Heating device and tunnel furnace

Abstract

The application relates to a heating device and a tunnel furnace. The heating device comprises a rack, at least two heating mechanisms, the two heating mechanisms are oppositely arranged along a first direction on the rack, and a heating space for a substrate with a coating to pass through is formed between the two heating mechanisms; each heating mechanism comprises a plurality of far-infrared heating pipes, the far-infrared heating pipes are parallel and spaced along a second direction, the far-infrared heating pipes on one heating mechanism and the far-infrared heating pipes on the other heating mechanism are vertically projected on a horizontal plane along the first direction, and the axial direction of the far-infrared heating pipes, the first direction and the second direction are perpendicular to each other. The heating device can improve the temperature uniformity of the coating on the substrate surface, the coating can slowly and stably drop to room temperature in the annealing stage after heating, and the annealing quality of the coating is improved.

Description

Technical Field

[0001] This application relates to the field of photovoltaic perovskite panel manufacturing technology, and in particular to a heating device and a tunnel furnace. Background Technology

[0002] Currently, perovskite materials are attracting widespread attention as a new generation of solar cell materials. Their unique photoelectric properties, characterized by high photogenerated carrier mobility and low exciton binding energy, enable solar cells based on this material to theoretically achieve photoelectric conversion efficiencies far exceeding those of traditional crystalline silicon cells. Furthermore, perovskite materials can be prepared using low-temperature solution processes such as spin coating and blade coating, offering significant advantages over the high-temperature production processes of crystalline silicon cells, including simpler processes, lower energy consumption, and lower raw material costs.

[0003] In related technologies, thermocouple heating tubes are generally installed inside tunnel furnaces to heat the air inside the furnace. The heat is then transferred to the perovskite coating on the glass substrate. In this method, the air flow and the temperature of the air inside the furnace can easily affect the heat transfer between the air and the perovskite coating, resulting in poor temperature uniformity of the perovskite coating and a long heating time for the perovskite coating. All of these factors affect the annealing quality of the perovskite coating. Utility Model Content

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application provides a heating device and a tunnel furnace that can improve the temperature uniformity of the coating on the substrate surface, enabling the coating to slowly and stably cool to room temperature during the annealing stage after heating, thereby improving the annealing quality of the coating.

[0005] In a first aspect, this application provides a heating device, comprising:

[0006] frame;

[0007] At least two heating mechanisms are arranged opposite to each other in a first direction on the frame, and a heating space is formed between the two heating mechanisms, through which a substrate with a coated surface passes;

[0008] Each of the heating mechanisms includes multiple far-infrared heating tubes, which are parallel and spaced apart along the second direction. The far-infrared heating tubes on one of the heating mechanisms and the far-infrared heating tubes on another heating mechanism have their vertical projections along the first direction onto the horizontal plane coincide. The axial direction, the first direction, and the second direction of the far-infrared heating tubes are perpendicular to each other.

[0009] The heating device according to the first aspect of this application has at least the following beneficial effects:

[0010] The heating device of this application, by arranging two opposing heating mechanisms in a first direction, allows far-infrared heating tubes on both heating mechanisms to simultaneously heat both surfaces of the substrate when a coated substrate is inserted into the heating space between the two heating mechanisms. The far-infrared rays emitted by the far-infrared heating tubes directly radiate heat to the coating on the substrate, replacing the air heat conduction and heat convection heating methods used in related technologies. This reduces heat loss to the air and eliminates the diffusion effect of airflow and the air's own heat on coating heating. Furthermore, by aligning the far-infrared heating tubes on one of the heating mechanisms with the far-infrared heating tubes of the other... The far-infrared heating tubes on the heating mechanism have their vertical projections along the first direction on the horizontal plane coincide, so that two far-infrared heating tubes facing each other along the first direction are directly opposite each other and heat the two opposite surfaces of the same part of the substrate respectively. With the cooperation of multiple far-infrared heating tubes to heat different parts of the coating, the coating on the substrate surface is heated more evenly, reducing the temperature difference between different parts of the coating and improving the temperature uniformity of the coating. This allows the coating to slowly and stably cool down to room temperature during the annealing stage after heating, reducing the risk of coating crystal fragmentation and coating cracking caused by uneven temperature during the annealing stage, and improving the annealing quality of the coating.

[0011] In some embodiments, on each of the heating mechanisms, a plurality of far-infrared heating tubes are distributed at equal intervals along the second direction.

[0012] In some embodiments, the heating mechanism further includes a bracket and a drive unit, wherein a plurality of far-infrared heating tubes are detachably mounted on the bracket, and the output end of the drive unit is connected to the bracket to drive the bracket to move along the first direction.

[0013] In some embodiments, the heating mechanism further includes a guide rod extending along the first direction, a guide hole is provided on the frame, the guide rod passes through the guide hole and is connected to the bracket, and the output end of the drive member is connected to the guide rod.

[0014] In some embodiments, the heating mechanism further includes a linear bearing mounted in the guide hole, and the guide rod is slidably connected to the linear bearing.

[0015] In some embodiments, the heating mechanism further includes a plurality of locking components, which are spaced apart from each other on the bracket along the second direction, and the locking components are configured to lock or release the corresponding far-infrared heating tubes on the bracket.

[0016] In some embodiments, the locking assembly includes a base, a threaded locking member, and two elastic clamping arms. The base is disposed on the bracket, and the two elastic clamping arms are spaced apart on the base along the second direction. A clamping cavity for clamping the far-infrared heating tube is formed between the two elastic clamping arms. One end of the threaded locking member is threaded through one of the elastic clamping arms and connected to the other elastic clamping arm.

[0017] In some embodiments, the threaded locking member has an adjustment knob at the end away from the elastic clamping arm.

[0018] Secondly, this application provides a tunnel furnace, the tunnel furnace comprising:

[0019] Furnace body;

[0020] In the heating device described above, all of the far-infrared heating tubes are suspended inside the furnace body.

[0021] The tunnel furnace according to the second aspect of this application has at least the following beneficial effects:

[0022] The tunnel furnace of this application, due to the presence of the aforementioned heating device, also possesses the technical effects of the heating device, namely, it can heat the coating on the substrate surface more uniformly, reduce the temperature difference between different parts of the coating, improve the temperature uniformity of the coating, and thus enable the coating to slowly and stably cool down to room temperature during the annealing stage after heating, reducing the risk of coating crystal fragmentation and coating cracking caused by uneven temperature during the annealing stage, and improving the annealing quality of the coating.

[0023] In some embodiments, the tunnel furnace further includes a conveying platform that passes through the heating space and is used to convey the substrate along the second direction; a plurality of hollow cavities are formed on the conveying platform and spaced apart along the second direction, the hollow cavities are through the first direction, and the vertical projection of the far-infrared heating tube on the horizontal plane is within the vertical projection of the hollow cavity on the horizontal plane.

[0024] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0025] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0026] Figure 1 This is a schematic diagram of the tunnel furnace according to an embodiment of this application.

[0027] Figure 2 for Figure 1 A magnified view of a portion of point A in the middle.

[0028] Figure 3 This is another structural schematic diagram of the tunnel furnace according to an embodiment of this application.

[0029] Figure 4 This is a partial structural schematic diagram of the heating device according to an embodiment of this application.

[0030] Figure 5 This is a schematic diagram of the heating mechanism according to an embodiment of this application.

[0031] Figure 6 for Figure 5 A magnified view of a section at point B in the middle.

[0032] Explanation of reference numerals in the attached drawings: Frame 100; Bearing mounting plate 110; Heating mechanism 200; Far-infrared heating tube 210; Support 220; Drive component 230; Guide rod 240; Linear bearing 250; Locking assembly 260; Base 261; Threaded locking component 262; Elastic clamping arm 263; Clamping cavity 264; Adjustment knob 265; Heating space 300; Furnace body 400; Conveying platform 500; Hollow cavity 510; Conveying roller 520; Base plate 600; First direction Z; Second direction X. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0035] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0036] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0037] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0038] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0039] Currently, perovskite materials are attracting widespread attention as a new generation of solar cell materials. Their unique photoelectric properties, characterized by high photogenerated carrier mobility and low exciton binding energy, enable solar cells based on this material to theoretically achieve photoelectric conversion efficiencies far exceeding those of traditional crystalline silicon cells. Furthermore, perovskite materials can be prepared using low-temperature solution processes such as spin coating and blade coating, offering significant advantages over the high-temperature production processes of crystalline silicon cells, including simpler processes, lower energy consumption, and lower raw material costs.

[0040] In related technologies, thermocouple heating tubes are generally installed inside tunnel furnaces to heat the air inside the furnace. The heat is then transferred to the perovskite coating on the glass substrate. In this method, the air flow and the temperature of the air inside the furnace can easily affect the heat transfer between the air and the perovskite coating, resulting in poor temperature uniformity of the perovskite coating and a long heating time for the perovskite coating. All of these factors affect the annealing quality of the perovskite coating.

[0041] Based on this, embodiments of this application provide one or more heating devices. By arranging two opposing heating mechanisms in a first direction, when a coated substrate passes through the heating space between the two heating mechanisms, the far-infrared heating tubes on the two heating mechanisms simultaneously heat both surfaces of the substrate. The far-infrared rays emitted by the far-infrared heating tubes directly radiate heat to the coating on the substrate, replacing the air heat conduction and heat convection heating methods used in related technologies. This reduces heat loss to the air and eliminates the diffusion effect of airflow and the air's own heat on coating heating. Furthermore, by aligning the far-infrared heating tubes on one of the heating mechanisms with the far-infrared heating tubes of the other... The far-infrared heating tubes on the heating mechanism overlap vertically on the horizontal plane along the first direction, so that two far-infrared heating tubes opposite each other along the first direction face each other and heat the same part of the substrate on opposite sides along the thickness direction. In addition, multiple far-infrared heating tubes heat different parts of the coating along the length direction, thereby heating the coating on the substrate surface more uniformly, reducing the temperature difference between different parts of the coating, improving the temperature uniformity of the coating, and enabling the coating to slowly and stably cool down to room temperature during the annealing stage after heating. This reduces the risk of coating crystal fragmentation and cracking caused by uneven temperature during the annealing stage, and improves the annealing quality of the coating.

[0042] See Figure 1 , Figure 2 and Figure 3 This application provides a tunnel furnace, which includes a furnace body 400 and a heating device.

[0043] See Figure 1 , Figure 2 , Figure 3 and Figure 4This application provides a heating device, which includes a frame 100 and at least two heating mechanisms 200.

[0044] Two heating mechanisms 200 are arranged opposite each other in the first direction Z on the frame 100, and a heating space 300 is formed between the two heating mechanisms 200, through which a substrate 600 with a coating surface passes.

[0045] See Figure 2 and Figure 4 Each heating mechanism 200 includes multiple far-infrared heating tubes 210. The multiple far-infrared heating tubes 210 are parallel and spaced apart along the second direction X. The far-infrared heating tube 210 on one heating mechanism 200 and the far-infrared heating tube 210 on another heating mechanism 200 have their vertical projections on the horizontal plane along the first direction Z. The axial direction of the far-infrared heating tube 210, the first direction Z, and the second direction X are perpendicular to each other.

[0046] In this application, the frame 100 refers to the supporting structure used to install and support components such as the heating mechanism 200, which may be, but is not limited to, a frame, a cover, etc.

[0047] Heating mechanism 200 refers to a device for heating substrate 600, which has a front side surface and a back side surface along its thickness direction. Two heating mechanisms 200 can be arranged symmetrically and at intervals along the vertical direction of frame 100 to form heating space 300. The first direction Z corresponds to the vertical direction of frame 100, the second direction X corresponds to the length direction of frame 100, and the axial direction of far-infrared heating tube 210 corresponds to the width direction of frame 100.

[0048] See Figure 1 and Figure 3 The fact that the far-infrared heating tube 210 on one heating mechanism 200 and the far-infrared heating tube 210 on the other heating mechanism 200 coincide in the vertical projection of the far-infrared heating tube 210 on the horizontal plane along the first direction Z can be understood as: along the first direction Z, the far-infrared heating tube 210 on one heating mechanism 200 is directly opposite the corresponding far-infrared heating tube 210 on the other heating mechanism 200.

[0049] There can be multiple sets of heating mechanisms 200. Each set of heating mechanisms 200 includes two heating mechanisms 200 arranged opposite each other along the first direction Z. The heating space formed by each set of heating mechanisms 200 is connected sequentially along the second direction X. One or more sets of heating mechanisms 200 can be arranged on the frame 100 according to the actual length of the substrate 600.

[0050] In this application, a conveying platform 500 may be provided on the frame 100. The conveying platform 500 passes through the heating space 300. The conveying platform 500 is used to convey the substrate 600 along the second direction X to convey the substrate 600 with a coating on its surface to the heating space 300, so that the coating on the surface of the substrate 600 is heated by two heating mechanisms 200 arranged opposite to each other. At the same time, after the heating is completed, the substrate 600 can continue to be conveyed along the second direction X and leave the heating space 300 so that the substrate 600 can enter the next processing step.

[0051] In some embodiments, the front surface of the substrate 600 is coated with a coating, while the back surface of the substrate 600 is not coated. For example, the substrate 600 is a glass substrate, and the coating is a perovskite solution coating, in order to manufacture a solar photovoltaic panel. In other embodiments, both the front and back surfaces of the substrate 600 are coated with a coating. For example, the substrate 600 can be an electrode substrate, and the coating is an active material coating, in order to manufacture electrodes for lithium batteries.

[0052] This application uses a substrate 600 as a glass substrate for manufacturing solar photovoltaic panels, with a coating applied to the front and side surfaces of the substrate 600 and the coating being a perovskite solution coating, as an example to illustrate the specific operation of the heating device. In this example, the first direction Z corresponds to the thickness direction of the substrate 600, and the second direction X corresponds to the length direction of the substrate 600.

[0053] See Figure 2 and Figure 4 The substrate 600 is inserted into the heating space 300 and remains stationary. Two opposing heating mechanisms 200 heat the upper and lower surfaces of the substrate 600, respectively. Multiple far-infrared heating tubes 210 of the upper heating mechanism 200 heat different portions of the coating along its length. The far-infrared rays emitted by the far-infrared heating tubes 210 penetrate the air within the heating space 300, and the far-infrared energy directly acts on the molecules on the front and side surfaces of the substrate 600 and the coating. After absorbing the far-infrared energy, the coating molecules vibrate violently, converting it into heat energy. This achieves heating from the inside of the coating to the surface, promoting coating formation. The heating mechanism 200 below heats different parts of the back surface of the substrate 600 along the length direction with multiple far-infrared heating tubes 210. The far-infrared rays emitted by the far-infrared heating tubes 210 penetrate the air in the heating space 300, and the far-infrared energy directly acts on the back surface of the substrate 600. The molecules inside the substrate absorb the far-infrared energy and convert it into heat through their own vibration. Then, the heat inside the substrate is conducted to the coating through heat conduction, which further promotes the crystallization of the coating, strengthens the adhesion between the coating and the substrate, improves the density of the coating, and improves the temperature uniformity of the coating.

[0054] The heating device of this application embodiment, by providing two opposing heating mechanisms 200 in the first direction Z, allows the far-infrared heating tubes 210 on both heating mechanisms 200 to simultaneously heat both surfaces of the substrate 600 when the coated substrate 600 passes through the heating space 300 between the two heating mechanisms 200, using far-infrared rays emitted by the far-infrared heating tubes 210 to directly radiate heat the coating on the substrate 600. This replaces the air heat conduction and heat convection heating methods used in related technologies, reducing heat loss to the air and eliminating the diffusion effect of airflow and the air's own heat on coating heating. Furthermore, by using far-infrared rays emitted by one of the heating mechanisms 200... The heat pipe 210 and the far-infrared heating pipe 210 on another heating mechanism 200 have their vertical projections along the first direction Z on the horizontal plane coincide, so that the two far-infrared heating pipes 210 facing each other along the first direction Z are directly opposite each other and heat the two opposite surfaces of the same part of the substrate 600 respectively. With the cooperation of multiple far-infrared heating pipes 210 to heat different parts of the coating, the coating on the surface of the substrate 600 is heated more evenly, the temperature difference between different parts of the coating is reduced, the temperature uniformity of the coating is improved, and the coating can be slowly and stably cooled to room temperature during the annealing stage after heating. This reduces the risk of coating crystal fragmentation and coating cracking caused by uneven temperature during the annealing stage and improves the annealing quality of the coating.

[0055] In some embodiments of this application, see Figure 2 and Figure 4 On each heating mechanism 200, multiple far-infrared heating tubes 210 are distributed at equal intervals along the second direction X.

[0056] Specifically, the second direction X corresponds to the length direction of the substrate 600 or the heating space 300, and the first direction Z corresponds to the thickness direction of the substrate 600.

[0057] The two heating mechanisms 200 are located above and below the substrate 600, respectively. The far-infrared heating tube 210 of the upper heating mechanism 200 is directly opposite to the corresponding far-infrared heating tube 210 on the lower heating mechanism 200. The two correspond to the upper and lower sides of the same part on the substrate 600, respectively. Along the length direction of the substrate 600, that is, along the second direction X, the distance between any two adjacent far-infrared heating tubes 210 is equal.

[0058] In this way, different parts of the coating on the surface of the substrate 600 can absorb the far-infrared energy emitted by the far-infrared heating tube 210 more uniformly, promote uniform heat absorption and crystallization of the coating, further improve the temperature uniformity of the coating after heating, and further improve the annealing quality of the coating.

[0059] In some embodiments of this application, see Figure 4 and Figure 5The heating mechanism 200 also includes a bracket 220 and a drive unit 230. Multiple far-infrared heating tubes 210 are detachably mounted on the bracket 220. The output end of the drive unit 230 is connected to the bracket 220 to drive the bracket 220 to move along the first direction Z.

[0060] Specifically, multiple far-infrared heating tubes 210 are suspended on the frame 100 via brackets 220, and a drive unit 230 is fixedly mounted on the frame 100. The output end of the drive unit 230 is connected to the bracket 220 along the first direction Z. The drive unit 230 can be, but is not limited to, a linear cylinder, a lead screw mechanism, etc.

[0061] Based on the different heating requirements of different formulations and types of coatings, the above structure allows the drive component 230 to move the support 220 along the first direction Z, thereby driving multiple far-infrared heating tubes 210 on the support 220 to move along the first direction Z. This accurately adjusts the linear distance between the multiple far-infrared heating tubes 210 and the substrate 600 in the heating space 300, that is, adjusts the coating distance between the multiple far-infrared heating tubes 210 and the surface of the substrate 600. This satisfies the heating requirements of the corresponding formulations and types of coatings applied to the substrate 600, improves the temperature uniformity of the corresponding coatings, and also improves the overall compatibility and adaptability of the heating device.

[0062] In some embodiments, the drive unit 230 can be a combination structure of a servo motor and a ball screw pair to more precisely adjust the distance between the far-infrared heating tube 210 and the surface coating of the substrate 600.

[0063] Further, see Figure 4 and Figure 5 The heating mechanism 200 also includes a guide rod 240 extending along the first direction Z. A guide hole (not shown in the figure) is provided on the frame 100. The guide rod 240 passes through the guide hole and is connected to the bracket 220. The output end of the drive unit 230 is connected to the guide rod 240.

[0064] Specifically, the frame 100 has a closed cover structure, with guide holes opened in the upper part of the frame 100. The heating space 300 between the two heating mechanisms 200 overlaps with part of the cavity of the frame 100. One end of the guide rod 240 is connected to the output end of the drive component 230, and the connection method can be threaded connection, snap-fit ​​connection, pin connection, etc. The other end of the guide rod 240 is connected to the bracket 220, and the connection method can be threaded connection, snap-fit ​​connection, pin connection, etc.

[0065] The aforementioned structure, with the guide rod 240 and guide hole working together, provides positioning and guidance for the support 220 to move along the first direction Z, enabling the support 220 and its multiple far-infrared heating tubes 210 to move more accurately along the first direction Z, accurately adjusting the distance between the far-infrared heating tubes 210 and the coating on the surface of the substrate 600, thereby accurately adjusting the degree of far-infrared radiation heating of the coating to meet the heating requirements of different formulations and types of coatings.

[0066] Further, see Figure 4 and Figure 5 The heating mechanism 200 also includes a linear bearing 250, which is installed in the guide hole, and the guide rod 240 is slidably connected to the linear bearing 250.

[0067] Specifically, the frame 100 is provided with a bearing mounting plate 110, a guide hole is formed on the bearing mounting plate 110, a linear bearing 250 is welded to the guide hole, and a guide rod 240 slides through the linear bearing 250 and is connected to the bracket 220. The axial direction of the linear bearing 250 is the first direction Z.

[0068] The above structure uses the axial length of the guide rod 240 to suspend the bracket 220 and its multiple far-infrared heating tubes 210 within the heating space 300. At the same time, the guide rod 240 is positioned and guided by the linear bearing 250, thereby enabling the bracket 220 and its multiple far-infrared heating tubes 210 to move more accurately along the first direction Z. This accurately adjusts the distance between the far-infrared heating tubes 210 and the coating on the surface of the substrate 600, thereby accurately adjusting the degree of far-infrared radiation heating of the coating to meet the heating requirements of different formulations and types of coatings.

[0069] In some embodiments of this application, see Figure 5 and Figure 6 The heating mechanism 200 also includes a plurality of locking components 260, which are spaced apart along the second direction X on the bracket 220. The locking components 260 are configured to lock or release the corresponding far-infrared heating tube 210 to the bracket 220.

[0070] Specifically, the locking assembly 260 has two rows, which are arranged parallel to each other along the width direction of the bracket 220. The width direction of the bracket 220 coincides with the axial direction of the far-infrared heating tube 210, so that the opposite ends of the far-infrared heating tube 210 are respectively locked onto the bracket 220 by two locking assemblies 260, thereby improving the stability of the installation position of the far-infrared heating tube 210. The locking assembly 260 can be, but is not limited to, a snap-locking structure, an arc-shaped clamp locking structure, etc.

[0071] With the above-described structure, the locking assembly 260 can stably lock the far-infrared heating tube 210 to the connecting bracket 220, keeping the far-infrared heating tube 210 stationary while radiating heat to the coating on the surface of the substrate 600. The multiple far-infrared heating tubes 210 of the vertically distributed heating mechanism 200 simultaneously heat different parts of the coating, improving the temperature uniformity of the coating after heating, thus benefiting the annealing quality of the coating. Furthermore, the far-infrared heating tube 210 can be removed from the bracket 220 by unlocking the locking assembly 260, facilitating maintenance and replacement of the far-infrared heating tube 210.

[0072] In some embodiments of this application, see Figure 5 and Figure 6 The locking assembly 260 includes a base 261, a threaded locking member 262, and two elastic clamping arms 263. The base 261 is disposed on the bracket 220. The two elastic clamping arms 263 are spaced apart on the base 261 along the second direction X. A clamping cavity 264 for clamping the far-infrared heating tube 210 is formed between the two elastic clamping arms 263. One end of the threaded locking member 262 is threaded through one of the elastic clamping arms 263 and connected to the other elastic clamping arm 263.

[0073] Specifically, for the locking assembly 260, the base 261 can be fixed to the bracket 220 by a detachable structure such as screws, bolts, or clips. Of course, the base 261 can also be integrally formed with the bracket 220. The two elastic clamping arms 263 are metal springs. The end of the elastic clamping arm 263 away from the base 261 forms an arc-shaped part, which is adapted to the outer wall of the far-infrared heating tube 210. An arc-shaped clamping cavity 264 is formed between the two elastic clamping arms 263.

[0074] One of the elastic clamping arms 263 has a threaded hole. One end of the threaded locking member 262 is threaded into the threaded hole and fixedly connected to the other elastic clamping arm 263. The end of the threaded locking member 262 away from the elastic clamping arm 263 is provided with an adjustment knob 265. The surface of the adjustment knob 265 is provided with a raised ridge for easy operation by the user.

[0075] The above structure, by turning the adjusting knob 265 on the threaded locking member 262, causes the threaded locking member 262 to move forward and backward, thereby driving the opening and closing angle of the two elastic clamping arms 263. This causes the clamping cavity 264 between the two elastic clamping arms 263 to clamp or release the far-infrared heating tube 210. The clamping tightness can be adjusted according to the different specifications and sizes of the far-infrared heating tube 210. Furthermore, it can relatively reduce the direct contact area between the far-infrared heating tube 210 and other components, improving the absorption and utilization rate of far-infrared rays by the coating on the surface of the substrate 600, and thus improving the heating efficiency of the coating.

[0076] Additionally, see Figure 1 and Figure 3 This application also provides a tunnel furnace, which includes a furnace body 400 and a heating device of any of the above embodiments, with all far-infrared heating tubes 210 suspended inside the furnace body 400.

[0077] The tunnel furnace of this application embodiment, due to the configuration of the above-mentioned heating device, also has the technical effect brought by the heating device, that is, it can heat the coating on the surface of the substrate 600 more uniformly, reduce the temperature difference at different parts of the coating, improve the temperature uniformity of the coating, and thus enable the coating to slowly and stably cool down to room temperature during the annealing stage after heating, reduce the risk of coating crystal fragmentation and coating cracking caused by uneven temperature during the annealing stage, and improve the annealing quality of the coating.

[0078] See Figure 1 and Figure 2 In some embodiments of this application, the tunnel furnace further includes a conveying platform 500, which is disposed in the heating space 300 for conveying the substrate 600 along the second direction X. A plurality of hollow cavities 510 are formed on the conveying platform 500 and spaced apart along the second direction X. The hollow cavities 510 are through along the first direction Z, and the vertical projection of the far-infrared heating tube 210 on the horizontal plane is located within the vertical projection of the hollow cavity 510 on the horizontal plane.

[0079] Specifically, the conveying platform 500 includes a plurality of conveying rollers 520 spaced apart along the second direction X, with a hollow cavity 510 formed between two adjacent conveying rollers 520.

[0080] The above-described structure, with the hollow cavity 510, reduces the obstruction of the substrate 600 surface by the conveying platform 500, allowing the far-infrared heating tubes 210 on the two heating mechanisms 200 to heat the front and back surfaces of the substrate 600 respectively, further improving the temperature uniformity of the coating, improving the annealing quality of the coating, and also improving the absorption and utilization rate of the far-infrared energy emitted by the far-infrared heating tubes 210.

[0081] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0082] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A heating device, characterized in that, include: frame; At least two heating mechanisms are arranged opposite each other in a first direction on the frame, and a heating space is formed between the two heating mechanisms, through which a substrate with a coated surface passes; Each of the heating mechanisms includes multiple far-infrared heating tubes, which are parallel and spaced apart along the second direction. The far-infrared heating tubes on one of the heating mechanisms and the far-infrared heating tubes on another heating mechanism have their vertical projections along the first direction onto the horizontal plane coincide. The axial direction, the first direction, and the second direction of the far-infrared heating tubes are perpendicular to each other.

2. The heating device according to claim 1, characterized in that, On each of the heating mechanisms, a plurality of far-infrared heating tubes are distributed at equal intervals along the second direction.

3. The heating device according to claim 1, characterized in that, The heating mechanism further includes a bracket and a driving component. The plurality of far-infrared heating tubes are detachably mounted on the bracket, and the output end of the driving component is connected to the bracket to drive the bracket to move along the first direction.

4. The heating device according to claim 3, characterized in that, The heating mechanism further includes a guide rod extending along the first direction. A guide hole is provided on the frame. The guide rod passes through the guide hole and is connected to the bracket. The output end of the drive unit is connected to the guide rod.

5. The heating device according to claim 4, characterized in that, The heating mechanism also includes a linear bearing, which is installed in the guide hole, and the guide rod is slidably connected to the linear bearing.

6. The heating device according to claim 3, characterized in that, The heating mechanism further includes a plurality of locking components, which are spaced apart on the bracket along the second direction. The locking components are configured to lock or release the corresponding far-infrared heating tubes on the bracket.

7. The heating device according to claim 6, characterized in that, The locking assembly includes a base, a threaded locking member, and two elastic clamping arms. The base is disposed on the bracket, and the two elastic clamping arms are spaced apart on the base along the second direction. A clamping cavity for clamping the far-infrared heating tube is formed between the two elastic clamping arms. One end of the threaded locking member is threaded through one of the elastic clamping arms and connected to the other elastic clamping arm.

8. The heating device according to claim 7, characterized in that, An adjustment knob is provided at the end of the threaded locking member away from the elastic clamping arm.

9. A tunnel furnace, characterized in that, include: Furnace body; In any one of claims 1 to 8, all of the far-infrared heating tubes are suspended inside the furnace body.

10. The tunnel furnace according to claim 9, characterized in that, The tunnel furnace further includes a conveying platform, which is disposed in the heating space and used to convey the substrate along the second direction; a plurality of hollow cavities are formed on the conveying platform and spaced apart along the second direction, the hollow cavities are connected along the first direction, and the vertical projection of the far-infrared heating tube on the horizontal plane is located within the vertical projection of the hollow cavity on the horizontal plane.

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