Optical path sealing device and semiconductor device

Abstract

The application provides a light path sealing device and a semiconductor device. The light path sealing device comprises a sealing cavity, an optical lens and a window sealing structure. The sealing cavity comprises at least one light incident port and at least one light exit port, and is filled with a protective gas. The optical lens is arranged in the sealing cavity. The window sealing structure is arranged at the light incident port and the light exit port of the sealing cavity, and is used for sealing the light incident port and the light exit port and transmitting a light beam. The incident light enters the sealing cavity through the window sealing structure at the light incident port, is processed by the optical lens, and then is emitted through the window sealing structure at the light exit port. The light path sealing device can seal the optical lens and the light path related to the optical lens, prolong the service life of the optical lens, and improve the stability and precision without increasing the sealing complexity of the device.

Description

[0001] This application claims priority to Chinese Patent Application No. 2025212248393, filed on June 16, 2025, entitled "Optical Path Sealing Device and Semiconductor Equipment", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of semiconductor optical component mounting technology, and more specifically, to an optical path sealing device and a semiconductor device. Background Technology

[0003] In semiconductor measurement equipment, especially precision thin film measurement equipment used to measure various thin film parameters and subtle changes (such as film thickness, refractive index, stress, etc.) in semiconductor manufacturing processes, a stable external environment is usually required for the coating on the special lenses in the optical path transmission to extend the service life of the coating on the special lenses, so as to ensure the stability and precision of the equipment during use.

[0004] Currently, existing special lens coatings are generally exposed to the air, lacking a stable external environment, resulting in a short lifespan and increased difficulty in maintenance. Other solutions involve sealing the entire measuring device within a fully enclosed space, which increases the device's complexity, reduces sealing effectiveness, and further impacts the device's stability and precision during operation. Utility Model Content

[0005] The purpose of this application is to provide an optical path sealing device and a semiconductor device that can seal optical lenses and the optical path involving the optical lenses, thereby improving the service life of the optical lenses without excessively increasing the sealing complexity of the device, and improving stability and precision.

[0006] In one aspect, an optical path sealing device is provided, including a sealing cavity, an optical lens, and a window sealing structure.

[0007] The sealed cavity includes at least one light inlet and at least one light outlet; the sealed cavity is filled with a protective gas. An optical lens is disposed within the sealed cavity. Window sealing structures are installed at the light inlet and light outlet of the sealed cavity; the window sealing structures are used to seal the light inlet and light outlet and to allow the light beam to pass through. The incident light enters the sealed cavity through the window sealing structure at the light inlet, is processed by the optical lens, and then exits through the window sealing structure at the light outlet.

[0008] In one feasible embodiment, the window sealing structure includes a base, a sealing plate, and a window pane; the base has a through window, and the sealing plate includes a first side facing the base and a second side facing away from the base; the first side of the sealing plate has a groove of predetermined depth that matches the shape of the window pane, and a through light-transmitting hole is formed in the groove; the window pane is sealed and installed in the groove, the first side of the sealing plate is attached to the base and sealed and fixed, and the light-transmitting hole corresponds to the window of the base.

[0009] In one feasible embodiment, the optical path sealing device includes a sealing gasket disposed in the fitting gap between the first surface of the sealing plate and the base, and pressed tightly by the sealing plate.

[0010] In one feasible embodiment, a boss is provided between the groove on the first surface of the sealing plate and the edge of the sealing plate, and the thickness of the sealing gasket when it is not compressed is greater than the thickness of the boss.

[0011] In one feasible embodiment, the compressibility of the gasket is R, and the thickness of the boss is T, wherein, .

[0012] In one feasible solution, the groove on the sealing plate is circular and has internal threads on its side; the optical path sealing device also includes an annular component with external threads on its outer side; the window is installed in the groove; the external threads of the annular component mate with the internal threads of the groove to press the window tightly; and after the annular component is installed in place, its height does not exceed the surface of the first side of the sealing plate.

[0013] In one feasible solution, an annular pad is provided at the contact point between the window piece and the groove, and at the contact point between the window piece and the annular component.

[0014] In one feasible solution, the base of the window sealing structure and the shell of the sealing cavity are integrally formed, and the light inlet and light outlet are the windows of the base.

[0015] In one feasible embodiment, a mounting portion is provided around the light inlet and light outlet of the sealed cavity, and the base seal of the window sealing structure is installed at the mounting portion, so that the light inlet and light outlet correspond to the window of the mounted base.

[0016] In one feasible embodiment, a boss is provided on the first surface of the sealing plate. The boss is annular and distributed around the groove. The sealing gasket is annular and is attached to the outside of the annular boss. When the surface of the boss of the sealing plate is attached to the surface of the base, the sealing gasket is pressed between the first surface of the sealing plate and the base to isolate the sealing gasket from the inside of the boss.

[0017] In one feasible embodiment, the groove is formed by an area enclosed by an annular boss; the bottom surface of the groove is flush with the first surface of the sealing plate or the bottom surface of the groove is lower than the first surface of the sealing plate.

[0018] In one feasible embodiment, the sealing plate is provided with a number of through mounting holes, which are distributed around the outer side of the annular boss; the surface of the base is provided with threaded holes corresponding to the mounting holes; and the sealing plate and the base are fastened together by screws passing through the mounting holes and threaded holes to make the sealing plate fit tightly.

[0019] In one feasible solution, a light channel is opened in the base; the light channel runs straight through the base along the light transmission direction of the window; or the extension direction of the light channel is at a predetermined angle to the light transmission direction of the window, one end of the light channel passes through the base, and the other end extends at least to the window, and a light deflector is set near the window of the light channel so that the light is transmitted through the window and the light channel.

[0020] Secondly, a semiconductor device is also provided, including a light source emitting device and the aforementioned optical path sealing device, wherein the light source emitting device is disposed outside the sealing cavity of the optical path sealing device.

[0021] Compared with the prior art, the beneficial effects of this application include at least the following: In the pipeline sealing device of this application, the optical lens is placed in the sealing cavity, and the window sealing structure seals the light inlet and light outlet, making the sealing cavity a completely closed space. At the same time, the sealing cavity is filled with protective gas, so that the optical lens is in a stable gas environment, thereby extending the service life of the optical lens and reducing the number of subsequent maintenance.

[0022] Meanwhile, since the pipeline sealing device of this application only seals the optical path containing the optical lens, while other optical paths not involving the optical lens and other structures and components are still placed outside the sealing cavity, it will not excessively increase the complexity of the equipment, and will help reduce the sealing difficulty of the sealing cavity, achieve better sealing effect, and further improve stability and precision while extending the service life of the optical lens. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of an optical path sealing device according to an embodiment of this application;

[0025] Figure 2 This is a schematic diagram of another optical path sealing device shown in an embodiment of this application;

[0026] Figure 3This is a perspective view of a window sealing structure according to an embodiment of this application;

[0027] Figure 4 for Figure 3 Rear view of the sealing plate of the central window sealing structure;

[0028] Figure 5 for Figure 3 Top view of the sealing plate of the central window sealing structure;

[0029] Figure 6 This is a perspective view of an assembly of a sealing plate and a window piece according to an embodiment of this application;

[0030] Figure 7 for Figure 6 Exploded view of the middle sealing plate and window plate;

[0031] Figure 8 This is a perspective view of an assembly of another sealing plate and window piece according to an embodiment of this application;

[0032] Figure 9 for Figure 8 A first-view diagram of the exploded structure of the middle sealing plate and window plate;

[0033] Figure 10 for Figure 8 Exploded view of the middle sealing plate and window plate from a second perspective;

[0034] Figure 11 for Figure 8 A three-dimensional structural diagram of the central sealing plate.

[0035] In the diagram: 10. Window sealing structure; 1. Base; 11. Window; 12. Light channel; 2. Sealing plate; 21. Groove; 211. Internal thread; 212. Chamfer; 22. Light passage hole; 23. Boss; 24. Mounting hole; 241. Threaded hole; 25. Shielding protrusion; 3. Window piece; 4. Sealing gasket; 5. Ring part; 51. External thread; 6. Ring gasket; 7. Light guiding mirror; 20. Sealing cavity; 201. Light inlet; 202. Light outlet. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0038] like Figure 1 and Figure 2 As shown, this application embodiment first provides an optical path sealing device, including a sealing cavity 20, an optical lens, and a window sealing structure 10.

[0039] The sealed cavity 20 includes at least one light inlet 201 and at least one light outlet 202; the sealed cavity 20 is filled with a protective gas (e.g., nitrogen), and an optical lens is disposed within the sealed cavity 20. A window sealing structure 10 is installed at the light inlet 201 and the light outlet 202 of the sealed cavity 20; the window sealing structure 10 is used to seal the light inlet 201 and the light outlet 202 and to allow the light beam to pass through. The incident light enters the sealed cavity 20 through the window sealing structure 10 at the light inlet 201, is processed by the optical lens, and then exits through the window sealing structure 10 at the light outlet 202.

[0040] In the pipeline sealing device of this application, the optical lens is placed inside the sealing cavity 20, and the window sealing structure 10 seals the light inlet 201 and the light outlet 202, making the sealing cavity 20 a completely closed space. At the same time, the sealing cavity 20 is filled with protective gas, so that the optical lens is in a stable gas environment, thereby extending the service life of the optical lens and reducing the number of maintenance times.

[0041] Meanwhile, since the pipeline sealing device of this application only seals the optical path containing the optical lens, while other optical paths not involving the optical lens and other structures and components are still placed outside the sealing cavity 20, it will not excessively increase the complexity of the equipment, and will help reduce the sealing difficulty of the sealing cavity 20, achieve a better sealing effect, and further improve stability and precision while extending the service life of the optical lens.

[0042] In some embodiments, such as Figure 1 and Figure 2 As shown, the sealed cavity 20 may include a light inlet 201 and at least two light outlets 202. The light entering the sealed cavity 20 from the light inlet 201 is processed by the internal chemical lens to form multiple light beams, which are then emitted from the light outlets 202 respectively to achieve the purpose of beam expansion.

[0043] For example, in some embodiments, such as Figure 1As shown, the optical lens may include a parabolic mirror A, a reflector B1, and a reflector B2. One light inlet 201 may be provided, designated as inlet a. Three light outlets 202 may be provided, designated as outlet b1, outlet b2, and outlet b3. Light emitted from the light source enters the sealed cavity through the window sealing structure 10 at inlet a, and after reaching the parabolic mirror A, forms three parallel beams. One beam exits through the window sealing structure 10 at outlet b3, while the other two beams are reflected by reflectors B1 and B2 respectively, and exit through the window sealing structures 10 at outlets b1 and b2 respectively.

[0044] For example, in some embodiments, such as Figure 2 As shown, the optical lens may include a reflector B3 and a beam splitter C. One light inlet 201 may be provided, designated as inlet c. Two light outlets 202 may be provided, designated as outlet d1 and outlet d2. Light emitted from the light source enters the sealed cavity through the window sealing structure 10 at inlet c, reaches the reflector B3, and is reflected to the beam splitter C, forming two beams at beam splitter C. These beams then exit through the window sealing structures 10 at outlet d1 and outlet d2, respectively.

[0045] In some embodiments, such as Figure 3 , Figure 4 and Figure 5 As shown, the window sealing structure 10 may include a base 1, a sealing plate 2, and a window piece 3. The base 1 has a through window, and the sealing plate 2 includes a first surface facing the base 1 and a second surface facing away from the base 1. The first surface of the sealing plate 2 has a groove 21 of predetermined depth that matches the shape of the window piece 3, and a through light-transmitting hole 22 is formed in the groove 21. The window piece 3 is sealed and installed in the groove 21, with the first surface of the sealing plate 2 abutting and sealingly fixed to the base 1, and the light-transmitting hole 22 corresponding to the window of the base 1. The window piece 3 is suitable for lenses used for light transmission. The mating surfaces of the base 1 and the sealing plate 2 need to be designed with relatively high precision to ensure that the installation accuracy of the window piece meets the light transmission requirements.

[0046] The window sealing structure 10 in this embodiment is simple and compact, reducing equipment complexity.

[0047] In some embodiments, the size of the window on the base 1 may be smaller than the size of the light-transmitting hole 22. Preferably, the size of the window on the base 1 is at least greater than or equal to the size of the light-transmitting hole 22, that is, the projection boundary of the light-transmitting hole 22 onto the base 1 does not exceed the boundary of the window.

[0048] In some embodiments, such as Figure 3 and Figure 4As shown, the sealing plate 2 may be provided with a number of mounting holes 24, and the base 1 is provided with threaded holes (not shown in the figure) at positions corresponding to the mounting holes 24. The sealing plate 2 and the base 1 are fastened together by bolts passing through the mounting holes 24 of the sealing plate 2 and threadedly engaging with the threaded holes on the base 1.

[0049] In some embodiments, such as Figure 3 As shown, a ring-shaped shielding protrusion 25 of predetermined height can be provided on the second surface of the sealing plate 2, which surrounds the light-transmitting hole 22 and helps to reduce stray light interference.

[0050] In some embodiments, such as Figure 1 As shown, the optical path sealing device may include a sealing gasket 4, which is disposed in the fitting gap between the first surface of the sealing plate 2 and the base 1, and is pressed tightly by the sealing plate 2. The sealing gasket 4 may be made of fluororubber to have better light resistance.

[0051] In some embodiments, such as Figure 4 and Figure 5 As shown, a boss 23 is provided between the groove 21 on the first surface of the sealing plate 2 and the edge of the sealing plate 2. The thickness of the sealing gasket 4 when uncompressed is greater than the thickness of the boss 23. The boss 23 can be a strip boss, a continuous annular boss, or multiple discontinuous bosses forming an annular distribution. The side of the boss 23 closer to the groove 21 is the inner side, and the side farther from the groove 21 is the outer side. The sealing gasket 4 can be located on the inner side and / or the outer side of the boss 23. The surface of the boss 23 can have a higher surface finish, and the boss 23 can prevent the sealing gasket 4 from being overcompressed, thus preventing the sealing gasket 4 from failing due to overcompression. The sealing gasket 4 is preferably set as an annular shape to achieve full coverage filling of the gap between the sealing plate 2 and the base 1, achieving a better sealing effect.

[0052] In some preferred embodiments, the compressibility of the sealing gasket 4 is R, and the thickness of the boss 23 is T, wherein, ,For example , , , , The boss 23 prevents excessive compression of the gasket 4, so that the gasket 4 can achieve a better sealing effect.

[0053] In some embodiments, such as Figure 4 As shown, the groove 21 on the sealing plate 2 is circular, and a chamfer 212 can be provided on the upper side of its side. The window piece 3 is circular, and it is easier to install into the groove 21 under the guidance of the chamfer 212. Sealant is applied to the side of the window piece 3 and the side wall of the groove 21 to achieve sealing and fixation.

[0054] In some embodiments, such as Figure 6and Figure 7 As shown, the groove 21 on the sealing plate 2 is circular, and its side can be provided with internal threads 211. The optical path sealing device may also include an annular member 5, whose outer side is provided with external threads 51. The window piece 3 is installed in the groove 21; the external threads 51 of the annular member 5 cooperate with the internal threads 211 of the groove 21 to press the window piece 3 tightly; and after the annular member 5 is installed in place, its height does not exceed the surface of the first side of the sealing plate 2. In addition, annular gaskets 6 are provided at the contact points between the window piece 3 and the groove 21, and at the contact points between the window piece 3 and the annular member 5, to improve the sealing effect. In the structure of this embodiment, the sealing method using the annular member 5 and the annular gasket 6 can eliminate the need for glue sealing, making it easier to disassemble and maintain later. Furthermore, if there is a large change in the air pressure in the sealing cavity 20, it will not affect the sealing effect between the edge of the window piece 3 and the groove 21.

[0055] In some embodiments, the base 1 of the window sealing structure and the shell of the sealing cavity 20 are integrally formed, and the light inlet 201 and the light outlet 202 are the windows of the base 1.

[0056] In some embodiments, a mounting portion is provided around the light inlet 201 and light outlet 202 of the sealed cavity 20, and the base 1 of the window sealing structure is sealed and mounted at the mounting portion, so that the light inlet 201 and light outlet 202 correspond to the window of the mounted base 1.

[0057] In some embodiments, such as Figures 8 to 11 As shown, the first surface of the sealing plate 2 is provided with a boss 23, which is annular and distributed around the groove 21. The sealing gasket 4 is annular and is attached to the outside of the annular boss 23. When the surface of the boss 23 of the sealing plate 2 is in contact with the surface of the base 1, the sealing gasket 4 is pressed between the first surface of the sealing plate 2 and the base 1, so that the sealing gasket 4 is isolated from the inside of the boss 23. Therefore, when strong light passes through the light-transmitting hole 22, that is, when strong light passes through the inside of the boss 23, the sealing gasket 4 is protected from strong light exposure because it is isolated from the inside of the boss 23. This allows the sealing gasket 4 to perform a stable sealing function while extending its service life.

[0058] In some embodiments, such as Figure 10 and Figure 11 As shown, the groove 21 is formed by the area enclosed by the annular boss 23. The bottom surface of the groove 21 may be flush with the first surface of the sealing plate 2 or the bottom surface of the groove 21 may be lower than the first surface of the sealing plate 2.

[0059] In some embodiments, such as Figure 10 and Figure 11As shown, the sealing plate 2 can be provided with several through mounting holes 24, distributed around the outer side of the annular boss 23. The surface of the base 1 is provided with threaded holes 241 corresponding to the mounting holes 24. Screws are passed through the mounting holes 24 and fastened to the threaded holes 241 to ensure that the sealing plate 2 and the base 1 fit tightly together. This fastening method ensures the integrity of the annular boss 23 and further ensures complete isolation between the optical path and the sealing gasket 4.

[0060] In some embodiments, a light channel 12 is formed in the base 1, and the light channel 12 passes through the base 1 in a straight line along the light transmission direction of the window 11.

[0061] Alternatively, in some embodiments, such as Figure 9 As shown, the extension direction of the light channel 12 is at a predetermined angle (e.g., 90 degrees) to the light transmission direction of the window 11. One end of the light channel 12 extends out of the base 1, and the other end extends at least to the window 11. A light-deflecting mirror 7 is provided near the window 11 in the light channel 12, so that the light is redirected after passing through the window 11 and transmitted along the light channel 12, or so that the light passes through the light channel 12 and is redirected after hitting the light-deflecting mirror 7 and exiting through the window 11. This structural design allows the window sealing structure 10 to adapt to more installation scenarios.

[0062] This application also provides a semiconductor device, which includes at least a light source emitting device and the aforementioned optical path sealing device, wherein the light source emitting device is disposed outside the sealing cavity 20 of the optical path sealing device.

[0063] The above description is only a partial preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An optical path sealing device, characterized in that, include: A sealed cavity (20) includes at least one light inlet (201) and at least one light outlet (202); the sealed cavity (20) is filled with a protective gas; An optical lens is disposed within the sealed cavity (20); A window sealing structure (10) is installed at the light inlet (201) and the light outlet (202) of the sealed cavity (20); the window sealing structure (10) is used to seal the light inlet (201) and the light outlet (202) and to allow light beams to pass through; The incident light enters the sealed cavity (20) through the window sealing structure (10) at the light inlet (201), and after being processed by the optical lens, it is emitted through the window sealing structure (10) at the light outlet (202).

2. The optical path sealing device according to claim 1, characterized in that, The window sealing structure (10) includes a base (1), a sealing plate (2), and a window piece (3); The base (1) has a through window (11), and the sealing plate (2) includes a first side facing the base (1) and a second side facing away from the base (1); The first side of the sealing plate (2) has a groove (21) of a predetermined depth that is consistent with the shape of the window piece (3), and a through light hole (22) is provided in the groove (21); The window piece (3) is sealed and installed in the groove (21), the first surface of the sealing plate (2) is attached to the base (1) and sealed and fixed, and the light-transmitting hole (22) corresponds to the window (11) of the base (1).

3. The optical path sealing device according to claim 2, characterized in that, The optical path sealing device includes a sealing gasket (4), which is placed in the fitting gap between the first surface of the sealing plate (2) and the base (1) and is pressed by the sealing plate (2).

4. The optical path sealing device according to claim 3, characterized in that, A boss (23) is provided between the groove (21) on the first surface of the sealing plate (2) and the edge of the sealing plate (2), and the thickness of the sealing gasket (4) when it is not compressed is greater than the thickness of the boss (23).

5. The optical path sealing device according to claim 4, characterized in that, The compressibility of the sealing gasket (4) is R, and the thickness of the boss (23) is T, where T = R × (40% to 80%).

6. The optical path sealing device according to claim 2, characterized in that, The groove (21) opened on the sealing plate (2) is circular, and its side is provided with internal thread (211); The optical path sealing device also includes an annular component (5), whose outer surface is provided with an external thread (51); The window piece (3) is installed in the groove (21); the external thread (51) of the annular piece (5) engages with the internal thread (211) of the groove (21) to press the window piece (3); and after the annular piece (5) is installed in place, its height does not exceed the surface of the first side of the sealing plate (2).

7. The optical path sealing device according to claim 6, characterized in that, An annular pad (6) is provided at the contact point between the window piece (3) and the groove (21), and at the contact point between the window piece (3) and the annular piece (5).

8. The optical path sealing device according to any one of claims 2 to 7, characterized in that, The base (1) of the window sealing structure and the shell of the sealing cavity (20) are integrally formed, and the light inlet (201) and the light outlet (202) are the windows of the base (1).

9. The optical path sealing device according to any one of claims 2 to 7, characterized in that, The sealing cavity (20) has mounting portions around the light inlet (201) and the light outlet (202). The base (1) of the window sealing structure is sealed and installed at the mounting portions, and the light inlet (201) and the light outlet (202) correspond to the window of the installed base (1).

10. The optical path sealing device according to claim 3, characterized in that, The first surface of the sealing plate (2) is provided with a boss (23), which is annular and distributed around the groove (21); The sealing gasket (4) is annular and is attached to the outside of the annular boss (23); when the surface of the boss (23) of the sealing plate (2) is attached to the surface of the base (1), the sealing gasket (4) is pressed between the first surface of the sealing plate (2) and the base (1) so as to isolate the sealing gasket (4) from the inside of the boss (23).

11. The optical path sealing device according to claim 10, characterized in that, The groove (21) is formed by the area enclosed by the annular boss (23); the bottom surface of the groove (21) is flush with the first surface of the sealing plate (2) or the bottom surface of the groove (21) is lower than the first surface of the sealing plate (2).

12. The optical path sealing device according to claim 10, characterized in that, The sealing plate (2) is provided with a plurality of through mounting holes (24), which are distributed around the outer side of the annular boss (23); The surface of the base (1) is provided with threaded holes (241) corresponding to the mounting holes (24); The sealing plate (2) is fastened to the base (1) by passing screws through the mounting hole (24) and threaded hole (241) to make the sealing plate (2) fit tightly against the base (1).

13. The optical path sealing device according to claim 2, characterized in that, An optical channel (12) is formed in the base (1); The light channel (12) runs straight through the base (1) along the light transmission direction of the window (11); or The extension direction of the light channel (12) is at a predetermined angle to the light transmission direction of the window (11). One end of the light channel (12) extends out of the base (1), and the other end extends at least to the window (11). A light deflector (7) is provided in the light channel (12) near the window (11) so that light is transmitted through the window (11) and the light channel (12).

14. A semiconductor device, characterized in that, Includes a light source emitting device and an optical path sealing device as described in any one of claims 1 to 13; The light source emitting device is located outside the sealed cavity (20) of the optical path sealing device.

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