Connection device for a semiconductor radio frequency generator

Abstract

The utility model provides a kind of connecting device for semiconductor radio frequency generator, including sleeve piece, plug post piece and at least 2 elastic conductive parts;Sleeve piece includes sleeve body and the elastic guide portion being set to the opening end of sleeve body, the inner diameter of elastic guide portion increases along the direction of direction away from sleeve body, to guide plug post piece insertion;Plug post piece is inserted in the accommodation cavity of sleeve body, and the outer wall of plug post piece is equipped with first recess and second recess;At least 2 elastic conductive parts are annularly arranged on at least part of the outer wall of plug post piece, and the elastic conductive part includes the arc spring that extends along the axial direction of plug post piece, and first end and second end are respectively arranged at both ends of arc spring, and the vault of arc spring protrudes in the direction away from the outer wall of plug post piece, and first end is fixed in first recess, and second end is axially slidably arranged in second recess.The present application solves the problems of mechanical damage, plugging difficulty, radio frequency energy attenuation and other problems in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a connection device for a semiconductor radio frequency generator. Background Technology

[0002] Radio frequency generators are core modules of modern electronic systems. Their working principle is based on electronic oscillators, which utilize active devices (such as transistors) and passive resonant elements (such as LC circuits and crystal resonators) under a positive feedback mechanism to conduct energy to the process cavity to excite plasma.

[0003] In this device, one of the keys to achieving efficient radio frequency energy transfer lies in the performance of its internal connection structure. Currently, a simple direct mating structure of pins and sleeves is widely used in the industry. This type of structure typically relies on extremely high machining precision and interference fit to ensure a tight connection, and theoretically, gaps can be avoided through "precision casting." However, in practical applications, especially in semiconductor process equipment that requires frequent maintenance or debugging, the mating structure has revealed many inherent defects: (1) It is easy to cause mechanical damage and lead to the deterioration of electrical performance: During the insertion and removal process, if there are micro-burrs or insufficient chamfering at the lead end of the plug or the opening end of the sleeve, or if there are processing residues (such as metal chips) attached to the mating surface, the hard contact and friction between the two will directly scratch the contact surface, thereby destroying the current distribution on the conductor surface, increasing the contact resistance, and becoming the direct cause of radio frequency energy transmission attenuation, power reflection and impedance mismatch.

[0004] (2) Short insertion and removal life and gradually decreasing connection reliability: Semiconductor equipment has extremely high requirements for process stability and connectors often need to withstand multiple insertions and removals. As the number of insertions and removals increases, surface damage intensifies, eventually leading to an expansion of the mating gap and loosening of the connection. This results in unstable contact resistance, reduced vibration resistance, and an exponential decrease in connection reliability over time.

[0005] (3) Difficult insertion and removal, resulting in poor user experience and efficiency: To avoid loosening, existing designs often use extremely small fit tolerances or even interference fits. This requires a great deal of force to insert each time, and removal may be even more difficult due to "seizing". This problem of "inconvenient installation and removal" greatly reduces the efficiency of equipment maintenance, increases the labor intensity of operators, and is very likely to cause permanent damage to expensive radio frequency components when handled roughly. Utility Model Content

[0006] The purpose of this invention is to provide a connection device for semiconductor radio frequency generators, which solves the problems of mechanical damage, difficulty in insertion and removal, and radio frequency energy attenuation in existing plug and sleeve components.

[0007] To achieve the above objectives, the connection device for a semiconductor radio frequency generator according to the present invention includes a sleeve, a plug, and at least two elastic conductive elements. The sleeve includes a sleeve body and an elastic guide portion disposed at the open end of the sleeve body. The inner diameter of the elastic guide portion increases in a direction away from the sleeve body to guide the plug insertion. The plug is inserted into the receiving cavity of the sleeve body, and the outer wall of the plug has a first groove and a second groove. At least two elastic conductive elements are arranged around at least a portion of the outer wall of the plug. Each elastic conductive element includes an arc-shaped spring extending along the axial direction of the plug, and a first end and a second end respectively disposed at both ends of the arc-shaped spring. The dome of the arc-shaped spring protrudes in a direction away from the outer wall of the plug. The first end is fixed to the first groove, and the second end is slidably disposed in the second groove along the axial direction of the plug.

[0008] Preferably, the first groove is located on the side of the insert member close to the insertion end of the insert member, and the second groove is located on the side of the insert member away from the insertion end. The insertion end is the end of the insert member that first enters the receiving cavity when it is inserted into the sleeve member.

[0009] Preferably, the elastic guide portion includes a plurality of elastic sheets, one end of which is circumferentially disposed around the open end of the sleeve body. The elastic sheets are inclined relative to the central axis of the sleeve body, and one end of the elastic sheet away from the open end of the sleeve body extends in a direction away from the central axis of the sleeve body.

[0010] Preferably, the connection device for the semiconductor radio frequency generator further includes an elastic clamp and a movable retaining ring. The first groove and the second groove are annular grooves surrounding the outer wall of the insert. The first end of the arc-shaped spring is detachably disposed in the first groove via the elastic clamp, and the second end of the arc-shaped spring is detachably disposed in the second groove via the movable retaining ring.

[0011] Preferably, the elastic clamp is an annular structure with an opening, and the inner diameter of the elastic clamp is adapted to the outer diameter of the insert at the first groove; the elastic conductive element and the elastic clamp are integrally formed, and the first ends of at least two arc-shaped spring pieces are evenly distributed along the circumference of the elastic clamp.

[0012] Preferably, the connection device for the semiconductor radio frequency generator further includes a slider, which includes a connecting part and a sliding part. The connecting part is connected and fixed to the second end of the arc-shaped spring piece. The sliding part is connected to the connecting part and has a barbed structure. A gap is provided between the sliding part and the connecting part for the movable retaining ring to pass through. The length of the sliding part is greater than the length of the connecting part.

[0013] Preferably, the working surface of the sliding part and the connecting part opposite to each other is provided with a locking structure, the working surface of the connecting part and the sliding part opposite to each other is provided with a locking hole structure adapted to the locking structure, and the movable retaining ring is provided with a plurality of through holes in the circumferential direction for the locking structure of each sliding part to pass through.

[0014] Preferably, the thickness of the elastic clamp is not greater than the radial depth of the first groove, and the sum of the thickness of the movable retaining ring and the thickness of the sliding member is not greater than the radial depth of the second groove.

[0015] Preferably, the second groove has a groove wall that is equal in number to and corresponds one-to-one with the number of sliding members. The groove extends along the axial direction of the insert member, and the sliding member is slidably disposed in the groove.

[0016] Preferably, at least two of the elastic conductive elements are evenly distributed around the outer wall of the insert member, and the elastic conductive elements are disposed near the insertion end of the insert member, which is the end of the insert member that first enters the receiving cavity when it is inserted into the sleeve member.

[0017] Preferably, the axial distance between the first groove and the second groove is less than half of the total axial length of the insert.

[0018] Preferably, the axial length of the groove along the insert is less than half of the axial distance between the first groove and the second groove.

[0019] Preferably, the thickness of the arc-shaped spring sheet is 1-3 mm.

[0020] The advantages of the connection device for semiconductor radio frequency generator described in this utility model are as follows: (1) The present application can bend and deform due to the elastic force of the elastic conductive part, so that when the insert is inserted into the sleeve, the direct hard contact and friction between the two can be effectively isolated, thereby avoiding scratches on the inner surface of the insert and the outer surface of the sleeve.

[0021] (2) In this application, the insert and the sleeve can maintain good contact through the elastic conductive element, which ensures the stability of radio frequency energy transmission and helps to avoid the failure of arcing due to the gap between the sleeve and the insert.

[0022] (3) The elastic conductive element described in this application is itself a highly efficient elastic element that can effectively absorb and buffer axial and radial mechanical vibrations and impacts. The sleeve and the insert form an elastic contact through the elastic conductive element, which can compensate for small displacements and deformations, prevent instantaneous interruption of contact due to vibration, and greatly improve the reliability and stability of the connection device used for semiconductor radio frequency generators.

[0023] (4) In this application, the first end is fixed to the first groove, and the second end is slidably disposed in the second groove along the axial direction of the insert, which avoids the first end and the second end protruding from the surface of the insert, reducing the risk of friction and scratching the inner surface of the sleeve, and avoiding the generation of gaps between the insert and the sleeve; moreover, it provides a certain amount of axial movement space for the arc-shaped spring, so that during the insertion and extraction process, the arc-shaped spring can adapt to the displacement by sliding, rather than relying entirely on its own bending deformation. Through the composite mechanism of "sliding + deformation", the insertion and extraction process is smoother, the force is smaller and more uniform and gentle, which is beneficial to guiding the insert. Successful insertion of the sleeve component reduces the difficulty of inserting the insert into the sleeve component, eliminates the risk of increased insertion / removal resistance or jamming caused by the deformation of the arc-shaped spring, and ensures high reliability of the connection process. Moreover, during the insertion process, when the insert component may be misaligned due to alignment deviation, the arc-shaped spring in a stretched state generates a strong elastic contraction force attempting to restore its original length, acting on the insert component to automatically and flexibly pull it back and align it with the central axis of the sleeve component, achieving dynamic self-correction and guidance, and significantly reducing insertion / removal force. At the same time, it avoids excessive strain of the elastomer under fixed constraints, thereby mitigating material fatigue and significantly extending the insertion / removal life of the connection device. Furthermore, the sliding setting of the second end in the second groove allows the insert component to adaptively adjust under temperature changes or mechanical stress within the sleeve component, compensating for manufacturing tolerances and thermal expansion effects, maintaining connection stability, and avoiding risks such as radio frequency energy interruption.

[0024] (5) The present application uses the gradually expanding inner diameter design of the elastic guide part to guide the insertion of the insert, reduce the insertion force and alignment error, improve the convenience of insertion and removal and the alignment accuracy, and avoid damage caused by misalignment between the insert and the sleeve. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the sleeve component in the connection device for a semiconductor radio frequency generator according to an embodiment of the present invention.

[0026] Figure 2 This is a schematic diagram of the connection between the insert and the elastic conductive element in the connection device for a semiconductor radio frequency generator according to an embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of the structure of the elastic clamp and the arc-shaped spring in the connection device for a semiconductor radio frequency generator according to an embodiment of the present invention.

[0028] Figure 4 This is a schematic diagram of the sliding member and the arc-shaped spring in the connecting device for a semiconductor radio frequency generator according to an embodiment of the present invention.

[0029] Explanation of reference numerals in the attached figures: 1. Sleeve component; 11. Sleeve body; 12. Elastic guide part; 2. Insert post component; 21. First groove; 22. Second groove; 23. Insertion end; 3. Elastic conductive component; 31. Arc-shaped spring piece; 311. First end; 312. Second end; 4. Elastic clamp component; 41. Opening; 5. Movable retaining ring; 6. Sliding component; 61. Connecting part; 62. Sliding part. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0031] To overcome the problems existing in the prior art, this utility model provides a connection device for a semiconductor radio frequency generator, which solves the problems of mechanical damage, difficulty in insertion and removal, and radio frequency energy attenuation in existing plug and sleeve components.

[0032] In some embodiments of this utility model, reference is made to Figures 1 to 3The connection device for the semiconductor radio frequency generator includes a sleeve 1, a plug 2, and at least two elastic conductive elements 3. The sleeve 1 includes a sleeve body 11 and an elastic guide portion 12 disposed at the open end of the sleeve body 11. The inner diameter of the elastic guide portion 12 increases in a direction away from the sleeve body 11 to guide the plug 2 into place. The plug 2 is inserted into the receiving cavity of the sleeve body 11, and the outer wall of the plug 2 is provided with a first groove 21 and a second groove 22. Two elastic conductive elements 3 are arranged around at least a portion of the outer wall of the insert 2. Each elastic conductive element 3 includes an arc-shaped spring piece 31 extending along the axial direction of the insert 2, and a first end 311 and a second end 312 respectively disposed at both ends of the arc-shaped spring piece 31. The arch of the arc-shaped spring piece 31 protrudes away from the outer wall of the insert 2. The first end 311 is fixed to the first groove 21, and the second end 312 is slidably disposed in the second groove 22 along the axial direction of the insert 2.

[0033] In this application, the elastic conductive element 3 includes an arc-shaped spring piece 31 extending axially along the insert 2. The dome of the arc-shaped spring piece 31 protrudes away from the outer wall of the insert 2, so that when the insert 2 is inserted into the receiving cavity of the sleeve body 11, the arc-shaped spring piece 31 undergoes radial elastic deformation under compression (i.e., the dome of the arc-shaped spring piece 31 moves closer to or away from the outer wall of the insert 2), avoiding direct rigid collision between the outer wall of the insert 2 and the inner wall of the sleeve body 11. As the insert 2 is inserted, the elastic conductive element 3 is compressed and fills the tiny gap between the insert 2 and the sleeve body 11, forming an elastic buffer area, thus reducing the original "metal- The direct contact between the metal components is transformed into an indirect contact between the metal and the elastic conductive element 3, thereby reducing or eliminating the source of scratches. When the insert 2 is inserted into the preset position of the sleeve body 11, the elastic conductive element 3 is compressed to a stable state, maintaining the connection between the insert 2 and the sleeve body 11 while ensuring close contact between the outer wall surface of the insert 2 and the inner wall surface of the sleeve 1. This ensures good contact between the insert 2 and the sleeve 1, guaranteeing the conduction of radio frequency energy. When the insert 2 is pulled out by external force, the elastic conductive element 3 gradually rebounds, but still maintains contact buffer with the inner wall of the sleeve 1 until the insert 2 is completely detached, ensuring no hard contact scratches between the insert 2 and the sleeve 1 throughout the process. In other words, the bending deformation caused by the elastic force of the elastic conductive element 3 effectively isolates the direct frictional contact between the insert 2 and the sleeve 1 when they are inserted and removed, thereby avoiding scratches on the inner surface of the insert 2 and the outer surface of the sleeve 1. Furthermore, the first end 311 of the arc-shaped spring piece 31 is fixed to the first groove 21, and the second end 312 is slidably disposed in the second groove 22 along the axial direction of the insert 2. That is, the arc-shaped spring piece 31 is in contact with the insert 2. When the arc-shaped spring piece 31 is radially compressed, it can generate a uniform and controllable rebound force, ensuring that the arched part of the arc-shaped spring piece 31 maintains a continuous and pressure-stable tight contact with the inner wall of the sleeve body 11. This ensures that the insert 2 and the sleeve 1 can maintain a good contact through the elastic conductive element 3, ensuring the stability of radio frequency energy transmission and helping to avoid the failure of ignition due to gaps between the sleeve 1 and the insert 2. At the same time, the elastic conductive element 3 itself is a highly efficient elastic element that can effectively absorb and buffer axial and radial mechanical vibrations and impacts. The elastic contact formed between the sleeve 1 and the insert 2 through the elastic conductive element 3 can compensate for small displacements and deformations, prevent instantaneous interruption of contact due to vibration, and greatly improve the reliability and stability of the connection device.

[0034] In this application, the first end 311 is fixed to the first groove 21, and the second end 312 is slidably disposed in the second groove 22 along the axial direction of the insert 2. This avoids the first end 311 and the second end 312 protruding from the surface of the insert 2, reducing friction and the risk of scratching the inner surface of the sleeve 1, and also avoids gaps between the insert 2 and the sleeve 1. Furthermore, the second end 312 slidably disposed in the second groove 22 along the axial direction of the insert 2 provides a certain amount of axial movement for the arc-shaped spring piece 31. The space allows the arc-shaped spring 31 to adapt to displacement through sliding during insertion and removal, rather than relying entirely on its own bending deformation. This combined "sliding + deformation" mechanism makes the insertion and removal process smoother, with smaller, more uniform, and gentler forces. This facilitates the smooth insertion of the insert 2 into the sleeve 1, reducing the difficulty of inserting the insert 2 into the sleeve 1 and eliminating the risk of increased insertion and removal resistance or jamming caused by the deformation of the arc-shaped spring 31 itself, ensuring a high degree of reliability in the connection process. The end of the second groove 22 can serve as a reliable mechanical stop. When the insert 2 is subjected to excessive insertion force or external impact, the second end 312 will slide to the end of the second groove 22 and abut against it, preventing the elastic conductive element 3 from being further stretched. It also allows excessive external force to be directly transferred to the insert 2 body through the second end 312 and the inner wall of the second groove 22, preventing all stress from being borne entirely by the elastic conductive element 3 itself, thus providing a crucial safety guarantee mechanism for the entire connection system. Meanwhile, during insertion, when the insert 2 may be misaligned due to alignment deviation, the arc-shaped spring 31 in a stretched state generates a strong elastic contraction force attempting to restore its original length. This force acts on the insert 2, automatically and flexibly pulling it back and aligning it with the central axis of the sleeve 1. This achieves dynamic self-correction and guidance, significantly reducing insertion and extraction forces. Simultaneously, it avoids excessive strain on the elastomer under fixed constraints, thereby mitigating material fatigue and significantly extending the insertion and extraction life of the connection device. Furthermore, the sliding arrangement of the second end 312 within the second groove 22 allows the insert 2 to adaptively adjust within the sleeve 1 under temperature changes or mechanical stress, compensating for manufacturing tolerances and thermal expansion effects, maintaining connection stability, and avoiding risks such as radio frequency energy interruption.

[0035] In this application, the inner diameter of the elastic guide 12 increases in the direction away from the sleeve body 11 to guide the insertion of the insert 2. That is, the gradual expansion of the inner diameter of the elastic guide 12 plays a guiding role when the insert 2 is inserted, reducing the insertion force and alignment error, which helps to improve the convenience of insertion and removal and the alignment accuracy, and avoids damage caused by misalignment between the insert 2 and the sleeve 1.

[0036] In this embodiment, the axial direction of the insert 2 is the direction perpendicular to the radial direction of the insert 2.

[0037] In some embodiments of this utility model, the insertion post 2 is disposed on the radio frequency matching unit, and the sleeve 1 is disposed on the power supply unit. The specific structures of the insertion post 2 and the sleeve 1 are conventional settings in the art and will not be described in detail here.

[0038] In some embodiments of this utility model, reference is made to Figure 2 The first groove 21 is located on the side of the insert 2 close to the insertion end 23 of the insert 2, and the second groove 22 is located on the side of the insert 2 away from the insertion end 23. The insertion end 23 is the end of the insert 2 that first enters the receiving cavity when it is inserted into the sleeve 1.

[0039] In this embodiment, during the insertion of the insert 2 into the sleeve 1, the second end 312 of the elastic conductive element 3 can slide away from the first end 311 in the second groove 22 under the squeezing force of the sleeve 1. This causes the arch of the arc-shaped spring piece 31 to move closer to the outer wall of the insert 2, resulting in controlled tensile deformation of the arc-shaped spring piece 31. This facilitates the smooth insertion of the insert 2 into the sleeve 1, reducing the difficulty of inserting the insert 2 into the sleeve 1 and ensuring uniform buffering force. If the second groove 22 is located on the side of the insert 2 closer to the insertion end 23, during the insertion of the insert 2 into the sleeve 1, the second end 312 of the elastic conductive element 3 will slide closer to the first end 311 in the second groove 22 under the squeezing force of the sleeve 1. This causes the arch of the arc-shaped spring piece 31 to move away from the outer wall of the insert 2, increasing the difficulty of inserting the insert 2 into the sleeve 1.

[0040] In some embodiments of this utility model, reference is made to Figure 2 At least two of the elastic conductive elements 3 are evenly distributed around the outer wall of the insert 2, that is, multiple axially extending arc-shaped elastic pieces 31 are arranged at equal intervals around the insert 2.

[0041] In this embodiment, multiple circumferentially evenly distributed arc-shaped spring pieces 31 form a completely symmetrical, centripetal contact force system in the radial direction. When the insert 2 is inserted into the sleeve body 11, the contact pressure applied by each arc-shaped spring piece 31 to the inner wall of the sleeve body 11 is completely balanced in the circumferential direction, thereby ensuring that the insert 2 is always automatically aligned in the sleeve, avoiding contact resistance fluctuations and micro-spark discharges caused by uneven force on one side, which is beneficial to ensuring the accuracy and efficiency of radio frequency energy transmission. Each elastic conductive element 3 is an independent conductive path. The multiple circumferentially evenly distributed elastic conductive elements 3 are equivalent to establishing multiple parallel, impedance-balanced current channels between the insert 2 and the sleeve 1, so that the total current value that the connection device can carry far exceeds the limit of a single conductor; moreover, even if a single elastic conductive element 3 fails due to extreme conditions, the remaining elastic conductive elements 3 can still ensure circuit continuity, greatly improving the redundancy and reliability of the system. In a vibration environment, the circumferentially distributed elastic conductive elements 3 together form a uniform, all-around damping system. No matter which direction the vibration comes from, there is a corresponding elastic conductive element 3 to provide buffering and restoring force, effectively suppressing the slight swaying of the insert 2 in the sleeve 1, and ensuring the stability of radio frequency energy transmission.

[0042] In some embodiments of this invention, the elastic conductive element 3 includes a copper spring or a copper alloy spring, meaning the elastic conductive element 3 is a metal spring made of copper or a copper alloy. Copper or copper alloys have good conductivity, ensuring that the current path between the insert 2 and the sleeve 1 has extremely low volume resistance and contact resistance, ensuring efficient and stable output of radio frequency energy. Furthermore, copper and copper alloys have high yield strength and excellent elastic recovery ability, ensuring that the elastic conductive element 3 can completely return to its original shape during insertion and removal, avoiding plastic deformation, thereby ensuring long-term stability of contact pressure and greatly improving the insertion and removal life and mechanical reliability of the connection device. The connection device generates a large amount of heat during operation. Copper and its alloys not only have good electrical conductivity but also excellent thermal conductivity. When current passes through the elastic conductive element 3 and generates Joule heat or heat due to contact resistance, the copper spring or copper alloy spring can quickly conduct and disperse the heat to the larger metal shell such as the sleeve 1, effectively reducing the local operating temperature of the contact point, preventing material degradation and performance failure due to overheating, and improving the overall operational safety of the device.

[0043] In some embodiments of this utility model, the thickness of the arc-shaped spring 31 is 0.3-1.3mm, which is beneficial to ensure the conduction of radio frequency energy. If the thickness of the arc-shaped spring 31 is too thick, it will increase the friction between the arc-shaped spring 31 and the inner wall of the sleeve body 11, thereby affecting insertion and removal and the conduction of radio frequency energy. If the thickness of the arc-shaped spring 31 is too thin, it is easily damaged and affects the service life.

[0044] In some embodiments of this utility model, reference is made to Figure 2 The elastic conductive element 3 is positioned close to the insertion end 23 of the insert 2. The insertion end 23 is the end that first enters the receiving cavity when the insert 2 is inserted into the sleeve 1, which is beneficial for improving the conduction of radio frequency energy.

[0045] In some embodiments of this utility model, reference is made to Figure 2 and Figure 3 The connection device for the semiconductor RF generator further includes an elastic clamp 4 and a movable retaining ring 5. The first groove 21 and the second groove 22 are annular grooves surrounding the outer wall of the insert 2. The first end 311 of the arc-shaped spring 31 is detachably disposed in the first groove 21 via the elastic clamp 4, and the second end 312 of the arc-shaped spring 31 is detachably disposed in the second groove 22 via the movable retaining ring 5. The first groove 21 and the second groove 22 are annular grooves surrounding the outer wall of the insert 2, making it simpler and more convenient to install the arc-shaped spring 31 via the elastic clamp 4 and the movable retaining ring 5. Moreover, the elastic conductive element 3 is detachably disposed in the annular groove via the elastic clamp 4 and the movable retaining ring 5, making the elastic conductive element 3 easy to install and replace. This allows for regular replacement of the elastic conductive element 3 to avoid surface oxidation or arcing that could affect RF energy transmission. It also avoids gaps caused by frequent insertion and removal of the insert 2 and the sleeve 1, which could lead to arcing and affect RF energy transmission.

[0046] In some embodiments of this utility model, reference is made to Figure 2 and Figure 3 The elastic clamp 4 is an annular structure with an opening 41. The inner diameter of the elastic clamp 4 is adapted to the outer diameter of the insert 2 at the first groove 21, which facilitates the installation or removal of the elastic clamp 4 in the first groove 21.

[0047] In some embodiments of this utility model, reference is made to Figure 3 The elastic conductive element 3 and the elastic clamp 4 are integrally formed, and the first ends 311 of at least two arc-shaped spring pieces 31 are evenly distributed along the circumference of the elastic clamp 4. This makes the connection between the arc-shaped spring pieces and the elastic clamp more secure, avoids damage caused by deformation of the arc-shaped spring pieces 31, and extends the service life of the elastic conductive element 3.

[0048] In some embodiments of this utility model, the thickness of the elastic clamp 4 is not greater than the radial depth of the first groove 21. Even when the elastic clamp 4 is installed in the first groove 21, the surface of the elastic clamp 4 away from the central axis of the insert 2 is not higher than the outer wall surface of the insert 2, so that the elastic clamp 4 will not protrude relative to the outer wall surface of the insert 2, thereby reducing friction and the risk of scratching the inner surface of the sleeve 1, and avoiding affecting the gap between the insert 2 and the sleeve 1.

[0049] In some embodiments of this utility model, reference is made to Figure 2 and Figure 4 The connection device for the semiconductor radio frequency generator further includes a slider 6, which includes a connecting part 61 and a sliding part 62. The connecting part 61 is connected and fixed to the second end 312 of the arc-shaped spring 31. The sliding part 62 is connected to the connecting part 61 and has a barbed structure. A gap is provided between the sliding part 62 and the connecting part 61 for the movable retaining ring 5 to pass through. The length of the sliding part 62 is greater than the length of the connecting part 61, so that while ensuring that the movable retaining ring 5 stably installs the slider 6 in the second groove 22, it does not affect the sliding of the slider 6. This ensures that the arc-shaped spring 31 can adapt to displacement by sliding during insertion and removal.

[0050] In some embodiments of this utility model, the working surfaces of the sliding part 62 and the connecting part 61 opposite each other are provided with a locking structure, and the working surfaces of the connecting part 61 and the sliding part 62 opposite each other are provided with a locking hole structure adapted to the locking structure. The movable retaining ring 5 is provided with a plurality of through holes through which the locking structure of each sliding member 6 passes, so that the movable retaining ring 5 and the sliding member 6 can be connected and fixed by passing the locking structure through the through holes and locking it in the locking hole structure. This prevents the movable retaining ring 5 from sliding out of the gap between the sliding part 62 and the connecting part 61, and also prevents the sliding member 6 from sliding circumferentially on the working end face of the movable retaining ring 5. This prevents the possibility of the elastic conductive member 3 rotating circumferentially relative to the insert member 2, making the contact pressure between the insert member 2 and the sleeve member 1 more stable and the contact resistance fluctuation smaller, which is beneficial to ensuring the stability and low loss of high frequency radio frequency energy transmission.

[0051] In some embodiments of this utility model, the working surface of the sliding part 62 opposite to the connecting part 61 is provided with a locking structure, and the working surface of the connecting part 61 opposite to the sliding part 62 is provided with a locking hole structure. In this case, the number of through holes circumferentially arranged on the movable retaining ring 5 is equal to the number of sliding members 6. Alternatively, to improve the connection's firmness, each sliding member 6 may have multiple locking structures on its sliding part 62, and multiple locking hole structures on its connecting part 61. The number and position of the through holes circumferentially arranged on the movable retaining ring 5 can be adapted to the number and position of the locking structures and the locking hole structures.

[0052] In some embodiments of this utility model, the latch structure is a boss or a pin, and the lock hole structure is a matching groove.

[0053] In some embodiments of this utility model, reference is made to Figure 2 The sum of the thickness of the movable retaining ring 5 and the thickness of the sliding member 6 is not greater than the radial depth of the second groove 22. Even when the movable retaining ring 5 fixes the sliding member 6 in the second groove 22, the surface of the connecting part 61 away from the central axis of the insert 2 is not higher than the outer wall surface of the insert 2, so that the connecting part 61 will not protrude relative to the outer wall surface of the insert 2, thereby reducing friction and the risk of scratching the inner surface of the sleeve 1, and avoiding affecting the gap between the insert 2 and the sleeve 1.

[0054] In some embodiments of this utility model, the elastic conductive element 3 and the sliding element 6 are integrally formed, which is structurally robust and helps to improve the service life of the elastic conductive element 3.

[0055] In some specific embodiments of this utility model, the two ends of the movable retaining ring 5 are connected by screws, buckles or other means to form a ring structure that fixes the sliding member 6. The structure is simple and easy to disassemble.

[0056] In some embodiments of this utility model, the groove wall of the second groove 22 is provided with a sliding groove that is equal in number and corresponds one-to-one with the number of sliding members 6. The sliding groove extends along the axial direction of the insert member 2, and the sliding member 6 is slidably disposed in the sliding groove.

[0057] In this embodiment, the sliding member 6 and the groove cooperate to form an anti-misalignment and guiding structure, increasing the guiding performance of the sliding member 6. During the insertion and removal of the plug member 2, it provides precise guidance for the axial extension and retraction of the elastic conductive member 3, which helps to make the sliding of the sliding member 6 more stable and avoids the problems of uneven buffering force or excessive local stress caused by skewness or jamming. This makes the buffering smoother and more effective, significantly improving the impact resistance and insertion / removal resistance. The sliding member 6 is confined within the axial groove, preventing the possibility of circumferential rotation of the elastic conductive member 3 relative to the plug member 2. This makes the contact pressure between the plug member 2 and the sleeve member 1 more stable and the contact resistance fluctuation smaller. This helps to ensure the stability and low loss of high-frequency radio frequency energy transmission, and ensures that the elastic conductive member 3 always remains in the correct functional position when subjected to multiple insertions and removals or complex external forces, without failing due to torsion or generating additional stress, thus improving the connection stability. The groove in the second groove 22 and the through hole in the movable retaining ring 5 provide dual positional constraints for the sliding member 6, further preventing the elastic conductive member 3 from rotating circumferentially relative to the insert member 2. Simultaneously, the multiple circumferentially distributed sliding members 6 work together to form a stable sliding mechanism, improving the structural rigidity and reliability of the connecting device during long-term use. Furthermore, by converting large-area sliding friction into friction on a limited "sliding member-groove" contact surface, it effectively reduces wear points and the total amount of wear.

[0058] In some embodiments of this utility model, the cross-sectional shape of the groove is adapted to the cross-sectional shape of the slider 6, and the width of the groove is slightly larger than the width of the slider 6, forming a sliding clearance fit, which helps to reduce the risk of abnormal noise or wear in a vibration environment.

[0059] In some embodiments of this utility model, the axial distance between the first groove 21 and the second groove 22 is less than half of the total axial length of the insert 2.

[0060] In this embodiment, the effective working length of the elastic conductive element 3 (i.e., the axial distance between the two grooves) is controlled to be less than half the total length of the insert 2. Essentially, this shortens the lever arm of the elastic system. Under the same insertion and extraction stroke, a shorter lever arm means that the arc-shaped spring 31 needs to generate a larger unit deformation rate, thus providing sufficient and concentrated contact pressure with a smaller overall deformation. This ensures that the arc-shaped spring 31 operates within its optimal elastic deformation range, avoiding both plastic deformation or fatigue fracture caused by an excessively long lever arm and excessive deformation, and insufficient contact pressure caused by an insufficient lever arm and insufficient deformation. Ultimately, this achieves the best balance between contact pressure and mechanical life. In radio frequency transmission, the stability of the current path directly affects the integrity of radio frequency energy. The shorter groove spacing makes the "anchoring" area of ​​multiple elastic conductive elements 3 on the insert 2 more concentrated, forming a stable, low-inductive parallel conductive area. This reduces the path differences that may occur when the current flows to each arc-shaped spring 31, helping to maintain a balanced current distribution and stable characteristic impedance, thereby reducing radio frequency energy attenuation.

[0061] In some embodiments of this utility model, the axial length of the groove along the insert 2 is less than half of the axial distance between the first groove 21 and the second groove 22.

[0062] In this embodiment, the axial length of the groove directly determines the maximum sliding displacement of the second end 312 of the elastic conductive element 3, thereby controlling the maximum allowable tensile deformation of the arc-shaped spring piece 31. By limiting the axial length of the groove along the insert 2 to within half of the distance between the two grooves, it is beneficial to ensure that the arc-shaped spring piece 31 will not undergo plastic deformation or breakage due to excessive stretching under extreme insertion and extraction or accidental force conditions, thus ensuring its elastic recovery capability and long-term stability of contact pressure, and improving the mechanical life and reliability of the connection device. In the initial stage of the insertion process, the second end 312 of the elastic conductive element 3 is located on the side of the groove near the insertion end 23. At this time, the arc-shaped spring piece 31 is in a natural or slightly stretched state. Since the groove is short, before the second end 312 starts to slide, the insert 2 needs to move a "no-load stroke" first, so that the arched part of the arc-shaped spring piece 31 can first contact the inner wall of the sleeve body 11 and begin preliminary guidance and centering. This "contact guidance first, then buffer sliding" timing design makes the insertion force increase gradually, avoids sudden changes in force, makes the insertion and removal feel smoother, and reduces the wear of the mating parts.

[0063] In some embodiments of this utility model, the axial distance between the first groove 21 and the second groove 22 is less than half of the total axial length of the insert 2, and the axial length of the groove along the insert 2 is less than half of the axial distance between the first groove 21 and the second groove 22. The "natural length" of the arc-shaped spring 31 is determined by controlling the distance between the two grooves, and the "working stroke" of the arc-shaped spring 31 is determined by controlling the length of the groove. The synergistic limitation of these two dimensional parameters enables the fine-tuning of the performance of the elastic system, such as contact pressure, insertion and extraction force, and buffer stroke, thereby achieving high predictability and controllability, which is beneficial to the consistency of quality and product reliability in large-scale production.

[0064] In some embodiments of this utility model, reference is made to Figure 1 The elastic guide portion 12 includes a plurality of elastic plates, one end of which is annularly disposed around the open end of the sleeve body 11. The elastic plates are inclined relative to the central axis of the sleeve body 11, and the end of the elastic plate away from the open end of the sleeve body 11 extends in a direction away from the central axis of the sleeve body 11. This design facilitates guidance during the insertion of the insert 2, reducing insertion force and alignment errors, improving insertion and removal convenience and alignment accuracy, and preventing damage caused by misalignment between the insert 2 and the sleeve 1. Furthermore, the elastic plate structure is simple and effective.

[0065] In some embodiments of this utility model, the structure composed of several elastic sheets is a frustum-shaped structure, i.e., a trumpet-shaped structure, i.e., the elastic guide part 12 as a whole is a frustum-shaped structure, i.e., a trumpet-shaped structure.

[0066] In some embodiments of this utility model, the elastic guide portion 12 and the sleeve body 11 are integrally formed structures.

[0067] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A connection device for a semiconductor radio frequency generator, characterized in that, It includes a sleeve, a post, and at least two flexible conductive elements; The sleeve includes a sleeve body and an elastic guide portion disposed at the open end of the sleeve body. The inner diameter of the elastic guide portion increases in a direction away from the sleeve body to guide the insertion of the insert. The insert is inserted into the receiving cavity of the sleeve body, and the outer wall of the insert is provided with a first groove and a second groove; At least two of the elastic conductive elements are arranged around at least a portion of the outer wall of the insert member. The elastic conductive element includes an arc-shaped spring extending along the axial direction of the insert member, and a first end and a second end respectively disposed at both ends of the arc-shaped spring. The arch of the arc-shaped spring protrudes away from the outer wall of the insert member. The first end is fixed to the first groove, and the second end is slidably disposed in the second groove along the axial direction of the insert member.

2. The connection device for a semiconductor radio frequency generator according to claim 1, characterized in that, The first groove is located on the side of the insert member close to the insertion end of the insert member, and the second groove is located on the side of the insert member away from the insertion end. The insertion end is the end of the insert member that first enters the receiving cavity when it is inserted into the sleeve member.

3. The connection device for a semiconductor radio frequency generator according to claim 1, characterized in that, The elastic guide portion includes a plurality of elastic sheets, one end of which is circumferentially disposed around the open end of the sleeve body. The elastic sheets are inclined relative to the central axis of the sleeve body, and one end of the elastic sheet away from the open end of the sleeve body extends in a direction away from the central axis of the sleeve body.

4. The connection device for a semiconductor radio frequency generator according to claim 1, characterized in that, It also includes an elastic clamp and a movable retaining ring. The first groove and the second groove are annular grooves that are arranged around the outer wall of the insert. The first end of the arc-shaped spring is detachably disposed in the first groove through the elastic clamp, and the second end of the arc-shaped spring is detachably disposed in the second groove through the movable retaining ring.

5. The connection device for a semiconductor radio frequency generator according to claim 4, characterized in that, The elastic clamp is a ring-shaped structure with an opening. The inner diameter of the elastic clamp is adapted to the outer diameter of the insert at the first groove. The elastic conductive element and the elastic clamp are integrally formed. The first ends of at least two arc-shaped spring pieces are evenly distributed along the circumference of the elastic clamp.

6. The connection device for a semiconductor radio frequency generator according to claim 4, characterized in that, It also includes a slider, which includes a connecting part and a sliding part. The connecting part is connected and fixed to the second end of the arc-shaped spring piece. The sliding part is connected to the connecting part and has a barbed structure. A gap is provided between the sliding part and the connecting part for the movable retaining ring to pass through. The length of the sliding part is greater than the length of the connecting part.

7. The connection device for a semiconductor radio frequency generator according to claim 6, characterized in that, The sliding part and the connecting part have a locking structure on their opposing surfaces. The connecting part and the sliding part have a locking hole structure that is adapted to the locking structure. The movable retaining ring has a plurality of through holes in its circumferential direction for the locking structure of each sliding part to pass through.

8. The connection device for a semiconductor radio frequency generator according to claim 6, characterized in that, The thickness of the elastic clamp is not greater than the radial depth of the first groove, and the sum of the thickness of the movable retaining ring and the thickness of the sliding member is not greater than the radial depth of the second groove.

9. The connection device for a semiconductor radio frequency generator according to claim 6, characterized in that, The second groove has a groove on its wall that is equal in number to and corresponds one-to-one with the number of sliding members. The groove extends along the axial direction of the insert member, and the sliding member is slidably disposed in the groove.

10. The connection device for a semiconductor radio frequency generator according to claim 1, characterized in that, At least two of the elastic conductive elements are circumferentially and evenly distributed around the outer wall of the insert member, and the elastic conductive elements are disposed near the insertion end of the insert member, the insertion end being the end that first enters the receiving cavity when the insert member is inserted into the sleeve member.

11. The connection device for a semiconductor radio frequency generator according to claim 9, characterized in that, The axial distance between the first groove and the second groove is less than half of the total axial length of the insert; And / or, the axial length of the groove along the insert is less than half of the axial distance between the first groove and the second groove; And / or, the thickness of the arc-shaped spring is 0.3-1.3 mm.

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