Photodetector

Abstract

The photoelectric detector according to the exemplary embodiment of the present application can include: a flow cell configured to allow a liquid sample containing nanoparticles to flow; a laser generation unit that irradiates a pulsed laser beam on the flow cell and generates a plasma; a flow control unit that controls the flow of the liquid sample in the flow cell; an integrating sphere that reflects a light signal from the plasma multiple times; and a spectrometer that measures the light signal reflected from the integrating sphere. The present application can more accurately analyze nanoparticle information.

Description

[0001] Cross-reference to related applications and priority claims This application claims priority to Korean Patent Application No. 20-2024-0002323, filed on December 26, 2024, with the Korean Intellectual Property Office (KIPO), the entire disclosure of which is incorporated herein by reference. Technical Field

[0002] This utility model relates to a photoelectric detector. Background Technology

[0003] The various organic and inorganic chemicals used in the manufacturing processes of products requiring high precision (such as displays and semiconductors) need to be of higher purity than currently available to prevent a decrease in manufacturing yield. Furthermore, advanced analytical techniques are being developed and newly applied to confirm the quality of high-purity chemicals.

[0004] The importance of particle analysis is increasing. Nanoscale particles can reduce semiconductor manufacturing yields and affect the high integration of semiconductor processes. Therefore, there is a need to develop stable analytical methods for quality control, and the scalability of the technology must be guaranteed so that the causes of defects that may occur during processing can be analyzed.

[0005] Typically, a solution is a state in which substances are uniformly dispersed in a liquid in the form of molecules or ions. In such a solution, particles larger than ordinary molecules or ions and with a diameter of 1 nm to 1000 nm are dispersed without agglomerating or precipitating; this state is called the colloidal state. Substances in this colloidal state are called colloids.

[0006] Studies of microcolloids in solution have focused on obtaining information about the physicochemical properties of the analyte or improving the detection capabilities of separation analyzers. Until recently, the analysis of colloidal particles was limited because it involved particles larger than 100 nm. Therefore, there is a need to develop a technique that requires high concentrations of sample to accurately analyze colloidal particles smaller than 100 nm. Utility Model Content

[0007] One aspect of this invention provides a photodetector for improving the reliability of measurements of nanoparticles.

[0008] A photodetector according to an exemplary embodiment of the present invention includes: a flow cell configured to allow the flow of a liquid sample containing nanoparticles; a laser generating unit that irradiates the flow cell with a pulsed laser beam and generates plasma; a flow control unit that controls the flow of the liquid sample within the flow cell; an integrating sphere that reflects light signals from the plasma multiple times; and a spectrometer that measures the light signals reflected from the integrating sphere.

[0009] In an exemplary embodiment, the spectrometer can analyze information about nanoparticles using the spectrum of the optical signal.

[0010] In an exemplary embodiment, the inner surface of the integrating sphere may be coated such that the inner surface of the integrating sphere reflects light signals multiple times.

[0011] In an exemplary embodiment, the flow pool may be disposed within an integrating sphere.

[0012] In an exemplary embodiment, the photodetector may further include a flow cell holder placed in the integrating sphere, the flow cell holder fixing the flow cell.

[0013] In an exemplary embodiment, the flow cell can be detachably mounted to the flow cell holder.

[0014] In an exemplary embodiment, the surface of the flow cell holder may be configured to reflect light signals.

[0015] In an exemplary embodiment, the inner surface of the integrating sphere and the surface of the flow cell holder can be configured to reflect light with wavelengths between 180 nm and 2500 nm.

[0016] In an exemplary embodiment, the inner surface of the integrating sphere and the surface of the flow cell holder can be configured to reflect light with wavelengths between 200 nm and 1100 nm.

[0017] In an exemplary embodiment, a flow path can be formed inside the integrating sphere, in which the liquid sample can flow.

[0018] In an exemplary embodiment, the photodetector may further include a notch filter disposed along the path, wherein the optical signal is incident on the spectrometer along the path.

[0019] In an exemplary embodiment, the photodetector may further include a concentrator that collects light signals reflected from the inner surface of the integrating sphere.

[0020] In an exemplary embodiment, the photodetector may further include an optical fiber connecting the integrating sphere and the spectrometer, the optical fiber transmitting the optical signal reflected multiple times from the integrating sphere to the spectrometer.

[0021] In an exemplary embodiment, a first opening may be formed on one side of the integrating sphere, and a second opening may be formed on the other side of the integrating sphere. The pulsed laser beam may be configured to enter the interior of the integrating sphere through the first opening, and at least a portion of the pulsed laser beam may be configured to exit the integrating sphere through the second opening.

[0022] In an exemplary embodiment, the photodetector may further include a camera for detecting an image of the light signal generated from the plasma, the camera being displaced to one side of the integrating sphere.

[0023] In an exemplary embodiment, the spectrometer and the camera can penetrate the surface of the integrating sphere, such that at least a portion of the spectrometer and at least a portion of the camera are located inside the integrating sphere.

[0024] In an exemplary embodiment, the photodetector may further include a data storage device for storing signals detected by the spectrometer.

[0025] In an exemplary embodiment, the laser generating unit may include an attenuator for adjusting the intensity of the pulsed laser beam.

[0026] According to an exemplary embodiment of the present invention, a photodetector can analyze the type of nanoparticles in a liquid sample by using a spectrometer.

[0027] The photodetector according to an exemplary embodiment of the present invention amplifies the light signal emitted from the induced plasma by arranging a flow cell inside the integrating sphere, and obtains a uniform signal through multiple reflections of light on the inner surface of the integrating sphere. Therefore, more precise and accurate analysis of nanoparticle information is possible. Attached Figure Description

[0028] The accompanying drawings are included to provide a further understanding of the present disclosure and are incorporated in and constitute a part of this disclosure. The drawings illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0029] Figure 1 This is a schematic diagram of a fluid nanoparticle measuring device including a photodetector according to an embodiment of the present invention.

[0030] Figure 2 This is a schematic diagram of a fluid nanoparticle measuring device according to an embodiment of the present invention.

[0031] Figure 3 This is a schematic diagram showing components related to a photodetector according to an embodiment of the present invention.

[0032] Figure 4 This is a schematic diagram illustrating the arrangement of components of a photodetector according to an embodiment of the present invention. Detailed Implementation

[0033] The embodiments of the present invention are provided to explain the present invention more fully to those skilled in the art, and the following embodiments may be modified in various different forms, and the scope of the present invention is not limited to the following embodiments.

[0034] For ease of explanation, some embodiments of the present invention are described below with reference to the exemplary accompanying drawings. When designating reference numerals for components in various figures, the same reference numerals are used to denote the same components as much as possible, even if the same components are shown in different figures.

[0035] The terms or words used in this specification and claims should not be limited to their ordinary or dictionary meanings, but should be interpreted as having meanings and concepts consistent with the technical ideas of this utility model, based on the inventor's ability to appropriately define the concepts of the terms in order to best interpret the principles of his or her own utility model.

[0036] The terminology used herein is for describing particular embodiments and is not intended to limit the invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise.

[0037] Furthermore, when used to describe and declare this disclosure, the terms “comprising,” “including,” “by,” and “having” shall be interpreted in a non-exclusive manner and, unless otherwise specifically stated, shall be interpreted as implying that the component may exist and therefore not excluding but including other components.

[0038] Furthermore, when describing components of embodiments of this utility model, terms such as first, second, A, B, (A), (B) may be used. These terms are intended only to distinguish components from other components, and the nature, order, or sequence of components is not limited by the terms.

[0039] When a component is described as “connected” or “linked” to another component, it should be understood that the component may be directly connected or linked to the other component, but the other component may also be “connected” or “linked” between the component and other components.

[0040] Spatial terms such as "below," "below," "lower," "above," and "upper" are used to facilitate understanding of one element or feature depicted in the drawings and another element or feature. These spatial terms are for the purpose of facilitating understanding of the use of this invention in various process or usage states, and are not intended to limit the invention. For example, if an element or feature in the drawings is flipped, an element or feature described as "below" or "below" becomes "upper" or "above," thus "below" is a concept that includes "above" or "below." The embodiments described in this specification and the configurations shown in the accompanying drawings are merely the most preferred embodiments of this utility model and do not represent all the technical ideas of this utility model. Therefore, it should be understood that various equivalents and modifications that can replace them may exist at the time of this application. In addition, detailed descriptions of well-known functions and configurations that may unnecessarily obscure the essence of this utility model have been omitted.

[0041] This invention relates to a photodetector 110 that can be applied to a fluid nanoparticle measuring device 1.

[0042] The fluid nanoparticle measurement device 1 can use the laser-induced breakdown detection (LIBD) method. The LIBD method is a technique that utilizes the following principle: when a pulsed laser beam with a pulse width of a few nanoseconds is incident on lens 18 (see... Figure 1 When on lens 18 (see) Figure 1 Laser-induced plasma is generated within the focal region of the nanoparticle. Specifically, when a pulsed laser beam irradiates a nanoparticle, the energy levels of the nanoparticle are excited. Subsequently, the excited-state nanoparticle emits energy and becomes a stable state, i.e., the ground state. The released energy causes the generation of plasma or shock waves within the nanoparticle.

[0043] The phenomenon that generates plasma or shock waves is called breakdown. Generating plasma requires energy, and the minimum energy required is called the threshold energy. The ionization energy required varies for each substance, and the threshold energy depends on the phase of the substance. The threshold energy is highest when the substance is in a gaseous state, and decreases sequentially when the substance is in a liquid or solid state.

[0044] The energy of the laser beam required to generate laser-induced plasma increases sequentially when the nanoparticles are in solid, liquid, and gaseous states. Therefore, when using appropriate laser beam energy, only solid particles in aqueous solutions can be decomposed into a laser-induced plasma state.

[0045] The breakdown probability of a particle depends on its concentration, and the threshold energy of the laser beam required for breakdown depends on the particle size. These properties can be used to analyze either the concentration or size of nanoparticles. Furthermore, the elemental composition of nanoparticles can be analyzed using induced plasma spectroscopy. Therefore, both the physical properties and chemical composition of particles can be identified simultaneously.

[0046] Figure 1 This is a schematic diagram of a fluid nanoparticle measuring device including a photodetector according to an embodiment of the present invention. Figure 2 This is a schematic diagram of a fluid nanoparticle measuring device according to an embodiment of the present invention.

[0047] refer to Figure 1 and 2 The fluid nanoparticle measuring device 1 may include a laser generating unit 10 and a flow device 20.

[0048] The laser generating unit 10 may include at least one of the following: laser generating device 12, aperture 13, reflector 14, beam splitter 16, first energy detector 17, lens 18, or second energy detector 19.

[0049] Laser generating device 12 can generate a pulsed laser beam B. The wavelength of the pulsed laser beam B is not limited to a specific wavelength range. Laser generating device 12 can generate the pulsed laser beam B by using a Q-switch. Laser generating device 12 can repeatedly generate the pulsed laser beam B according to a period. For example, laser generating device 12 can generate a pulsed laser beam B with a first period by switching it on and off. Laser generating device 12 includes an Nd:YAG laser that generates a laser beam with a wavelength of 532 nm. However, it is not limited to this, and the type and energy of the pulsed laser beam B generated from laser generating device 12 can be applied in various ways.

[0050] The aperture 13 can be located on one side of the laser generating device 12, and the diameter of the pulsed laser beam B emitted from the laser generating device 12 and then incident on the aperture 13 can be adjusted.

[0051] The reflector 14 can be arranged in the path of the pulsed laser beam B, which can change the path of the pulsed laser beam B. In addition, as the number of reflectors 14 arranged in the path of the pulsed laser beam B increases, the pulsed laser beam B with the desired wavelength can reach the flow cell 30.

[0052] Beam splitter 16 can control the intensity of the pulsed laser beam B by changing the path of the pulsed laser beam B or by splitting the pulsed laser beam B. Beam splitter 16 can control the path of the pulsed laser beam B so that at least a portion of the pulsed laser beam B (i.e., the first pulsed laser beam B1) incident on beam splitter 16 is guided to flow cell 30.

[0053] In addition, the second pulsed laser beam B2, which branches off from the first pulsed laser beam B1 at the beam splitter 16, can be measured by the first energy detector 17. Therefore, the energy of the first pulsed laser beam B1 irradiating the flow cell 30 can be monitored.

[0054] The first energy detector 17 can detect the second pulsed laser beam B2. The first energy detector 17 can detect the second pulsed laser beam B2, which branches off from the pulsed laser beam B at a certain ratio, thereby inferring the energy of the first pulsed laser beam B1 incident on the flow cell 30.

[0055] Lens 18 can be arranged or adjusted so that the focus of the first pulsed laser beam B1 incident on the flow cell 30 is set on the liquid sample within the flow cell 30. Lens 18 can be adjusted to control the irradiation area of ​​the first pulsed laser beam B1 within the flow cell 30. By adjusting the irradiation area of ​​the flow cell 30, lens 18 can improve the detectability of nanoparticles. The focal length of lens 18 can be adjusted based on the Gaussian distribution of the nanoparticle plasma induced by the first pulsed laser beam B1. The focal length of lens 18 can be set from 10 to 40 nm. However, the focal length of lens 18 is not limited to this.

[0056] The point where the induced plasma is generated can be the point where the first pulsed laser beam B1 encounters the nanoparticles. For example, the point where the induced plasma is generated may be the same as or adjacent to the focal point of the first pulsed laser beam B1 propagating in the flow cell 30. For example, the point where the induced plasma is generated may depend on the refractive index of the liquid sample contained in the flow cell 30. Therefore, it may be necessary to adjust the focal length of the first pulsed laser beam B1 to measure various liquid samples.

[0057] The distance between lens 18 and flow cell 30 can be adjusted based on the type of liquid sample. The distance between lens 18 and flow cell 30 can be adjusted via control unit 70.

[0058] The second energy detector 19 can detect the first pulsed laser beam B1 passing through the flow device 20. In an exemplary embodiment, the control unit 70 can compare the energy of the second pulsed laser beam B2 detected by the first energy detector 17 with the energy of the first pulsed laser beam B1 detected by the second energy detector 19. In this way, the control unit 70 can analyze the energy involved in generating the plasma.

[0059] Simultaneously, the laser generating unit 10 may further include an attenuator 11 for adjusting the intensity of the pulsed laser beam B. For example, the attenuator 11 may reduce the intensity of the pulsed laser beam B incident on the attenuator 11. For example, the intensity of the pulsed laser beam B incident on the attenuator 11 may be greater than the intensity of the pulsed laser beam B that has already passed through the attenuator 11.

[0060] The fluid device 20 may be configured to flow a liquid sample. The fluid device 20 may include a flow cell 30.

[0061] The flow cell 30 can be configured to allow a liquid sample to flow within the flow cell 30. The flow cell 30 may include a cell inlet through which the liquid sample is introduced into the flow cell 30. The cell inlet of the flow cell 30 may be the portion through which the liquid sample is introduced into the flow cell 30.

[0062] The flow cell 30 may include a cell outlet through which the liquid sample flows out. The cell outlet of the flow cell 30 may be the portion through which the liquid sample flows out of the flow cell 30.

[0063] The flow cell 30 may be made of materials including quartz. However, it is not limited to quartz, and depending on the type of liquid sample, polymeric materials such as acrylic acid may be used to manufacture the flow cell 30.

[0064] The shape of the flow cell 30 is described under the assumption that the external shape of the flow cell 30 is a rectangular cell, but the shape of the flow cell 30 is not limited to a rectangular cell. However, for example, when the flow cell 30 is constructed as a rectangular cell, the detector may be positioned in a direction perpendicular to the outer surface of the rectangular cell, or in a direction inclined at an angle relative to the outer surface of the rectangular cell.

[0065] However, the shape of the flow cell 30 and the arrangement of the detectors according to the shape of the flow cell 30 are not limited thereto. The liquid sample can flow within the flow cell 30, and at least a portion of the flow cell 30 can be made of a light-transmitting material, so that the first pulsed laser beam B1 can irradiate the liquid sample located within the flow cell 30.

[0066] The flow cell 30 may include a flow section in which a liquid sample flows, and the flow section of the flow cell 30 may be formed in the shape of a "┓". The flow section of the flow cell 30 may be connected to an inlet section 41 and an outlet section 42.

[0067] However, the shape of the flow portion of the flow cell 30 is not limited to a "┓" shape. For example, the flow portion of the flow cell 30 can be configured to connect the inlet portion 41 and the outlet portion 42 and allow liquid sample flow.

[0068] The inner diameter and shape of the flow portion of the flow cell 30 can be varied. For example, the inner diameter of the flow portion of the flow cell 30 can be equal to or less than 10 mm.

[0069] For example, the flow portion of the flow cell 30 may have a rectangular cross-section or a circular cross-section.

[0070] In an exemplary embodiment, when the flow portion of the flow cell 30 has a circular cross-section, the distance from the flow portion of the flow cell 30 to the detector can be configured to be the same according to the detector arrangement direction. Therefore, constraints on the detector device can be reduced. Furthermore, the reliability of the detection results can be correspondingly improved.

[0071] In an exemplary embodiment, when the flow portion of the flow cell 30 has a square cross-section, the first pulsed laser beam B1 can be irradiated, or the plasma can be measured in a direction perpendicular to the cross-section of the flow cell 30, thereby reducing distortion, such as signal refraction. This configuration allows for more accurate detection results. Furthermore, when the flow portion of the flow cell 30 has a square cross-section, a larger flow path can be formed for the same width. Therefore, the flow portion of the flow cell 30 can achieve smooth flow of the liquid sample.

[0072] However, the shape of the flow portion of the flow pool 30 described above is exemplary, and the shape of the flow portion of the flow pool 30 is not limited to the shape described above. For example, at least a portion of the flow portion of the flow pool 30 may be formed as a curved surface, and the remaining portion may be formed as a flat surface.

[0073] For example, the cross-section of the flow portion of the flow cell 30 can be formed as a combination of curved surfaces and polygonal shapes. If a portion of the flow portion of the flow cell 30 is formed as a curved surface, the detection intensity can be maximized. Additionally, the generation of bubbles in the liquid sample according to the flow rate can be minimized.

[0074] The inner diameter of the flow section of the flow cell 30 can be configured to be constant throughout the entire section. Alternatively, the inner diameter of the flow section of the flow cell 30 can be configured to vary along the flow direction of the liquid sample. Specifically, the flow section of the flow cell 30 can be divided into multiple sections, and the inner diameter of the flow section of the flow cell 30 can be configured to vary for each section. Within the flow sections of the flow section, the main flow section can be constructed to have a different inner diameter and shape than the other flow sections.

[0075] The flow section of the flow cell 30 can form a path through which the liquid sample flows. The flow section of the flow cell 30 can be connected to the cell inlet or cell outlet.

[0076] The flow portion of the flow cell 30 may include a main flow section through which the first pulsed laser beam B1 is transmitted. The main flow section can form a flow space in which the liquid sample flows. The main flow section can be configured such that the first pulsed laser beam B1 is irradiated into the flow space. The flow space of the main flow section can form a path in which the liquid sample flows in one direction.

[0077] The main flow section through which the first pulsed laser beam B1 propagates can be a part of the flow section or the entire flow section. For example, the portion of the flow section before it bends can be the main flow section. However, this invention is not limited to this, and the portion of the flow section after it bends can be the main flow section, or the entire flow section can be defined as the main flow section. The location of the main flow section in the flow section is not limited.

[0078] The first pulsed laser beam B1 can irradiate the flow path of the liquid sample passing through the main flow section. Specifically, the first pulsed laser beam B1 can irradiate the center of the flow path of the liquid sample passing through the main flow section. However, the irradiation position of the first pulsed laser beam B1 relative to the main flow section is not limited to the flow path or the center of the flow path.

[0079] The flow direction of the liquid sample in the main flow section and the irradiation direction of the first pulsed laser beam B1 can be arranged to be perpendicular to each other. That is, the flow path of the liquid sample formed in the main flow section and the first pulsed laser beam B1 incident on the main flow section can be configured to be perpendicular to each other. However, the present invention is not limited to this; the flow direction of the liquid sample and the irradiation direction of the first pulsed laser beam B1 can be adjusted to a horizontal, vertical, or non-horizontal angle. The angle formed by the flow direction and the irradiation direction of the first pulsed laser beam B1 can be applied differently depending on the type of detector.

[0080] The flow cell 30 may be configured such that at least a portion of the flow cell 30, including the main flow section, includes a light-transmitting material for irradiation by the first pulsed laser beam B1. Thus, the first pulsed laser beam B1 can pass through the flow cell 30 and irradiate the liquid sample passing through the main flow section.

[0081] The flow device 20 may include an inlet portion 41. The flow device 20 may include an outlet portion 42.

[0082] Liquid samples can be introduced into the flow cell 30 through the inlet portion 41. Liquid samples contained in the flow cell 30 can be discharged to the outside of the flow device 20 through the outlet portion 42.

[0083] The storage tank can store liquid samples. An inlet portion 41 and an outlet portion 42 can be connected to a storage tank. Therefore, a liquid sample discharged from the storage tank to the inlet portion 41 can flow into the storage tank through the outlet portion 42. However, the invention is not limited thereto; each of the inlet portion 41 and the outlet portion 42 can be connected to a separate storage tank.

[0084] The flow device 20 may include a flow control unit 50.

[0085] The flow control unit 50 can be positioned in the flow path of the liquid sample. The flow control unit 50 can be configured to control the flow rate or flow volume of the liquid sample passing through the flow cell 30. The control unit 70 can control the flow rate or flow volume of the liquid sample passing through the flow cell 30 by controlling the flow control unit 50.

[0086] In one exemplary embodiment, the flow control unit 50 may be located on the path between the flow pool 30 and the outlet portion 42, such as Figure 1 As shown, the path between the flow cell 30 and the outlet section 42 can be downstream of the flow direction of the liquid sample. Therefore, contamination of the liquid sample to be measured can be minimized. However, the arrangement of the flow control unit 50 is not limited to between the flow cell 30 and the outlet section 42.

[0087] For example, the flow control unit 50 may be located on the path between the flow cell 30 and the inlet portion 41. The flow control unit 50 is configured to control the flow rate of the liquid sample flowing through the flow cell 30, and the flow control unit 50 may be placed in a location where the liquid sample will not be contaminated.

[0088] In an exemplary embodiment, the flow control unit 50 can control the flow of the liquid sample in the main flow section. In an exemplary embodiment, the flow control unit 50 can control the flow rate so that a certain amount of liquid sample can be sequentially positioned in the main flow section while stationary. That is, the flow control unit 50 can control the liquid sample to flow repeatedly at a certain pulse period.

[0089] The flow control unit 50 can be operated such that the flow state and the flow-stop state of the liquid sample alternate regularly. The flow state can represent the state in which the liquid sample flows in the flow section of the flow cell 30, and the flow-stop state can represent the state in which the liquid sample does not flow in the flow section of the flow cell 30.

[0090] The flow control unit 50 can control the flow of the liquid sample, causing the flow state and the flow-stop state to alternate in a pulsed manner. When the flow control unit 50 operates to cause the liquid sample to flow through the fluid unit at a constant linear velocity, the liquid sample can be in a flowing state. The linear velocity can be constant, but is not limited to this, and the magnitude and variation of the linear velocity can be changed. When the flow control unit 50 inhibits the flow of the liquid sample, the liquid sample can be in a flow-stop state. The flow control unit 50 can be operated by signals sent by the control unit 70 to repeat the flow state and the flow-stop state, or it can be operated to mechanically repeat the flow state and the flow-stop state. Various methods can be used to implement the operation of the flow control unit 50; for example, if the flow of the liquid sample is controlled by the flow control unit 50, this could be a method to implement the operation of the flow control unit 50.

[0091] The irradiation of the first pulsed laser beam B1 by the laser generating device 12 and the flow control unit 50 of the liquid sample can be configured to correspond to each other. The period of the pulsed laser beam B and the period of the flow control unit 50 can be configured to be the same.

[0092] In one exemplary embodiment, the flow control unit 50 can control the flow of the liquid sample such that the flow rate of the liquid sample through the flow cell 30 corresponds to the period of the pulsed laser beam B. The operation of the flow control unit 50 entering the flow stop state and the irradiation of the first pulsed laser beam B1 by the laser generating device 12 can be repeated at the same time point, or can be repeated at time points with a certain time delay.

[0093] For example, when the flow control unit 50 operates in a flow-stopped state, it can stop the flow of the liquid sample in the main flow section. At this time, the laser generation unit 10 can generate induced plasma for nanoparticles in the liquid sample by irradiating the main flow section of the flow cell 30 with a first pulsed laser beam B1.

[0094] When the flow control unit 50 operates in a flowing state, it can cause the liquid sample in which induced plasma is generated to flow downstream, and can also cause the upstream liquid sample not exposed to the first pulsed laser beam B1 to flow into the main flow section. At this time, the laser generating unit 10 can be controlled so that the first pulsed laser beam B1 does not irradiate the main flow section.

[0095] When the flow control unit 50 operates again in the flow-stopped state, the liquid sample not exposed to the first pulsed laser beam B1 located in the main flow section can stop flowing. At the same time, since the first pulsed laser beam B1 irradiates the main flow section of the flow cell 30 through the laser generation unit 10, induced plasma for nanoparticles in the liquid sample can be generated.

[0096] In this invention, this process can be repeated. By measuring nanoparticles in a flowing liquid sample according to the above process, the reliability of nanoparticle measurement can be improved.

[0097] The flow device 20 can be configured such that the amount of liquid sample passing through the main flow section when the flow control section 50 is in a flowing state is equal to or greater than the amount of liquid sample located in the main flow section when the flow control section 50 is in a flow-stopped state. This configuration prevents the liquid sample exposed to the first pulsed laser beam B1 from being re-exposed to the first pulsed laser beam B1 and prevents measurement errors of nanoparticles.

[0098] In one exemplary embodiment, the flow device 20 may include a separation unit that separates nanoparticles from a liquid sample before the liquid sample containing nanoparticles flows into the flow cell 30. For example, the separation unit may be positioned between the flow cell 30 and the inlet portion 41 and configured to separate nanoparticles from the liquid sample flowing into the flow cell 30. The separation of nanoparticles may be performed based on the type or size of the nanoparticles.

[0099] The flow control unit 50 can be operated by receiving control signals from the control unit 70.

[0100] The flow control unit 50 is capable of controlling the flow cycle of the liquid sample. That is, the flow control unit 50 is capable of controlling the period of flow state and flow stop state of the liquid sample.

[0101] When the volume of the internal space of the flow section through which the liquid sample flows is the same as the volume of the liquid sample, the flow control unit 50 can control the flow rate by adjusting the amount of liquid sample flowing through.

[0102] The flow control unit 50 can be operated to stop the flow of a liquid sample in the flow cell 30 located upstream of the flow control unit 50, or the flow control unit 50 can be operated to make the liquid sample in the flow cell 30 located upstream of the flow control unit 50 flow.

[0103] Although the flow cell 30 is located upstream of the flow control unit 50, it is not limited to the flow control unit 50. For example, if the flow cell 30 is located downstream of the flow control unit 50, the above operation can be performed in reverse. That is, the movement of the piston in the pressurization direction can operate the liquid sample in the flow cell 30 in a flowing state, and the movement of the piston in the opposite direction to the pressurization direction can stop the flow of the liquid sample in the flow cell 30.

[0104] Through this process, the flow control unit 50 can control the flow of the liquid sample, so that the flow state and the stop state of the liquid sample operate in a specific cycle.

[0105] To measure nanoparticles in flow cell 30, methods for detecting and analyzing the shock waves and flashes of induced plasma can be used. However, simply detecting images of the flashes using camera 112 may not be sufficient to accurately analyze the composition of the nanoparticles. In particular, accurate analysis of nanoparticles may be even more difficult when the size of the nanoparticles is small, the amount of nanoparticles is small, or the concentration of nanoparticles is low.

[0106] In addition, for the spectral analysis of light, it is necessary to obtain a certain amount or more of light signals, but laser-induced plasma is usually generated at a period interval of less than 1 second, making spectral analysis difficult.

[0107] Furthermore, when the laser typically illuminates the flow cell 30, a light signal S with a specific directionality relative to one side of the flow cell 30 can be formed. In this case, the intensity of the light signal S used for analysis may be weak, and spectral analysis may be difficult.

[0108] Therefore, the embodiments of this utility model can provide a fluid nanoparticle measuring device 1, which can accurately analyze the composition of nanoparticles by collecting the spectral information of flashes through a spectrometer 111.

[0109] Furthermore, embodiments of this invention can provide a photodetector 110 for a fluid nanoparticle measurement device. The photodetector supplements the intensity of the optical signal S by using an integrating sphere 113 in which a fluid cell 30 is placed.

[0110] The fluid nanoparticle measuring device 1 may include a signal detection unit 100.

[0111] Nanoparticles included in a liquid sample can be converted into a laser-induced plasma state by a first pulsed laser beam B1. A signal detection unit 100 can detect shock waves or flashes generated during this process. The signal detection unit 100 can detect various signals generated from the plasma. For example, the signal detection unit 100 can detect signals such as the spectrum of elements, shock waves, plasma images, thermal signals, and sound signals.

[0112] In an exemplary embodiment, the signal detection unit 100 may be positioned at a certain distance from the source of the signal to be detected. In an exemplary embodiment, the signal detection unit 100 may be positioned on one side of the integrating sphere 113. For example, the signal detection unit 100 may penetrate the surface of the integrating sphere 113, such that at least a portion of the signal detection unit 100 may be located inside the integrating sphere 113.

[0113] Figure 3 This is a schematic diagram showing components related to a photodetector according to an embodiment of the present invention. Figure 4 This is a schematic diagram illustrating the arrangement of components of a photodetector according to an embodiment of the present invention.

[0114] Reference Figure 3 and Figure 4 In an exemplary embodiment, the signal detection unit 100 may include a photodetector 110 and a shock wave detector 120 for detecting different signals. The photodetector 110 according to this embodiment can detect flashes generated when laser-induced plasma is produced. For example, the photodetector 110 may include a camera 112 and / or a spectrometer 111 for detecting the flashes. Additionally, the photodetector 110 may include an integrating sphere 113, a notch filter 115, a condenser 116, a cosine corrector 118, and an optical fiber for increasing the reliability of the signal to be measured by the camera 112 and / or the spectrometer 1115. The integrating sphere 113, the condenser 116, and the cosine corrector 118 supplement the intensity of the optical signal S and may be described as a light-collecting unit.

[0115] In an exemplary embodiment, the photodetector 110 may include a spectrometer 111. The plasma induced by the first pulsed laser beam B1 can emit light of various wavelengths at high temperatures. This may be a phenomenon that occurs when specific atoms or ions are repeatedly excited and de-excited within the plasma. The light emitted by the induced plasma may include the unique spectrum of the elements constituting the corresponding nanoparticles.

[0116] The spectrometer 111 can extract information about the chemical composition, concentration, or size of nanoparticles by analyzing the spectrum of light emitted when the first pulsed laser beam B1 irradiates the nanoparticles.

[0117] In an exemplary embodiment, the photodetector 110 may include an integrating sphere 113. The integrating sphere 113 may have an inner surface formed as a perfect sphere. In addition, the inner surface of the integrating sphere 113 may be coated with a material with high reflectivity, so that light can be reflected multiple times without being absorbed.

[0118] For example, at least a portion of the light propagating toward the inner surface of the integrating sphere 113 may be reflected at the inner surface of the integrating sphere 113. The light traveling within the integrating sphere 113 may include at least one of visible light, infrared light, ultraviolet light, or microwaves.

[0119] For example, a space can be formed inside the integrating sphere 113. For example, the integrating sphere 113 can have a hollow portion. The inner surface of the integrating sphere 113 can face the hollow portion of the integrating sphere 113. For example, the inner surface of the integrating sphere 113 can define the hollow portion of the integrating sphere 113.

[0120] At least a portion of the inner surface of the integrating sphere 113 may form a curved surface. For example, at least a portion of the inner surface of the integrating sphere 113 may be spherical. For example, the cross-section of at least a portion of the inner surface of the integrating sphere 113 may be a circular arc.

[0121] For example, at least a portion of the inner surface of the integrating sphere 113 may be ellipsoidal in shape. For example, the cross-section of at least a portion of the inner surface of the integrating sphere 113 may be elliptical in shape.

[0122] For example, at least a portion of the inner surface of the integrating sphere 113 may be formed into a parabolic shape. For example, the cross-section of at least a portion of the inner surface of the integrating sphere 113 may be formed into a parabolic shape. The first opening 113a may be an opening formed in the integrating sphere 113.

[0123] The second opening 113b may be an opening formed in the integrating sphere 113. The first opening 113a and the second opening 113b may be positioned relative to each other. For example, the first opening 113a and the second opening 113b may be opposite poles.

[0124] Openings 113a and 113b may include or represent at least one of a first opening 113a or a second opening 113b. Windows may be joined or connected to openings 113a and 113b. Windows located in openings 113a and 113b may be formed of a light-transmitting material.

[0125] In an exemplary embodiment, the flow cell 30 may be located inside the integrating sphere 113. For example, the center of the integrating sphere 113 may be located within the flow cell 30. The flow cell 30 may be located between the first opening 113a and the second opening 113b. For example, a virtual line connecting the first opening 113a and the second opening 113b may pass through the flow cell 30. A flow cell holder 114 that can fix the flow cell 30 may be disposed inside the integrating sphere 113. The flow cell 30 may be detachably connected to the flow cell holder 114 within the integrating sphere 113. The flow cell 30 may be detachably mounted to the flow cell holder 114. The flow cell 30 may be positioned at the center of the integrating sphere 113 via the flow cell holder 114.

[0126] In other words, the flow path through which the liquid sample, including nanoparticles, flows can be located inside the integrating sphere 113. For example, the inlet portion 41 and the outlet portion 42 of the flow cell 30 can be arranged to communicate with the first opening portion 113a and the second opening portion 113b of the integrating sphere 113, respectively.

[0127] For example, the flow cell 30 can extend from the inlet portion 41 to the outlet portion 42. The direction in which the flow cell 30 extends can be the longitudinal direction of the flow cell 30. The longitudinal direction of the flow cell 30 can be, for example, parallel to the direction from the inlet portion 41 to the outlet portion 42.

[0128] The first pulsed laser beam B1 can irradiate the flow cell 30. The first pulsed laser beam B1 can intersect with the flow cell 30, and the propagation direction of the first pulsed laser beam B1 can be, for example, from the first opening 113a toward the second opening 113B.

[0129] However, the arrangement of the inlet portion 41 and the outlet portion 42 of the flow cell 30 is not limited to this. For example, the inlet portion 41 and the outlet portion 42 of the flow cell 30 can be arranged at different positions on the integrating sphere 113.

[0130] For example, the surface of the flow cell holder 114 can be coated with a material with high reflectivity, so that light can be reflected multiple times without being absorbed, similar to the inner surface of the integrating sphere 113.

[0131] The inner surface of the integrating sphere 113 and the surface of the flow cell holder 114 can be configured to reflect light of a predetermined wavelength. For example, the inner surface of the integrating sphere 113 and the surface of the flow cell holder 114 can reflect light with wavelengths between 180 and 2500 nm.

[0132] Alternatively, the inner surface of the integrating sphere 113 and the surface of the flow cell holder 114 can be configured to reflect light in the wavelength range of 200 to 1100 nm. However, this wavelength range is exemplary and not limited thereto.

[0133] For example, depending on the light source, the inner surface of the integrating sphere 113 and the surface of the flow cell holder 114 can be configured to reflect light of various wavelengths, such as ultraviolet, visible and infrared.

[0134] In an exemplary embodiment, at least a portion of the first pulsed laser beam B1 incident into the integrating sphere 113 through the first opening 113a may be incident onto the flow cell 30. At least a portion of the first pulsed laser beam B1 passing through the flow cell 30 may be discharged through the second opening 113B.

[0135] When the first pulsed laser beam B1 irradiates the liquid sample in the flow cell 30, at least some nanoparticles in the liquid sample can receive energy from the first pulsed laser beam B1, thereby generating induced plasma. At this time, the light emitted by the induced plasma can be reflected multiple times on the inner surface of the integrating sphere 113 and is uniformly distributed inside the integrating sphere 113.

[0136] The light generated from the induced plasma can form an optical signal S. For example, the light reflected from the inner surface of the integrating sphere 113 is uniformly mixed, thereby generating an overall uniform optical signal S.

[0137] The spectrometer 111 of the photodetector 110 can be placed within the integrating sphere 113. For example, the spectrometer 111 can be spaced apart from the openings 113a, 113b and the flow cell 30. The spectrometer 111 can receive and detect light. For example, the spectrometer 111 can detect at least a portion of the light incident on the spectrometer 111. The spectrometer 111 of the photodetector 110 can detect the light signal S reflected and homogenized by the inner surface of the integrating sphere 113.

[0138] The flow cell 30 is described above as being arranged inside the integrating sphere 113, but this is only one embodiment of the present invention, and the arrangement structure of the flow cell 30 is not limited to this.

[0139] In an exemplary embodiment, the flow cell 30 may be located outside the integrating sphere 113. For example, the flow cell 30 may be located outside and adjacent to the integrating sphere 113.

[0140] In this case, when the induced plasma is generated by the first pulsed laser beam B1 irradiating the flow cell 30, the optical signal S from the induced plasma can be incident inside the integrating sphere 113 and reflected multiple times from the inner surface of the integrating sphere 113.

[0141] The spectrometer 111 can detect the light signal S reflected multiple times using the integrating sphere 113. At this time, the light signal S reflected multiple times can be transmitted to the spectrometer 111 through an optical fiber.

[0142] In an exemplary embodiment, the photodetector 110 may include a notch filter 115. The notch filter 115 may be located in the optical path through which the optical signal S is incident on the camera 112 and / or the spectrometer 111. For example, the notch filter 115 may be located in the optical path through which the optical signal S is incident on the spectrometer 111.

[0143] The notch filter 115 can block light of a preset specific wavelength and transmit light of other wavelengths. For example, the notch filter 115 can block light with a wavelength of 532 nm. For example, the notch filter 115 can block light from the first pulsed laser beam B1 and transmit light emitted from the induced plasma.

[0144] When camera 112 and / or spectrometer 111 analyze the emission flash from the induced plasma, if the intensity of the first pulsed laser beam B1 is stronger than the intensity of the plasma emission flash, the first pulsed laser beam B1 may generate noise. Therefore, notch filter 115 can be positioned on the optical path incident on camera 112 and / or spectrometer 111. This prevents the first pulsed laser beam B1 from incident on camera 112 and / or spectrometer 111, thereby minimizing noise that may be generated during analysis.

[0145] In an exemplary embodiment, photodetector 110 may include a concentrator 116.

[0146] For example, the concentrator 116 can be positioned near the location where the induced plasma is generated in order to collect the light emitted from the induced plasma. The concentrator 116 can be positioned such that the light emitted from the induced plasma is aligned on the optical axis. For example, the light collected and amplified by the concentrator 116 can be transmitted to the camera 112 and / or the spectrometer 111 via an optical fiber or integrating sphere 113.

[0147] For example, when light emitted from the induced plasma is reflected within the integrating sphere 113 and diffuses in various directions, the concentrator 116 can collect the optical signal S at a specific location and transmit it to the camera 112 and / or the spectrometer 111. The concentrator 116 can focus the multi-directional light reflected within the integrating sphere 113 to minimize light loss.

[0148] Furthermore, the concentrator 116 can increase the intensity of the light used for analysis by reducing the diffusion of light emitted from the induced plasma and focusing the light. The concentrator 116 can improve the signal-to-noise ratio by increasing the intensity of the light used for analysis.

[0149] For example, condenser 116 may include a condenser lens. However, this is exemplary and not limiting, and it should be understood that anything capable of collecting light signals can be applied, as long as it does not depart from the scope of this invention.

[0150] In an exemplary embodiment, the photodetector 110 may include an optical fiber. The optical fiber can transmit an optical signal S from the induced plasma to the spectrometer 111. For example, the optical fiber may be configured to transmit an optical signal S reflected multiple times from the inner surface of the integrating sphere 113 to the spectrometer 111.

[0151] For example, an optical fiber can provide a path for the light collected by the concentrator 116. For example, the optical fiber can be placed between the concentrator 116 and the spectrometer 111 to transmit the light collected by the concentrator 116 to the spectrometer 111.

[0152] Optical fiber can minimize light loss through total internal reflection and provides a flexible optical path toward camera 112 and / or spectrometer 111. It can also minimize signal distortion and increase stability by protecting transmitted light from external electromagnetic interference.

[0153] In an exemplary embodiment, the photodetector 110 may further include a cosine corrector 118. For example, the cosine corrector 118 may be located between the condenser 116 and the spectrometer 111 to remove or correct the directionality of light incident on the spectrometer 111. Furthermore, the cosine corrector 118 can ensure a uniform light signal at all angles.

[0154] Light emitted from the induced plasma can be reflected from the inner surface of the integrating sphere 113 and can diffuse in multiple directions. That is, even if the light is focused by the concentrator 116, the light generated within the integrating sphere 113 can still have multiple directions. The cosine corrector 118 can correct for residual asymmetry in the light mixed within the integrating sphere 113. Therefore, the cosine corrector 118 ensures that the signal transmitted to the spectrometer 111 is reliable and allows the spectrometer 111 to collect spectral data more accurately.

[0155] The fluid nanoparticle measuring device 1 of this invention can analyze the properties of nanoparticles in real time, obtained through light absorption, scattering, or emission, while the nanoparticles flow through the flow cell 30. Specifically, in this invention, by using a spectrometer 111 with a photodetector 110, the accuracy of estimating the type and size of the nanoparticles flowing through the flow cell 30 can be improved. Furthermore, according to an embodiment of this invention, since the light generated from the induced plasma is reflected multiple times from the inner surface of the integrating sphere 113, a strong signal can be obtained even when the concentration of nanoparticles is low, as the light is amplified through multiple reflections.

[0156] Meanwhile, the photodetector 110 may include a camera 112 capable of detecting the size of the nanoparticles. For example, the camera 112 may include a high-sensitivity CCD camera 112 or a CMOS camera 112. For example, the camera 112 may be disposed on one side of the integrating sphere 113 to detect light homogenized by the inner surface of the integrating sphere 113. For example, the camera 112 may be placed inside the integrating sphere 113 to detect the intensity distribution or pattern of scattered light, thereby estimating the average particle size of the nanoparticles.

[0157] Because induced plasma is generated inside the integrating sphere 113, light emitted from the asymmetrically distributed induced plasma can be uniformly or consistently converted through the integrating sphere 113, thus facilitating the analysis of the optical signal S. Therefore, reliable data can be provided even when the concentration or distribution of nanoparticles is non-uniform.

[0158] Light emitted from induced plasma can be intensely emitted in a specific direction or distributed asymmetrically. In embodiments of this invention, this asymmetry can be eliminated because the light is reflected multiple times within the integrating sphere 113, and the signal intensity can be uniformly distributed. Furthermore, since the light is dispersed into multiple paths and returns to a specific location during multiple reflections, the signal can be effectively reused. Therefore, weak signals can be transmitted to the spectrometer 111 and / or camera 112 through multiple reflections without being lost in a single path.

[0159] Furthermore, according to embodiments of this invention, when the signal generated by the nanoparticles is weak, the integrating sphere 113 has the effect of amplifying the signal through multiple reflections, which enables signal detection even when the liquid sample has a low concentration. In other words, the integrating sphere 113 can spatially diffuse weak signals and significantly increase the amount of light transmitted to the spectrometer 111 and / or camera 112.

[0160] In addition, since the integrating sphere 113 can automatically mix signals internally, the complexity caused by optical path design or alignment can be reduced, and the average value of the entire signal can be measured stably without the need to selectively adjust the signal in a specific direction.

[0161] The signal detection unit 100 may include a shock wave detector 120. The shock wave detector 120 can measure the laser-induced shock wave generated accompanying the laser-induced plasma. When induced plasma is generated from nanoparticles by a first pulsed laser beam B1, the size and intensity of the generated plasma may vary depending on the size of the nanoparticles. The shock wave detector 120 can detect the shock wave generated when the induced plasma is generated.

[0162] In an exemplary embodiment, the shock wave detector 120 may include a piezoelectric element 122 and a microphone 121. The signal measured by the shock wave detector 120 may be amplified by an amplifier (e.g., a lock-in amplifier).

[0163] The signal detection unit 100 according to an embodiment of the present invention can obtain information about nanoparticles by detecting shock waves or flashes of light. The information about the nanoparticles may include the number or size of the nanoparticles.

[0164] In an exemplary embodiment, the photodetector 110 and the shock wave detector 120 may be located at different positions on the surface of the integrating sphere 113. For example, the photodetector 110 and the shock wave detector 120 may be configured to penetrate the surface of the integrating sphere 113, so that at least a portion of the photodetector 110 and at least a portion of the shock wave detector 120 may be disposed inside the integrating sphere 113.

[0165] In an exemplary embodiment, the photodetector 110 and the shock wave detector 120 may be disposed adjacent to the flow cell 30. For example, the photodetector 110 and the shock wave detector 120 may be placed inside the flow cell 30 or may be arranged outside the flow cell 30. For example, the photodetector 110 and the shock wave detector 120 may be arranged to contact the flow cell 30, or the photodetector 110 and the shock wave detector 120 may be arranged to be spaced apart from the flow cell 30.

[0166] Furthermore, multiple photodetectors 110 and multiple shock wave detectors 120 may be arranged around the flow cell 30. For example, the piezoelectric elements 122 of the shock wave detectors 120 may be configured to be at least one or more to detect pressure changes caused by the shock wave of the induced plasma. For example, at least some of the multiple piezoelectric elements 122 may be attached to the surface of the flow cell 30. Alternatively, at least some of the multiple piezoelectric elements 122 may be attached to the surface of the flow cell holder 114. Alternatively, at least some of the multiple piezoelectric elements 122 may be attached to the surface of the integrating sphere 113.

[0167] In this invention, the type of signal detection unit 100 is not limited, and various detectors corresponding to the detected signals can be applied.

[0168] The fluid nanoparticle measuring device 1 may include a control unit 70.

[0169] The control unit 70 can control the overall operation of the fluid nanoparticle measuring device 1. For example, the control unit 70 can control the laser generating device 12 or the flow control unit 50.

[0170] The control unit 70 can control the generation of the pulsed laser beam B by the laser generating device 12. For example, the control unit 70 can control the laser generating device 12 to control the first cycle or generation time of the first pulsed laser beam B1. Furthermore, the control unit 70 can control the flow control unit 50 to control the second cycle or flow start time of the liquid sample. The control of the laser generating device 12 and the control of the flow control unit 50 by the control unit 70 can be performed independently. That is, the control unit 70 can control the laser generating device 12 and the flow control unit 50 separately.

[0171] The control unit 70 can correct the detection value based on the distance between the point where the induced plasma is generated in the flow cell 30 and the signal detection unit 100, as well as the angle between the flow cell 30 and the signal detection unit 100.

[0172] Additionally, the control unit 70 can move the lens 18 relative to the flow cell 30 to adjust the focal length or focus.

[0173] The control unit 70 can obtain information about the nanoparticles from the signal detection unit 100. The control unit 70 can analyze the signals detected by the signal detection unit 100. The control unit 70 can determine information about the composition and size of the nanoparticles by the signals of the induced plasma detected by the photodetector 110 and the shock wave detector 120.

[0174] The control unit 70 can process signals transmitted from the photodetector 110 to determine the type, size, concentration, etc., of nanoparticles based on light generated from the induced plasma. For example, the control unit 70 can detect the intensity and spectral data of signals incident on the camera 112 and / or spectrometer 111 in real time. For example, the control unit 70 can classify the type of nanoparticles in real time based on the analyzed spectral data, and can also automatically classify the spectral data by comparing the spectral data with existing data through machine learning or database-based algorithms.

[0175] For example, the control unit 70 can adjust the status of each optical component or provide an alarm based on the output data of the camera 112 or the spectrometer 111.

[0176] In an exemplary embodiment, the control unit 70 can monitor the position and normal operation of the notch filter 115. The control unit 70 can adjust the position of the notch filter 115 or set the cutoff band to provide an alarm.

[0177] In an exemplary embodiment, the control unit 70 can finely adjust the focal length of the condenser 116. Therefore, the control unit 70 can control the focus of light from the plasma to reach the entrance of the fiber optic or photodetector 110. For example, the control unit 70 can control alignment such that the position of the condenser 116 and the light from the plasma are on the same optical axis. Alternatively, the control unit 70 can detect the alignment of the condenser 116 and provide an alarm. Alternatively, the control unit 70 can provide an alarm for switching to a preset lens based on signal strength.

[0178] In an exemplary embodiment, the control unit 70 may periodically detect the signal transmission efficiency of the optical fiber and provide alarms regarding the damage and contamination status of the optical fiber.

[0179] In an exemplary embodiment, the control unit 70 can adjust the position of the cosine corrector 118 so that the signal from the light is uniformly transmitted to the entrance of the photodetector 110. For example, the control unit 70 can detect the uniformity of the signal to check the operating state of the cosine corrector 118.

[0180] The control unit 70 can determine the type, size, concentration, etc. of nanoparticles by the shock wave signal of the sensed plasma passing through the shock wave detector 120.

[0181] The control unit 70 can comprehensively analyze the signals detected by the photodetector 110 and the shock wave detector 120 to further improve the accuracy of determining information such as the type, size and concentration of nanoparticles.

[0182] In an exemplary embodiment, the control unit 70 may preprocess the signals transmitted from the photodetector 110 and the shock wave detector 120. Through preprocessing, the control unit 70 may amplify the signals detected by the shock wave detector 120, such as the piezoelectric element 122 or the microphone 121, via a signal amplifier (e.g., a lock-in amplifier).

[0183] The control unit 70 can remove noise in the low-frequency range of 100 Hz or lower using a bandpass filter. A converter can then convert the filtered signal into a digital signal. The converted signal can be used to extract signal values ​​for a specific range based on conditions, and a Fast Fourier Transform (FFT) can be performed in real time. Through this process, the control unit 70 can analyze the frequency components of the shock wave generated from the induced plasma by converting it into a function of frequency. The control unit 70 can determine the type, size, or quantity of nanoparticles based on the frequency components or amplitude converted from the detected shock wave.

[0184] Under the same energy conditions, as the size of the nanoparticles increases, the size of the generated plasma also increases, and the size of the shock wave also increases accordingly. The control unit 70 can determine the type, size, or quantity of nanoparticles based on the frequency components and amplitude of the shock wave.

[0185] The control unit 70 can measure the concentration of nanoparticles in the liquid sample based on the flow rate of the liquid sample flowing through the flow control unit 50 and the information about the nanoparticles detected from the signal detection unit 100.

[0186] Meanwhile, the fluid nanoparticle measuring device 1 according to the exemplary embodiment of the present invention may also include a data storage device, which is capable of storing signals detected by the signal detection unit 100 and / or information analyzed by the control unit 70.

[0187] The fluid nanoparticle measuring device 1 of the present invention can more accurately determine the physical properties and chemical composition of the nanoparticles to be measured by simultaneously analyzing the shock wave and flash emitted by the induced plasma through the photodetector 110 and the shock wave detector 120.

[0188] For the above, although all components constituting the embodiments of this utility model have been described as being combined or operating in combination, this utility model is not necessarily limited to such embodiments. That is, within the scope of the purpose of this utility model, all components can be selectively combined and operated in one or more ways. Unless otherwise defined, all terms (including technical or scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model pertains. Common terms (e.g., terms defined in dictionaries) should be interpreted as consistent with the meaning in the context of the relevant art and should not be interpreted as having an ideal or overly formal meaning unless expressly defined in this utility model.

[0189] The above description is merely an example of the technical concept of this utility model, and those skilled in the art will understand that various modifications and variations can be made without departing from the basic characteristics of this utility model. Therefore, the embodiments disclosed in this utility model are not intended to limit the technical concept of this utility model, but rather to explain it; the scope of the technical concept of this utility model is not limited by these embodiments. The scope of protection of this utility model should be interpreted by the appended claims, and all technical concepts within the same scope should be interpreted as being included within the scope of the rights of this utility model.

[0190] Explanation of reference numerals in the attached figures 1: Fluid Nanoparticle Measurement Device 10: Laser generating unit 12: Laser generating device 14: Reflector 16: Beam splitter 17: First Energy Detector 18: Lens 19: Second Energy Detector 20: Flowing device 30: Flow pool 41: Entrance Section 42: Export Portion 50: Flow control unit 70: Control Unit 100: Signal Detection Unit 110: Photodetector 111: Spectrometer 112: Camera 113: Integrating Ball 113a: First opening 113b: Second opening 114: Flow cell retainer 115: Notch filter 116: Concentrator 118: Cosine Corrector 120: Shockwave Detector 121: Microphone 122: Piezoelectric element.

Claims

1. A photodetector, characterized in that, The photodetector includes: A flow cell, which is configured to allow the flow of liquid samples containing nanoparticles; A laser generating unit that irradiates the flow cell with a pulsed laser beam and generates plasma. A flow control unit that controls the flow of the liquid sample within the flow cell; An integrating sphere that reflects light signals from the plasma multiple times; and A spectrometer that measures the light signal reflected from the integrating sphere.

2. The photodetector according to claim 1, characterized in that, The spectrometer analyzes information about the nanoparticles using the spectrum of the light signal.

3. The photodetector according to claim 1, characterized in that, The inner surface of the integrating sphere is coated to cause the inner surface of the integrating sphere to reflect the light signal multiple times.

4. The photodetector according to claim 1, characterized in that, The flow cell is located inside the integrating sphere.

5. The photodetector according to claim 4, characterized in that, The photodetector also includes a flow cell holder placed in the integrating sphere, the flow cell holder fixing the flow cell.

6. The photodetector according to claim 5, characterized in that, The flow cell can be detachably installed into the flow cell holder.

7. The photodetector according to claim 5, characterized in that, The surface of the flow cell holder is configured to reflect the optical signal.

8. The photodetector according to claim 7, characterized in that, The inner surface of the integrating sphere and the surface of the flow cell holder are configured to reflect light with wavelengths between 180 nm and 2500 nm.

9. The photodetector according to claim 8, characterized in that, The inner surface of the integrating sphere and the surface of the flow cell holder are configured to reflect light with wavelengths between 200 nm and 1100 nm.

10. The photodetector according to claim 1, characterized in that, A flow path is formed inside the integrating sphere, in which the liquid sample flows.

11. The photodetector according to claim 1, characterized in that, The photodetector also includes a notch filter disposed on the path, and the optical signal is incident on the spectrometer along the path.

12. The photodetector according to claim 1, characterized in that, The photodetector also includes a concentrator for collecting the light signal reflected from the inner surface of the integrating sphere.

13. The photodetector according to claim 1, characterized in that, The photodetector also includes an optical fiber connecting the integrating sphere and the spectrometer, wherein the optical fiber transmits the optical signal reflected multiple times from the integrating sphere to the spectrometer.

14. The photodetector according to claim 1, characterized in that, A first opening is formed on one side of the integrating sphere. A second opening is formed on the other side of the integrating sphere. The pulsed laser beam is configured to enter the interior of the integrating sphere through the first opening, and At least a portion of the pulsed laser beam is configured to exit the integrating sphere through the second opening.

15. The photodetector according to claim 1, characterized in that, The photodetector also includes a camera for detecting an image of the light signal generated from the plasma, wherein the camera is displaced to one side of the integrating sphere.

16. The photodetector according to claim 15, characterized in that, The spectrometer and the camera penetrate the surface of the integrating sphere, such that at least a portion of the spectrometer and at least a portion of the camera are positioned inside the integrating sphere.

17. The photodetector according to claim 1, characterized in that, The photodetector also includes a data storage device for storing signals detected by the spectrometer.

18. The photodetector according to claim 1, characterized in that, The laser generating unit includes an attenuator for adjusting the intensity of the pulsed laser beam.

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