A ceramic substrate warpage detection device

CN224873076UActive Publication Date: 2026-10-20FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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Patent Information

Application Number
CN202621385116.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2026-09-03
Publication Date
2026-10-20
Estimated Expiration
2036-09-03

AI Technical Summary

Technical Problem

[0004]然而,定位槽为保证定位效果往往具有一定深度,基板放入后其上表面明显低于定位板上平面,操作人员取件时手指难以直接触及基板边缘或底部,通常需要借助镊子、真空吸笔等工具辅助夹取或吸附,此举不仅额外增加了取放步骤,也延长了单个产品的检测节拍,不利于批量产线的高效流转,而且在工具操作过程中容易划伤基板表面或造成边缘微裂纹,降低产品良率,整体实用性有待提高,因此,针对上述问题提出一种陶瓷基板翘曲度检测装置

Benefits of technology

1.本实用新型通过设置顶料组件,利用移动板、连接块与顶板的配合,检测完成后只需转动转动筒,即可通过转动板和转动杆的传动使顶板沿定位槽上升,将陶瓷基板平稳顶出,便于操作人员直接徒手取件,无需借助镊子或真空吸笔等辅助工具,有效简化了取料步骤,缩短了单个产品的检测节拍,显著提升了批量产线的流转效率。

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Abstract

The utility model relates to the field of ceramic substrate detection, specifically is a kind of ceramic substrate warping degree detection device, including operation platform, the operation platform side wall is provided with detection control frame, the operation platform top side is equipped with control slide rail, the control slide rail top is equipped with mounting plate by slider, the mounting plate top side is equipped with locating plate, the locating plate top side is equipped with locating groove, the locating plate inner wall is provided with material pushing subassembly, the mounting plate inner wall is provided with limiting component, the material pushing subassembly includes moving plate;The utility model is equipped with material pushing subassembly, utilizes the cooperation of moving plate, connecting block and top plate, after detection, only need to rotate rotating cylinder, can make top plate rise along locating groove by the transmission of rotating plate and rotating rod, ceramic substrate is stably pushed out, it is convenient for operator to take piece directly by hand, without the aid of pincette or vacuum suction pen and other auxiliary tools, effectively simplify the material taking step.
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Description

Technical Field

[0001] This utility model relates to the field of ceramic substrate testing, specifically a ceramic substrate warpage testing device. Background Technology

[0002] Ceramic substrates are widely used in power electronics, semiconductor packaging and microwave components, such as IGBT modules, high-power LEDs and system-in-package. Their warpage is a key indicator affecting the subsequent mounting accuracy, soldering reliability and device life. Due to the mismatch between the conductor paste and ceramic shrinkage during the sintering process, the substrate is prone to non-uniform deformation. It is necessary to accurately quantify its warpage degree through a special testing device in order to screen qualified products.

[0003] Existing small laser warp detection devices mostly use a positioning plate and a positioning groove to fix the ceramic substrate. During detection, the positioning plate is driven to move horizontally relative to the laser detection head. The laser displacement sensor (such as the triangulation method or the confocal principle) is used to scan the surface of the substrate to obtain Z-axis height data of multiple points, and then calculate the overall warp value. The sidewall of the positioning groove can effectively restrict the movement of the substrate in the horizontal direction, avoid positional deviation during the scanning process, and thus ensure measurement repeatability.

[0004] However, the positioning groove often has a certain depth to ensure the positioning effect. After the substrate is placed, its upper surface is significantly lower than the upper surface of the positioning plate. When the operator picks up the part, it is difficult to directly touch the edge or bottom of the substrate with their fingers. Usually, it is necessary to use tools such as tweezers or vacuum suction pens to assist in picking up or adsorbing it. This not only adds extra picking and placing steps, but also prolongs the inspection cycle of a single product, which is not conducive to the efficient flow of mass production lines. Moreover, the substrate surface is easily scratched or micro-cracks are caused during tool operation, reducing the product yield. The overall practicality needs to be improved. Therefore, a ceramic substrate warpage detection device is proposed to address the above problems. Utility Model Content

[0005] In order to overcome the shortcomings of the prior art and solve at least one of the technical problems mentioned in the background art, this utility model proposes a ceramic substrate warpage detection device.

[0006] The technical solution adopted by this utility model to solve its technical problem is: a ceramic substrate warpage detection device, including an operating platform, a detection control frame provided on the side wall of the operating platform, a control slide rail installed on the top side of the operating platform, an installation plate installed on the top of the control slide rail via a slider, a positioning plate installed on the top side of the installation plate, a positioning groove opened on the top side of the positioning plate, a top-feeding assembly provided on the inner wall of the positioning plate, a limit assembly provided on the inner wall of the installation plate, the top-feeding assembly including a moving plate, the moving plate being slidably connected to the inner wall of the positioning plate, a connecting block being fixedly connected to the top side of the moving plate, the outer wall of the connecting block being slidably connected to the inner wall of the positioning plate, a top plate being fixedly connected to the top side of the connecting block, and the outer wall of the top plate being slidably connected to the inner wall of the positioning groove.

[0007] Preferably, the top material assembly further includes a rotating cylinder, which is rotatably connected to the inner wall of the positioning plate. A rotating plate is fixedly connected to the outer wall of the rotating cylinder. A through groove is provided on the top side of the moving plate. The end of the rotating plate is slidably disposed on the inner wall of the through groove. A rectangular groove is provided on the inner wall of the through groove. A rotating rod is rotatably connected to the side wall of the end of the rotating plate. The rotating rod rolls on the inner wall of the rectangular groove.

[0008] Preferably, the limiting component includes a sliding strip, which is slidably connected to the inner wall of the mounting plate. A limiting plate is fixedly connected to the side wall of the sliding strip. An insertion strip is fixedly connected to the bottom side of the mounting plate. An insertion groove is provided on the top side of the mounting plate. The insertion strip is inserted into the inner wall of the insertion groove. A limiting groove is provided on the side wall of the insertion strip. The limiting plate is inserted into the inner wall of the limiting groove.

[0009] Preferably, a pull rod is slidably connected to the inner wall of the rotating cylinder, and an insert plate is slidably connected to the inner wall of the end of the rotating cylinder. The insert plate is fixed to the end side of the pull rod, and an X-shaped groove is formed on the inner wall of the mounting plate. The insert plate is inserted into the inner wall of the X-shaped groove.

[0010] Preferably, the limiting component further includes a fixing block, which is fixedly connected to the side wall of the mounting plate. A bidirectional threaded rod is rotatably connected to the inner wall of the fixing block, and the end of the sliding bar is threadedly connected to the outer wall of the end of the bidirectional threaded rod.

[0011] Preferably, a spring is sleeved on the outer wall of the pull rod, one end of the spring is fixed to the outer wall of the pull rod, and the other end of the spring is fixed to the inner wall of the rotating cylinder.

[0012] Preferably, a fixing ring is fixedly connected to the outer wall of the end of the rotating cylinder, and an annular groove is formed on the inner wall of the mounting plate, with the fixing ring rotatably connected to the inner wall of the annular groove.

[0013] The advantages of this utility model are: 1. This utility model, by setting up a top material assembly, utilizes the cooperation of the moving plate, connecting block and top plate. After the inspection is completed, simply rotate the rotating cylinder, and the top plate will rise along the positioning groove through the transmission of the rotating plate and rotating rod, and the ceramic substrate will be smoothly ejected. This makes it easy for operators to pick up the parts by hand without the need for auxiliary tools such as tweezers or vacuum suction pens, which effectively simplifies the material picking steps, shortens the inspection cycle of a single product, and significantly improves the turnover efficiency of the mass production line.

[0014] 2. This utility model, by setting a limiting component, uses a bidirectional threaded rod to drive the sliding bar and the limiting plate to move synchronously, so that the limiting plate can be inserted into or disengaged from the limiting groove on the side wall of the plug-in bar, realizing the quick locking or separation of the plug-in bar and the plug-in groove. This completes the convenient assembly and disassembly of the positioning plate and the mounting plate, which facilitates the quick replacement of the appropriate positioning plate according to different specifications of ceramic substrates, effectively improving the versatility and maintenance convenience of the equipment. With the locking structure of the X-shaped groove and the plug-in plate, it can ensure that the top plate maintains a stable height after being lifted, preventing the substrate from accidentally falling back during the picking and placing process, further enhancing the reliability and safety of operation. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall device of this utility model; Figure 2 This is a schematic diagram of the disassembled cross-sectional structure of the control slide rail and mounting plate of this utility model; Figure 3 This is a schematic diagram of the disassembled cross-sectional structure of the rotating cylinder and the moving plate of this utility model; Figure 4 This utility model Figure 2 An enlarged structural diagram of region A; Figure 5 This utility model Figure 2 A magnified structural diagram of region B.

[0017] In the diagram: 1. Operating platform; 2. Detection control frame; 3. Control slide rail; 4. Mounting plate; 5. Positioning plate; 6. Top plate; 61. Tie rod; 62. Rotating cylinder; 63. Through groove; 64. Moving plate; 65. Rectangular groove; 66. Connecting block; 67. Fixing ring; 68. Insert plate; 69. Spring; 610. Rotating plate; 611. Rotating rod; 7. Bidirectional threaded rod; 71. Insertion strip; 72. Limiting groove; 73. Limiting plate; 74. Sliding strip; 75. Fixing block; 8. Positioning groove; 9. Annular groove; 10. Insertion groove; 11. X-shaped groove. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] The following is in conjunction with the appendix Figure 1 - Figure 5 This application will be described in further detail. This application discloses a device for detecting the warpage of a ceramic substrate: Reference Figure 1 - Figure 3 A ceramic substrate warpage detection device includes an operating platform 1, a detection control frame 2 mounted on the side wall of the operating platform 1, a control slide rail 3 mounted on the top side of the operating platform 1, a mounting plate 4 mounted on the top of the control slide rail 3 via a slider, a positioning plate 5 mounted on the top side of the mounting plate 4, a positioning groove 8 formed on the top side of the positioning plate 5, a material ejection assembly mounted on the inner wall of the positioning plate 5, and a limit assembly mounted on the inner wall of the mounting plate 4. The material ejection assembly includes a movable plate 64, which is slidably connected to the inner wall of the positioning plate 5. A connecting block 66 is fixedly connected to the top side of the movable plate 64. The outer wall of the top plate 6 is slidably connected to the inner wall of the positioning plate 5. The top plate 6 is fixed to the top side of the connecting block 66. The outer wall of the top plate 6 is slidably connected to the inner wall of the positioning groove 8. During operation and testing, the ceramic substrate is placed in the positioning groove 8 on the top side of the positioning plate 5. The control slide rail 3 drives the mounting plate 4 and the positioning plate 5 to move horizontally. The warpage scanning is completed in conjunction with the detection control frame 2. When picking up the part, the moving plate 64 slides upward along the inner wall of the positioning plate 5. Through the transmission of the connecting block 66, the top plate 6 is pushed up from the bottom of the positioning groove 8, and the substrate is pushed out smoothly. It is easy to pick up by hand without the need for external tools.

[0020] Reference Figure 1 - Figure 3The top material assembly also includes a rotating cylinder 62, which is rotatably connected to the inner wall of the positioning plate 5. A rotating plate 610 is fixed to the outer wall of the rotating cylinder 62. A through groove 63 is provided on the top side of the moving plate 64. The end of the rotating plate 610 is slidably disposed on the inner wall of the through groove 63. A rectangular groove 65 is provided on the inner wall of the through groove 63. A rotating rod 611 is rotatably connected to the side wall of the end of the rotating plate 610. The rotating rod 611 rolls on the inner wall of the rectangular groove 65. During operation, rotating the rotating cylinder 62 causes the rotating plate 610 on its outer wall to swing accordingly. The rotating rod 611 at the end of the rotating plate 610 rolls along the rectangular groove 65 on the moving plate 64, converting the rotational motion into the lifting motion of the moving plate 64. Thus, the connecting block 66 controls the top plate 6 to be ejected or reset, enabling easy loading and unloading of the substrate.

[0021] Reference Figure 1 - Figure 2 and Figure 4 The limiting component includes a sliding strip 74, which is slidably connected to the inner wall of the mounting plate 4. A limiting plate 73 is fixedly connected to the side wall of the sliding strip 74. An insertion strip 71 is fixedly connected to the bottom side of the mounting plate 4. An insertion groove 10 is opened on the top side of the mounting plate 4. The insertion strip 71 is inserted into the inner wall of the insertion groove 10. A limiting groove 72 is opened on the side wall of the insertion strip 71. The limiting plate 73 is inserted into the inner wall of the limiting groove 72. The limiting component also includes a fixing block 75, which is fixedly connected to the side wall of the mounting plate 4. A bidirectional threaded rod 7 is rotatably connected to the inner wall of the fixing block 75. The end of the sliding strip 74 is threadedly connected to the outer wall of the end of the bidirectional threaded rod 7. During operation, rotating the bidirectional threaded rod 7 drives the sliding strips 74 and the limiting plates 73 on both sides to move synchronously towards or away from each other. When the limiting plate 73 is inserted into the limiting groove 72 on the side wall of the connector strip 71, the connector strip 71 is locked in the connector groove 10, thus completing the stable connection between the positioning plate 5 and the mounting plate 4; when rotated in the opposite direction, the limiting plate 73 is disengaged from the limiting groove 72, and the connector strip 71 can be quickly pulled out, realizing the convenient disassembly and replacement of the positioning plate 5.

[0022] Reference Figure 1 - Figure 3 and Figure 5A pull rod 61 is slidably connected to the inner wall of the rotating cylinder 62. An insert plate 68 is slidably connected to the inner wall of the end of the rotating cylinder 62. The insert plate 68 is fixed to the end side of the pull rod 61. An X-shaped groove 11 is opened on the inner wall of the mounting plate 4. The insert plate 68 is inserted into the inner wall of the X-shaped groove 11. A spring 69 is sleeved on the outer wall of the pull rod 61. One end of the spring 69 is fixed to the outer wall of the pull rod 61, and the other end of the spring 69 is fixed to the inner wall of the rotating cylinder 62. During operation, the pull rod 61 is pulled outward. As the pull rod 61 retracts, the insert plate 68 is compressed, causing the spring 69 to disengage from the X-shaped groove 11 on the inner wall of the mounting plate 4. This releases the angle lock of the rotating cylinder 62, allowing it to rotate freely to drive the top plate 6 to rise and fall. After the pull rod 61 is released, the spring 69 resets and pushes the insert plate 68 back into the X-shaped groove 11, locking the current angle of the rotating cylinder 62 to ensure that the top plate 6 remains at the required height and to prevent the substrate from falling accidentally during loading and unloading.

[0023] Reference Figure 1 - Figure 3 A fixing ring 67 is fixedly connected to the outer wall of the end of the rotating cylinder 62. An annular groove 9 is provided on the inner wall of the mounting plate 4. The fixing ring 67 is rotatably connected to the inner wall of the annular groove 9. During operation, when the rotating cylinder 62 rotates, the fixing ring 67 at its end rotates smoothly in the annular groove 9 on the inner wall of the mounting plate 4. The annular groove 9 provides radial limit and axial support for the fixing ring 67, ensuring that the rotating cylinder 62 runs smoothly and the axis does not deviate. At the same time, it reduces frictional resistance, makes the material ejection operation smoother, and extends the service life of the components.

[0024] Working principle: When in use, multiple sets of products are placed on the inner wall of the positioning groove 8 in sequence. Then, the detection control frame 2 and the control slide rail 3 are activated to control the detection mechanism and the products to move, thereby achieving the detection effect. The above detection principle and method are existing technologies and can be implemented by those skilled in the art. Since they are existing technologies, they will not be described in detail in this case.

[0025] When material needs to be removed, the pull rod 61 can be pulled to move the insert plate 68. The pull rod 61 will compress the spring 69, and the insert plate 68 will disengage from the inner wall of the X-shaped groove 11. At this time, the rotating cylinder 62 can be rotated. The rotating plate 610 will rotate around the center of the rotating cylinder 62. The end of the rotating plate 610 will drive the rotating rod 611 to slide on the inner wall of the rectangular groove 65, and drive the moving plate 64 to move. The moving plate 64 will drive the top plate 6 to move out of the inner wall of the positioning groove 8 through the connecting block 66. The top plate 6 will push the product out. When the top plate 6 is flush with the opening of the positioning groove 8, the pull rod 61 can be released. The spring 69 will push the pull rod 61 back to its original position through its own elasticity, so that the insert plate 68 is inserted into the inner wall of the X-shaped groove 11. In this state, the product can be easily removed, and the surface of the top plate 6 can also be cleaned to ensure that the product is placed stably and flat inside the positioning groove 8.

[0026] When it is necessary to disassemble the mounting plate 4, the bidirectional threaded rod 7 can be rotated to drive the sliding strip 74 and the limiting plate 73 to move synchronously, so that the limiting plate 73 is disengaged from the inner wall of the limiting groove 72. Then, the mounting plate 4 can be pushed directly to disengage the connector strip 71 from the inner wall of the connector groove 10. During installation, the connector strip 71 can be fully inserted into the inner wall of the connector groove 10, and finally the bidirectional threaded rod 7 can be rotated in the opposite direction.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A ceramic substrate warpage detection device, comprising an operating platform (1), characterized in that: The operating platform (1) is provided with a detection control frame (2) on its side wall. The operating platform (1) is provided with a control slide rail (3) on its top side. The control slide rail (3) is provided with a mounting plate (4) on its top side via a slider. The mounting plate (4) is provided with a positioning plate (5) on its top side. The positioning plate (5) is provided with a positioning groove (8) on its top side. The positioning plate (5) is provided with a top material assembly on its inner wall. The mounting plate (4) is provided with a limit assembly on its inner wall. The top material assembly includes a moving plate (64). The moving plate (64) is slidably connected to the inner wall of the positioning plate (5). The moving plate (64) is fixedly connected to the top side of the moving plate (64). The outer wall of the connecting block (66) is slidably connected to the inner wall of the positioning plate (5). The top side of the connecting block (66) is fixedly connected to a top plate (6). The outer wall of the top plate (6) is slidably connected to the inner wall of the positioning groove (8).

2. The ceramic substrate warpage detection device according to claim 1, characterized in that: The top material assembly also includes a rotating cylinder (62), which is rotatably connected to the inner wall of the positioning plate (5). A rotating plate (610) is fixed to the outer wall of the rotating cylinder (62). A through groove (63) is provided on the top side of the moving plate (64). The end of the rotating plate (610) is slidably disposed on the inner wall of the through groove (63). A rectangular groove (65) is provided on the inner wall of the through groove (63). A rotating rod (611) is rotatably connected to the side wall of the end of the rotating plate (610). The rotating rod (611) rolls on the inner wall of the rectangular groove (65).

3. The ceramic substrate warpage detection device according to claim 1, characterized in that: The limiting component includes a sliding strip (74), which is slidably connected to the inner wall of the mounting plate (4). A limiting plate (73) is fixedly connected to the side wall of the sliding strip (74). A plug strip (71) is fixedly connected to the bottom side of the mounting plate (4). A plug groove (10) is provided on the top side of the mounting plate (4). The plug strip (71) is inserted into the inner wall of the plug groove (10). A limiting groove (72) is provided on the side wall of the plug strip (71). The limiting plate (73) is inserted into the inner wall of the limiting groove (72).

4. The ceramic substrate warpage detection device according to claim 2, characterized in that: A pull rod (61) is slidably connected to the inner wall of the rotating cylinder (62), and an insert plate (68) is slidably connected to the inner wall of the end of the rotating cylinder (62). The insert plate (68) is fixed to the end side of the pull rod (61). An X-shaped groove (11) is opened on the inner wall of the mounting plate (4), and the insert plate (68) is inserted into the inner wall of the X-shaped groove (11).

5. The ceramic substrate warpage detection device according to claim 3, characterized in that: The limiting component also includes a fixing block (75), which is fixed to the side wall of the mounting plate (4). The inner wall of the fixing block (75) is rotatably connected to a bidirectional threaded rod (7), and the end of the sliding bar (74) is threaded to the outer wall of the end of the bidirectional threaded rod (7).

6. The ceramic substrate warpage detection device according to claim 4, characterized in that: A spring (69) is fitted on the outer wall of the pull rod (61). One end of the spring (69) is fixed to the outer wall of the pull rod (61), and the other end of the spring (69) is fixed to the inner wall of the rotating cylinder (62).

7. The ceramic substrate warpage detection device according to claim 6, characterized in that: A fixing ring (67) is fixed to the outer wall of the end of the rotating cylinder (62), and an annular groove (9) is opened on the inner wall of the mounting plate (4). The fixing ring (67) is rotatably connected to the inner wall of the annular groove (9).