A multi-point armored thermocouple for measuring temperature of a diffusion furnace

Abstract

The utility model provides a kind of for the temperature measurement of diffusion furnace multiple point armoured thermocouple, comprising: outer sleeve, multiple different lengths armoured thermocouple are sleeved in;Connecting assembly, including ferrule joint, connecting pipe, connecting joint and anti-bending joint, ferrule joint connects outer sleeve with connecting pipe, connecting joint connects the connecting pipe with anti-bending joint, thermocouple wire is connected with compensating conductor in connecting assembly, compensating conductor is connected with plug-in connector and is drawn out anti-bending joint.By integrating multiple different lengths armoured thermocouple in outer sleeve, after being inserted into diffusion furnace, the temperature of different depth can be detected simultaneously;Thermocouple wire is connected with compensating conductor in connecting assembly, to avoid environmental interference, compensating conductor is drawn out through anti-bending joint and is connected with detection instrument through plug-in connector, complete signal transmission.Compensating conductor and connecting assembly can effectively reduce signal loss, improve temperature measurement accuracy.The present application can realize the stepwise temperature measurement of horizontal diffusion furnace at different depths.

Description

Technical Field

[0001] This utility model relates to the field of armored thermocouple technology, and in particular to a multi-point armored thermocouple for temperature measurement in a diffusion furnace. Background Technology

[0002] In the semiconductor industry, diffusion is a crucial step that affects the final quality of electronic components, and rapid annealing is an important preparatory process before diffusion operations. Therefore, precise control of the temperature field inside the diffusion furnace is of paramount importance to semiconductor manufacturers.

[0003] Currently, the horizontal diffusion furnaces used in the semiconductor industry require multiple temperature measurements at different depths, but existing armored thermocouples cannot meet this requirement. Summary of the Invention

[0004] This invention provides a multi-point armored thermocouple for temperature measurement in a diffusion furnace, to solve the problem that existing armored thermocouples cannot achieve multi-point temperature measurement.

[0005] This utility model provides a multi-point armored thermocouple for temperature measurement in a diffusion furnace, comprising: An outer tube, inside which are fitted multiple armored thermocouples of different lengths, with the thermocouple wires of the armored thermocouples extending out of the outer tube; The connecting assembly includes a ferrule connector, a connecting tube, a connecting joint, and an anti-bend joint. The ferrule connector connects the outer tube to the connecting tube, and the connecting joint connects the connecting tube to the anti-bend joint. The thermocouple wire is connected to a compensating wire inside the connecting assembly, and the compensating wire passes through the anti-bend joint connecting plug.

[0006] In one embodiment of the present invention, the ferrule connector includes a first engagement portion and a second engagement portion, both of which are provided with external threads. The first engagement portion is used for threaded connection with the outer sleeve, and the second engagement portion is used for threaded connection with the connecting pipe.

[0007] In one embodiment of the present invention, the diameter of the first joint is smaller than the diameter of the second joint.

[0008] In one embodiment of the present invention, the connecting assembly further includes a clamping member, which is installed in the second joint portion. The clamping member has a plurality of through holes corresponding to the armored thermocouple, and the through holes are used for the thermocouple wire to pass through.

[0009] In one embodiment of this utility model, the outer wall of the clamping member is provided with conical extrusion portions symmetrically along the axial direction, and the inside of the ferrule connector and the connecting tube are provided with conical mating surfaces. The conical mating surfaces cooperate with the conical extrusion portions to extrude the through hole to clamp the thermocouple wire.

[0010] In one embodiment of this utility model, the clamping member is a plastic clamping member.

[0011] In one embodiment of this utility model, the outer wall of the connecting pipe is provided with knurling.

[0012] In one embodiment of this utility model, the index number of the plug-in is consistent with the index number of the thermocouple wire.

[0013] In one embodiment of this utility model, the armored thermocouple is a base metal armored thermocouple of type T, J, E, K, or N.

[0014] In one embodiment of this utility model, the outer tube is a quartz glass tube.

[0015] The beneficial effects of this utility model are as follows: This utility model proposes a multi-point armored thermocouple for temperature measurement in a diffusion furnace. By integrating multiple armored thermocouples of different lengths within an outer tube, it can simultaneously detect temperatures at different depths after insertion into the diffusion furnace. This achieves simultaneous temperature measurement at multiple depths with a single insertion, meeting the multi-point temperature measurement requirements of horizontal diffusion furnaces without the need for repeated arrangement of multiple sets of equipment. Furthermore, the outer tube protects the thermocouple wires from corrosion by the furnace environment. After the thermocouple wires exit the outer tube, they are connected to compensating wires within the connecting assembly to avoid environmental interference. The compensating wires are then led out through an anti-bending connector and connected to the detection instrument via a plug-in connector to complete signal transmission. The compensating wires and connecting assembly effectively reduce signal loss and improve temperature measurement accuracy. This application features a simple and compact structure, convenient manufacturing and installation, and enables stepped temperature measurement at different depths in horizontal diffusion furnaces used in the semiconductor industry. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0017] In the attached diagram: Figure 1 This is a schematic diagram of the structure of a multi-point armored thermocouple for temperature measurement in a diffusion furnace according to an embodiment of the present invention; Figure 2 This is a partial cross-sectional structural diagram of the connecting component provided in one embodiment of the present invention.

[0018] The attached figures are labeled as follows: 1. Outer tube; 2. Armored thermocouple; 3. Connecting assembly; 301. Compression fitting; 301a. First joint; 301b. Second joint; 302. Connecting tube; 302a. Knurled part; 303. Connecting joint; 304. Anti-bending joint; 305. Clamping part; 305a. Through hole; 305b. Conical extrusion part; 306. Conical mating surface; 4. Compensating wire; 5. Insertion piece. Detailed Implementation

[0019] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0020] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. The drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0021] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the present invention. However, it will be apparent to those skilled in the art that embodiments of the present invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the present invention.

[0022] Please combine Figures 1 to 2 As shown, this utility model provides a multi-point armored thermocouple 2 for temperature measurement in a diffusion furnace.

[0023] In an exemplary embodiment of this application, the multi-point armored thermocouple 2 for temperature measurement in a diffusion furnace includes: The outer tube 1 contains multiple armored thermocouples 2 of different lengths, and the thermocouple wires of the armored thermocouples 2 extend out of the outer tube 1. The connecting assembly 3 includes a compression fitting 301, a connecting tube 302, a connecting connector 303, and an anti-bending connector 304. The compression fitting 301 connects the outer tube 1 to the connecting tube 302, and the connecting connector 303 connects the connecting tube 302 to the anti-bending connector 304. The thermocouple wire is connected to the compensating wire 4 inside the connecting assembly 3, and the compensating wire 4 passes through the anti-bending connector 304 to connect to the plug-in piece 5.

[0024] In this embodiment, by integrating multiple armored thermocouples 2 of different lengths within the outer tube 1, the temperature at different depths can be simultaneously detected after insertion into the diffusion furnace. This achieves simultaneous temperature measurement at multiple depths with a single insertion, meeting the multi-point temperature measurement requirements of horizontal diffusion furnaces without the need for repeated arrangement of multiple sets of equipment. Furthermore, the outer tube 1 protects the thermocouple wires from corrosion by the furnace environment. After the thermocouple wires exit the outer tube 1, they are connected to the compensating wire 4 within the connecting component 3, avoiding environmental interference. The compensating wire 4 is then led out through the anti-bending connector 304 and connected to the detection instrument via the plug-in 5 to complete signal transmission. The compensating wire 4 and the connecting component 3 effectively reduce signal loss and improve temperature measurement accuracy. This application features a simple and compact structure, convenient manufacturing and installation, and enables stepped temperature measurement at different depths in horizontal diffusion furnaces used in the semiconductor industry.

[0025] In an exemplary embodiment of this application, the ferrule connector 301 includes a first engagement portion 301a and a second engagement portion 301b. Both the first engagement portion 301a and the second engagement portion 301b are provided with external threads. The first engagement portion 301a is used for threaded connection with the outer sleeve 1, and the second engagement portion 301b is used for threaded connection with the connecting pipe 302.

[0026] In this embodiment, the first joint 301a and the second joint 301b are provided with standardized external threads, so that the assembly of the ferrule connector 301 with the outer sleeve 1 and the connecting pipe 302 does not require special tools. The connection can be completed by screwing, which has high installation efficiency and low operation difficulty.

[0027] In an exemplary embodiment of this application, the diameter of the first joint portion 301a is smaller than the diameter of the second joint portion 301b.

[0028] In an exemplary embodiment of this application, the connecting component 3 further includes a clamping member 305, which is installed in the second joint portion 301b. The clamping member 305 is provided with a plurality of through holes 305a corresponding to the armored thermocouple 2, and the through holes 305a are used for passing thermocouple wires through.

[0029] In this embodiment, the clamping component has three through holes 305a, corresponding to the three armored thermocouples 2 installed inside the outer sleeve 1. By tightly inserting the thermocouple wires, the clamping component 305 can fill the gap between the thermocouple wires and the clamping connector 301, reduce the infiltration of high-temperature gas or dust in the furnace into the connection component 3, and protect the connection of the compensation wire 4.

[0030] In an exemplary embodiment of this application, the outer side wall of the clamping member 305 is provided with a conical extrusion portion 305b symmetrically along the axial direction. The inside of the ferrule connector 301 and the connecting pipe 302 are both provided with a conical mating surface 306. The conical mating surface 306 and the conical extrusion portion 305b cooperate to extrude through holes 305a to clamp the thermocouple wire.

[0031] In this embodiment, the connecting tube 302 engages with the second joint 301b through a threaded connection. When the number of engagement teeth reaches the point where the conical mating surface 306 engages with the conical pressing part 305b, the connecting tube 302 continues to be screwed into the engagement depth of the second joint 301b. At this time, the conical mating surface 306 begins to press the conical pressing part 305b, causing the clamping member 305 to deform and the diameter of the through hole 305a to shrink, thereby clamping the thermocouple wire and improving the sealing performance of the thermocouple wire.

[0032] In an exemplary embodiment of this application, the clamping member 305 is a plastic clamping member 305.

[0033] In this embodiment, the clamping component 305 includes, but is not limited to, materials made of plastic or rubber that are prone to extrusion deformation.

[0034] In an exemplary embodiment of this application, the outer wall of the connecting pipe 302 is provided with knurling 302a.

[0035] In this embodiment, the outer wall of the connecting pipe 302 is provided with knurling 302a, which can enhance the friction of the part of the operator holding the connecting pipe 302 and prevent the operator from slipping when the connecting pipe 302 is screwed on the second joint 301b.

[0036] In an exemplary embodiment of this application, the index number of the connector 5 is consistent with the index number of the thermocouple wire.

[0037] In this embodiment, the connector 5 and the thermocouple wire use the same index number, so that the thermoelectric characteristics of the connector 5 and the thermocouple wire are completely matched. This can avoid conversion errors caused by differences in characteristics during signal transmission, ensure that the thermoelectric potential signal accurately reflects the temperature inside the furnace, and improve data accuracy.

[0038] In an exemplary embodiment of this application, the armored thermocouple 2 is a base metal armored thermocouple 2 of type T, J, E, K, or N.

[0039] In this embodiment, existing thermocouples are mainly composed of precious metals such as platinum and rhodium, resulting in high material costs and impacting the operation and maintenance costs of the diffusion furnace. This application effectively reduces material and operation and maintenance costs by using T, J, E, K, and N type base metal armored thermocouples 2. In the field of thermocouple technology, "T, J, E, K, and N types" all belong to the base metal thermocouple types specified in the IEC 60584 standard (International Electrotechnical Commission thermocouple standard). The core difference lies in the electrode material combination, temperature measurement range, and application scenarios. "Base metal" refers to electrodes made of low-cost alloys / metals such as nickel-based and copper-based materials (as opposed to precious metal thermocouples such as platinum and rhodium).

[0040] For example, Type T: copper (Cu) / copper-nickel alloy (Cu-Ni, often called constantan); Type J: iron (Fe) / copper-nickel alloy (Cu-Ni, constantan); Type E: nickel-chromium alloy (Ni-Cr) / copper-nickel alloy (Cu-Ni); Type K: nickel-chromium alloy (Ni-Cr, containing about 10% Cr) / nickel-silicon alloy (Ni-Si); Type N: nickel-chromium-silicon alloy (Ni-Cr-Si) / nickel-silicon-magnesium alloy (Ni-Si-Mg).

[0041] In one exemplary embodiment of this application, the outer tube 1 is a quartz glass tube.

[0042] In this embodiment, by adding a quartz glass tube as a protective tube outside the armored thermocouple 2, the visualization function of the temperature measuring part is realized, and the convenience of sensor maintenance is improved.

[0043] The working principle involves integrating multiple armored thermocouples 2 of varying lengths within the outer tube 1. After insertion into the diffusion furnace, these thermocouples can simultaneously detect temperatures at different depths, enabling multi-depth simultaneous temperature measurement with a single insertion. This meets the multi-point temperature measurement requirements of horizontal diffusion furnaces, eliminating the need for redundant setups of multiple equipment sets. Furthermore, the outer tube 1 protects the thermocouple wires from corrosion within the furnace environment. After exiting the outer tube 1, the thermocouple wires connect to the compensating wire 4 within the connecting assembly 3, preventing environmental interference. The compensating wire 4 is then led out through an anti-bending connector 304 and connected to the detection instrument via a connector 5 to complete signal transmission. The compensating wire 4 and connecting assembly 3 effectively reduce signal loss and improve temperature measurement accuracy. This application features a simple and compact structure, convenient manufacturing and installation, and enables stepped temperature measurement at different depths in horizontal diffusion furnaces used in the semiconductor industry.

[0044] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A multi-point armored thermocouple for temperature measurement in a diffusion furnace, characterized in that, include: An outer tube, inside which are fitted multiple armored thermocouples of different lengths, with the thermocouple wires of the armored thermocouples extending out of the outer tube; The connecting assembly includes a ferrule connector, a connecting tube, a connecting joint, and an anti-bend joint. The ferrule connector connects the outer tube to the connecting tube, and the connecting joint connects the connecting tube to the anti-bend joint. The thermocouple wire is connected to a compensating wire inside the connecting assembly, and the compensating wire passes through the anti-bend joint connecting plug.

2. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 1, characterized in that: The ferrule connector includes a first engagement portion and a second engagement portion, both of which are provided with external threads. The first engagement portion is used for threaded connection with the outer sleeve, and the second engagement portion is used for threaded connection with the connecting pipe.

3. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 2, characterized in that: The diameter of the first joint is smaller than the diameter of the second joint.

4. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 3, characterized in that: The connecting assembly further includes a clamping member, which is installed in the second joint. The clamping member has multiple through holes corresponding to the armored thermocouple, and the through holes are used to pass through the thermocouple wire.

5. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 4, characterized in that: The outer wall of the clamping member is symmetrically provided with conical extrusion parts along the axial direction. The inside of the ferrule and the connecting tube are both provided with conical mating surfaces. The conical mating surfaces and the conical extrusion parts cooperate to extrude the through hole to clamp the thermocouple wire.

6. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 5, characterized in that: The clamping component is a plastic clamping component.

7. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 1, characterized in that: The outer wall of the connecting pipe is knurled.

8. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 1, characterized in that: The index number of the connector is the same as the index number of the thermocouple wire.

9. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 1, characterized in that: The armored thermocouples are T, J, E, K, and N type base metal armored thermocouples.

10. The multi-point armored thermocouple for temperature measurement in a diffusion furnace according to claim 1, characterized in that: The outer tube is a quartz glass tube.

Images