High-precision two-fluid etching and developing integrated nozzle device

Abstract

The utility model relates to etching / developing spray technical field, concretely relates to a kind of high-precision two-fluid etching developing integrated spray pipe device, including the front cover plate, middle plate and back cover plate of fixed in turn layering, air inlet channel is equipped between back cover plate and middle plate, liquid inlet channel is equipped between front cover plate and middle plate;Middle plate and front cover plate are equipped with aligned mounting hole.It also includes multiple spray heads, each spray head includes nozzle seat, nozzle body and locking piece, locking piece is fixed with nozzle body in the front end of nozzle seat, nozzle seat is through and has the liquid inlet hole and air inlet hole of the communication nozzle body, the entrance of air inlet hole is located in the rear end surface of nozzle seat, the entrance of liquid inlet hole is located in the side of nozzle seat.Nozzle seat is fixed in mounting hole, the entrance of air inlet hole is communicated air inlet channel, the entrance of liquid inlet hole is communicated liquid inlet channel.Gas of air inlet channel enters nozzle body by the air inlet hole of spray head, liquid of liquid inlet channel enters nozzle body by the liquid inlet hole of spray head, gas impact liquid forms spray effect.

Description

Technical Field

[0001] This utility model relates to the field of etching / developing spray technology, specifically to a high-precision two-fluid etching and developing integrated nozzle device. Background Technology

[0002] Etching is a technique that removes material using chemical reactions or physical impact. Etching technology can be divided into two categories: wet etching and dry etching. Etching, also known as photochemical etching, refers to the process of removing the protective film from the area to be etched after exposure and development, followed by contact with a chemical solution during etching to achieve a dissolving and corroding effect, creating raised or hollowed-out shapes. Generally, the larger the etching droplets sprayed onto the substrate, the more severe the lateral etching, which significantly affects the accuracy of printed conductors on the substrate. Therefore, to improve the accuracy of printed conductors on the substrate, it is necessary to reduce the volume of etching droplets sprayed onto the substrate during the etching process, which places high demands on the precision of the etching machine. To address this, a two-fluid etching device has emerged on the market.

[0003] For example, Chinese patent document CN212278554U discloses a two-fluid etched manifold, which includes a manifold body and multiple spray devices disposed on the manifold body. The multiple spray devices are arranged sequentially along the length of the manifold body. Each spray device includes a spray body and a nozzle disposed on the spray body. The spray body is mounted on the manifold body. The spray body is provided with an air inlet and a liquid inlet, which are arranged sequentially along the length of the spray body. A gas supply is provided on the manifold body. The system includes a gas inlet and a liquid inlet. The gas inlet is connected to the air inlet on each spray body via a gas delivery pipe, and the liquid inlet is connected to the liquid inlet on each spray body via a liquid delivery pipe. The nozzle is mounted on the spray body via a detachable connection structure. The spray body has a limiting groove at a corresponding position to restrict the rotation of the nozzle, and the nozzle has a mating part that engages with the limiting groove. When the nozzle is mounted on the spray body via the detachable connection structure, the mating part on the nozzle engages with the limiting groove on the spray body. This two-fluid etching manifold allows for fixing the nozzle's installation angle during nozzle replacement, saving time spent manually adjusting the nozzle's installation angle and increasing the nozzle installation speed.

[0004] For example, Chinese patent document CN219592725U relates to the field of PCB etching technology, specifically a two-fluid etching spray system, including: a gas system, a liquid system, and a two-fluid mixing nozzle; the two-fluid mixing nozzle is provided with a gas inlet, a liquid inlet, and a nozzle; the gas system is connected to the gas inlet to provide the driving gas required for spraying; the liquid system is connected to the liquid inlet to provide the etching liquid required for spraying; the driving gas and etching liquid are mixed in the two-fluid mixing nozzle and then sprayed out from the nozzle; the gas system is equipped with a gas heating system. This eliminates the problem of spray temperature drop after gas-liquid mixing caused by the temperature difference between the gas and liquid fluids. This ensures that the temperature of the etching liquid after atomization is not significantly affected by the gas and liquid fluids, thereby effectively improving etching quality and etching rate. Compared with traditional two-fluid etching technology, the control of gas and liquid fluid temperature significantly improves the manufacturing capability and yield of precision circuits.

[0005] In the prior art, the long strip-shaped base with nozzles is provided with air intake channels and water intake channels. However, the prior art is to open holes in a whole base to form air intake and water intake channels. The long strip-shaped base is difficult to process and has high manufacturing cost. Utility Model Content

[0006] In view of the above-mentioned technical problems, the present invention provides a high-precision two-fluid etching and developing integrated nozzle device.

[0007] To achieve the above objectives, this utility model provides the following technical solution: A high-precision two-fluid etching and developing integrated nozzle device is provided, comprising a front cover plate, a middle plate and a rear cover plate that are stacked and fixed in sequence. An air inlet channel is provided between the rear cover plate and the middle plate, and a liquid inlet channel is provided between the front cover plate and the middle plate. The middle plate and the front cover plate are provided with aligned mounting holes. It also includes multiple nozzles, each nozzle including a nozzle seat, a nozzle body and a locking member. The locking member fixes the nozzle body to the front end of the nozzle seat. The nozzle seat has a through-hole for liquid inlet and air inlet that communicate with the nozzle body. The inlet of the air inlet is located on the rear end face of the nozzle seat, and the inlet of the liquid inlet is located on the side of the nozzle seat. The nozzle seat is fixed to the mounting holes of the middle plate and the front cover plate. The inlet of the air inlet is connected to the air intake channel, and the inlet of the liquid inlet is connected to the liquid intake channel.

[0008] Specifically, the locking element is a nut, and the front end of the nozzle seat has an external thread. The nut engages with the external thread to press the nozzle body.

[0009] Specifically, the mounting hole is a stepped hole, and the outer side of the nozzle seat is provided with a first flange and a second flange. The first flange is embedded in the mounting hole of the middle plate, and the second flange is embedded in the mounting hole of the front cover plate.

[0010] Specifically, the first flange and the second flange are interference-fitted with the corresponding mounting holes.

[0011] Specifically, each nozzle seat is provided with multiple liquid inlet holes, which are arranged circumferentially around the air inlet hole.

[0012] Specifically, the liquid inlet hole is a straight hole.

[0013] Specifically, the centerline of the liquid inlet is arranged to intersect with the centerline of the air inlet.

[0014] Specifically, the front cover, middle plate, and rear cover are all long strips, with multiple nozzles arranged along the length of the strips.

[0015] Specifically, the long strip body has air intake pipes at both ends that connect to the two ends of the air intake channel, and the air intake pipes at both ends are staggered.

[0016] Specifically, the long strip plate has inlet pipes at both ends that connect to the liquid inlet channel, and the inlet pipes at both ends are staggered.

[0017] The beneficial effects of this utility model are: This invention relates to a high-precision two-fluid etching and developing integrated nozzle device. The structure for mounting the nozzle includes a front cover plate, a middle plate, and a rear cover plate. These three components are assembled to form the nozzle mounting structure. A liquid inlet channel is formed between the front cover plate and the middle plate, and an air inlet channel is formed between the rear cover plate and the middle plate. Compared with the existing technology of opening through holes in a long strip base, this invention is easier to process and reduces manufacturing costs.

[0018] During use, the gas in the air intake channel enters the nozzle body through the air intake hole of the nozzle, and the liquid in the liquid intake channel enters the nozzle body through the liquid intake hole of the nozzle. At the nozzle body, the gas impacts the liquid to form a spray effect. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings. However, the embodiments in the drawings do not constitute any limitation on the present invention. For those skilled in the art, other drawings can be obtained based on the following drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a high-precision two-fluid etching and developing integrated nozzle device in the embodiment.

[0021] Figure 2 for Figure 1 A magnified view of the circled area.

[0022] Figure 3 This is a structural schematic diagram from another perspective of a high-precision two-fluid etching and developing integrated nozzle device in the embodiment.

[0023] Figure 4 This is a schematic diagram of the nozzle structure in the embodiment.

[0024] Figure 5 This is an exploded view of the nozzle in the embodiment.

[0025] Figure 6 This is a cross-sectional view of the nozzle seat in the embodiment.

[0026] Figure label: 1. Front cover plate; 2. Middle plate; 3. Rear cover plate; 4. Air inlet channel; 5. Liquid inlet channel; 6. Mounting hole; 7. Air inlet pipe; 8. Liquid inlet pipe; Nozzle 9, nozzle seat 91, liquid inlet 911, air inlet 912, first flange 913, second flange 914, nozzle body 92, locking element 93. Detailed Implementation

[0027] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0028] This embodiment provides a high-precision two-fluid etching and developing integrated nozzle device, such as... Figures 1 to 6 As shown, the system includes a front cover plate 1, a middle plate 2, and a rear cover plate 3, which are stacked and fixed in sequence. The sides of the rear cover plate 3 and the middle plate 2 facing each other have slots to form air intake channels 4, and the sides of the front cover plate 1 and the middle plate 2 facing each other have slots to form liquid intake channels 5. The middle plate 2 and the front cover plate 1 have aligned mounting holes 6. The front cover plate 1, the middle plate 2, and the rear cover plate 3 are all elongated plates, and the multiple mounting holes 6 are arranged along the length of the elongated plates.

[0029] The spray device also includes multiple nozzles 9. Each nozzle 9 includes a nozzle seat 91, a nozzle body 92, and a locking member 93. The locking member 93 fixes the nozzle body 92 to the front end of the nozzle seat 91. The nozzle seat 91 has a through-hole 911 for liquid inlet and 912 for air inlet, which are connected to the nozzle body 92. The inlet of the air inlet 912 is located on the rear end face of the nozzle seat 91, and the inlet of the liquid inlet 911 is located on the side of the nozzle seat 91. The nozzle seat 91 is fixed to the mounting holes 6 of the middle plate 2 and the front cover plate 1. The inlet of the air inlet 912 is connected to the air intake channel 4, and the inlet of the liquid inlet 911 is connected to the liquid intake channel 5. In use, the gas in the air intake channel 4 enters the nozzle body 92 through the air inlet 912 of the nozzle 9, and the liquid in the liquid intake channel 5 enters the nozzle body 92 through the liquid inlet 911 of the nozzle 9. At the nozzle body 92, the gas impacts the liquid to create an outward spray effect.

[0030] During assembly, first fix the nozzle 9 to the front cover plate 1, observing that the inlet position of the liquid inlet 911 protrudes from the top surface of the front cover plate 1; then install the middle plate 2, observing that the inlet position of the air inlet 912 protrudes from the top surface of the middle plate 2, ensuring installation accuracy; finally, fix the rear cover plate 3. Alternatively, first fix the front cover plate 1, middle plate 2, and rear cover plate 3 together, and then insert each nozzle 9 into the corresponding mounting hole 6.

[0031] Specifically, the locking element 93 is a nut with a step inside, and the front end of the nozzle seat 91 has an external thread. The nut engages with the external thread to press the nozzle body 92. In practice, the locking element 93 can also be a screw, which can also fix the nozzle body 92.

[0032] Specifically, the mounting hole 6 is a stepped hole, and the outer side of the nozzle seat 91 is provided with a first flange 913 and a second flange 914. The first flange 913 is embedded in the mounting hole 6 of the middle plate 2, and the second flange 914 is embedded in the mounting hole 6 of the front cover plate 1. When installing the nozzle 9, the first flange 913 and the second flange 914 provide a reference. As long as they are embedded in place, it means that the installation is in place.

[0033] Specifically, the first flange 913 and the second flange 914 are interference-fitted with the corresponding mounting holes 6.

[0034] Specifically, each nozzle seat 91 is provided with a plurality of liquid inlet holes 911, and the plurality of liquid inlet holes 911 are arranged circumferentially around the air inlet hole 912.

[0035] Specifically, the liquid inlet 911 is a straight hole, and the center line of the liquid inlet 911 is arranged to intersect with the center line of the air inlet 912.

[0036] In this embodiment, the long strip plate has air inlet pipes 7 at both ends, connecting to the two ends of the air inlet channel 4, and the air inlet pipes 7 at both ends are staggered. Specifically, the long strip plate has liquid inlet pipes 8 at both ends, connecting to the two ends of the liquid inlet channel 5, and the liquid inlet pipes 8 at both ends are staggered. The staggered arrangement refers to the arrangement in the width direction of the long strip plate, i.e. Figure 2 The nozzles are staggered vertically as shown. During use, air / liquid enters from both ends simultaneously. The staggered arrangement prevents the gas / liquid from entering from both ends from colliding, resulting in a more uniform gas / liquid flow into each nozzle.

[0037] In the description of this utility model, it is obvious that the described embodiments are only a part of the embodiments of this utility model, and not all of them. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0038] Therefore, the above detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0039] In the description of this utility model, it should be noted that the terms "middle," "upper," "lower," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0040] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. They can refer to a mechanical connection or an electrical connection. They can refer to a direct connection or an indirect connection through an intermediate medium, or a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

Claims

1. A high-precision two-fluid etching and developing integrated nozzle device, characterized in that: It includes a front cover plate (1), a middle plate (2) and a rear cover plate (3) that are stacked and fixed in sequence. An air inlet channel (4) is provided between the rear cover plate (3) and the middle plate (2), and a liquid inlet channel (5) is provided between the front cover plate (1) and the middle plate (2). The middle plate (2) and the front cover plate (1) are provided with mounting holes (6) that are aligned one to one. It also includes multiple nozzles (9), each nozzle (9) including a nozzle seat (91), a nozzle body (92) and a locking member (93). The locking member (93) fixes the nozzle body (92) to the front end of the nozzle seat (91). The nozzle seat (91) has a liquid inlet (911) and an air inlet (912) that communicate with the nozzle body (92). The inlet of the air inlet (912) is located on the rear end face of the nozzle seat (91), and the inlet of the liquid inlet (911) is located on the side of the nozzle seat (91). The nozzle seat (91) is fixed to the mounting holes (6) of the middle plate (2) and the front cover plate (1), the inlet of the air inlet (912) is connected to the air intake channel (4), and the inlet of the liquid inlet (911) is connected to the liquid intake channel (5).

2. The high-precision two-fluid etching and developing integrated nozzle device according to claim 1, characterized in that: The locking element (93) is a nut, and the front end of the nozzle seat (91) is provided with an external thread. The nut engages with the external thread to press the nozzle body (92).

3. The high-precision two-fluid etching and developing integrated nozzle device according to claim 1, characterized in that: The mounting hole (6) is a stepped hole. The nozzle seat (91) is provided with a first flange (913) and a second flange (914) on the outside. The first flange (913) is embedded in the mounting hole (6) of the middle plate (2), and the second flange (914) is embedded in the mounting hole (6) of the front cover plate (1).

4. The high-precision two-fluid etching and developing integrated nozzle device according to claim 3, characterized in that: The first flange (913) and the second flange (914) are interference-fitted with the corresponding mounting holes (6).

5. The high-precision two-fluid etching and developing integrated nozzle device according to claim 1, characterized in that: Each nozzle seat (91) is provided with a plurality of liquid inlet holes (911), which are arranged circumferentially around the air inlet hole (912).

6. The high-precision two-fluid etching and developing integrated nozzle device according to claim 5, characterized in that: The liquid inlet hole (911) is a straight hole.

7. The high-precision two-fluid etching and developing integrated nozzle device according to claim 5, characterized in that: The centerline of the liquid inlet (911) intersects with the centerline of the air inlet (912).

8. The high-precision two-fluid etching and developing integrated nozzle device according to claim 1, characterized in that: The front cover (1), middle plate (2) and rear cover (3) are all long strips, and multiple nozzles (9) are arranged separately along the length of the strips.

9. A high-precision two-fluid etching and developing integrated nozzle device according to claim 8, characterized in that: The long strip plate has air inlet pipes (7) at both ends that connect to the air inlet channel (4), and the air inlet pipes (7) at both ends are staggered.

10. A high-precision two-fluid etching and developing integrated nozzle device according to claim 8, characterized in that: The long strip plate has inlet pipes (8) at both ends that connect to the inlet channel (5), and the inlet pipes (8) at both ends are staggered.

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