Crystal growth temperature measuring device with rotation function

Abstract

The utility model discloses a crystal growth temperature measuring equipment with rotation function, include: crystal bearing, crystal bearing is used for rotating setting in the thermal field, and the temperature measuring thermocouple is set up on the crystal bearing, support part, support part connects crystal bearing and extends the thermal field, conductive slip ring, conductive slip ring has the stator and the rotor that rotates setting in the stator, and the rotor connects support part and with temperature measuring thermocouple electricity is connected, and the stator is connected with output wire, and the rotor that rotates is contacted with the stator to make output wire with temperature measuring thermocouple conduction, cooling piece, cooling piece sets up on conductive slip ring to carry out heat dissipation to the inside of conductive slip ring. Solve the crystal growth temperature measuring equipment operation stability poor of prior art and easily lead to temperature measuring failure, temperature measuring thermocouple poor performance, the problem that the protection pipe poor heat shock resistance and temperature measuring point density are low.

Description

Technical Field

[0001] This invention belongs to the field of crystal growth technology, and particularly relates to a crystal growth temperature measuring device with rotation function, which is suitable for single crystal growth processes under high temperature and oxidizing atmosphere, especially for real-time temperature monitoring and control of high temperature melt crystals such as gallium oxide. Background Technology

[0002] During gallium oxide single crystal growth, the crucible stage needs to be continuously rotated (5-20 rpm) to optimize crystal quality. Temperature is the most critical parameter in crystal growth, directly affecting the growth process and determining the crystal's performance and quality. In particular, the actual temperature measured close to the crucible most directly reflects the actual crystal growth situation and is an important means of monitoring the crystal growth process. Therefore, it is essential to measure the actual temperature at relevant points on the crucible during crystal growth to precisely control the temperature and obtain high-quality crystals.

[0003] Existing rotating temperature measurement platforms for crystal growth typically employ conductive slip rings to conduct electricity during rotation, preventing the wires of the temperature measurement circuit from becoming tangled or knotted. However, the thermal field temperature during gallium oxide single crystal growth can reach as high as 1800℃. At such high temperatures, the crucible temperature is easily conducted to the conductive slip ring. Overheating of the slip ring can cause component expansion, and the contact and fit between components during rotation are easily affected by the high temperature, leading to poor operational stability of the conductive slip ring.

[0004] Furthermore, existing thermocouples have significant limitations in adaptability to high-temperature oxidizing environments. For example, the commonly used Type B thermocouples (PtRh30-PtRh6) have a long-term operating temperature limit of only 1600℃, which cannot meet the temperature measurement requirements for gallium oxide crystal growth. While tungsten-rhenium thermocouples have higher temperature resistance, they are only suitable for reducing or inert atmospheres and will rapidly oxidize and fail in oxygen environments. Simultaneously, thermocouple protection tubes often crack at high temperatures due to poor thermal shock resistance, leading to thermocouple oxidation or short circuits, further limiting their application in practical high-temperature conditions.

[0005] In addition, existing temperature measuring equipment usually only sets up temperature measuring points in a single location, which makes it difficult to fully reflect the temperature field distribution during crystal growth, thus limiting the accuracy of process control and further improvement of crystal quality.

[0006] Therefore, there is an urgent need to develop a crystal growth temperature measurement device that can operate stably under high temperature and oxidizing atmosphere, has a rotation function, and supports multiple temperature measurement points, in order to solve the shortcomings of existing technologies in terms of conductive slip ring heat dissipation, thermocouple high temperature adaptability, protective tube thermal shock resistance, and temperature measurement point layout. Utility Model Content

[0007] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a crystal growth temperature measuring device with rotation function, so as to solve the problem of poor operation stability of the conductive slip ring caused by heating when operating near high temperature in the prior art.

[0008] The technical solution of this utility model is as follows: This utility model proposes a crystal growth temperature measuring device with rotation function, comprising: A crystal carrier is used to be rotatably mounted in a thermal field, and a temperature measuring thermocouple is installed on the crystal carrier. The support section connects to the crystal carrier and extends into the thermal field; A conductive slip ring has a stator and a rotor rotatably disposed within the stator. The rotor is connected to a support and electrically connected to a temperature measuring thermocouple. The stator is connected to an output wire. The rotating rotor contacts the stator to make the output wire conduction with the temperature measuring thermocouple. A cooling component is installed on the conductive slip ring to dissipate heat from the inside of the conductive slip ring.

[0009] Optionally, the cooling component includes: a cooling channel, which is formed inside the stator, and has an inlet and an outlet, which are respectively connected to external water cooling pipes.

[0010] Optionally, the cooling channel is a copper alloy pipe.

[0011] Optionally, the cooling channels are spirally arranged inside the stator.

[0012] Optionally, a contact conductive track is provided on the outer wall of the rotor, which is electrically connected to a temperature measuring thermocouple, and a lever is provided on the stator, which elastically abuts against the contact conductive track.

[0013] Optionally, the paddle is a graphite-silver composite paddle, and the contact conductive track is a platinum-rhodium alloy track.

[0014] Optionally, multiple sets of paddles are provided, and multiple contact conductive rails are spaced apart along the axial direction of the rotor, with multiple contact conductive rails corresponding to multiple sets of paddles.

[0015] Optionally, the support part is provided with a hollow hole, the temperature measuring thermocouple extends into the hollow hole, and a protective tube is fitted on the temperature measuring thermocouple. Optionally, the protective tube is an alumina protective tube.

[0016] Optionally, the crystal carrier includes a crucible, and multiple temperature-measuring thermocouples are provided, with one end of each thermocouple distributed at different positions along the outer wall of the crucible.

[0017] Optionally, the temperature measuring thermocouple is spirally wound along the outer wall of the crucible and fixed by passing through a protective tube.

[0018] Optionally, a heat-resistant insulating layer is fixedly provided between the rotor and the support.

[0019] Optionally, the crystal support is a crucible.

[0020] Optionally, the temperature measuring thermocouple is a platinum-rhodium thermocouple.

[0021] Optionally, the support part is an alumina ceramic rod.

[0022] Optionally, the crystal growth temperature measuring equipment also includes a power mechanism, which is connected to the support unit and drives the crystal carrier to rotate; The power mechanism includes: an electric motor, which is positioned away from the support. Speed ​​reducer; the speed reducer connects to the motor shaft. A drive belt assembly that connects the reducer's shaft and support.

[0023] The beneficial effects of this invention's crystal growth temperature measurement device with rotation function are at least as follows: By setting a conductive slip ring and employing a conductive structure that combines the slip ring and brush, the signal from the thermocouple is transmitted uninterruptedly during the continuous rotation (5-20 rpm) of the crystal carrier, thus smoothly transmitting the detection signal to the output wire and the external temperature measuring instrument. This solves the problem of temperature measurement failure caused by wire entanglement in traditional methods. Furthermore, a cooling component is installed inside the conductive slip ring. When the internal temperature of the conductive slip ring rises due to the influence of the thermal field, the cooling component dissipates heat from the conductive slip ring, thereby preventing overheating and expansion of the component, which could lead to loosening or detachment. This improves the operational stability of the crystal growth temperature measurement device, extends its service life, and reduces maintenance costs. Attached Figure Description

[0024] Figure 1 This is a schematic diagram illustrating the structural principle of a crystal growth temperature measuring device with rotation function according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the main structure of a crystal growth temperature measuring device with rotation function according to an embodiment of the present invention; Figure 3 This is a cross-sectional view of the main structure of a crystal growth temperature measuring device with rotation function according to an embodiment of the present invention; Figure 4 for Figure 3 Enlarged view of point A; Figure 5 This is an exploded view of the main structure of a crystal growth temperature measuring device with rotation function according to an embodiment of the present invention.

[0025] The following are the labels in the diagram: 10. Hot zone; 11. Bottom cover plate; 100. Crystal support; 110. Crucible platform; 111. Crucible; 120. Thermocouple; 130. Protective tube; 200. Support; 210. Connecting plate; 220. Ceramic rod; 300. Conductive slip ring; 310. Stator; 311. Paddle; 312. Spiral mounting groove; 320. Rotor; 321. Contact conductive track; 322. Temperature-resistant insulation layer; 400. Cooling component; 410. Cooling channel; 420. Water inlet; 430. Water outlet; 500. Power mechanism; 510. Motor; 520. Reducer; 530. Transmission belt assembly; 540. Motor frame. Detailed Implementation

[0026] This utility model provides a crystal growth temperature measuring device with rotation function. To make the purpose, technical solution, and effects of this utility model clearer and more explicit, the following describes this utility model in further detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit this utility model.

[0027] It should be noted that in annotations, leader lines with arrows represent non-solid areas such as holes and slots, or non-specific solid features such as higher-level features, or specific directions. Leader lines without arrows represent solid features or specific lower-level features.

[0028] When a component is referred to as "fixed to" or "set on" another component, it may be directly or indirectly located on that other component. When a component is referred to as "connected to" another component, it may be directly or indirectly connected to that other component. The terms "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or position based on the accompanying drawings, and are for ease of description only, and should not be construed as limiting the technical solution. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. "A plurality of" means two or more, unless otherwise explicitly defined.

[0029] In the traditional vertical Bridgman (VB) method for growing gallium oxide (β-Ga2O3) crystals, the thermocouple measuring points cannot rotate synchronously with the crucible stage. The wires become entangled and cross-linked due to rotation, leading to signal interruption or short circuits. Furthermore, the choice of thermocouple materials is limited in high-temperature oxidizing environments. Existing tungsten-rhenium thermocouples (W-Re) are only suitable for reducing atmospheres and rapidly oxidize and fail in oxygen. Type B thermocouples (PtRh30-PtRh6) have a maximum operating temperature of only 1600℃, which cannot meet the requirements of the gallium oxide melting temperature (1800℃). This results in poor stability of existing thermocouples in oxidizing environments of 1800-1850℃. Additionally, the protective tube also has defects. Conventional magnesium oxide protective tubes are prone to cracking at high temperatures, leading to thermocouple oxidation or short circuits. Excessive length of the protective tube (e.g., 800 mm) results in excessive rigidity, making it difficult to bend and prone to breakage due to mechanical stress. Therefore, existing equipment suffers from large temperature measurement errors, inaccurate temperature field measurements, and high defect density due to fluctuations at the crystal growth interface. Furthermore, the thermocouple lifespan is less than 50 hours, and frequent replacements increase costs.

[0030] Therefore, this embodiment proposes a crystal growth temperature measurement device with rotation function. During gallium oxide single crystal growth, the crucible stage continuously rotates the crucible (5-20 rpm) at high temperatures (above 1800℃) during the process to optimize crystal quality. Real-time temperature monitoring under high temperature and oxidizing atmosphere is required. To meet the need for multiple temperature measurement points (≥3 points), the wiring of the temperature measurement circuit can accommodate complex routing requirements while avoiding tangling or breakage of the thermocouple wires. Specifically: like Figure 1 , Figure 2 As shown, this embodiment proposes a crystal growth temperature measurement device with rotation function, mainly including: a crystal carrier 100, a support 200, a conductive slip ring 300, and a cooling component 400. The crystal carrier 100 can be a crucible platform 110 and a crucible 111 that moves up and down on it. The crucible platform 110 and the crucible 111 are placed in a thermal field 10 for heating. The thermal field 10 can be the internal space of a growth furnace. Gallium oxide (β-Ga2O3) crystal is grown in the crucible 111. The crystal carrier 100 rotates within the thermal field 10 of the growth furnace, and the thermal field 10 of the growth furnace provides a thermal environment for the crystal carrier 100. A temperature measuring thermocouple 120 is provided on the crystal carrier 100 to measure the temperature of the crystal carrier 100. A bottom cover plate 11 is provided at the bottom of the growth furnace. The crystal support 100 (crucible platform 110 and crucible 111) is located in the thermal field 10 above the bottom cover plate 11. The support part 200 is connected to the lower part of the crystal support 100 and extends downward and through the bottom cover plate 11, while extending outward from the thermal field 10. Figure 1 , Figure 3As shown, the support portion 200 can be a connecting plate 210 located in the growth furnace and a vertically arranged ceramic rod 220. The connecting plate 210 is connected to the crucible platform 110 in the thermal field 10. The portion of the ceramic rod 220 extending out of the thermal field 10 is connected to a power mechanism 500, which drives the support portion 200 and the crystal carrier 100 to rotate. The conductive slip ring 300 has a stator 310 and a rotor 320 rotatably disposed within the stator 310. The rotor 320 is connected to the ceramic rod 220 of the support portion 200 and electrically connected to the temperature measuring thermocouple 120. The stator 310 is connected to an output wire. The rotating rotor 320 contacts the stator 310 to make the output wire conduct to the temperature measuring thermocouple 120. A cooling element 400 is disposed on the conductive slip ring 300 to dissipate heat from the interior of the conductive slip ring 300.

[0031] In the growth process of gallium oxide (β-Ga2O3) crystals, a conductive slip ring 300 is used to stably transmit the temperature detection signal during rotation. A cooling element 400 is installed inside the conductive slip ring 300. When the internal temperature of the conductive slip ring 300 rises due to the influence of the thermal field 10, the cooling element 400 dissipates heat, thus preventing overheating and expansion of the conductive slip ring 300, which could lead to loosening or detachment. This improves the operational stability of the crystal growth temperature measurement equipment, extends its service life, and reduces maintenance costs.

[0032] like Figure 1 , Figure 3 As shown, the ceramic rod 220 of the support portion 200 in this embodiment is specifically an alumina ceramic rod with a hollow hole inside. The upper end of the hollow alumina ceramic rod is fixedly connected to the crystal carrier 100. The alumina ceramic rod extends downward, thus creating a longer distance between the lower conductive slip ring 300 and the internal thermal field 10, reducing the impact of the heat from the internal thermal field 10 on the conductive slip ring 300 and the transmission part of the power mechanism 500. The alumina ceramic rod contacts the highest temperature region of the thermal field 10, exhibiting strong heat resistance and providing support for the crystal carrier 100. Furthermore, the alumina ceramic rod material has good thermal shock resistance, thus adapting to temperature differences from the high-temperature contact area at the upper end to the relatively low-temperature area at the lower end.

[0033] like Figure 1 , Figure 3 , Figure 4As shown, the temperature-measuring thermocouple 120 in this embodiment is a platinum-rhodium thermocouple, such as a platinum-rhodium 40-20 alloy thermocouple, which conforms to the GB / T 36010-2018 standard. The temperature-measuring thermocouple 120 has a diameter of 0.5 mm and a length of 1.5 m. It has a maximum withstand temperature of 1850℃ (up to 1950℃ for short periods) and stability >200 hours in an oxygen atmosphere. Using a platinum-rhodium thermocouple has advantages: more accurate temperature measurement within the 1800-1850℃ range, with a measurement error superior to type B thermocouples. It also has oxidation resistance; the platinum-rhodium 40-20 alloy (PtRh40-PtRh20) significantly improves high-temperature stability through the solid solution strengthening effect of rhodium. It should be noted that in a nitrogen protective atmosphere, the temperature-measuring thermocouple 120 can also be a tungsten-rhenium thermocouple (W-Re26 / W-Re5). Tungsten-rhenium thermocouples are suitable for inert / reducing atmospheres, with a maximum temperature range of 2300℃. The protective tube 130 must be made of molybdenum (Mo) or boron nitride (BN) to prevent oxidation. Using tungsten-rhenium thermocouples can reduce material costs, but the temperature range must be matched to the atmospheric conditions.

[0034] like Figure 1 , Figure 3 , Figure 4 As shown, in this embodiment, one end of the temperature-measuring thermocouple 120 is located on the crystal support 100 for temperature measurement, and the other end extends into the hollow hole. A protective tube 130 is fitted onto the temperature-measuring thermocouple 120. The protective tube 130 is an alumina protective tube. For example, the material of a high-purity alumina protective tube is 99.9% high-purity Al2O3 with a sintering density ≥3.9 g / cm³. Since the melting point of gallium oxide crystal reaches about 1800°C, only zirconium oxide and alumina are materials that do not melt at this temperature and are stable in an oxygen-containing environment. Alumina has stronger thermal shock resistance than zirconium oxide. Therefore, alumina ceramic material is preferred as the protective tube 130. Since the conductive slip ring 300 conducts electricity after contacting the temperature-measuring thermocouple 120, which will affect the temperature measurement of the thermocouple, a high-temperature resistant alumina ceramic must be used to separate the metal wire of the temperature-measuring thermocouple 120 from the rotating slip ring.

[0035] like Figure 1 , Figure 4As shown, the alumina protective tube has the following dimensions: outer diameter 1.2 mm, wall thickness 0.2 mm, and length 10 mm. Due to its short length of only 10 mm, it forms a protective short tube, which is then spliced ​​together to protect the entire thermocouple. The use of 1 cm long protective short tubes balances thermal shock resistance and flexibility, preventing the temperature-sensing thermocouple 120 from breaking due to mechanical stress (traditional long tubes are prone to rigid breakage). For example, the multiple protective short tubes can accommodate the bending of the temperature-sensing thermocouple 120. Therefore, the protective short tube has the advantages of flexibility and fracture resistance; the short tube design allows the thermocouple to bend freely, avoiding mechanical stress concentration. Furthermore, it has good thermal shock resistance; the protective short tube showed no cracking after 30 cycles of rapid cooling and heating (1800℃ → room temperature).

[0036] It should be noted that zirconia ceramic tubes can also be selected for the protective tube 130, but the mainstream material on the market at present is alumina ceramic insulation tubes, and alumina protective tubes have a relatively low cost.

[0037] Because an alumina protective tube is used to cover the outside of the temperature-sensing thermocouple 120, multiple temperature-sensing thermocouples 120 can be installed, with one end of each thermocouple distributed at different positions along the outer wall of the crucible 111. Specifically, a single protective tube 130 can integrate three temperature-sensing points, and the short protective tube structure allows for multiple positions along the outer wall of the crucible 111, significantly optimizing temperature gradient monitoring. This increases the density of temperature-sensing points, enables a compact multi-channel layout, supports flexible arrangement of multiple temperature-sensing points, and improves the accuracy of temperature field monitoring. In this embodiment, the temperature-sensing thermocouple 120 is spirally wound along the outer wall of the crucible 111, with its lower end inserted into the protective tube 130 for fixation. The spiral arrangement of the temperature-sensing thermocouple 120 along the outer wall of the crucible 111 accommodates rotational and vertical movement. During vertical movement, the bent temperature-sensing thermocouple 120 provides sufficient length for the vertical movement of the crucible 111, thereby reducing wire bending fatigue.

[0038] It should be noted that the alumina protective tube can also be configured with an outer diameter of 2.0 mm, a wall thickness of 0.3 mm, and 5 internal channels. Such an alumina protective tube can accommodate more temperature measuring thermocouples 120, thus adapting to larger crucibles 111 (diameter > 150 mm) and supporting the arrangement of more temperature measuring points.

[0039] Therefore, in the above structure, the conductive slip ring 300 solves the problem of rotating wire entanglement through its conductive mechanism 510; the platinum-rhodium thermocouple is matched to the oxidizing high-temperature environment, operating stably in an oxygen atmosphere at 1800-1850℃, with a significantly extended lifespan; the short-sized alumina protective tube allows for flexible layout, excellent thermal shock resistance, and can withstand multiple rapid cooling and heating cycles. The synergy of these three components ensures stable temperature measurement.

[0040] like Figure 2 , Figure 3 , Figure 4As shown, in this embodiment, the conductive slip ring 300 is disposed at the lower part of the support 200. The stator 310 of the conductive slip ring 300 is fixedly disposed, and a heat-resistant insulating layer 322 is fixedly disposed between the rotor 320 and the support 200. The heat-resistant insulating layer 322 is made of zirconium powder (ZrO2) material and has a temperature resistance exceeding 2000℃. A contact conductive track 321 is formed on the outer wall of the rotor 320. The contact conductive track 321 surrounds the rotor 320 to form a slip ring. The contact conductive track 321 is electrically connected to the temperature measuring thermocouple 120. A lever 311 is disposed on the stator 310. The lever 311 (brush) is elastically pressed against the contact conductive track 321 (slip ring). When the rotor 320 rotates with the crucible 111 at 5-20 rpm, the lever 311 (brush) is kept in contact with the contact conductive track 321 on the surface of the rotor 320 by spring pressure, so as to achieve continuous conductivity during rotation. During operation, the temperature-sensing thermocouple 120 rotates together with the support 200 and the rotor 320, and the positive and negative leads of the temperature-sensing thermocouple 120 also rotate with the rotor 320. The lead wires set in the slip ring also rotate with the rotor 320. However, the output wires connected to the other end of the stator 310 do not rotate with the rotor 320, while still satisfying the corresponding wire connection between the rotor 320 and the stator 310. To accommodate the connection of multiple sets of temperature-sensing thermocouples 120, multiple sets of levers 311 are provided, and multiple contact conductive rails 321 are spaced apart along the axial direction of the rotor 320, with multiple contact conductive rails 321 corresponding to multiple sets of levers 311.

[0041] The brush 311 is a graphite-silver composite brush, made of graphite-silver composite material (C-Ag, ratio 7:3). It is spring-loaded and contacts the conductive rail, with an external input wire connected to the temperature measuring instrument. The rotor 320's conductive rail 321 (slip ring) is a platinum-rhodium alloy rail. The conductive rail 321, made of platinum-rhodium alloy (PtRh40), is embedded and fixed on the support 200, and different conductive rails 321 are welded to the positive and negative leads of the temperature measuring thermocouple 120. Therefore, the combination of the platinum-rhodium slip ring and the graphite-silver brush ensures low contact resistance (<0.1Ω) during rotation, preventing signal interruption.

[0042] It should be noted that a platinum-zirconia composite material (Pt-ZrO2) can also be used to make platinum-zirconia brushes 311, replacing the original graphite-silver brushes 311. Zirconia (ZrO2) has high hardness and wear resistance (Mohs hardness 8.5), which can reduce wear under high-speed rotation, while platinum (Pt) provides conductivity and is compatible with the slip ring material (PtRh40), avoiding contact potential interference. Using platinum-zirconia brushes 311 is suitable for higher speed applications (e.g., >20 rpm), extending brush life.

[0043] like Figure 2 , Figure 4 , Figure 5 As shown, the cooling component 400 in this embodiment includes a cooling channel 410, which is formed within the stator 310. The cooling channel 410 has an inlet 420 and an outlet 430, which are respectively connected to external water-cooling pipes. The cooling channel 410 forms a liquid circulation channel through the inlet 420 and outlet 430 connected to the external water-cooling pipes, allowing the cooling liquid (cooling water) in the cooling channel 410 to circulate and carry away heat from the conductive slip ring 300, thus dissipating heat from the conductive slip ring 300 in a timely manner.

[0044] like Figure 4 , Figure 5 As shown, the cooling channel 410 in this embodiment is a copper alloy pipe with an inner diameter of Ø2mm. The copper alloy pipe is made of platinum-rhodium alloy plated copper pipe. The copper substrate facilitates heat conduction, and the platinum-rhodium layer prevents oxidation. This improves the heat dissipation of the cooling channel 410 and enhances its stability.

[0045] like Figure 4 , Figure 5 As shown, in this embodiment, the cooling channel 410 is spirally wound inside the stator 310. Specifically, a spiral mounting groove 312 is machined on the inner wall of the stator 310. The spiral mounting groove 312 has a certain pitch, thus creating a space between adjacent grooves. A lever 311 can be fixedly mounted in this space. The lever 311 can also be fixed to the upper part of the spiral mounting groove 312 by an insulating component, as long as a slot is left for the copper tube to pass through. A platinum-rhodium alloy plated copper tube is embedded in the threaded mounting groove. This allows the platinum-rhodium alloy plated copper tube to be positioned between the stator 310 and the rotor 320, achieving heat dissipation without affecting the rotation of the rotor 320. Both the inlet 420 and the outlet 430 penetrate the outer wall of the stator 310. At the connection between the inlet 420 and the outlet 430 and the stator 310, a ceramic-metal composite sealing ring (Al2O3 ceramic ring + Inconel alloy spring) can be used to prevent leakage. This sealing ring has the advantages of being resistant to temperature of 400℃ and pressure of 1.5MPa.

[0046] like Figure 1 , Figure 2As shown, the power mechanism 500 in this embodiment specifically includes a motor 510, a reducer 520, and a transmission belt assembly 530. A motor frame 540 is fixedly mounted on one side of the support portion 200. The reducer 520 is fixed on the motor frame 540, and the motor 510 is connected to the reducer 520, thereby moving the motor 510 away from the support portion 200. The reducer 520 is connected to the shaft of the motor 510, and the transmission belt assembly 530 connects the shaft of the reducer 520 and the support portion 200. After the motor 510 rotates, it is reduced in speed by the reducer 520, thereby reducing the speed to 5-20 rpm. The transmission belt assembly 530 drives the support portion 200 to rotate, which in turn drives the crystal carrier 100 to rotate, thus realizing the rotation function.

[0047] The following is a comparative experiment between a crystal growth temperature measurement device with rotation function in this embodiment and a traditional method: (1) Rotation test comparison: In the traditional method, the thermocouple wires will break after rotating for 1 hour; in this embodiment, the signal remains stable after 72 hours of continuous rotation, and there is no obvious wear on the contact surface between the brush and the slip ring.

[0048] (2) High-temperature oxidation comparison: In the traditional method, the oxide layer of the type B thermocouple peels off after 50 hours under the same conditions, and the temperature measurement error increases significantly. The platinum-rhodium 40-20 thermocouple in this embodiment only has slight oxidation (darkening color) after working in an oxygen atmosphere at 1850℃ for 200 hours.

[0049] (3) Comparison of thermal shock resistance of protective tubes: In the traditional method, the magnesium oxide tube breaks after 5 cycles. The alumina short tube in this embodiment still maintains structural integrity after 30 cycles.

[0050] The specific technical effects are compared in the table below: In summary, this embodiment proposes a crystal growth temperature measurement device with rotation functionality. Through a slip ring-brush conductive structure, the thermocouple signal is uninterrupted during continuous crucible rotation (5-20 rpm), solving the temperature measurement failure problem caused by wire entanglement in traditional methods. Furthermore, the platinum-rhodium 40-20 thermocouple exhibits an extremely low oxidation rate in an oxygen atmosphere, improving its adaptability to high-temperature oxidation environments. The short-sized alumina protective tube (1 cm) showed no cracking after 30 cycles of rapid cooling and heating from 1800℃ to room temperature, demonstrating improved thermal shock resistance. Additionally, the density of temperature measurement points is increased, allowing a single protective tube to integrate three measurement points, and the short tube design allows for multiple placement positions along the outer wall of the crucible, significantly optimizing temperature gradient monitoring.

[0051] It should be understood that the application of this utility model is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A crystal growth temperature measuring device with rotation function, characterized in that, include: A crystal carrier (100) is used to carry a crystal within a thermal field (10); A temperature-measuring thermocouple (120) is installed on the crystal carrier (100) for detecting the crystal growth temperature; A support (200) is connected at one end to the crystal carrier (100) and extends outward from inside the thermal field (10), and at the other end extends to outside the thermal field (10); A conductive slip ring (300) is disposed outside the thermal field (10) and located on the extension path of the support (200); the conductive slip ring (300) includes a stator (310) and a rotor (320) rotatably disposed within the stator (310); the rotor (320) is connected to the extension end of the support (200) and electrically connected to the temperature measuring thermocouple (120); the stator (310) is connected to an output wire; the rotor (320) maintains contact and conduction with the stator (310) when rotating, so that the signal of the temperature measuring thermocouple (120) is stably output through the output wire; A cooling component (400) is integrated on the stator (310) of the conductive slip ring (300) for actively dissipating heat from the inside of the conductive slip ring (300).

2. The crystal growth temperature measuring device with rotation function according to claim 1, characterized in that, The cooling component (400) includes a cooling channel (410) formed inside the stator (310). The cooling channel (410) has an inlet (420) and an outlet (430) that penetrate the wall of the stator (310). The inlet (420) and the outlet (430) are respectively used to connect to external water cooling pipes to form a circulating cooling loop.

3. The crystal growth temperature measuring device with rotation function according to claim 2, characterized in that, The cooling channel (410) is a copper alloy pipe embedded in the stator (310); and the cooling channel (410) is arranged in a spiral around the inner peripheral wall of the stator (310).

4. The crystal growth temperature measuring device with rotation function according to claim 1, characterized in that, The rotor (320) has an annular contact conductive track (321) circumferentially opened on the outer peripheral wall, and the contact conductive track (321) is electrically connected to the lead wire of the temperature measuring thermocouple (120); the stator (310) is correspondingly provided with an elastic lever (311), and the lever (311) always abuts against the surface of the contact conductive track (321) under elastic pressure.

5. The crystal growth temperature measuring device with rotation function according to claim 4, characterized in that, The paddle (311) is a brush made of graphite-silver composite material or platinum-zirconia composite material; the contact conductive track (321) is a slip ring made of platinum-rhodium alloy; and multiple contact conductive tracks (321) are spaced apart along the axial direction of the rotor (320), each contact conductive track (321) independently corresponds to a set of paddles (311) and a signal channel to support the synchronous transmission of signals from multiple temperature measuring thermocouples (120).

6. The crystal growth temperature measuring device with rotation function according to claim 1, characterized in that, The support part (200) has a hollow hole arranged along its axial direction; the temperature measuring thermocouple (120) extends downward from the crystal carrier (100) and passes through the hollow hole; the temperature measuring thermocouple (120) is covered with a protective tube (130); the protective tube (130) is a segmented high-purity alumina ceramic short tube.

7. The crystal growth temperature measuring device with rotation function according to claim 6, characterized in that, The crystal support includes a crucible; multiple temperature-measuring thermocouples are provided, and the measuring ends of the multiple temperature-measuring thermocouples are distributed in a non-coplanar manner at different heights and / or different circumferential positions on the outer peripheral wall of the crucible (111).

8. The crystal growth temperature measuring device with rotation function according to claim 7, characterized in that, The main body of the temperature measuring thermocouple (120) is spirally wound along the outer peripheral wall of the crucible (111), and its end is gathered and fixed in the protective tube (130) inside the hollow hole of the support (200).

9. The crystal growth temperature measuring device with rotation function according to claim 1, characterized in that, A heat-resistant insulating layer (322) is fixedly provided at the connection between the rotor (320) and the support (200) for electrical isolation and high-temperature insulation.

10. The crystal growth temperature measuring device with rotation function according to claim 1, characterized in that, It also includes a power mechanism (500) for driving the crystal carrier (100) to rotate; the power mechanism (500) includes: The motor (510) is mounted on a bracket at a position away from the thermal field (10) and the support (200); A speed reducer (520) whose input end is connected to the output shaft of the motor (510); A drive belt assembly (530) is connected between the output end of the reducer (520) and the extension end of the support (200) for transmitting the reduced rotational motion to the support (200).

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