Furnace door structure and processing equipment
Patent Information
- Application Number
- CN202522105417.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-29
- Publication Date
- 2026-10-20
- Estimated Expiration
- 2035-09-29
AI Technical Summary
目前，一些具有粉尘产生或用于粉尘加工的加工设备，例如，LPCVD（低压化学气相沉积）设备，使用后其门上的密封圈处会生成粉尘，影响LPCVD设备的腔体密封
[0028]本实用新型的有益效果：本实用新型提供的炉门结构，吹气管通过吹气孔向密封圈喷射清洁气体，清洁气体会将粉尘吹离密封圈并朝挡圈流动，以实现密封圈的清洁，有利于提高清洁效率。且挡圈可以阻挡混有粉尘的清洁气体，并通过抽气孔将混有粉尘的清洁气体抽离，有利于减少粉尘的飞溅，降低粉尘重新落至密封圈上的风险，提高密封圈的清洁度。
Smart Images
Figure CN224872862U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and in particular to a furnace door structure and processing equipment. Background Technology
[0002] With the development of technology, more and more processing equipment is being put into production. Currently, some processing equipment that generates dust or is used for dust processing, such as LPCVD (low-pressure chemical vapor deposition) equipment, will generate dust at the sealing ring on its door after use, affecting the cavity sealing of the LPCVD equipment.
[0003] In related technologies, the dust generated at the sealing ring is usually cleaned by manual brushing, which is inconvenient and has low cleaning efficiency. Utility Model Content
[0004] One objective of this invention is to provide a furnace door structure that facilitates the cleaning of dust at the sealing ring.
[0005] To achieve this objective, the present invention adopts the following technical solution:
[0006] A furnace door structure is provided, comprising:
[0007] Furnace door body;
[0008] A sealing ring is located on the inner side of the furnace door body;
[0009] An air blowing pipe is located on the inner side of the furnace door body and inside the inner ring of the sealing ring. The air blowing pipe is provided with an air blowing hole. The air blowing pipe is configured to spray cleaning gas onto the sealing ring through the air blowing hole to blow away the dust on the sealing ring.
[0010] A baffle ring is connected to the furnace door body and located outside the outer ring of the sealing ring. The baffle ring is provided with an air extraction hole, which is configured to extract the clean gas mixed with the dust at the baffle ring.
[0011] Optionally, the retaining ring is provided with a collection groove, the opening of which is radially toward the sealing ring along the retaining ring, and the collection groove is configured to contain the cleaning gas mixed with the dust.
[0012] Optionally, the retaining ring includes an inner ring plate, a bottom ring plate, an outer ring plate, and a top ring plate connected in sequence. The inner ring plate is sleeved on the outer periphery of the furnace door body. The collecting groove is formed between the inner ring plate, the bottom ring plate, the outer ring plate, and the top ring plate. The opening of the collecting groove is formed between the inner ring plate and the top ring plate. The exhaust hole is provided on the bottom ring plate.
[0013] Optionally, the top end of the inner ring plate is flush with the top end of the sealing ring, or the top end of the inner ring plate is lower than the top end of the sealing ring.
[0014] Optionally, the retaining ring further includes a plurality of connecting strips, which are spaced apart circumferentially along the retaining ring, with one end of each connecting strip connected to the inner ring plate and the other end connected to the top ring plate.
[0015] Optionally, the retaining ring can be detachably mounted on the furnace door body;
[0016] The outer ring of the sealing ring fits against the retaining ring, and multiple air extraction holes are spaced apart along the circumference of the retaining ring.
[0017] Optionally, the air blowing pipe includes:
[0018] The annular tube is located inside the furnace door body and inside the inner ring of the sealing ring. The annular tube has a plurality of air blowing holes spaced apart along its circumference.
[0019] The intake pipe section includes multiple intake pipe sections arranged at circumferential intervals along the annular pipe section, and the intake pipe sections are connected to the annular pipe section.
[0020] The furnace door body is provided with a plurality of limiting holes corresponding to the air inlet pipe, and the air inlet pipe passes through the corresponding limiting holes.
[0021] Another objective of this utility model is to provide a processing device, including a furnace body and a furnace door structure as described in any of the above-mentioned embodiments, wherein the furnace door structure is installed at the furnace opening of the furnace body.
[0022] Optionally, the processing equipment further includes an air extraction device, which is connected to the air extraction port and configured to extract the clean gas mixed with the dust at the baffle ring through the air extraction port.
[0023] Optionally, the air extraction device includes:
[0024] A filter, wherein the air inlet of the filter is connected to the air extraction port;
[0025] An air extraction valve is provided, wherein the air inlet of the air extraction valve is connected to the air outlet of the filter;
[0026] An exhaust fan, wherein the exhaust port of the exhaust fan is connected to the exhaust port of the exhaust valve.
[0027] Optionally, the processing equipment further includes N inlet valves, which are sequentially connected to the air blowing pipe. The clean gas can flow sequentially through the N inlet valves and the air blowing pipe and be injected into the sealing ring through the air blowing hole. At least one of the N inlet valves is configured to divert the clean gas to the outside of the air blowing pipe. Wherein, N≥2.
[0028] The beneficial effects of this utility model are as follows: The furnace door structure provided by this utility model allows the air blowing pipe to spray cleaning gas onto the sealing ring through the air blowing hole. The cleaning gas blows dust away from the sealing ring and flows towards the baffle ring, thereby cleaning the sealing ring and improving cleaning efficiency. Furthermore, the baffle ring can block the cleaning gas mixed with dust, and the dust-laden cleaning gas is extracted through the air extraction hole, which helps reduce dust splashing, lowers the risk of dust falling back onto the sealing ring, and improves the cleanliness of the sealing ring.
[0029] The processing equipment provided by this utility model facilitates the cleaning of dust on the sealing ring, and after cleaning, the furnace door body can form a cavity with good sealing effect with the furnace body through the sealing ring. Attached Figure Description
[0030] Figure 1 This is a schematic diagram of the furnace door structure provided by this utility model at the furnace door body.
[0031] Figure 2 This utility model provides Figure 1 Enlarged structural diagram at point A;
[0032] Figure 3 This is a schematic diagram of the structure of the retaining ring provided by this utility model;
[0033] Figure 4 This is a schematic diagram showing the positional relationship between the furnace door body and the sealing ring provided by this utility model;
[0034] Figure 5 This is a schematic diagram of the air blowing pipe provided by this utility model;
[0035] Figure 6 This is a schematic diagram of the structure of the air extraction device provided by this utility model;
[0036] Figure 7 This is a schematic diagram of the processing equipment provided by this utility model on the air inlet side of the air blowing pipe;
[0037] Figure 8 This is an exploded view of the processing equipment provided by this utility model.
[0038] In the picture:
[0039] 100. Furnace door body; 101. Limiting hole;
[0040] 200. Sealing ring;
[0041] 300. Air blowing pipe; 301. Air blowing port; 310. Annular tube section; 320. Air inlet section;
[0042] 400, retaining ring; 401, collecting trough; 410, inner ring plate; 420, bottom ring plate; 430, outer ring plate; 440, top ring plate; 450, connecting strip; 460, extension tube section;
[0043] 500. Exhaust device; 510. Filter; 520. Exhaust valve; 530. Exhaust fan; 540. Second exhaust pipe; 550. Diverter exhaust component;
[0044] 610. Inlet valve; 611. Manual diaphragm valve; 612. Pneumatic diaphragm valve; 620. Flow meter; 630. Purge and diverter;
[0045] 700. Furnace body. Detailed Implementation
[0046] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0047] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0048] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0049] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0050] Some processing equipment that generates dust or is used for dust-based processes, such as LPCVD (Low-Pressure Chemical Vapor Deposition) equipment, ALD (Atomic Layer Deposition) equipment, SALD (Selective Laser Ablation) equipment, boron diffusion equipment, and phosphorus diffusion equipment, will generate dust at the sealing rings on their doors after use, affecting the sealing of the equipment's cavities. In existing technologies, manual cleaning is usually inconvenient and inefficient.
[0051] To address the aforementioned issues, this embodiment discloses a processing device, which includes a furnace body and a furnace door structure, with the furnace door structure installed at the furnace opening of the furnace body.
[0052] The furnace door structure includes a furnace door body, a sealing ring, an air blowing pipe, and a baffle ring. The sealing ring is located inside the furnace door body. The air blowing pipe is located inside the furnace door body and inside the inner ring of the sealing ring. The air blowing pipe has air blowing holes and is configured to spray cleaning gas onto the sealing ring through the air blowing holes to blow away dust on the sealing ring. The baffle ring is connected to the furnace door body and is located outside the outer ring of the sealing ring. The baffle ring has an air extraction hole and is configured to extract cleaning gas mixed with dust at the baffle ring.
[0053] It is understandable that the inner side of the furnace door body refers to the side of the furnace door body facing the furnace opening.
[0054] It is understandable that a cavity is formed between the furnace body and the furnace door structure.
[0055] In the above setup, the air blowing pipe sprays cleaning gas onto the sealing ring through the air blowing hole. The cleaning gas blows dust away from the sealing ring and flows towards the baffle ring, thus cleaning the sealing ring. The baffle ring blocks the cleaning gas mixed with dust, and the dust-laden cleaning gas is extracted through the air extraction hole, which helps reduce dust splashing, lowers the risk of dust falling back onto the sealing ring, and improves the cleanliness of the sealing ring. After cleaning, the furnace door body can form a cavity with a good sealing effect with the furnace body through the sealing ring.
[0056] Reference Figures 1 to 2 As shown, Figure 1 This is a schematic diagram of the furnace door structure provided in this embodiment at the furnace door body 100. Figure 2 yes Figure 1An enlarged structural diagram at point A. This embodiment provides a furnace door structure, which includes a furnace door body 100, a sealing ring 200, an air blowing pipe 300, and a retaining ring 400. The sealing ring 200 is located inside the furnace door body 100; the air blowing pipe 300 is located inside the furnace door body 100 and within the inner ring of the sealing ring 200, and has an air blowing hole 301. The air blowing pipe 300 is configured to spray cleaning gas onto the sealing ring 200 through the air blowing hole 301 to blow away dust from the sealing ring 200; the retaining ring 400 is connected to the furnace door body 100 and located outside the outer ring of the sealing ring 200, and has an extraction hole (not shown) configured to extract cleaning gas mixed with dust from the retaining ring 400. It is understood that the retaining ring 400 can block the cleaning gas.
[0057] In this embodiment, the air blowing pipe 300 sprays cleaning gas onto the sealing ring 200 through the air blowing hole 301. The cleaning gas blows dust away from the sealing ring 200 and flows towards the baffle ring 400, thereby cleaning the sealing ring 200 and improving cleaning efficiency. Furthermore, the baffle ring 400 can block the cleaning gas mixed with dust and extract the dust-laden cleaning gas through the air extraction hole, which helps reduce dust splashing, lowers the risk of dust falling back onto the sealing ring 200, and improves the cleanliness of the sealing ring 200. It is understood that compared to manually cleaning the sealing ring 200, this furnace door structure can automatically clean the dust on the sealing ring 200, which is beneficial to improving worker safety and reducing wear on the sealing ring 200.
[0058] For example, the cleaning gas can be nitrogen, which, compared to compressed air, helps reduce the risk of water vapor and oil contamination of the furnace door structure.
[0059] For example, the sealing ring 200 can be replaced every one to two years.
[0060] In some embodiments, the retaining ring 400 is detachably mounted on the furnace door body 100. It is understood that after repeated cleaning of the sealing ring 200, dust may accumulate on the retaining ring 400. Removing the retaining ring 400 from the furnace door body 100 facilitates its cleaning. The cleaning of the retaining ring 400 can be completed every three to six months.
[0061] For example, the retaining ring 400 can be fastened to the furnace door body 100 by the first screw (not shown) for easy disassembly and assembly.
[0062] For example, the retaining ring 400 can be fitted around the outer periphery of the furnace door body 100 for easy positioning and assembly.
[0063] In some embodiments, the outer ring of the sealing ring 200 fits against the retaining ring 400, which facilitates the positioning and assembly of the sealing ring 200.
[0064] In some embodiments, multiple air extraction holes are spaced apart along the circumference of the retaining ring 400 to make the air extraction more uniform, which helps to reduce dust splashing, reduce the risk of dust falling back onto the sealing ring 200, and improve the cleanliness of the sealing ring 200.
[0065] For example, there are three to ten air vents, such as four, five or six.
[0066] In some embodiments, continue to refer to Figure 1 and combined Figure 3 As shown, Figure 3 This is a schematic diagram of the retaining ring 400 provided in an embodiment of this application. The retaining ring 400 is provided with a collection groove 401, the opening of which faces the sealing ring 200 radially along the retaining ring 400. The collection groove 401 is configured to contain cleaning gas mixed with dust. In this embodiment, the cleaning gas blows the dust away from the sealing ring 200 and allows it to flow into the collection groove 401, which helps reduce dust splashing and facilitates the concentrated collection of dust.
[0067] In one feasible embodiment, the retaining ring 400 includes an inner ring plate 410, a bottom ring plate 420, an outer ring plate 430, and a top ring plate 440 connected in sequence. The inner ring plate 410 is fitted around the outer periphery of the furnace door body 100, facilitating the positioning and assembly of the retaining ring 400 onto the furnace door body 100. A collection groove 401 is formed between the inner ring plate 410, the bottom ring plate 420, the outer ring plate 430, and the top ring plate 440. The opening of the collection groove 401 is formed between the inner ring plate 410 and the top ring plate 440, facilitating the formation of the collection groove 401. Furthermore, the inner ring plate 410 can prevent dust within the collection groove 401 from contacting the sealing ring 200.
[0068] For example, the top end of the inner ring plate 410 is flush with the top end of the sealing ring 200, or the top end of the inner ring plate 410 is lower than the top end of the sealing ring 200, which facilitates the cleaning gas blowing dust away from the sealing ring 200 and into the collection trough 401. It is understood that the top end of the outer ring plate 430 is higher than the top end of the sealing ring 200. Here, the top end of the inner ring plate 410 refers to the end of the inner ring plate 410 away from the bottom ring plate 420, the top end of the outer ring plate 430 refers to the end of the outer ring plate 430 away from the bottom ring plate 420, and the top end of the sealing ring 200 refers to the end of the sealing ring 200 away from the furnace door body 100.
[0069] For example, the inner ring plate 410 and the outer ring plate 430 are arranged coaxially.
[0070] For example, the bottom ring plate 420 and the top ring plate 440 are parallel to each other.
[0071] For example, the air extraction hole is provided on the bottom ring plate 420, which helps to reduce the risk of dust splashing out of the collection tank 401.
[0072] For example, the outer ring of the sealing ring 200 can fit against the inner ring of the inner ring plate 410.
[0073] For example, the outer periphery of the furnace door body 100 is fitted with the inner ring of the inner ring plate 410.
[0074] In one feasible embodiment, the retaining ring 400 further includes a plurality of connecting strips 450, which are spaced apart circumferentially along the retaining ring 400. One end of each connecting strip 450 is connected to the inner ring plate 410, and the other end is connected to the top ring plate 440. When the sealing ring 200 is disassembled or assembled, the connecting strips 450 can block the sealing ring 200, guiding its assembly and disassembly, thus reducing the risk of the sealing ring 200 becoming stuck in the collecting groove 401. Furthermore, the connecting strips 450 help improve the structural strength of the retaining ring 400 and reduce the risk of deformation.
[0075] In one feasible implementation, the retaining ring 400 is provided with an extension tube 460. For example, the bottom end of the bottom ring plate 420 (i.e. the end of the bottom ring plate 420 away from the top ring plate 440) is provided with an extension tube 460, and the extension tube 460 is connected to the air extraction hole in a one-to-one correspondence.
[0076] In one feasible embodiment, the outer periphery of the extension tube 460 is provided with external threads. The extension tube 460 passes through the furnace door body 100 and is threadedly connected to the first threaded connector. It is understood that the first threaded connector can be a threaded sleeve. In another feasible embodiment, the retaining ring 400 is fitted around the outer periphery of the furnace door body 100. The furnace door body 100 is welded with sheet metal parts (not shown). The extension tube 460 passes through the sheet metal parts and is threadedly connected to the first threaded connector.
[0077] In some embodiments, refer to Figure 4 and Figure 5 As shown, Figure 4 This is a schematic diagram showing the positional relationship between the furnace door body 100 and the sealing ring 200 provided in an embodiment of this application. Figure 5 This is a schematic diagram of the air blowing pipe 300 provided in the embodiment of this application. The air blowing pipe 300 includes an annular pipe portion 310, which is located inside the furnace door body 100 and inside the inner ring of the sealing ring 200. The annular pipe portion 310 is provided with a plurality of air blowing holes 301 spaced apart along its circumference, so as to make the air blowing towards the sealing ring 200 more uniform and to improve the cleanliness of the sealing ring 200.
[0078] In one feasible embodiment, the air blowing pipe 300 further includes an air inlet pipe 320, which is connected to the annular pipe 310. It is understood that the air inlet pipe 320 is used to introduce clean gas, which can flow through the air inlet pipe 320 and the annular pipe 310 in sequence and be sprayed onto the sealing ring 200 through the air blowing hole 301.
[0079] In one feasible embodiment, the air intake pipe 320 is provided with a plurality of air holes 301 that are spaced apart circumferentially along the annular pipe 310, which is beneficial to improve the uniformity of clean gas in the annular pipe 310. In conjunction with the plurality of air holes 301 that are spaced apart circumferentially along the annular pipe 310, the uniformity of air blown toward the sealing ring 200 can be further improved.
[0080] For example, the intake manifold 320 has three to ten, such as four, five or six.
[0081] For example, the air blowing pipe 300 can be fastened to the furnace door body 100 by a second screw connector (not shown) for easy disassembly and assembly. For instance, the outer periphery of the air inlet pipe 320 is provided with external threads, and the second screw connector is provided as a screw sleeve and is fitted onto the air inlet pipe 320 to form a threaded engagement.
[0082] In one feasible implementation, the furnace door body 100 is provided with a plurality of limiting holes 101 corresponding one-to-one with the air inlet pipe 320. The annular pipe 310 is located on the inner side of the furnace door body 100 and on the inner side of the inner ring of the sealing ring 200. The air inlet pipe 320 passes through the corresponding limiting holes 101, which is conducive to the positioning and assembly of the air blowing pipe 300 on the furnace door body 100.
[0083] Reference Figure 1 and Figure 8 As shown, Figure 8 This is an exploded view of the processing equipment provided in the embodiments of this application. This embodiment also provides a processing equipment, which includes a furnace body 700 and a furnace door structure provided in any of the above embodiments. The furnace door structure is installed at the furnace opening of the furnace body 700. In this embodiment, the processing equipment has all the beneficial effects of the aforementioned furnace door structure. It facilitates cleaning dust from the sealing ring 200, and after cleaning, the furnace door body 100 can form a cavity with a good sealing effect with the furnace body 700 through the sealing ring 200, which helps reduce safety hazards such as dangerous gas leakage.
[0084] For example, the furnace body 700 and the furnace door body 100 are separable, wherein the furnace opening of the furnace body 700 can be set downwards.
[0085] For example, the cavity of the processing equipment can be a vertical cavity or a horizontal cavity.
[0086] For example, the processes used in the processing equipment include, but are not limited to, processes that produce dust byproducts, such as LPCVD, ALD, SALD, boron diffusion, and phosphorus diffusion.
[0087] In some embodiments, continue to refer to Figure 1 and combined Figure 6 As shown, Figure 6 This is a schematic diagram of the structure of the air extraction device 500 provided in the embodiment of this application. The processing equipment also includes the air extraction device 500, which is connected to the air extraction hole. The air extraction device 500 is configured to extract clean gas mixed with dust from the baffle ring 400 through the air extraction hole, which is stable and reliable.
[0088] In one feasible implementation, the extraction device 500 includes a filter 510, an extraction valve 520, and an extraction fan 530. The inlet of the filter 510 is connected to the extraction port, the inlet of the extraction valve 520 is connected to the outlet of the filter 510, and the extraction port of the extraction fan 530 is connected to the outlet of the extraction valve 520. In this embodiment, opening the extraction valve 520 and starting the extraction fan 530 draws clean gas from the baffle ring 400 to the filter 510. The filter 510 filters out dust mixed in the clean gas, meaning the dust is retained inside the filter 510. The filtered clean gas is then discharged by the extraction fan 530, thus achieving centralized dust collection.
[0089] For example, the filter 510 is detachably equipped with a water-cooled filter screen, which blocks and collects dust. The water-cooled filter screen can be replaced or cleaned every three to six months, reducing maintenance time, saving maintenance manpower, and indirectly increasing productivity.
[0090] For example, the air inlet of the filter 510 can be connected to the air extraction port through a first extraction pipe (not shown). For instance, the air inlet of the filter 510 is connected to a diversion extraction component 550, which is provided with extraction connectors corresponding to the first extraction pipes. The first extraction pipes and extension pipes 460s are provided in a one-to-one correspondence. One end of the first extraction pipe is connected to the corresponding extension pipe 460, and the other end of the first extraction pipe is connected to the corresponding extraction connector.
[0091] For example, the exhaust port of the exhaust valve 520 can be connected to the intake port of the exhaust fan 530 through the second exhaust pipe 540.
[0092] For example, the opening of the air extraction valve 520 is adjustable, that is, the air extraction valve 520 can adjust the air extraction speed.
[0093] For example, the air extraction valve 520 can be configured as a butterfly valve.
[0094] In some embodiments, continue to refer to Figure 1 and combined Figure 7 As shown, Figure 7 This is a schematic diagram of the processing equipment provided in this application embodiment on the air inlet side of the air blowing pipe 300. The processing equipment also includes N air inlet valves 610, which are sequentially connected to the air blowing pipe 300. Clean gas can flow sequentially through the N air inlet valves 610 and the air blowing pipe 300 and be injected into the sealing ring 200 through the air blowing hole 301. At least one of the N air inlet valves 610 is configured to divert the clean gas to outside the air blowing pipe 300; wherein, N≥2. In this embodiment, the arrangement of the N air inlet valves 610 facilitates the diversion of clean gas, allowing the clean gas to be used in other equipment. For example, the end air inlet valve 610 away from the air blowing pipe 300 can be connected to a gas cylinder as a main valve, and at least one of the remaining air inlet valves 610 can be set as a three-way valve or replaced with a three-way valve to facilitate the diversion of clean gas in the gas cylinder. Understandably, by opening all the air inlet valves 610, the clean gas in the gas cylinder can flow into the air blowing pipe 300 through the air inlet valves 610 to clean the sealing ring 200.
[0095] In one feasible implementation, the processing equipment further includes a flow meter 620, which is connected in series between two adjacent inlet valves 610. The flow meter 620 can detect the flow rate of the cleaning gas, which helps reduce the risk of the cleaning gas flow rate being too high or too low. Excessive flow rate of the cleaning gas can cause dust to splash, hindering dust collection; insufficient flow rate may affect the cleanliness of the sealing ring 200. In this embodiment, the flow meter 620 is connected in series between two adjacent inlet valves 610. When cleaning the sealing ring 200 is not required, the inlet valves 610 remain closed, which helps reduce the risk of dust entering the flow meter 620 and helps maintain the required pressure environment in the cavity formed between the furnace door body 100 and the furnace body 700.
[0096] For example, the processing equipment includes three inlet valves 610, one of which is a manual diaphragm valve 611, and the other two are pneumatic diaphragm valves 612. The manual diaphragm valve 611, one of the two pneumatic diaphragm valves 612, a flow meter 620, the other of the two pneumatic diaphragm valves 612, and an air blowing pipe 300 are sequentially connected. The pneumatic diaphragm valve 612 located between the manual diaphragm valve 611 and the flow meter 620 can be a three-way valve.
[0097] For example, the intake valve 610 can be connected to the air blowing pipe 300 via a connecting pipe (not shown). For instance, the outlet port of the other of the two pneumatic diaphragm valves 612 is connected to a purge diverter 630, which is provided with an outlet connector corresponding to the connecting pipe. The connecting pipe is provided with an intake pipe section 320 corresponding to the other, with one end of the connecting pipe connected to the corresponding intake pipe section 320 and the other end connected to the corresponding outlet connector.
[0098] In this embodiment, after the processing equipment has finished its operation, the furnace door body 100 is first lowered and the product is removed. Then, the exhaust valve 520 and the inlet valve 610 are opened, and the exhaust fan 530 is started. Nitrogen gas in the gas cylinder is sequentially injected into the sealing ring 200 through the inlet valve 610, the inlet pipe 320 and the annular pipe 310 of the blowing pipe 300, and then through the blowing hole 301 to blow the dust away from the sealing ring 200. Under the obstruction of the baffle ring 400 and the suction of the exhaust hole, the dust blown away from the sealing ring 200 can enter the collection groove 401 of the baffle ring 400 and then flow to the filter 510 for filtration and collection through the exhaust hole.
[0099] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A furnace door structure, characterized in that, include: Furnace door body; A sealing ring is located on the inner side of the furnace door body; An air blowing pipe is located on the inner side of the furnace door body and inside the inner ring of the sealing ring. The air blowing pipe is provided with an air blowing hole. The air blowing pipe is configured to spray cleaning gas onto the sealing ring through the air blowing hole to blow away the dust on the sealing ring. A baffle ring is connected to the furnace door body and located outside the outer ring of the sealing ring. The baffle ring is provided with an air extraction hole, which is configured to extract the clean gas mixed with the dust at the baffle ring.
2. The furnace door structure according to claim 1, characterized in that, The retaining ring is provided with a collection groove, the opening of which is radially toward the sealing ring along the retaining ring, and the collection groove is configured to contain the cleaning gas mixed with the dust.
3. The furnace door structure according to claim 2, characterized in that, The retaining ring includes an inner ring plate, a bottom ring plate, an outer ring plate, and a top ring plate connected in sequence. The inner ring plate is sleeved on the outer periphery of the furnace door body. The collecting groove is formed between the inner ring plate, the bottom ring plate, the outer ring plate, and the top ring plate. The opening of the collecting groove is formed between the inner ring plate and the top ring plate. The air extraction hole is provided on the bottom ring plate.
4. The furnace door structure according to claim 3, characterized in that, The top end of the inner ring plate is flush with the top end of the sealing ring, or the top end of the inner ring plate is lower than the top end of the sealing ring.
5. The furnace door structure according to claim 4, characterized in that, The retaining ring also includes a plurality of connecting strips, which are spaced apart circumferentially along the retaining ring. One end of each connecting strip is connected to the inner ring plate, and the other end of each connecting strip is connected to the top ring plate.
6. The furnace door structure according to claim 1, characterized in that, The retaining ring is detachably mounted on the furnace door body; The outer ring of the sealing ring fits against the retaining ring, and multiple air extraction holes are spaced apart along the circumference of the retaining ring.
7. The furnace door structure according to claim 1, characterized in that, The air blowing pipe includes: The annular tube is located inside the furnace door body and inside the inner ring of the sealing ring. The annular tube has a plurality of air blowing holes spaced apart along its circumference. The intake pipe section includes multiple intake pipe sections arranged at circumferential intervals along the annular pipe section, and the intake pipe sections are connected to the annular pipe section. The furnace door body is provided with a plurality of limiting holes corresponding to the air inlet pipe, and the air inlet pipe passes through the corresponding limiting holes.
8. A processing equipment, characterized in that, It includes a furnace body and a furnace door structure as described in any one of claims 1-7, wherein the furnace door structure is installed at the furnace opening of the furnace body.
9. The processing equipment according to claim 8, characterized in that, The processing equipment also includes an air extraction device, which is connected to the air extraction port and is configured to extract the clean gas mixed with the dust at the baffle ring through the air extraction port.
10. The processing equipment according to claim 9, characterized in that, The air extraction device includes: A filter, wherein the air inlet of the filter is connected to the air extraction port; An air extraction valve is provided, wherein the air inlet of the air extraction valve is connected to the air outlet of the filter; An exhaust fan, wherein the exhaust port of the exhaust fan is connected to the exhaust port of the exhaust valve.
11. The processing equipment according to claim 8, characterized in that, The processing equipment further includes N air inlet valves, which are sequentially connected to the air blowing pipe. The clean gas can flow sequentially through the N air inlet valves and the air blowing pipe and be injected into the sealing ring through the air blowing hole. At least one of the N air inlet valves is configured to divert the clean gas to the outside of the air blowing pipe. Wherein, N≥2.