A detection device for detecting a spindle vacuum of a CVD apparatus

Abstract

The utility model discloses a detection device for CVD equipment main shaft vacuum detection, include: PM cavity simulation vacuum cover, first adapter, second adapter, vacuum bellows and helium detector, PM cavity simulation vacuum cover one end with CVD equipment main shaft's main shaft casing installation reference plane fixed connection, the other end is connected with first adapter one end, first adapter's other end is connected with second adapter one end, and second adapter's other end is connected with vacuum bellows one end, vacuum bellows's other end is connected with helium detector, the utility model discloses a detection device for CVD equipment main shaft vacuum detection has simple structure, convenient operation can be convenient for realizing to CVD equipment main shaft realizes vacuum helium leak detection, and further guarantees the processing quality of subsequent wafer.

Description

Technical Field

[0001] This utility model relates to the field of CVD equipment maintenance technology, and in particular to a detection device for vacuum detection of the spindle of CVD equipment. Background Technology

[0002] A transfer tray is installed above the spindle of a chemical vapor deposition (CVD) equipment. The lifting and rotation of the spindle can drive the lifting and rotation of the transfer tray, thereby realizing the transfer of wafers. During the wafer transfer process, the process chamber needs to be in a vacuum environment. Since the CVD equipment spindle is located outside the process chamber and connected to the inside of the process chamber, whether the CVD equipment spindle is completely sealed is related to whether the process chamber can be in a vacuum. How to conveniently realize vacuum detection of the CVD equipment spindle is an urgent technical problem to be solved. Utility Model Content

[0003] This invention addresses the aforementioned problems by proposing a detection device for vacuum detection of the spindle of CVD equipment. The technical means adopted in this utility model are as follows: A detection device for vacuum detection of the spindle of a CVD equipment includes: a PM cavity simulating a vacuum hood, a first adapter, a second adapter, a vacuum bellows, and a helium detector; One end of the PM cavity simulates a vacuum hood and is fixedly connected to the mounting reference surface of the spindle housing of the CVD equipment spindle, while the other end is connected to one end of the first adapter. The other end of the first adapter is connected to one end of the second adapter, and the other end of the second adapter is connected to one end of the vacuum bellows; the other end of the vacuum bellows is connected to the helium detector.

[0004] Furthermore, the PM cavity simulates a vacuum shroud, which includes a vacuum shroud body with a sleeve structure. The end face of the vacuum shroud body connected to the mounting reference surface of the spindle housing has a plurality of threaded holes evenly distributed for fixed connection with the spindle housing. The end face of the vacuum shroud body connected to the mounting reference surface of the spindle housing is also provided with a positioning pin hole for positioning with the mounting reference surface of the spindle housing.

[0005] Furthermore, sealing rings are provided between the PM cavity simulated vacuum hood and the spindle housing mounting reference surface of the CVD equipment spindle, between the PM cavity simulated vacuum hood and the first adapter, and between the second adapter and the vacuum bellows.

[0006] Furthermore, the first adapter and the vacuum bellows, the vacuum bellows and the second adapter, and the second adapter and the helium detector are all connected by vacuum clamps for tight sealing.

[0007] Furthermore, the end face of the vacuum shroud body connected to the mounting reference surface of the spindle housing is also provided with a sealing ring receiving groove for installing the sealing ring.

[0008] Furthermore, the first adapter is a KF40-KF100 adapter; the second adapter is a KF25-KF40 adapter.

[0009] Compared with the prior art, the detection device for vacuum detection of CVD equipment spindle disclosed in this utility model has the following beneficial effects: By setting up a PM cavity to simulate a vacuum hood, a first adapter, a second adapter, a vacuum bellows, and a helium detector, this application can conveniently realize vacuum detection of CVD equipment spindle, and thus realize the sealing performance detection of the sealing parts of CVD equipment spindle. Attached Figure Description

[0010] Figure 1 This is a front view of the detection device for vacuum detection of the spindle of a CVD equipment disclosed in this utility model; Figure 2 This is a side view of the detection device for vacuum detection of the spindle of a CVD equipment disclosed in this utility model; Figure 3 This is an axial view of the detection device for vacuum detection of the spindle of a CVD equipment disclosed in this utility model; Figure 4 This is a structural diagram of the spindle of a CVD equipment. Figure 5 This is a cross-sectional view of the PM cavity simulated vacuum chamber of the detection device for vacuum detection of the spindle of CVD equipment disclosed in this utility model; Figure 6 for Figure 5 The right view; In the figure: 1. PM cavity simulates vacuum hood; 10. Vacuum hood body; 11. Threaded hole; 12. Locating pin hole; 13. Sealing ring receiving groove; 2. First adapter; 3. Second adapter; 4. Vacuum bellows; 5. Helium detector; 6. CVD equipment spindle; 60. Spindle housing mounting reference surface; 61. Spindle housing; 62. Spindle; 7. Vacuum clamp. Detailed Implementation

[0011] like Figure 1 , Figure 2 and Figure 3 As shown, the detection device for vacuum detection of the spindle of CVD equipment disclosed in this application includes: PM cavity simulated vacuum hood 1, first adapter 2, second adapter 3, vacuum bellows 4, and helium detector 5; One end of the PM cavity simulates a vacuum hood 1 and is fixedly connected to the spindle housing mounting reference surface 60 of the CVD equipment spindle 6, and the other end is connected to one end of the first adapter 2. The other end of the first adapter 2 is connected to one end of the second adapter 3, and the other end of the second adapter 3 is connected to one end of the vacuum bellows 4; the other end of the vacuum bellows 4 is connected to the helium detector 5.

[0012] Specifically, such as Figure 4 As shown, the CVD equipment spindle 6 includes a spindle housing 61, a spindle 62, a linear drive mechanism, and a rotary drive mechanism. The linear drive mechanism, rotary drive mechanism, and spindle are housed within the spindle housing 61. A spindle housing mounting reference surface 60 is machined on the spindle housing 61 for fixed connection with the CVD equipment frame. The output end of the linear drive mechanism is connected to the rotary drive mechanism, and the output end of the rotary drive mechanism is connected to the spindle 62. The end of the spindle 62 is connected to a transfer tray. The linear drive mechanism drives the rotary drive mechanism (spindle) to move linearly within the spindle housing 61, and the rotary drive mechanism drives the spindle 62 to rotate, thereby achieving the lifting and rotation of the transfer tray. Before installing the CVD equipment spindle to the CVD equipment frame, a vacuum leak test is required on the CVD equipment spindle to avoid poor spindle sealing, which could cause air leakage in the process chamber and affect wafer processing. This application enables convenient connection between the CVD equipment spindle and a helium detector by setting up a PM cavity to simulate a vacuum hood, a first adapter, a second adapter, and a vacuum bellows. The helium detector is then used to perform vacuum leak detection on the CVD equipment spindle. This device has the advantages of simple structure and convenient operation.

[0013] Furthermore, the PM cavity simulated vacuum shroud 1 includes a vacuum shroud body 10 with a sleeve structure. The end face of the vacuum shroud body 10 connected to the spindle housing mounting reference surface 60 is evenly distributed with a plurality of threaded holes 11 for fixed connection with the spindle housing 61. The end face of the vacuum shroud body 10 connected to the spindle housing mounting reference surface 60 is also provided with a positioning pin hole 12 for positioning with the spindle housing mounting reference surface 60.

[0014] Specifically, in this embodiment, such as Figure 5 and Figure 6As shown, the PM cavity simulated vacuum cover 1 includes a vacuum cover body 10 with a sleeve structure. One end of the vacuum cover body 10 is mated with the spindle housing mounting reference surface 60 (the spindle housing mounting reference surface is the end face of the connecting flange of the spindle housing). Multiple threaded holes 11 are evenly distributed on the end face of this end. Multiple through holes are provided on the spindle housing mounting reference surface 60. Bolts can pass through the through holes and connect with the threaded holes 11 on the vacuum cover body 10, thereby realizing the fixed connection between the PM cavity simulated vacuum cover 1 and the spindle housing 61. A positioning pin hole 12 is also provided on the end face of the PM cavity simulated vacuum cover 1 connected to the spindle housing. The spindle housing mounting reference surface 60 is also provided with a positioning pin hole and a positioning pin. Through the positioning pin structure, the positioning of the PM cavity simulated vacuum cover 1 and the spindle housing 61 can be effectively guaranteed, thereby facilitating quick positioning and connection.

[0015] Furthermore, sealing rings are provided between the PM cavity simulated vacuum hood 1 and the spindle housing mounting reference surface 60 of the CVD equipment spindle 6, between the PM cavity simulated vacuum hood 1 and the first adapter 2, and between the second adapter 4 and the vacuum bellows 4.

[0016] Specifically, in this embodiment, such as Figure 5 and Figure 6 As shown, sealing rings are provided between the PM cavity simulated vacuum hood 1 and the spindle housing mounting reference surface 60 of the CVD equipment spindle 6, between the PM cavity simulated vacuum hood 1 and the first adapter 2, and between the second adapter 4 and the vacuum bellows 4. These can further improve the sealing performance of the connection parts and ensure the accuracy of subsequent helium leak detection.

[0017] Furthermore, the first adapter 2 and the vacuum bellows 4, the vacuum bellows 4 and the second adapter 3, and the second adapter 3 and the helium detector 4 are all clamped and sealed together by vacuum clamps 7.

[0018] Specifically, in this embodiment, the first adapter 2 and the vacuum bellows 4, the vacuum bellows 4 and the second adapter 3, and the second adapter 3 and the helium detector 4 are all connected by vacuum clamps 7 for sealing. Using vacuum clamps 7 for connection can quickly achieve sealing and clamping connection of each part.

[0019] Furthermore, the end face of the vacuum shroud body 10 connected to the mounting reference surface 60 of the spindle housing is also provided with a sealing ring receiving groove 13 for installing a sealing ring.

[0020] Specifically, in this embodiment, the end face of the vacuum cover body 10 connected to the spindle housing mounting reference surface 60 is also provided with a sealing ring receiving groove 13 for installing a sealing ring. The sealing ring receiving groove 13 is an annular groove. By setting a sealing ring between the end face of the vacuum cover body 10 and the spindle housing mounting reference surface 60, the sealing performance between the two is further guaranteed, thereby ensuring the detection accuracy of subsequent vacuum helium leak detection.

[0021] Furthermore, the first adapter 2 is a KF40-KF100 adapter; the second adapter 3 is a KF25-KF40 adapter.

[0022] Specifically, in this embodiment, by setting a first adapter 2 and a second adapter 3, the conversion between different pipe diameters can be quickly realized. In this application, the first adapter 2 is a KF40-KF100 adapter and the second adapter 3 is a KF25-KF40 adapter, which can quickly realize the connection between pipe diameter 100 and pipe diameter 25, that is, realize the connection between the vacuum cover body and the vacuum bellows.

[0023] A detection method for detecting the vacuum of a CVD equipment spindle using the detection device for CVD equipment spindle vacuum detection described in this application includes the following steps: Step 1: Fix one end of the PM cavity to the mounting reference surface of the spindle housing of the CVD equipment spindle; Specifically, first, a sealing ring is installed in the sealing ring receiving groove of the PM cavity simulated vacuum hood. Then, one end of the PM cavity simulated vacuum hood is placed on the spindle housing mounting reference surface of the CVD equipment spindle. The PM cavity simulated vacuum hood and the spindle housing mounting reference surface are positioned by a locating pin, and the PM cavity simulated vacuum hood and the spindle housing mounting reference surface are tightened and fixed by multiple screws. Step 2: Connect the other end of the PM cavity to the first adapter, the second adapter, the vacuum bellows, and the helium detector in series in sequence. Specifically, a first adapter, a second adapter, and a vacuum bellows are sequentially installed at the other end of the PM cavity simulated vacuum cover. The PM cavity simulated vacuum cover and the first adapter are generally connected by vacuum adsorption. The first adapter and the second adapter are connected by a vacuum clamp. The second adapter and the vacuum bellows are connected by a vacuum clamp. The other end of the vacuum bellows is connected to the helium detector through a vacuum clamp. Step 3: After confirming that all components are connected in series, turn on the helium detector; Step 4: Check if the helium detector value is zero. If not, manually adjust it to zero. If yes, start the helium detector's evacuation function, obtain the detection value in the helium detector, and determine if the detection value is less than the set threshold. If yes, determine that there is a leak in the CVD equipment spindle or detection device, and adjust the CVD equipment spindle and detection device. If no, proceed to the next step. Specifically, in this step, the pumping function of the helium detector is used to perform a preliminary inspection of the entire circuit of the equipment to be tested (including the CVD equipment spindle, the first adapter, the second adapter, and the vacuum bellows) to determine whether the connection is intact. Step 5: Connect the gas gun to the helium storage device, open the helium valve of the helium storage device, and use the gas gun to spray helium at each sealed position of the CVD equipment spindle and the detection device. Obtain the detection value in the helium detector and determine whether the detection value is less than the set threshold. If so, it is determined that there is a leak in the CVD equipment spindle or the detection device, and the CVD equipment spindle and the detection device are adjusted. If not, proceed to the next step. Specifically, in this step, a vacuum test is performed on the properly connected equipment. This involves connecting the air gun to the helium storage device, opening the helium valve, spraying helium gas through the air gun to each sealed position of the CVD equipment spindle and the testing device, and obtaining the test value through a helium detector to determine whether the test value is less than the set threshold, i.e., to determine whether there is a leak. If there is a leak, adjustments are made; if there is no leak, proceed to the next step. Step 6: Insert the air gun into the spindle of the CVD equipment to release the gas and simultaneously obtain the detection value of the helium detector. Determine whether the detection value is less than the set threshold. If so, it is determined that there is a leak in the CVD equipment spindle or the detection device, and the CVD equipment spindle and the detection device are adjusted. If not, proceed to the next step. Specifically, in the previous step, the connection points between the CVD equipment spindle and the PM cavity simulated vacuum hood and other components were checked for air leakage. This step further checks for air leakage inside the CVD equipment spindle, that is, it determines whether there is air leakage between the spindle and the spindle housing in the CVD spindle equipment. Since one end of the spindle is connected to the linear drive mechanism and the rotary drive mechanism, and the other end extends out of the spindle housing mounting reference surface and is placed inside the PM cavity simulated vacuum hood, in this step, the air gun is inserted into the vicinity of the side where the linear drive mechanism and the rotary drive mechanism are located and helium gas is sprayed out. Helium gas is detected by a helium detector to determine whether there is air leakage between the CVD equipment spindle and the spindle housing. Step 7: After controlling the helium detector to continuously pump air from the CVD equipment spindle for a set time, use an air gun to perform a secondary helium leak detection on the CVD equipment spindle, obtain the detection value from the helium detector, and determine whether the detection value is less than the set threshold. If so, it is determined that there is a leak in the CVD equipment spindle or the detection device; if not, it is determined that the vacuum test of the CVD equipment spindle is qualified. Specifically, after the above steps are completed, the initial vacuum test of the CVD equipment spindle is completed. In order to further ensure the accuracy of the test results, the CVD spindle equipment needs to be evacuated for a period of time. The duration of evacuation can be set as needed, generally lasting 30 minutes. Then, helium gas is sprayed again from the air gun to each monitoring part of the CVD equipment spindle for retesting, thereby ensuring the accuracy and authenticity of the test results.

[0024] Furthermore, in step 5, the locations where helium gas is sprayed from the gas gun at each sealed position of the CVD equipment spindle and the detection device include the space between the PM cavity simulated vacuum hood and the mounting reference surface of the spindle housing of the CVD equipment spindle, the space between the PM cavity simulated vacuum hood and the first adapter, and the space between the second adapter and the vacuum bellows.

[0025] Specifically, the PM cavity simulated vacuum hood and the main spindle housing mounting reference surface of the CVD equipment spindle, the PM cavity simulated vacuum hood and the first adapter, and the second adapter and the vacuum bellows are all structures installed on-site during the testing process, and there is a possibility of air leakage. This application can avoid the impact on the inspection results caused by air leakage of the testing equipment itself by testing the above-mentioned parts.

[0026] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A detection device for detecting vacuum in the spindle of a CVD equipment, characterized in that, include: PM cavity simulates a vacuum chamber, first adapter, second adapter, vacuum bellows, and helium detector; One end of the PM cavity simulates a vacuum hood and is fixedly connected to the mounting reference surface of the spindle housing of the CVD equipment spindle, while the other end is connected to one end of the first adapter. The other end of the first adapter is connected to one end of the second adapter, and the other end of the second adapter is connected to one end of the vacuum bellows; the other end of the vacuum bellows is connected to the helium detector.

2. The detection device for vacuum detection of CVD equipment spindles according to claim 1, characterized in that: The PM cavity simulates a vacuum shroud, which includes a sleeve-structured vacuum shroud body. The end face of the vacuum shroud body connected to the mounting reference surface of the spindle housing has a plurality of threaded holes evenly distributed thereon for fixed connection with the spindle housing. The end face of the vacuum shroud body connected to the mounting reference surface of the spindle housing is also provided with a positioning pin hole for positioning with the mounting reference surface of the spindle housing.

3. The detection device for vacuum detection of CVD equipment spindle according to claim 2, characterized in that: Sealing rings are provided between the PM cavity simulated vacuum hood and the spindle housing mounting reference surface of the CVD equipment spindle, between the PM cavity simulated vacuum hood and the first adapter, and between the second adapter and the vacuum bellows.

4. The detection device for vacuum detection of CVD equipment spindle according to claim 3, characterized in that: The first adapter and the vacuum bellows, the vacuum bellows and the second adapter, and the second adapter and the helium detector are all connected by vacuum clamps for tight sealing.

5. The detection device for vacuum detection of CVD equipment spindle according to claim 4, characterized in that: The end face of the vacuum shroud body connected to the mounting reference surface of the spindle housing is also provided with a sealing ring receiving groove for installing a sealing ring.

6. The detection device for vacuum detection of CVD equipment spindle according to claim 5, characterized in that: The first adapter is a KF40-KF100 adapter; the second adapter is a KF25-KF40 adapter.

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