A device for measuring the light output performance of an ultraviolet light source system
Patent Information
- Application Number
- CN202522242574.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-23
- Publication Date
- 2026-10-20
- Estimated Expiration
- 2035-10-23
AI Technical Summary
[0004]本实用新型的目的是：提供一种紫外光源系统光输出性能测量装置，以解决现有技术中紫外光源系统需要安装到光刻机中才能进行调试和测试，导致调试时间过长，影响生产效率的技术问题
[0014]本实用新型提供的光输出性能测量装置，其有益效果为：汞灯安装在光源安装室内，汞灯启动后，其发出的光线被椭球反光碗收集并聚焦。随后，光线依次经过出光口、出光柱的过光通道、测试光口，并在紫外辐射计的探头处形成光斑；三轴位移台可移动探头，以便探头的接收面中心点对准椭球反光碗的第二焦点；而且，三轴位移台可移动探头，使得紫外辐射计可以检测多个检测点位的辐照度。通过计算，可以得到X轴方向的辐照度均匀性、Y轴方向的辐照度均匀性和光源系统的光输出平均辐照度，根据X轴方向的辐照度均匀性、Y轴方向的辐照度均匀性和光源系统的光输出平均辐照度便可以判断汞灯及其光源系统的性能，因此，不仅可以更好地测试和验证汞灯及其光源系统的性能，确保光源系统产品的质量，且还能大大缩短将光源系统安装到光刻机中的调试和测试时间，有效提高了生产效率。
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Figure CN224873287U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of light source system measurement equipment technology, and in particular to a device for measuring the light output performance of an ultraviolet light source system. Background Technology
[0002] The light source system of a lithography machine is one of its core components. It provides the specific wavelengths and power of light required for the lithography process, which is fundamental to achieving high-precision pattern transfer. Typically, lithography machine light source systems employ excimer lasers, mercury lamps, and extreme ultraviolet (EUV) light sources to generate ultraviolet (UV), deep ultraviolet (DUV), or extreme ultraviolet (EUV) light. The wavelength of the light source directly determines the lithography machine's processing capabilities and resolution. With the continuous advancement of chip manufacturing technology, the wavelength of the light source has gradually shortened from ultraviolet to deep ultraviolet, and then to extreme ultraviolet, to meet the demands for higher resolution and smaller feature sizes. The performance of the light source system directly determines the resolution, exposure uniformity, and production efficiency of the lithography machine, and is a key factor in achieving high-precision pattern transfer.
[0003] The light source system of an i-line (365nm wavelength) lithography machine primarily uses mercury lamps as its light source. This system typically includes key components such as the mercury lamp light source, driving power supply, reflector bowl, and cold mirror. To ensure the precision and overall performance of the lithography machine, the light output performance of the mercury lamp light source system must meet the stringent requirements of the lithography system. However, there are currently no measurement devices available on the market specifically for the light source system of i-line lithography machines. Therefore, the light source system requires multiple adjustments and tests after installation to ensure the lithography machine operates normally. This not only results in excessively long adjustment times and low production efficiency but also makes it difficult for mercury lamp light source manufacturers to conduct comprehensive testing and verification before products leave the factory, thus compromising product quality. Utility Model Content
[0004] The purpose of this invention is to provide a device for measuring the light output performance of an ultraviolet light source system, thereby solving the technical problem that in the prior art, ultraviolet light source systems need to be installed in a lithography machine for debugging and testing, resulting in excessively long debugging times and affecting production efficiency. At the same time, it also benefits mercury lamp light source manufacturers by allowing them to conduct thorough testing and verification before products leave the factory, ensuring product quality.
[0005] To achieve the above objectives, this utility model provides a device for measuring the light output performance of an ultraviolet light source system. The light source system has a light source mounting chamber, and the device includes: a test stage, a light-emitting column, a cover plate, a three-axis displacement stage, and an ultraviolet radiometer. The test stage is connected to the light source mounting chamber of the light source system. A light-emitting port is provided at the top of the light source mounting chamber. A light-passing channel is provided in the middle of the light-emitting column. The light-emitting column covers the light-emitting port, and the bottom end of the light-passing channel communicates with the light-emitting port. The cover plate is provided at the top of the light-emitting column, and the cover plate has a test light port communicating with the light-passing channel. The three-axis displacement stage is provided on the cover plate. The three-axis displacement stage has a moving stage, which is used to drive the moving stage to move along the X-axis, Y-axis, and Z-axis. The moving stage is located at the test light port, and the ultraviolet radiometer has a probe, which is located below the moving stage.
[0006] Preferably, a probe mounting base is provided on the lower side of the mobile stage, and the probe is located on the lower side of the probe mounting base.
[0007] Preferably, it further includes: a light shield; the light shield is sleeved on the outside of the probe and the probe mounting base, and the light shield is used to cover the gap between the probe and the test light port.
[0008] Preferably, the light shield has a straight cylindrical portion and a flanged portion, the flanged portion is disposed on the lower side of the straight cylindrical portion, the flanged portion is used to cover the gap between the probe and the test light port, and the straight cylindrical portion is sleeved on the outside of the probe and the probe mounting base.
[0009] Preferably, the straight cylindrical portion is provided with a lead wire groove, and the ultraviolet radiometer has a connecting wire that connects to the probe, the connecting wire passing through the lead wire groove.
[0010] Preferably, the probe and the probe holder are both cylindrical, and the straight cylindrical part is a cylindrical tube.
[0011] Preferably, the probe is located above the test optical port.
[0012] Preferably, the triaxial displacement stage is disposed on the upper side of the cover plate.
[0013] Preferably, an ellipsoidal reflector is provided in the light source installation chamber, and the opening of the ellipsoidal reflector faces the light outlet.
[0014] The optical output performance measurement device provided by this utility model has the following advantages: The mercury lamp is installed in the light source installation chamber. After the mercury lamp is turned on, the light emitted is collected and focused by the ellipsoidal reflector. Subsequently, the light passes sequentially through the light outlet, the light-passing channel of the light column, and the test light outlet, forming a light spot at the probe of the ultraviolet radiometer. The three-axis displacement stage can move the probe so that the center point of the probe's receiving surface is aligned with the second focal point of the ellipsoidal reflector. Moreover, the three-axis displacement stage's ability to move the probe allows the ultraviolet radiometer to detect the irradiance at multiple detection points. Through calculation, the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction, and the average irradiance of the light output of the light source system can be obtained. Based on the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction, and the average irradiance of the light output of the light source system, the performance of the mercury lamp and its light source system can be judged. Therefore, it not only allows for better testing and verification of the performance of the mercury lamp and its light source system, ensuring the quality of the light source system products, but also significantly shortens the debugging and testing time when installing the light source system into the lithography machine, effectively improving production efficiency. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the structure of the ultraviolet light source system light output performance measurement device according to an embodiment of the present invention; Figure 2 yes Figure 1 Enlarged structural diagram at point A; Figure 3 This is a cross-sectional structural schematic diagram of the ultraviolet light source system light output performance measurement device according to an embodiment of this utility model; Figure 4 yes Figure 3 A magnified structural diagram at point B in the middle.
[0016] In the diagram, 100 is the test platform; 110 is the light source mounting chamber; 111 is the light outlet; 120 is the ellipsoidal reflector; 200 is the light outlet column; 210 is the light transmission channel; 300 is the cover plate; 310 is the test light port; 400 is the three-axis displacement stage; 410 is the moving stage; 420 is the probe mounting base; 500 is the ultraviolet radiometer; 510 is the probe; 520 is the connecting cable; 600 is the light shield; 610 is the straight section; 620 is the flanged section; and 630 is the lead wire groove. Detailed Implementation
[0017] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0018] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0019] In the description of this utility model, "multiple" means two or more; "greater than," "less than," and "exceeding" are understood to exclude the stated number; "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly specifying the number of indicated technical features or their sequential relationship.
[0020] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.
[0021] Please refer to the following: Figures 1 to 4 The light output performance measurement device for an ultraviolet light source system provided in this embodiment of the present invention will now be described. The X-axis, Y-axis, and Z-axis directions are as follows: Figure 1 As shown, the light source system being measured has a light source mounting chamber 110.
[0022] like Figures 1 to 4 As shown, the ultraviolet light source system light output performance measurement device of this utility model embodiment includes: a test stage 100, a light-emitting column 200, a cover plate 300, a three-axis displacement stage 400, and an ultraviolet radiometer 500; the test stage 100 is connected to the light source mounting chamber 110 of the light source system, the top of the light source mounting chamber 110 is provided with a light-emitting port 111, the light-emitting column 200 has a light-passing channel 210 in the middle, the light-emitting column 200 covers the light-emitting port 111, and the bottom end of the light-passing channel 210 communicates with the light-emitting port 111; A cover plate 300 is disposed on top of the light-emitting column 200, and the cover plate 300 is provided with a test light port 310 communicating with the light-passing channel 210; a three-axis displacement stage 400 is disposed on the cover plate 300, and the three-axis displacement stage 400 has a moving stage 410, which is used to drive the moving stage 410 to move along the X-axis, Y-axis, and Z-axis; the moving stage 410 is located at the test light port 310, and the ultraviolet radiometer 500 has a probe 510, which is disposed on the lower side of the moving stage 410.
[0023] The light-emitting column 200 is a hollow column to allow light to pass through the light-passing channel 210. The light-emitting column 200 prevents stray light leakage from the light source system, avoiding harm to test personnel. The ultraviolet radiometer 500 is used to detect the irradiance of the ultraviolet spot at the probe 510. The light source mounting chamber 110 is used to install a mercury lamp. To facilitate light focusing, an ellipsoidal reflector 120 is provided in the light source mounting chamber 110. The opening of the ellipsoidal reflector 120 faces the light-emitting port 111, so that the light emitted by the mercury lamp is collected by the ellipsoidal reflector 120 and emitted towards the light-emitting port 111, forming a light spot on the probe 510. The three-axis displacement stage 400 has three slide rails, which are parallel to the X-axis, Y-axis, and Z-axis respectively. Each slide rail is slidably connected to a slide table for three-axis movement. In this embodiment, the Y-axis slide rail and Y-axis slide table are disposed on the X-axis slide table; the Z-axis slide table and Z-axis slide rail are disposed on the Y-axis slide table; and the moving stage 410 is disposed on the Z-axis slide table, so that the moving stage 410 can move along the X-axis, Y-axis, and Z-axis.
[0024] Understandably, when installing the mercury lamp, it is installed inside the light source mounting chamber 110, and the center of the distance between the anode and cathode of the mercury lamp is adjusted to the first focal point of the ellipsoidal reflector bowl 120. The three-axis displacement stage 400 can move the center point of the receiving surface of the probe 510 to the second focal point of the ellipsoidal reflector bowl 120, so that after the mercury lamp is turned on, a light spot is formed at the probe 510.
[0025] The operating procedure is as follows: Install the mercury lamp in the light source installation chamber 110 and turn it on. The light generated by the mercury lamp passes through the light outlet 111, the light channel 210, and the test light port 310, forming a light spot on the probe 510. After 30 to 50 minutes, the mercury lamp light source reaches a stable state, at which point the probe 510 can obtain the irradiance of the second focal point. Subsequently, use a three-axis displacement stage 400 to move the probe 510 along the X-axis, so that the probe 510 sequentially passes through 5 to 9 X-axis test points, i.e., detect the irradiance of 5 to 9 X-axis test points, and calculate the average value. Similarly, the irradiance at 5 to 9 Y-axis test points is measured, and the average value is calculated. and find and average As the average irradiance of light output in a mercury lamp light source system; It should be noted that the method for selecting the X-axis test points and Y-axis test points is as follows: take the first test point at the second focus of the ellipsoidal reflector bowl 120, and then take the remaining test points symmetrically in the left and right directions of the X-axis or Y-axis.
[0026] Finally, the maximum irradiance values at the X-axis measurement points are extracted. and minimum value and the maximum irradiance at the Y-axis measurement point. and minimum value Calculate the irradiance uniformity U in the X-axis and Y-axis directions using the following formulas. x and U y ; Formula for calculating the uniformity of irradiance in the X-axis direction: ; Formula for calculating the uniformity of irradiance in the Y-axis direction: .
[0027] Therefore, through the above operations, the average irradiance of the light output of the mercury lamp's light source system, as well as the irradiance uniformity U, can be obtained. x and U y And based on the uniformity of irradiance U x and U y To determine the light output performance of the light source system, the light output performance test of the mercury lamp light source system is completed. Specifically, if the irradiance uniformity U along the X-axis direction... x ≥95% irradiance uniformity in the Y-axis direction U y The light source system performance is qualified if the efficiency is ≥95%.
[0028] In this embodiment, the mercury lamp is installed in the light source mounting chamber 110. After the mercury lamp is turned on, the light will pass through the light outlet 111, the light passage 210 of the light outlet column 200, and the test light outlet 310, and form a light spot at the probe 510 of the ultraviolet radiometer 500. The three-axis displacement stage 400 can move the probe 510 so that the center point of the receiving surface of the probe 510 is aligned with the second focal point of the ellipsoidal reflector bowl 120. Moreover, the three-axis displacement stage 400 can move the probe 510 so that the ultraviolet radiometer 500 can detect the irradiance at multiple detection points. After calculation, the irradiance uniformity in the X-axis direction, the irradiance uniformity in the Y-axis direction, and the average irradiance of the light output of the mercury lamp light source system can be obtained, so as to better test and verify the performance of the mercury lamp and its light source system, ensure the quality of the light source product, and greatly shorten the debugging and testing time of installing the light source system into the lithography machine, effectively improving production efficiency.
[0029] In some embodiments of this utility model, reference is made to Figures 2 to 4 A probe holder 420 is provided on the lower side of the moving stage 410, and the probe 510 is disposed on the lower side of the probe holder 420. The probe holder 420 is used to fix the probe 510 so that the probe 510 faces downward, which facilitates the probe 510 to detect the light output irradiance of the light source system.
[0030] In some embodiments of this utility model, reference is made to Figures 2 to 4It also includes: a light shield 600; the light shield 600 is sleeved on the outside of the probe 510 and the probe mounting base 420, the light shield 600 is used to cover the gap between the probe 510 and the test light port 310, the light shield 600 can prevent stray light from leaking out from the gap between the probe 510 and the cover plate 300 of the ultraviolet radiometer 500, thereby reducing light leakage and avoiding stray light from causing harm to the test personnel and affecting the test data of the probe 510.
[0031] Based on the above, and referring to Figures 2 to 4 The light shield 600 has a straight cylindrical portion 610 and a flanged portion 620. The flanged portion 620 is disposed on the lower side of the straight cylindrical portion 610 and is used to cover the gap between the probe 510 and the test light port 310. The straight cylindrical portion 610 is sleeved on the outside of the probe 510 and the probe mounting base 420, that is, the flanged portion 620 covers the gap. The lower side of the flanged portion 620 is horizontal to avoid collision or friction between the light shield 600 and the cover plate 300, so that the three-axis displacement stage 400 can move the probe 510 along the X-axis and Y-axis. Specifically, in some preferred embodiments, for ease of installation, the probe 510 and the probe mounting base 420 are both cylindrical, and the straight cylindrical portion 610 is a cylindrical tube. In addition, the probe 510 and the probe mounting base 420 can be regular shapes such as square columns, and the corresponding straight cylindrical portion 610 can be regular shapes such as square tubes.
[0032] In some embodiments of this utility model, reference is made to Figures 2 to 4 To facilitate wiring, the straight cylindrical part 610 is provided with a lead wire groove 630, and the ultraviolet radiometer 500 is also provided with a connecting wire 520. The connecting wire 520 passes through the lead wire groove 630 and connects the ultraviolet radiometer 500 to the probe 510 so that the ultraviolet radiometer 500 can measure the irradiance of the light spot at the second focal point in a timely manner, thereby detecting the light output performance of the light source system.
[0033] In some embodiments of this utility model, reference is made to Figures 2 to 4 To facilitate installation and testing, the probe 510 is located above the test optical port 310, and the triaxial displacement stage 400 is set on the upper side of the cover plate 300. This assembly method makes it easier for testers to adjust the position of the probe 510 and makes operation more convenient.
[0034] The operation method of the optical output performance measurement device in this embodiment is as follows: The mercury lamp is placed in the light source mounting chamber 110, which contains an ellipsoidal reflector 120. The center of the distance between the anode and cathode of the mercury lamp can be adjusted to the first focal point of the ellipsoidal reflector 120. Then, a three-axis displacement stage 400 is used to move the center point of the receiving surface of the probe 510 to the second focal point of the ellipsoidal reflector 120. The mercury lamp is then turned on, and the light source is allowed to reach a stable state for 30-50 minutes, so that the light emitted by the mercury lamp forms a light spot at the probe 510. The probe 510 is moved along the X-axis using a triaxial displacement stage 400, so that the probe 510 sequentially passes through 5 to 9 X-axis test points. The irradiance of all X-axis test points is measured using the probe 510, and the average value is calculated. ; The probe 510 is moved along the Y-axis using a triaxial displacement stage 400, so that the probe 510 passes through 5 to 9 Y-axis test points in sequence. The irradiance of all Y-axis test points is measured using the probe 510, and the average value is calculated. and find and average As the average irradiance of light output in a mercury lamp light source system; Extract the maximum irradiance values at the X-axis measurement points respectively. and minimum value and the maximum irradiance at the Y-axis measurement point. and minimum value Calculate the irradiance uniformity U in the X-axis and Y-axis directions using the following formulas. x and U y ; Formula for calculating the uniformity of irradiance in the X-axis direction: ; Formula for calculating the uniformity of irradiance in the Y-axis direction: .
[0035] The light output performance of the light source system is judged based on the irradiance uniformity Ux in the X-axis direction and the irradiance uniformity Uy in the Y-axis direction; if the irradiance uniformity Ux in the X-axis direction is ≥95% and the irradiance uniformity Uy in the Y-axis direction is ≥95%, the performance of the light source system is qualified.
[0036] It should be noted that the method for selecting the X-axis test point or Y-axis test point is as follows: the center point of the receiving surface of the probe is adjusted to the second focal point of the ellipsoidal reflector bowl 120 to take the first test point, and then the remaining test points are taken symmetrically in the left and right directions of the X-axis or Y-axis.
[0037] Specifically, when the probe 510 is moved along the X-axis using a triaxial displacement stage 400, so that the probe 510 sequentially passes through 5 to 9 X-axis test points, the center point of the receiving surface of the probe 510 is adjusted to the second focal point of the ellipsoidal reflector bowl 120 of the light source system to obtain the first X-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the X-axis to obtain 5 to 9 X-axis test points. Therefore, by using the triaxial displacement stage 400 to move the probe 510 to each X-axis test point, the irradiance of each X-axis test point can be obtained.
[0038] When the probe 510 is moved along the Y-axis using a triaxial displacement stage 400, so that the probe 510 passes through 5 to 9 Y-axis test points in sequence, the center point of the receiving surface of the probe 510 is adjusted to the second focal point of the ellipsoidal reflector bowl 120 of the light source system to obtain the first Y-axis test point. Then, the remaining test points are symmetrically taken in the left and right directions along the Y-axis to obtain 5 to 9 Y-axis test points. Therefore, by using the triaxial displacement stage 400 to move the probe 510 to each Y-axis test point, the irradiance of each Y-axis test point can be measured.
[0039] Through the above operations, the average irradiance of the light output of the mercury lamp's light source system, as well as the irradiance uniformity U, can be obtained. x and U y To complete the light output performance test of the mercury lamp light source system.
[0040] The following examples will illustrate this: Implementation Plan 1: Place a 4500W mercury lamp 1 in the light source system, and adjust the center of the distance between the anode and cathode of the mercury lamp to the first focal point of the ellipsoidal reflector 120. Calibrate the UV radiometer 500, then mount its probe 510 on the probe holder 420. Use a triaxial displacement stage 400 to adjust the center point of the receiving surface of the probe 510 to the second focal point of the ellipsoidal reflector 120. Turn on the power, start the mercury lamp, and wait 30 minutes until the mercury lamp light source reaches a stable state. Next, turn on the UV radiometer 500 for testing, and use the triaxial displacement stage 400 to move the probe 510 of the UV radiometer 500 along the X-axis, and measure the irradiance at five X-axis measurement points: 15.02, 14.65, 14.17, 14.90, and 14.78 (unit: mW / cm²). 2 ), calculate the average irradiance It is 14.70 mW / cm 2Subsequently, a triaxial displacement stage 400 was used to reset the probe 510 of the ultraviolet radiometer 500, adjusting the center point of the receiving surface of the probe 510 back to the second focal point of the ellipsoidal reflector bowl 120 to measure the irradiance at the first point on the Y-axis. Then, the probe was moved along the Y-axis, acquiring the irradiance at five Y-axis measurement points: 15.02, 14.81, 13.63, 14.24, and 13.82 (unit: mW / cm²). 2 ), calculate the average It is 14.30 mW / cm 2 The irradiance uniformity along the X-axis was calculated to be 97.09%, and the irradiance uniformity along the Y-axis was calculated to be 95.15%, indicating that the performance of the light source system was qualified.
[0041] Implementation Plan Two: A 4500W mercury lamp was placed in the light source system, and the center of the distance between the anode and cathode of the mercury lamp was adjusted to be at the first focal point of the ellipsoidal reflector bowl 120. The ultraviolet radiometer 500 was calibrated, and its probe 510 was mounted on the probe holder 420. The center point of the receiving surface of the probe 510 was adjusted to the second focal point of the ellipsoidal reflector bowl 120 using a triaxial displacement stage 400. The power was turned on, the mercury lamp was started, and 40 minutes were allowed for the light source to stabilize. Next, the ultraviolet radiometer 500 was turned on for testing. The probe 510 of the ultraviolet radiometer 500 was moved along the X-axis using the triaxial displacement stage 400, and the irradiance at seven X-axis measurement points was obtained: 15.21, 15.02, 14.87, 13.93, 15.14, 14.42, and 13.82 (unit: mW / cm²). 2 ), calculate the average value It is 14.63 mW / cm 2 Subsequently, a triaxial displacement stage 400 was used to reset the probe 510 of the ultraviolet radiometer 500, adjusting the center point of the receiving surface of the probe 510 back to the second focal point of the ellipsoidal reflector bowl 120 to measure the irradiance at the first point on the Y-axis. Then, the probe was moved along the Y-axis, acquiring the irradiance at seven Y-axis measurement points: 15.21, 14.46, 14.01, 13.78, 14.80, 14.07, and 13.79 (unit: mW / cm²). 2 ), calculate the average It is 14.30 mW / cm 2 The irradiance uniformity along the X-axis was calculated to be 95.21%, and the irradiance uniformity along the Y-axis was calculated to be 95.07%. Therefore, the performance of the light source system is qualified.
[0042] Implementation Plan 3: A 4500W mercury lamp (light source 3) was placed in the light source system, and the center of the distance between the anode and cathode of the mercury lamp was adjusted to be at the first focal point of the ellipsoidal reflector bowl 120. The UV radiometer 500 was calibrated, and then its probe 510 was mounted on the probe holder 420. The center point of the receiving surface of the probe 510 was adjusted to the second focal point of the ellipsoidal reflector bowl 120 using a triaxial displacement stage 400. The power was turned on, the mercury lamp was started, and 40 minutes were allowed for the light source to stabilize. Next, the UV radiometer 500 was turned on for testing. The triaxial displacement stage 400 was used to move the probe 510 of the UV radiometer 500 along the X-axis, and the irradiance at nine X-axis measurement points was obtained: 15.17, 15.15, 14.95, 14.06, 13.76, 15.13, 14.71, 14.29, and 13.73 (unit: mW / cm²). 2 ), calculate the average value It is 14.55 mW / cm 2 Subsequently, a triaxial displacement stage 400 was used to reset the probe 510 of the ultraviolet radiometer 500, adjusting the center point of the receiving surface of the probe 510 back to the second focal point of the ellipsoidal reflector bowl 120 to measure the irradiance at the first point on the Y-axis. Then, the stage was moved along the Y-axis, acquiring the irradiance at eight Y-axis measurement points: 15.17, 14.92, 14.25, 13.79, 13.75, 14.68, 14.31, 13.90, and 13.76 (unit: mW / cm²). 2 ), calculate the average It is 14.28 mW / cm 2 The irradiance uniformity along the X-axis was calculated to be 95.02%, and the irradiance uniformity along the Y-axis was calculated to be 95.09%. Therefore, the performance of the light source system is qualified.
[0043] The above are merely preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of this utility model, and these improvements and substitutions should also be considered within the protection scope of this utility model.
Claims
1. A device for measuring the light output performance of an ultraviolet light source system, wherein the light source system has a light source mounting chamber, characterized in that, include: The system comprises a test stage, a light-emitting column, a cover plate, a three-axis displacement stage, and an ultraviolet radiometer. The test stage is connected to the light source mounting chamber of the light source system. The top of the light source mounting chamber has a light-emitting port. The light-emitting column has a light-passing channel in the middle, and the light-emitting column covers the light-emitting port. The bottom end of the light-passing channel communicates with the light-emitting port. The cover plate is located on top of the light-emitting column and has a test light port communicating with the light-passing channel. The three-axis displacement stage is located on the cover plate and has a moving stage for driving the moving stage to move along the X, Y, and Z axes. The moving stage is located at the test light port, and the ultraviolet radiometer has a probe located below the moving stage.
2. The ultraviolet light source system light output performance measurement device according to claim 1, characterized in that, A probe mounting base is provided on the lower side of the mobile stage, and the probe is located on the lower side of the probe mounting base.
3. The ultraviolet light source system light output performance measurement device according to claim 2, characterized in that, Also includes: A light shield; the light shield is fitted over the outside of the probe and the probe mounting base, and the light shield is used to cover the gap between the probe and the test light port.
4. The ultraviolet light source system light output performance measurement device according to claim 3, characterized in that, The light shield has a straight cylindrical part and a flanged part. The flanged part is disposed on the lower side of the straight cylindrical part and is used to cover the gap between the probe and the test light port. The straight cylindrical part is sleeved on the outside of the probe and the probe mounting base.
5. The ultraviolet light source system light output performance measurement device according to claim 4, characterized in that, The straight cylindrical section is provided with a lead wire groove, and the ultraviolet radiometer has a connecting wire that connects to the probe, and the connecting wire passes through the lead wire groove.
6. The ultraviolet light source system light output performance measuring device according to claim 4, characterized in that, Both the probe and the probe holder are cylindrical, and the straight section is a cylindrical tube.
7. The ultraviolet light source system light output performance measurement device according to claim 1, characterized in that, The probe is located above the test optical port.
8. The ultraviolet light source system light output performance measurement device according to claim 1, characterized in that, The three-axis displacement stage is located on the upper side of the cover plate.
9. The ultraviolet light source system light output performance measurement device according to claim 1, characterized in that, An ellipsoidal reflector is installed in the light source installation chamber, with the opening of the ellipsoidal reflector facing the light outlet.