Quantum dot photoresist automatic spin coating equipment

Abstract

The utility model discloses a kind of automatic spin coating equipment of quantum dot photoresist applied to uniform glue technical field, including base, the upper side of base is sequentially equipped with main turntable and multiple vice turntables from bottom to top, the upper end of main turntable is fixedly connected with fixed rod, and the upper end of fixed rod is sequentially movably penetrated multiple vice turntables, the lower side of vice turntable is attached and is provided with backing plate, backing plate is fixedly connected to the outer end of fixed rod, and the vice turntable and backing plate of attached setting are fixed by a pair of first bolt, the outer end of main turntable is fixedly connected with first gear, the inside of base is fixedly connected with motor, and the cooperation of the present scheme, vice turntable, fixed rod, plug rod and backing plate is set, after starting motor, the synchronous rotation of main turntable and multiple vice turntables can be realized, single-time synchronous spin coating operation to multiple chips is realized, effectively improve processing efficiency, meanwhile, optional setting can be carried out according to need around cylinder, and splashed glue solution is collected in the process of spin coating.

Description

Technical Field

[0001] This utility model relates to the field of spin coating technology, and in particular to an automatic spin coating device for quantum dot photoresist. Background Technology

[0002] Photoresist is one of the key materials for fabricating fine patterns in microelectronics technology. In particular, the development of large-scale integrated circuits in recent years has greatly promoted the research, development and application of photoresist. Quantum dot photoresist is a new type of photolithography material that combines nanoscale semiconductor particles (quantum dot materials) with photoresist to prepare micro- and nano-scale quantum dot patterns on a substrate.

[0003] A spin coater is a mechanical device that uses the centrifugal force generated by rotation to evenly spread the adhesive onto the surface of a material. For example, Chinese patent CN213855459U discloses an LED chip photolithography spin coater. In use, the LED chip is placed on a tray, and the vacuum cylinder is started by the controller. The chip can be stably adsorbed on the tray by the cooperation of the vacuum cylinder and the vacuum suction cup. Then, the photoresist is dropped onto the chip, and the drive motor is started by the controller to achieve spin coating.

[0004] Because the photoresist on the chip will be flung outwards during the spin coating process, most existing spin coating equipment can only spin coating on a single chip, resulting in low processing efficiency. Summary of the Invention

[0005] The core of this invention lies in using a main turntable and multiple auxiliary turntables to carry and coat multiple chips, thereby achieving simultaneous coating of multiple chips in a single operation. This solves the problem of low processing efficiency in the prior art when coating a single chip. Additionally, a surrounding cylinder can be selectively set as needed to collect the splashed adhesive during the coating process.

[0006] To solve the above problems, the present invention adopts the following technical solution.

[0007] An automatic spin coating device for quantum dot photoresist includes a base. A main turntable and multiple auxiliary turntables are arranged sequentially from bottom to top on the upper side of the base. A fixed rod is fixedly connected to the upper end of the main turntable, and the upper end of the fixed rod moves through multiple auxiliary turntables sequentially. A pad is attached to the lower side of the auxiliary turntable and is fixedly connected to the outer end of the fixed rod. The auxiliary turntable and the pad are fixed together by a pair of first bolts. The outer end of the main turntable is fixedly connected to a first gear, the inside of the base is fixedly connected to a motor, the output end of the motor extends movably to the outside of the base and is fixedly connected to a rotating shaft, the outer end of the rotating shaft is fixedly connected to a second gear, and the second gear meshes with the first gear. A circular groove is provided at the center of the upper end of the base. The lower end of the main turntable is fixedly connected to the chassis. The chassis is rotatably connected to the inside of the circular groove. A limit ring is fixedly connected to the outer end of the chassis. An annular groove is provided on the inner wall of the circular groove. The limit ring is rotatably connected to the inside of the annular groove. Vacuum suction cups are fixedly connected to the upper center of both the main turntable and the auxiliary turntable. A vacuum generating device is also fixedly connected inside the base. The vacuum interface of the vacuum generating device is fixedly connected to a flexible hose. The flexible hose extends from inside the base and is fixedly extended into the chassis, the main turntable and multiple auxiliary turntables until it connects with the vacuum suction cups.

[0008] Furthermore, it also includes a plug rod. The secondary turntable has a plug hole, and the upper end of the main turntable has a main threaded groove. When the central axes of the secondary turntable and the main turntable coincide, the plug rod passes through multiple plug holes from top to bottom until it is threaded into the interior of the main threaded groove.

[0009] Furthermore, the hoses located inside the sub-turntable are in a relaxed state, as are the hoses located between the underside of the chassis and the bottom surface of the circular groove.

[0010] Optionally, it also includes a casing located on the upper side of the main turntable and sleeved on the outside of multiple auxiliary turntables. A pair of perforated plates are fixedly connected to the outer end of the casing. A pair of auxiliary screw grooves are opened at the upper end of the main turntable. A second bolt is threaded between the insert rod and the auxiliary screw grooves.

[0011] Optionally, the inner surface of the casing is provided with an inner annular groove and a concave annular groove. The inner annular groove is located above the concave annular groove and the two are connected. A plastic film sleeve is fixedly connected to the edge of the concave annular groove.

[0012] Compared with existing technologies, the advantages of this utility model are: This solution, through the coordinated arrangement of a main turntable, sub-turntables, fixed rods, insertion rods, and pads, enables the synchronous rotation of the main turntable and multiple sub-turntables after the motor is started, achieving simultaneous uniform coating of multiple chips in a single operation, effectively improving processing efficiency. Attached Figure Description

[0013] Figure 1 The three-dimensional representation of the first embodiment of this utility model Figure 1 ; Figure 2 The three-dimensional representation of the first embodiment of this utility model Figure 2 ; Figure 3 The three-dimensional representation of the first embodiment of this utility model Figure 3 ; Figure 4 This is a front view of the first embodiment of the present invention. Figure 1 ; Figure 5This is a front view of the first embodiment of the present invention. Figure 2 ; Figure 6 The three-dimensional representation of the second embodiment of this utility model Figure 1 ; Figure 7 The three-dimensional representation of the second embodiment of this utility model Figure 2 ; Figure 8 This is a front view of the second embodiment of the present invention. Figure 9 for Figure 8 Schematic diagram of the structure at point B; Figure 10 This is a partial front view of the casing of this utility model during use.

[0014] Explanation of the labels in the diagram: 1. Base, 101 Circular Groove, 2. Main Turntable, 201 Main Screw Groove, 202 Secondary Screw Groove, 3. Secondary Turntable, 301 Insertion Hole, 302 Fastening Hole, 4. Fixed Rod, 5. Insertion Rod, 6. Pad, 7. First Bolt, 81. First Gear, 82. Second Gear, 83. Rotating Shaft, 9. Vacuum Suction Cup, 10. Chassis, 11. Limiting Ring, 12. Vacuum Generating Device, 13. Hoses, 14. Enclosure, 1401 Inner Ring Groove, 1402 Concave Ring Groove, 15. Perforated Plate, 16. Second Bolt, 17. Plastic Film Sleeve. Detailed Implementation

[0015] The technical solution will now be clearly and completely described with reference to the accompanying drawings in the embodiments of this utility model.

[0016] First implementation method: Please see Figure 1 , Figure 2 and Figure 3 An automatic spin coating device for quantum dot photoresist includes a base 1. A main turntable 2 and multiple auxiliary turntables 3 are arranged sequentially from bottom to top on the upper side of the base 1. A fixed rod 4 is fixedly connected to the upper end of the main turntable 2, and the upper end of the fixed rod 4 moves through multiple auxiliary turntables 3 sequentially. A pad 6 is attached to the lower side of the auxiliary turntables 3. The pad 6 is fixedly connected to the outer end of the fixed rod 4. The auxiliary turntables 3 and the pad 6 are fixed together by a pair of first bolts 7.

[0017] Specifically: The secondary turntable 3 has a pair of fastening holes 302, and the pad 6 has a pair of threaded holes. When the central axis of the secondary turntable 3 coincides with that of the main turntable 2, the fastening holes 302 are aligned with the threaded holes on their lower sides. The first bolt 7 can be simultaneously screwed into the fastening holes 302 and the threaded holes to fix the secondary turntable 3 and the pad 6, thus achieving the first positioning function of the secondary turntable 3. Additionally, this application also includes a insertion rod 5. The secondary turntable 3 has insertion holes 301, and the upper end of the main turntable 2 has a main threaded groove 201. When the central axes of the secondary turntable 3 and the main turntable 2 coincide, the insertion rod 5 passes through multiple insertion holes 301 from top to bottom until it is threaded into the interior of the main threaded groove 201 (e.g., ...). Figure 1 and Figure 4 As shown in the figure, the second positioning function of the sub-rotor 3 is achieved by the insertion rod 5, so that the sub-rotor 3 and the main rotor 2 can rotate synchronously and perform the coating operation on the chip placed on its upper end (represented by A in the figure).

[0018] Please see Figure 1 and Figure 2 The main turntable 2 is fixedly connected to the outer end of a first gear 81. The base 1 is fixedly connected to a motor (shown in the figure; the model can be optimally selected by those skilled in the art, such as the 2RK6GN-C model that can rotate in both directions). The output end of the motor extends movably to the outside of the base 1 and is fixedly connected to a rotating shaft 83. The outer end of the rotating shaft 83 is fixedly connected to a second gear 82. The second gear 82 meshes with the first gear 81. When the chip is placed stably on the main turntable 2 and the auxiliary turntable 3 and photoresist is applied, the motor is started. The motor drives the rotating shaft 83 to rotate. Through the transmission action of the first gear 81 and the second gear 82, the main turntable 2 rotates synchronously. Combined with the connection and positioning of the auxiliary turntable 3 by the fixed rod 4, the insertion rod 5, and the pad 6, the auxiliary turntable 3 rotates synchronously with the main turntable 2, thereby realizing the uniform coating operation on the chip at the top of the main turntable 2 and the auxiliary turntable 3.

[0019] Please see Figure 4 A circular groove 101 is provided at the center of the upper end of the base 1. The lower end of the main turntable 2 is fixedly connected to the chassis 10. The chassis 10 is rotatably connected to the inside of the circular groove 101. A limiting ring 11 is fixedly connected to the outer end of the chassis 10. An annular groove is provided on the inner wall of the circular groove 101. The limiting ring 11 is rotatably connected to the inside of the annular groove. Through the cooperation of the limiting ring 11 and the annular groove, the chassis 10 and the main turntable 2 are limited, so that the two can rotate stably.

[0020] Please see Figure 4Vacuum suction cups 9 are fixedly connected to the upper center of both the main turntable 2 and the auxiliary turntable 3. A vacuum generator 12 is also fixedly connected inside the base 1. The model of the vacuum generator 12 can be optimally selected by those skilled in the art, such as using SMC's ZL series, such as ZL112. A controller matching the vacuum generator 12, such as a ZL3 / ZL6 vacuum pressure switch, is fixedly installed on the outer end of the base 1 to facilitate personnel control of the vacuum generator 12. A hose 13 is fixedly connected to the vacuum interface of the vacuum generator 12. The hose 13 extends from inside the base 1 and is fixedly extended to the chassis 10, the main turntable 2 and the multiple auxiliary turntables 3 until it is connected to the vacuum suction cups 9.

[0021] In use, first remove the first bolt 7 to allow the secondary turntable 3 to rotate. Figure 2 and Figure 5 As shown, the sub-rotor 3 is rotated outward around the fixed rod 4 to expose the vacuum suction cup 9 on the upper side of the main rotor 2. This makes it convenient to place a chip on the vacuum suction cup 9 on the upper side of the main rotor 2 first, and then rotate the sub-rotors 3 back to their original positions one by one from bottom to top, that is, on the upper side of the main rotor 2. After each sub-rotor 3 is rotated back, a chip is placed on the vacuum suction cup 9 on the upper side of the sub-rotor 3. Then, the sub-rotor 3 and the pad 6 are fixed by the first bolt 7. After all the sub-rotors 3 are rotated back to their original positions, the insertion rod 5 is inserted into the insertion hole 301 and the main screw groove 201 to further position the sub-rotors 3 and the main rotor 2. Then, the vacuum generator 12 is started, and the air is guided by the hose 13 to simultaneously perform vacuuming operation on multiple vacuum chucks 9, so that the vacuum chucks 9 can adsorb the chip under negative pressure and fix the chip; photoresist is applied to the chip manually or by using a dispensing tool, and the motor is started to realize the synchronous rotation of the main turntable 2 and the auxiliary turntable 3 for the uniform dispensing operation on the chip. It should be noted that, for ease of illustration, Figures 1 to 10 The dimensions of the various structures are not drawn strictly to scale. Those skilled in the art can design the dimensions of each structure reasonably according to actual usage requirements.

[0022] In addition, such as Figure 4As shown, the hose 13 located inside the sub-rotor 3 is in a relaxed state. That is, sufficient length is reserved for this part of the hose 13 so that it can adapt to the rotation of the sub-rotor 3 around the fixed rod 4, and the hose 13 is not tightened when the sub-rotor 3 rotates. The hose 13 located between the lower side of the chassis 10 and the inner bottom surface of the circular groove 101 is also in a relaxed state. Sufficient length is reserved for this part of the hose 13 so that it can adapt to the rotation operation of the chassis 10. In addition, during the glue-coating operation, the motor can be intermittently reversed, such as rotating forward twenty times and then reverse twenty times, and this operation is repeated. This can achieve a more uniform glue-coating operation and make the hose 13 between the lower side of the chassis 10 and the inner bottom surface of the circular groove 101 more adaptable to the rotation operation of the chassis 10.

[0023] Second implementation method: This embodiment adds a surrounding tube 14 based on the first embodiment. It should be noted that the surrounding tube 14 can be used selectively as needed, such as... Figures 6 to 8 As shown, the casing 14 is located on the upper side of the main turntable 2 and sleeved on the outside of multiple auxiliary turntables 3. A pair of perforated plates 15 are fixedly connected to the outer end of the casing 14. A pair of auxiliary screw grooves 202 are opened at the upper end of the main turntable 2. A second bolt 16 is threaded between the insert rod 5 and the auxiliary screw grooves 202, thereby realizing the detachable installation of the casing 14. Figure 8 and Figure 9 As shown, the inner surface of the sleeve 14 is provided with an inner annular groove 1401 and a concave annular groove 1402. The inner annular groove 1401 is located on the upper side of the concave annular groove 1402 and the two are connected. A plastic film sleeve 17 is fixedly connected to the edge of the groove of the concave annular groove 1402.

[0024] Before starting the motor for the uniform coating operation, the outer sleeve 14 can be placed over the auxiliary turntable 3 and positioned above the main turntable 2. Then, the perforated plate 15 and the main turntable 2 can be connected and fixed using the second bolt 16. This allows the adhesive splashed outwards by centrifugal force during the uniform coating process to be directly thrown onto the inner wall of the outer sleeve 14. Figure 10 As shown, if a large amount of splashed adhesive is generated, the adhesive can flow down along the inner wall of the inner ring groove 1401 and collect in the plastic film sleeve 17, thereby collecting the adhesive. Later, the adhesive can be recycled by disassembling the casing 14 and flipping the plastic film sleeve 17 out of the concave ring groove 1402, and the casing 14 and the plastic film sleeve 17 can be cleaned.

[0025] The above description is merely a preferred embodiment of this utility model; it encompasses all the protection scope of this utility model. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and its improved concept, should be covered within the protection scope of this utility model.

Claims

1. An automated spin coating device for quantum dot photoresist, comprising a base (1), characterized in that: The base (1) has a main turntable (2) and a number of auxiliary turntables (3) arranged sequentially from bottom to top on its upper side. The upper end of the main turntable (2) is fixedly connected to a fixed rod (4), and the upper end of the fixed rod (4) moves through the number of auxiliary turntables (3) sequentially. A pad (6) is attached to the lower side of the auxiliary turntable (3). The pad (6) is fixedly connected to the outer end of the fixed rod (4). The auxiliary turntable (3) and the pad (6) are fixed together by a pair of first bolts (7). The outer end of the main turntable (2) is fixedly connected to a first gear (81), and the inside of the base (1) is fixedly connected to a motor. The output end of the motor extends movably to the outside of the base (1) and is fixedly connected to a rotating shaft (83). The outer end of the rotating shaft (83) is fixedly connected to a second gear (82), and the second gear (82) meshes with the first gear (81). A circular groove (101) is provided at the center of the upper end of the base (1). A chassis (10) is fixedly connected to the lower end of the main turntable (2). The chassis (10) is rotatably connected to the inside of the circular groove (101). A limiting ring (11) is fixedly connected to the outer end of the chassis (10). An annular groove is provided on the inner wall of the circular groove (101). The limiting ring (11) is rotatably connected to the inside of the annular groove. Vacuum suction cups (9) are fixedly connected to the upper center of the main turntable (2) and the secondary turntable (3). A vacuum generator (12) is also fixedly connected inside the base (1). The vacuum interface of the vacuum generator (12) is fixedly connected to a hose (13). The hose (13) extends from inside the base (1) and is fixedly extended to the chassis (10), the main turntable (2) and the multiple secondary turntables (3) until it is connected to the vacuum suction cup (9).

2. The automatic spin coating equipment for quantum dot photoresist according to claim 1, characterized in that: It also includes a plug rod (5), the auxiliary turntable (3) is provided with a plug hole (301), and the upper end of the main turntable (2) is provided with a main thread groove (201). When the central axes of the auxiliary turntable (3) and the main turntable (2) coincide, the plug rod (5) passes through multiple plug holes (301) from top to bottom until it is threaded into the inside of the main thread groove (201).

3. The automatic spin coating equipment for quantum dot photoresist according to claim 1, characterized in that: The hose (13) located inside the sub-turntable (3) is in a relaxed state, and the hose (13) located between the lower side of the chassis (10) and the bottom surface of the circular groove (101) is also in a relaxed state.

4. An automatic spin coating device for quantum dot photoresist according to claim 2, characterized in that: It also includes a casing (14) located on the upper side of the main turntable (2) and sleeved on the outside of multiple auxiliary turntables (3). A pair of perforated plates (15) are fixedly connected to the outer end of the casing (14). A pair of auxiliary screw grooves (202) are opened at the upper end of the main turntable (2). A second bolt (16) is threaded between the insert rod (5) and the auxiliary screw grooves (202).

5. An automatic spin coating device for quantum dot photoresist according to claim 4, characterized in that: The inner surface of the sleeve (14) is provided with an inner ring groove (1401) and a concave ring groove (1402). The inner ring groove (1401) is located on the upper side of the concave ring groove (1402) and the two are connected. A plastic film sleeve (17) is fixedly connected to the edge of the groove of the concave ring groove (1402).

Images