A gas showerhead and upper electrode assembly

Abstract

The utility model discloses a gas shower head and upper electrode subassembly. Gas shower head includes: the shower head body, the shower head body includes first surface and with first surface opposite second surface is arranged, a plurality of gas passage through the shower head body, the gas passage includes the sunken portion and a plurality of with the bottom communication of sunken portion's gas hole, wherein, the sunken portion sets up in first surface, the gas hole from the bottom of sunken portion is through to second surface. Through setting up a plurality of gas holes in one gas passage, can increase single gas passage's unit time gas throughput, reduce gas accumulation, prevent the high gas pressure from producing in the side of gas shower head close to gas supply channel, thereby reduce the risk of discharge.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, specifically to a gas spray head and an upper electrode assembly. Background Technology

[0002] In the plasma processing chamber, the process gas is transmitted to the gas spray head through the gas supply channel, and then uniformly transmitted to the reaction chamber by the gas spray head. The process gas forms plasma under the action of the radio frequency power supply, and the plasma deposits or etches on the surface of the silicon wafer.

[0003] In traditional solutions, the vents of the gas spray head typically have a high aspect ratio, preventing the process gas supplied from the gas supply channel from quickly entering the vents. This causes the gas to accumulate on the side of the gas spray head closest to the gas supply channel, resulting in increased gas pressure in that area and a higher risk of discharge. Utility Model Content

[0004] To address the above problems, this utility model proposes the following solution:

[0005] A gas spray head includes: a spray head body, the spray head body including a first surface and a second surface disposed opposite to the first surface; a plurality of gas channels penetrating the spray head body, the gas channels including a recessed portion and a plurality of air holes communicating with the bottom of the recessed portion; wherein the recessed portion is disposed on the first surface, and the air holes penetrate from the bottom of the recessed portion to the second surface.

[0006] For example, the distance between the bottom of the recess and the first surface is 0.2 mm to 1 mm.

[0007] For example, the sunken section includes sloping sidewalls and a flat bottom.

[0008] For example, the angle between the inclined sidewall and the bottom of the plane is an obtuse angle.

[0009] For example, the bottom of the recessed portion is circular, and the diameter of the bottom of the recessed portion is larger than the diameter of the vent.

[0010] For example, the gas channel has 3 vents.

[0011] For example, the distance between the pores in the same gas channel is greater than or equal to 2 mm.

[0012] For example, the distance between adjacent gas channels is greater than or equal to 10 mm.

[0013] For example, the depth-to-width ratio of the pores is greater than or equal to 20:1.

[0014] Another aspect of this utility model discloses an upper electrode assembly, comprising: a mounting base having a plurality of gas supply channels therein; a gas spray head according to any of the above embodiments; and a fixing mechanism for fixing the gas spray head on the mounting base; wherein, a first surface of the spray head body faces the mounting base, and the gas supply channels are correspondingly arranged with at least a portion of the gas channels.

[0015] For example, the upper electrode assembly also includes a gasket disposed between the mounting base and the gas spray head. The gasket has multiple through holes, which correspond one-to-one with the gas channels.

[0016] For example, the diameter of the through hole is greater than or equal to the outer diameter of the recess.

[0017] Compared with the prior art, the technical solution of this utility model has at least the following beneficial effects:

[0018] The gas spray head of this invention, by setting multiple air holes in a gas channel, can increase the gas throughput per unit time of a single gas channel, reduce gas accumulation, and prevent high gas pressure from being generated on the side of the gas spray head near the gas supply channel, thereby reducing the risk of discharge. Attached Figure Description

[0019] Figure 1 This is a top view of a gas spray head in one embodiment of the present invention.

[0020] Figure 2 This is a bottom view of a gas spray head in one embodiment of the present invention.

[0021] Figure 3 for Figure 1 A magnified view of a portion of region A in the middle.

[0022] Figure 4 For along Figure 3 The cross-sectional view obtained by the dashed line B-B'.

[0023] Figure 5 This is a partial cross-sectional view of an upper electrode assembly in one embodiment of the present invention.

[0024] Explanation of icon numbers:

[0025] 10-Spray head body; 11-First surface; 12-Second surface;

[0026] 20 - Gas channel; 21 - Sinking section; 22 - Pore;

[0027] 30 - Mounting base; 31 - Air supply channel;

[0028] 40 - Gasket; 41 - Through hole. Detailed Implementation

[0029] The technical solutions, structural features, objectives, and effects of the present invention will be described in detail below with reference to the accompanying drawings of the embodiments of the present invention.

[0030] It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions. They are only used to facilitate and clarify the illustration of the embodiments of this utility model, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationship, or adjustments to the size should still fall within the scope of the technical content disclosed in this utility model, provided that they do not affect the effects and objectives that this utility model can produce.

[0031] It should be noted that in this invention, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only the expressly listed elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0032] As described in the background section, in traditional solutions, the vents of the gas spray head typically have a high aspect ratio. The process gas transmitted from the gas supply channel cannot quickly enter the vents, thus accumulating on the side of the gas spray head near the gas supply channel. This leads to an increase in gas pressure in that area, increasing the risk of discharge.

[0033] To address the aforementioned problems, this invention proposes a novel gas spray head, such as... Figures 1 to 4 As shown, the gas spray head includes: a spray head body 10, the spray head body 10 including a first surface 11 and a second surface 12 disposed opposite to the first surface 11; a plurality of gas channels 20 penetrating the spray head body 10, the gas channels 20 including a recessed portion 21 and a plurality of air holes 22 communicating with the bottom of the recessed portion 21; wherein, the recessed portion 21 is disposed on the first surface 11, and the air holes 22 penetrate from the bottom of the recessed portion 21 to the second surface 12.

[0034] Example, Figure 1 and Figure 2 A first surface 11 and a second surface 12 of a spray head body 10 are shown respectively. Figure 3 and Figure 4A top view and a cross-sectional view of a gas channel 20 are shown. Each gas channel 20 has a recessed portion 21 near the first surface 11, and multiple air holes 22 extend from the bottom of the recessed portion 21 to the second surface 12. The recessed portion 21 provides a larger buffer space for the process gas, slowing down the rise in gas pressure. In addition, by providing multiple air holes 22, the gas throughput per unit time of a single gas channel 20 can be increased without changing the aspect ratio of the air holes 22, allowing the process gas to pass through the gas channel 20 more quickly, reducing accumulation at the first surface 11 of the gas spray head, thereby reducing the gas pressure in that area and reducing the risk of discharge.

[0035] In some embodiments, the distance between the bottom of the recessed portion 21 and the first surface 11 is 0.2 mm to 1 mm. For example, the distance between the bottom of the recessed portion 21 and the first surface 11 can be 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, or 1 mm. By providing a recessed portion 21 of a certain depth, a buffer space can be provided before the process gas enters the vent 22, improving the gas separation effect; furthermore, the space provided by the recessed portion 21 can also slow down the rate of increase in gas pressure, and the design of multiple vents 22 can accelerate the passage speed of the process gas, solving the discharge problem caused by excessively high gas pressure.

[0036] In some embodiments, the recessed portion 21 includes an inclined sidewall and a flat bottom. By providing an inclined sidewall, the volume of the recessed portion 21 can be increased to accommodate more process gas, and the risk of sidewall damage can be reduced, preventing accidental damage to the first surface 11. For example, the angle between the inclined sidewall and the flat bottom is an obtuse angle, such as 120°, 135°, or 150°.

[0037] In some embodiments, the bottom of the recessed portion 21 is circular, and the diameter of the bottom of the recessed portion 21 is larger than the diameter of the vent 22.

[0038] Since multiple vents 22 need to be provided at the bottom of the recessed portion 21, the diameter of each vent 22 is smaller than the diameter of the bottom of the recessed portion 21. For example, the diameter of the bottom of the recessed portion 21 can be 4 to 10 times the diameter of the vent 22. With this configuration, the number of vents 22 can be increased as needed to improve the gas throughput per unit time of a single gas channel 20.

[0039] For example, the diameter of the pore 22 can be 0.3 mm, 0.4 mm or 0.5 mm.

[0040] In some embodiments, such as Figure 3 As shown, the gas channel 20 is provided with 3 vents 22.

[0041] Compared to the traditional single-hole design, using three vents 22 can triple the gas throughput per unit time in a single gas channel 20. Furthermore, machining three vents 22 in the gas channel 20 is relatively easy; the more vents 22 there are, the greater the machining difficulty.

[0042] For example, the three vents 22 can be positioned at the three vertices of an equilateral triangle. This arrangement allows for full utilization of the bottom area of ​​the recessed portion 21 and improves the uniformity of the vent distribution 22, thereby enhancing the uniformity of the process gas distribution. In this embodiment,

[0043] In some embodiments, the number of vents 22 can be two or more than three, and this application does not limit this. For example, when the number of vents 22 is more than three, the vents 22 are arranged at the vertices of a regular polygon, wherein the number of sides of the regular polygon is equal to the number of vents 22. For instance, when the number of vents 22 is four, the four vents 22 are placed at the four vertices of a regular quadrilateral; when the number of vents 22 is five, the five vents 22 are placed at the five vertices of a regular pentagon. This arrangement can improve the uniformity of process gas distribution.

[0044] In some embodiments, the spacing between the individual vents 22 in the same gas channel 20 is greater than or equal to 2 mm. This arrangement reduces the difficulty of processing the vents.

[0045] In some embodiments, the distance between adjacent gas channels 20 is greater than or equal to 10 mm.

[0046] In some embodiments, the depth-to-width ratio of the pore 22 is greater than or equal to 20:1.

[0047] For example, the aspect ratio of the vent 22 can be 20:1, 30:1, 50:1, or 70:1. By setting the aspect ratio of the vent 22 to be greater than or equal to 20:1, the diffusion path of plasma within the vent 22 can be effectively limited, preventing plasma from flowing back into the vent 22 from the process chamber and causing damage, thus improving the service life of the gas spray head.

[0048] Another aspect of this utility model discloses an upper electrode assembly. Figure 5 A partial cross-sectional view of the upper electrode assembly is shown. The upper electrode assembly includes: a mounting base 30, wherein the mounting base 30 is provided with a plurality of air supply channels 31; a gas spray head according to any of the above embodiments; and a fixing mechanism for fixing the gas spray head to the mounting base 30; wherein the first surface 11 of the spray head body 10 faces the mounting base 30, and the air supply channels 31 are correspondingly arranged with at least a portion of the gas channels 20.

[0049] The mounting base 30 is provided with air supply channels 31 for supplying process gas to the gas spray head. The first surface 11 of the gas spray head is positioned close to the mounting base 30, allowing the process gas to first reach the recessed portion 21 and then enter each air hole 22 for uniform delivery. For example, the number of air supply channels 31 can be equal to the number of gas channels 20. For example, the number of air supply channels 31 can be reduced according to process requirements, so that the air supply channels 31 can at least correspond to a portion of the gas channels 20. The fixing mechanism can use a mechanical structure for locking, such as screw locking, or an adhesive layer can be provided between the mounting base 30 and the gas spray head to adhere the gas spray head to the mounting base 30. This application does not limit the form of the fixing mechanism.

[0050] In some embodiments, the upper electrode assembly further includes a gasket 40 disposed between the mounting base 30 and the gas spray head. The gasket 40 has a plurality of through holes, which are configured to correspond one-to-one with the gas channels 20.

[0051] By setting a gasket 40 between the mounting base 30 and the gas spray head, and providing a through hole for each gas channel 20, the gas channels 20 can be isolated from each other without affecting gas transmission, thus preventing cross-contamination.

[0052] In some embodiments, the diameter of the through hole is greater than or equal to the outer diameter of the recess 21.

[0053] like Figure 5 As shown, by setting the diameter of the through hole to be greater than or equal to the outer diameter of the recess 21, the gasket 40 can be prevented from blocking the gas channel 20.

[0054] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A gas spray head, characterized in that, include: A spray head body, the spray head body including a first surface and a second surface disposed opposite to the first surface; Multiple gas channels penetrating the spray head body, each gas channel including a recessed portion and multiple air holes communicating with the bottom of the recessed portion; The sunken portion is disposed on the first surface, and the air hole extends from the bottom of the sunken portion to the second surface; The sunken portion includes an inclined sidewall and a flat bottom, with an obtuse angle between the inclined sidewall and the flat bottom; the depth-to-width ratio of the vent is greater than or equal to 20:

1.

2. The gas spray head as described in claim 1, characterized in that, The distance between the bottom of the sunken portion and the first surface is 0.2 mm to 1 mm.

3. The gas spray head as described in claim 1, characterized in that, The bottom of the sunken part is circular, and the diameter of the bottom of the sunken part is larger than the diameter of the air hole.

4. The gas spray head as described in claim 1, characterized in that, The gas channel has three air holes.

5. The gas spray head as described in claim 1 or 4, characterized in that, The distance between each of the pores in the same gas channel is greater than or equal to 2 mm.

6. The gas spray head as described in claim 1, characterized in that, The distance between adjacent gas channels is greater than or equal to 10 mm.

7. An upper electrode assembly, characterized in that, include: The mounting base is provided with multiple air supply channels; The gas spray head according to any one of claims 1-6; and A fixing mechanism is used to fix the gas spray head on the mounting base; The first surface of the spray head body faces the mounting base, and the air supply channel is configured to correspond to at least a portion of the gas channel.

8. The upper electrode assembly as described in claim 7, characterized in that, Also includes: A gasket is disposed between the mounting base and the gas spray head. The gasket has multiple through holes, and each through hole corresponds to a gas channel.

9. The upper electrode assembly as described in claim 8, characterized in that, The diameter of the through hole is greater than or equal to the outer diameter of the recessed portion.

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