Ceramic heater

Abstract

The utility model discloses a kind of ceramic heaters, including first ceramic plate for panel, second ceramic plate for backplate, heating sheet embedded between the first ceramic plate and the second ceramic plate and fastening assembly;The fastening assembly includes fastener, locking piece and elastic piece, one end of the fastener is fixedly connected with the first ceramic plate, the other end is threaded and protrudes the second ceramic plate, the locking piece can cooperate the fastener and lock the elastic piece between the locking piece and the second ceramic plate, and the locking piece is set to pre-press the elastic piece and generate elastic potential energy, to resist the second ceramic plate and press.This ceramic heater of the utility model, the cooperation of locking piece and fastener can pre-press elastic piece, ensure the pre-tightening pressure between the first ceramic plate and the second ceramic plate, also give the first ceramic plate and the second ceramic plate certain free allowance for thermal expansion and contraction, ensure its normal use.

Description

Technical Field

[0001] This utility model belongs to the technical field of heating equipment, and specifically relates to a ceramic heater. Background Technology

[0002] A ceramic heater is an electric heating device that uses ceramic materials and can be used in many industries, including the semiconductor industry. Its core component is a heating resistor; when energized, the resistor heats up and distributes the heat evenly through the panel. It features rapid heating, high thermal efficiency, automatic temperature control, and safety and reliability. However, during prolonged operation, thermal expansion and contraction may cause deformation in the ceramic heater, affecting its normal use.

[0003] Therefore, it is necessary to provide a ceramic heater to address the aforementioned technical problems. Utility Model Content

[0004] The purpose of this invention is to provide a ceramic heater that can solve the problem that thermal expansion and contraction may cause deformation of the ceramic heater, affecting its normal use.

[0005] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0006] A ceramic heater includes a first ceramic plate for a front panel, a second ceramic plate for a back panel, a heating element embedded between the first ceramic plate and the second ceramic plate, and a fastening assembly.

[0007] The fastening assembly includes a fastener, a locking member, and an elastic member. One end of the fastener is fixedly connected to the first ceramic plate, and the other end passes through and extends out of the second ceramic plate. The locking member can cooperate with the fastener to lock the elastic member between the locking member and the second ceramic plate. The locking member is configured to pre-compress the elastic member to generate elastic potential energy to press against the second ceramic plate.

[0008] In one or more embodiments of the present invention, the locking member includes a baffle plate, which is disposed in conjunction with the fastener and located on the side of the second ceramic plate away from the first ceramic plate, and the elastic member can be pre-pressed between the baffle plate and the second ceramic plate.

[0009] In one or more embodiments of the present invention, the fastener includes a screw with one end fixed to the first ceramic plate and a nut disposed on the screw, the screw passing through and extending out of the second ceramic plate, and the nut preventing the locking member from disengaging from the screw.

[0010] In one or more embodiments of the present invention, the fastening assembly further includes a spacer sleeve, which is sleeved on the outer periphery of the fastener, with both ends of the spacer sleeve abutting against the locking member and the second ceramic plate, respectively, and the length of the spacer sleeve is set to limit the maximum deformation of the elastic member.

[0011] In one or more embodiments of this utility model, the elastic element is configured as a ceramic spring sleeved outside the spacer, with both ends of the ceramic spring abutting against the second ceramic plate and the locking element, respectively.

[0012] In one or more embodiments of the present invention, multiple sets of fastening components are provided, and the vertical projections of the multiple fastening components on the side of the second ceramic plate away from the first ceramic plate are evenly arranged.

[0013] In one or more embodiments of the present invention, the first ceramic plate and the second ceramic plate are configured as circular plates, and the plurality of fastening components are arranged in a ring relative to the center of the circular plate.

[0014] In one or more embodiments of the present invention, the ceramic heater further includes a high-temperature resistant mounting base disposed on the second ceramic plate and a thermocouple connected to the mounting base.

[0015] In one or more embodiments of the present invention, the ceramic heater further includes a high-temperature resistant terminal disposed on the second ceramic plate and a lead wire connected to the high-temperature resistant terminal.

[0016] In one or more embodiments of this utility model, the first ceramic plate and the second ceramic plate are provided with ventilation holes.

[0017] Compared with the prior art, the ceramic heater of this utility model generates heat in use, and the heat can be conducted to the corresponding device through the first ceramic plate. The locking element and fastener work together to pre-compress the elastic element, ensuring the pre-tightening pressure between the first and second ceramic plates, while also providing a certain amount of free space for thermal expansion and contraction, ensuring normal operation. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of the structure of a ceramic heater in one embodiment of the present invention;

[0020] Figure 2 This is a cross-sectional schematic diagram of a ceramic heater in one embodiment of the present invention;

[0021] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0022] Figure 4 This is a top view of a ceramic heater in one embodiment of the present invention.

[0023] Explanation of key figure labels:

[0024] 1. First ceramic plate; 2. Second ceramic plate; 3. Heating element; 4. Fastening assembly; 41. Fastener; 411. Screw; 412. Nut; 42. Locking element; 43. Elastic element; 44. Spacer; 5. Mounting base; 6. Thermocouple; 7. Terminal; 8. Lead wire. Detailed Implementation

[0025] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0026] Reference Figure 1 and Figure 2 In one embodiment of this utility model, the ceramic heater includes a first ceramic plate 1 for the front panel, a second ceramic plate 2 for the back panel, a heating element 3 embedded between the first ceramic plate 1 and the second ceramic plate 2, and a fastening assembly 4. This embodiment of the ceramic heater is illustrated exemplarily using its application in the semiconductor field; however, it can also be applied to other fields in other embodiments. During operation, heat is generated through the heating element 3 and conducted to the semiconductor device through the first ceramic plate 1.

[0027] In this embodiment, the first ceramic plate 1 and the second ceramic plate 2 can be made of aluminum nitride ceramic plates. The heating element 3 can be printed onto either side of the first ceramic plate 1 and the second ceramic plate 2 that are close to each other. Aluminum nitride ceramic material has excellent thermal conductivity, ensuring good temperature stability and uniformity of the panel. The use of aluminum nitride ceramic material also ensures the cleanliness of the panel during heating.

[0028] Reference Figure 2 and Figure 3The fastening assembly 4 includes a fastener 41, a locking element 42, and an elastic element 43. One end of the fastener 41 is fixedly connected to the first ceramic plate 1, and the other end passes through and extends out of the second ceramic plate 2. The locking element 42 cooperates with the fastener 41 to lock the elastic element 43 between the locking element 42 and the second ceramic plate 2. The locking element 42 is configured to pre-compress the elastic element 43 to generate elastic potential energy to press against the second ceramic plate 2. During assembly, the locking element 42 and the fastener 41, in conjunction with the pre-compressed elastic element 43, generate pre-tightening pressure, thereby ensuring effective fixation between the first ceramic plate 1, the heating element 3, and the second ceramic plate 2. During use, due to large temperature variations, the elastic element 43 can have a certain free margin to accommodate the deformation of the ceramic heater due to thermal expansion and contraction, thus effectively ensuring the normal operation of the ceramic heater.

[0029] Reference Figure 2 and Figure 3 The fastener 41 includes a screw 411 fixed at one end to the first ceramic plate 1 and a nut 412 disposed on the screw 411. The screw 411 passes through and extends out of the second ceramic plate 2, and the nut can prevent the locking member 42 from disengaging from the screw 411. The locking member 42 includes a baffle plate, which is fitted onto the fastener 41 and located on the side of the second ceramic plate 2 away from the first ceramic plate 1. The elastic member 43 can be pre-pressed between the baffle plate and the second ceramic plate 2. Therefore, the nut can limit the baffle plate, and the elastic deformation of the elastic member 43 can be controlled by setting the distance between the baffle plate and the second ceramic plate 2 to pre-press the second ceramic plate 2. In this embodiment, the fastener 41 can be made of a high-temperature resistant material to prevent the first ceramic plate 1 and the second ceramic plate 2 from cracking due to thermal expansion.

[0030] Reference Figure 2 and Figure 3 The fastening assembly 4 also includes a spacer 44, which is fitted around the outer periphery of the fastener 41. Both ends of the spacer 44 abut against the locking member 42 and the second ceramic plate 2, respectively. The length of the spacer 44 is set to limit the maximum deformation of the elastic member 43. The elastic member 43 is a ceramic spring fitted around the spacer 44, with both ends abutting against the second ceramic plate 2 and the locking member 42, respectively. The spacer 44 not only limits the maximum deformation of the ceramic spring but also provides a limiting position for it.

[0031] Reference Figure 4Multiple sets of fastening components 4 are provided, and the multiple fastening components 4 are evenly arranged on the vertical projection of the second ceramic plate 2 away from the first ceramic plate 1. In this embodiment, the first ceramic plate 1 and the second ceramic plate 2 are set as circular plates, and the multiple sets of fastening components 4 are arranged in a ring relative to the center of the circular plate. In this embodiment, six sets of fastening components 4 are provided as an example to illustrate the quantity. In other embodiments, the quantity can also be three, four, five, seven or even more sets. This application does not impose a specific limitation on this quantity.

[0032] Reference Figure 4 The ceramic heater also includes a high-temperature resistant mounting base 5 disposed on the second ceramic plate 2 and a thermocouple 6 connected to the mounting base 5. The thermocouple 6 can be used to detect and provide feedback on the temperature of the ceramic heater, so as to facilitate temperature control and adjustment.

[0033] Reference Figure 4 The ceramic heater also includes a high-temperature resistant terminal 7 disposed on the second ceramic plate 2 and a lead wire 8 connected to the high-temperature resistant terminal 7. The lead wire 8 is the lead wire 8 of the heating element 3, used for energizing and heating the heating element 3.

[0034] Reference Figure 1 In one optional embodiment, the first ceramic plate 1 and the second ceramic plate 2 are provided with ventilation holes, which can be used to introduce gas or for vacuum adsorption according to actual needs. Furthermore, the ceramic heater of this application can also be used in combination with a silicon carbide chuck. The ceramic heater and the silicon carbide chuck are in contact for heat transfer, and the silicon carbide chuck then contacts and heats a semiconductor device (such as a wafer), which can further improve temperature uniformity.

[0035] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0036] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A ceramic heater, characterized in that, It includes a first ceramic plate (1) for the front panel, a second ceramic plate (2) for the back panel, a heating element (3) embedded between the first ceramic plate (1) and the second ceramic plate (2), and a fastening assembly (4). The fastening assembly (4) includes a fastener (41), a locking member (42), and an elastic member (43). One end of the fastener (41) is fixedly connected to the first ceramic plate (1), and the other end passes through and extends out of the second ceramic plate (2). The locking member (42) can cooperate with the fastener (41) to lock the elastic member (43) between the locking member (42) and the second ceramic plate (2). The locking member (42) is configured to pre-compress the elastic member (43) to generate elastic potential energy to press against the second ceramic plate (2).

2. The ceramic heater according to claim 1, characterized in that, The locking member (42) includes a baffle plate that is fitted to the fastener (41) and located on the side of the second ceramic plate (2) away from the first ceramic plate (1). The elastic member (43) can be pre-pressed between the baffle plate and the second ceramic plate (2).

3. The ceramic heater according to claim 1, characterized in that, The fastener (41) includes a screw (411) fixed at one end to the first ceramic plate (1) and a nut (412) disposed on the screw (411). The screw (411) passes through and extends out of the second ceramic plate (2), and the nut can restrict the locking member (42) from disengaging from the screw (411).

4. The ceramic heater according to claim 1, characterized in that, The fastening assembly (4) further includes a spacer (44), which is fitted around the outer periphery of the fastener (41). The two ends of the spacer (44) abut against the locking member (42) and the second ceramic plate (2) respectively. The length of the spacer (44) is set to limit the maximum deformation of the elastic member (43).

5. The ceramic heater according to claim 4, characterized in that, The elastic element (43) is configured as a ceramic spring sleeved outside the spacer (44), with the two ends of the ceramic spring abutting against the second ceramic plate (2) and the locking element (42) respectively.

6. The ceramic heater according to claim 1, characterized in that, The fastening components (4) are provided in multiple sets, and the multiple fastening components (4) are evenly arranged on the vertical projection of the second ceramic plate (2) away from the first ceramic plate (1).

7. The ceramic heater according to claim 6, characterized in that, The first ceramic plate (1) and the second ceramic plate (2) are configured as circular plates, and multiple sets of the fastening components (4) are arranged in a ring relative to the center of the circular plates.

8. The ceramic heater according to claim 1, characterized in that, The ceramic heater also includes a high-temperature resistant mounting base (5) disposed on the second ceramic plate (2) and a thermocouple (6) connected to the mounting base (5).

9. The ceramic heater according to claim 1, characterized in that, The ceramic heater also includes a high-temperature resistant terminal (7) disposed on the second ceramic plate (2) and a lead wire (8) connected to the high-temperature resistant terminal (7).

10. The ceramic heater according to claim 1, characterized in that, Ventilation holes are provided on the first ceramic plate (1) and the second ceramic plate (2).

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