner liner cavities.

[0073] The insulation component 22 is installed externally by threads on the inner liner module 10, which simplifies the processing technology of the insulation layer while achieving external insulation. By setting a transmission port 32 on the inner liner module 10, the transmission and adjustment mechanism can be led out through the transmission port 32, which can isolate the power source such as the motor cylinder from the high temperature to protect the power source. The air inlet of the cavity adopts a conical air inlet, which divides the gas entering from one pipe into multiple air chambers before entering the working cavity of the furnace body. The use of the turbulence component 53 and the flow divider 57 to turbulentize the air can make the gas more uniform after entering the vacuum chamber 11, forming a micro-speed uniform airflow.

[0074] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A furnace body structure, characterized in that, The furnace body structure includes: The inner liner module (10) is provided to form a vacuum cavity (11), and a transmission port (12) and an inspection port (13) are both connected to the vacuum cavity (11). The transmission port (12) includes two ports, which are located at both ends of the inner liner module (10) in a first direction (X). The inspection port (13) includes two ports, which are located at at least one end of the inner liner module (10) in a second direction (Y) that intersects with the first direction (X). Two furnace doors (20) are provided on the inner liner module (10) and located at both ends of the vacuum chamber (11) in the first direction (X). Each furnace door (20) is used to close and open one of the transmission ports (12). Two heat-insulating doors (21) are provided on the inner liner module (10) and located at both ends of the vacuum chamber (11) in the second direction (Y). Each heat-insulating door (21) is used to open and close one of the inspection ports (13). Two insulation components (22) are provided on the inner liner module (10) and located at both ends of the vacuum cavity (11) on a third direction (Z) that intersects both the first direction (X) and the second direction (Y).

2. The furnace body structure according to claim 1, characterized in that, The inner liner module (10) includes a frame structure (30), a support structure (40), and an air intake structure (50). The support structure (40) includes two supports, which are spaced apart on the frame structure (30) along the second direction (Y). At least one support structure (40) is provided with the inspection port (13). The air intake structure (50) is located on the end of the two supports (40) away from the frame structure (30) in the third direction (Z). The frame structure (30), the support structure (40), and the air intake structure (50) surround and form the vacuum chamber (11) and the transmission port (12).

3. The furnace body structure according to claim 2, characterized in that, The supporting structure (40) includes a first structural member (41) and a second structural member (42). The first structural member (41) includes two members, which are arranged at intervals along the third direction (Z). The second structural member (42) includes two members, each of which is connected to the two first structural members (41) at both ends of the third direction (Z). The two second structural members (42) are located at both ends of the first structural member (41) in the first direction (X).

4. The furnace body structure according to claim 3, characterized in that, The support structure (40) further includes a reinforcing member (43), which is connected to two first structural members (41) at both ends of the third direction (Z) and is located between two second structural members (42).

5. The furnace body structure according to claim 2, characterized in that, The air intake structure (50) includes an air intake body (52) and a baffle (53). The air intake body (52) is mounted on two of the support structures (40) and has an air intake port (51) that communicates with the vacuum chamber (11). The baffle (53) is located on one side of the air intake body (52) in the vacuum chamber (11) and surrounds the air intake (51). The surface of the baffle (53) is provided with a plurality of baffle holes (54), and each baffle hole (54) is connected to the air intake (51).

6. The furnace body structure according to claim 5, characterized in that, The air intake body (52) is provided with a diffusion cavity (55), and the air inlet (51) is located at the end of the diffusion cavity (55) that is away from the vacuum cavity (11) in the third direction (Z). The air intake body (52) is provided with a connecting port (56) on the side close to the vacuum cavity (11), and the connecting port (56) connects the vacuum cavity (11) and the diffusion cavity (55). On a cross section perpendicular to the third direction (Z), the cross-sectional area of ​​the diffusion cavity (55) gradually decreases in the direction away from the vacuum cavity (11) in the third direction (Z).

7. The furnace body structure according to claim 6, characterized in that, The air intake structure (50) also includes a flow divider (57), which covers the communication port (56). The flow divider (57) has multiple flow divider holes, each of which is connected to the diffusion cavity (55) and the vacuum cavity (11).

8. The furnace body structure according to claim 2, characterized in that, The frame structure (30) is also provided with a vacuum port (31), which is connected to the vacuum chamber (11).

9. The furnace body structure according to claim 2, characterized in that, The inner liner module (10) is also provided with a transmission port (32), which is connected to the vacuum chamber (11).

10. A tunnel furnace, characterized in that, Includes the furnace body structure as described in any one of claims 1-9.

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