A mounting device

Abstract

The utility model relates to the technical field of semiconductor process equipment assembly, and specifically discloses an installation device, in the installation device, the first mounting piece has a plurality of through -holes, and the plurality of through -holes are used to one -to -one correspondingly insert the first end of a plurality of electrode assemblies to limit the second end of a plurality of electrode assemblies is located in the pre -fixed region, and the adjustment gap between at least one through -hole and the first end of corresponding electrode assembly has to adjust the position of the second end of at least one electrode assembly in the pre -fixed region corresponds to the first mounting hole of heating piece, and the second mounting piece includes the first ring piece, and the first ring piece is equipped with a plurality of first limit holes, and the first limit hole is used to cooperate the second end of the electrode assembly at least partially located in the pre -fixed region to limit the relative position of the second end of at least partial electrode assembly corresponds to the second mounting hole of heating piece. The above-mentioned setting makes the installation position of heating piece accurate, guarantees the heating quality to semiconductor product, improves installation efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process equipment assembly technology, and in particular to an installation device. Background Technology

[0002] The heating components in the process chambers of semiconductor process equipment are set at very high temperatures. When performing heat treatment processes such as oxidation or annealing, the temperature requirement is 1500℃-2000℃. Since semiconductor process equipment is in a high-temperature state for a long time, in order to ensure the quality of semiconductor products, it is necessary to regularly maintain or replace the heating components.

[0003] Currently, the disassembly and assembly of heating components are primarily done manually. Each heating component group consists of multiple electrode assemblies and one heating element. The operator first installs a fixing flange onto the cavity of the process chamber, then installs the multiple electrode assemblies onto the fixing flange, and finally installs the corresponding heating element onto the multiple electrode assemblies. The same process is repeated for other heating elements. The installation process requires repeated adjustments to the positions of the heating element and multiple electrode assemblies, which is time-consuming and inefficient. Furthermore, there is a risk of misalignment between the heating element and the multiple electrode assemblies, leading to deviations and even deformation or breakage of the heating element. Finally, inaccurate installation of the multiple heating elements will affect the heating power and the temperature uniformity within the process chamber, thereby impacting the quality of the semiconductor products.

[0004] Therefore, it is urgent to study an installation device to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide an installation device to solve the problems of low installation efficiency, easy deformation or breakage, and impact on the quality of semiconductor products in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An installation device is provided for positioning electrode assemblies of a semiconductor process apparatus to align with a heating element of the semiconductor process apparatus. The device includes a first mounting member having a plurality of through holes for correspondingly inserting first ends of a plurality of electrode assemblies into a pre-fixed region, wherein at least one through hole and a corresponding first end of the electrode assembly have an adjustment gap to adjust the position of the second end of at least one electrode assembly within the pre-fixed region to correspond to a first mounting hole of the heating element. A second mounting member includes a first ring having a plurality of first limiting holes for engaging at least a portion of the second ends of the electrode assemblies located within the pre-fixed region, thereby limiting the relative position of the at least a portion of the second ends of the electrode assemblies to correspond to a second mounting hole of the heating element.

[0008] As an optional technical solution for the installation device, the second mounting member further includes a second ring member coaxially connected to the first ring member. At least a portion of the inner diameter of the second ring member is larger than the outer diameter of the second heating element. A first bearing member is provided on the inner side of the second ring member, and the first bearing member is configured to bear the second heating element placed inside the second ring member.

[0009] As an optional technical solution for the installation device, the first bearing member is a boss extending along the inner sidewall of the second ring member towards the center of the second ring member; and / or,

[0010] The first carrier has a plurality of components, which are arranged at intervals around the axis of the second ring component.

[0011] As an optional technical solution for the installation device, the axial dimension of the second ring is smaller than that of the second heating element. The second installation element also includes a third ring and a first support. The third ring and the second ring are arranged at intervals along the axial direction of the second heating element. The first support is disposed between the second ring and the third ring and is located on the outer periphery of the second heating element. The third ring is configured to be sleeved on the end of the second heating element away from the second ring to radially constrain the second heating element.

[0012] As an optional technical solution for the installation device, the second mounting component further includes an auxiliary component, which is detachably connected to the interior of the second mounting component, such that the outer side wall of the auxiliary component and the inner side wall of the third ring component form an annular cavity for accommodating the second heating element.

[0013] As an optional technical solution for the installation device, the auxiliary component includes:

[0014] A fourth ring and a fifth ring are coaxially connected; the outer diameter of the fourth ring is smaller than the outer diameter of the fifth ring, and the first bearing member supports the fifth ring.

[0015] The second support member has one end connected to the fifth ring member;

[0016] The sixth ring is arranged along the axial direction of the second heating element, and the sixth ring is spaced apart from the fifth ring. The other end of the second support is connected to the sixth ring.

[0017] As an optional technical solution for the installation device, a limiting member is provided on the outer side of the fourth ring member, and the first bearing member is sandwiched between the fifth ring member and the limiting member.

[0018] As an optional technical solution for the installation device, the electrode assembly further includes a third electrode assembly, and the heating element further includes a third heating element. The third electrode assembly includes a third graphite electrode and a graphite connecting plate connected between the third heating element and the third graphite electrode.

[0019] The mounting device includes a third mounting member, which includes a seventh ring member. The seventh ring member has a second limiting hole extending radially through it. The second limiting hole is used to engage with the second mating hole of the third graphite electrode to limit the relative position of the third graphite electrode to correspond to the first connecting hole of the graphite connecting plate.

[0020] As an optional technical solution for the installation device, the third mounting member further includes an eighth ring member coaxially connected to the seventh ring member. The outer diameter of the eighth ring member is smaller than that of the seventh ring member. The eighth ring member has a third limiting hole extending radially through it. The third limiting hole is used to cooperate with the second connecting hole of the graphite connecting plate to limit the relative position of the graphite connecting plate to correspond to the third mounting hole of the third heating element; and / or,

[0021] The inner wall of the seventh ring is provided with a second support member for supporting the third heating element.

[0022] As an optional technical solution for the installation device, the seventh ring is provided with a clearance opening, which is configured to avoid the portion of the graphite connecting plate where the second connecting hole is located.

[0023] This utility model has at least the following beneficial effects:

[0024] This utility model provides an installation device for positioning electrode assemblies of a semiconductor process equipment to align with a heating element of the semiconductor process equipment. The installation device includes a first mounting member and a second mounting member. The first mounting member has a plurality of through holes for inserting the first ends of a plurality of electrode assemblies one-to-one, thereby limiting the second ends of the plurality of electrode assemblies to be located in a pre-fixed area. An adjustment gap is provided between at least one through hole and the corresponding first end of the electrode assembly to adjust the position of the second end of at least one electrode assembly in the pre-fixed area to correspond to the first mounting hole of the heating element. The second mounting member includes a first ring member with a plurality of first limiting holes for engaging the second ends of at least a portion of the electrode assemblies located in the pre-fixed area, thereby limiting the relative position of the second ends of at least a portion of the electrode assemblies to correspond to the second mounting hole of the heating element.

[0025] The precise installation of the heating element is achieved through the use of the first and second mounting components. The first mounting component determines the approximate position of the first end of several electrode assemblies, thereby determining the approximate position of the second end of the electrode assemblies. This ensures the installation accuracy of the first heating element within the heating element. The second mounting component, through the first ring component, limits the position of the second end, ensuring the installation accuracy of the second heating element when it is installed to the second end of the electrode assembly. This avoids the risk of deformation or breakage of either the first or second heating element, guarantees heating power, and ensures temperature uniformity within the process chamber, thus guaranteeing the heating quality of the semiconductor product. Furthermore, it avoids repeated adjustments and improves installation efficiency. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram showing the cooperation between the first and second mounting components and the electrode assembly in an embodiment of this utility model;

[0028] Figure 2 This is a schematic diagram of the structure of the second electrode assembly in an embodiment of this utility model;

[0029] Figure 3 This is a cross-sectional structural diagram of the second electrode assembly in an embodiment of the present invention;

[0030] Figure 4 This is a schematic diagram of the assembly structure of the first heating element in an embodiment of this utility model;

[0031] Figure 5 This is a schematic diagram of the structure of the first ring and the second ring in the second mounting component in this embodiment of the present utility model;

[0032] Figure 6 This is a schematic diagram showing the cooperation between the first ring and the second graphite electrode in an embodiment of this utility model;

[0033] Figure 7 This is a schematic diagram of the connection structure between the second ring and the third ring in an embodiment of this utility model;

[0034] Figure 8 This is a schematic diagram of the auxiliary component in an embodiment of the present utility model;

[0035] Figure 9 This is a schematic diagram illustrating the cooperation between the second heating element and the second mounting element in an embodiment of this utility model;

[0036] Figure 10 This is a schematic diagram showing the cooperation between the second heating element and the second graphite electrode in an embodiment of this utility model;

[0037] Figure 11 This is a schematic diagram of the structure of the third mounting component in an embodiment of this utility model;

[0038] Figure 12 This is a schematic diagram showing the cooperation between the seventh ring and the third graphite electrode in an embodiment of this utility model;

[0039] Figure 13 This is a schematic diagram showing the cooperation between the eighth ring and the graphite connecting plate in an embodiment of this utility model;

[0040] Figure 14 This is a schematic diagram showing the cooperation between the third heating element and the graphite connecting plate in an embodiment of this utility model;

[0041] Figure 15 This is a schematic diagram of the assembly of the first heating element, the second heating element, and the third heating element in an embodiment of this utility model.

[0042] In the picture:

[0043] 1000, First Flange;

[0044] 1100, First electrode assembly; 1110, First graphite electrode;

[0045] 1200, Second electrode assembly; 1210, Second copper electrode; 1211, Second flange; 1212, Fixing hole; 1220, Second cooling sleeve; 1221, Third flange; 1222, Fixing screw hole; 1230, Second molybdenum electrode; 1240, Second graphite electrode; 1241, First sub-fixing block; 1242, First mating hole; 1243, Second sub-fixing block; 1244, First locking hole; 1245, Limiting groove; 1246, Stress relief groove;

[0046] 1300, Third electrode assembly; 1310, Third copper electrode; 1320, Third cooling sleeve; 1330, Third molybdenum electrode; 1340, Third graphite electrode; 1341, Second mating hole; 1350, Graphite connecting plate; 1351, First connecting hole; 1352, Second connecting hole;

[0047] 2100, First heating element; 2200, Second heating element; 2210, Second mounting hole; 2300, Third heating element; 2310, Third mounting hole;

[0048] 100. First mounting component; 110. Through hole;

[0049] 200. Second mounting component; 210. First ring component; 211. First limiting hole; 220. Second ring component; 221. First bearing component; 230. Third ring component; 240. First support component; 250. Auxiliary component; 251. Fourth ring component; 252. Fifth ring component; 253. Second support component; 254. Sixth ring component; 255. Limiting component;

[0050] 300. Third mounting component; 310. Seventh ring component; 311. Second limiting hole; 312. Second bearing component; 313. Clearance opening; 320. Eighth ring component; 321. Third limiting hole. Detailed Implementation

[0051] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0052] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0053] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0054] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0055] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​that do not use relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0056] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0057] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0058] like Figures 1 to 15 As shown, this embodiment provides a mounting device for positioning electrode assemblies of a semiconductor process apparatus to align with a heating element of the semiconductor process apparatus. The mounting device includes a first mounting member 100 and a second mounting member 200. The first mounting member 100 has a plurality of through holes 110, which are used to insert the first ends of a plurality of electrode assemblies one-to-one to restrict the second ends of the plurality of electrode assemblies to be located in a pre-fixed region. An adjustment gap is provided between at least one through hole 110 and the corresponding first end of the electrode assembly to adjust the position of the second end of at least one electrode assembly in the pre-fixed region to correspond to the first mounting hole of the heating element. The second mounting member 200 includes a first ring member 210, which has a plurality of first limiting holes 211. The first limiting holes 211 are used to engage with the second ends of the electrode assemblies that are at least partially located in the pre-fixed region to restrict the relative position of the second ends of at least some of the electrode assemblies to correspond to the second mounting hole 2210 of the heating element.

[0059] The pre-fixed area refers to the area where the second end is locked within a preset small range after the position of the first end is restricted, so as to facilitate docking with the first ring 210.

[0060] The precise installation of the heating element is achieved through the arrangement of the first mounting component 100 and the second mounting component 200. The first mounting component 100 determines the approximate position of the first end of several electrode assemblies, thereby determining the approximate position of the second end of the electrode assemblies. This ensures the installation accuracy of the first heating element 2100 within the heating element. The second mounting component 200, through the first ring component 210, limits the position of the second end, ensuring the installation accuracy of the second heating element 2200 when it is installed to the second end of the electrode assembly. This avoids the risk of deformation or breakage of either the first heating element 2100 or the second heating element 2200, ensuring heating power and thus guaranteeing temperature uniformity within the process chamber, ensuring the heating quality of the semiconductor product. Furthermore, it avoids repeated adjustments and improves installation efficiency.

[0061] Specifically, the semiconductor process equipment includes a cavity, a first flange 1000 disposed in the cavity, a plurality of electrode assemblies connected to the first flange 1000, and a plurality of heating elements connected to the plurality of electrode assemblies.

[0062] The electrode assembly includes a copper electrode, a molybdenum electrode, a graphite electrode, and a cooling sleeve. The copper electrode is used to connect to an external power source, the molybdenum electrode connects between the copper and graphite electrodes, and the cooling sleeve is used to cool each electrode; it requires the circulation of cold air or cold water during use. The copper electrode forms the first end of the electrode assembly, and the graphite electrode forms the second end. [The text then abruptly shifts to a seemingly unrelated topic:] ...combining... Figure 1 , Figure 2 and Figure 15 As shown, a molybdenum electrode is inserted into a cooling sleeve, and a graphite electrode is located on the lower side of the cooling sleeve. The bottom end of the cooling sleeve is fixedly connected to a first flange 1000, and a copper electrode is located on the top of the cooling sleeve. A second flange 1211 is provided on the outer periphery of the copper electrode, and the second flange 1211 has a fixing hole 1212. A third flange 1221 is provided on the outer periphery of the cooling sleeve, and the third flange 1221 has a fixing screw hole 1222. The radial dimension of the fixing hole 1212 is larger than the dimension of the fixing screw hole 1222. A bolt with a nut passes through the fixing hole 1212 and is tightened to fix it in the fixing screw hole 1222, thereby pressing and fixing the copper electrode and the cooling sleeve. The nut of the bolt is located outside the fixing hole 1212. However, before the bolt is tightened, the position of the copper electrode on the top of the cooling sleeve can be slightly adjusted (rotated by a small angle). After the slight adjustment, it will not affect the bolt passing through the fixing hole 1212 and the fixing screw hole 1222 to tighten and fix the two.

[0063] The electrode assembly includes a first electrode assembly 1100 and a second electrode assembly 1200. The heating element includes a first heating element 2100 and a second heating element 2200, wherein the first heating element 2100 cooperates with two first electrode assemblies 1100, and the second heating element 2200 cooperates with three second electrode assemblies 1200. The electrode assembly also includes a third electrode assembly 1300, and the heating element also includes a third heating element 2300, which cooperates with three third electrode assemblies 1300.

[0064] Specifically, for ease of understanding and description, the first electrode assembly 1100 includes a first copper electrode, a first cooling sleeve, a first molybdenum electrode, and a first graphite electrode 1110; the second electrode assembly 1200 includes a second copper electrode 1210, a second cooling sleeve 1220, a second molybdenum electrode 1230, and a second graphite electrode 1240; the third electrode assembly 1300 includes a third copper electrode 1310, a third cooling sleeve 1320, a third molybdenum electrode 1330, a third graphite electrode 1340, and a graphite connecting plate 1350. The connection method of each electrode is described in reference [reference needed]. Figure 2 and Figure 3The connection method of the second electrode assembly 1200 is as follows: the second copper electrode 1210 is used to connect to an external power source; the second molybdenum electrode 1230 is connected between the second copper electrode 1210 and the second graphite electrode 1240; and the second cooling sleeve 1220 is used to cool the second molybdenum electrode 1230, requiring the introduction of cold air or cold water during use. The second molybdenum electrode 1230 passes through the second cooling sleeve 1220, the second graphite electrode 1240 is located on the lower side of the second cooling sleeve 1220, and the second copper electrode 1210 is located at the top of the second cooling sleeve 1220. A second flange 1211 is provided on the outer periphery of the second copper electrode 1210, and the second flange 1211 has a fixing hole 1212. A third flange 1221 is provided on the outer periphery of the second cooling sleeve 1220, and the third flange 1221 has a fixing screw hole 1222. The fixing hole 1212 has a large radial dimension. Based on the dimensions of the fixing screw hole 1222, a bolt with a nut passes through the fixing hole 1212 and is tightened into the fixing screw hole 1222, thereby pressing and fixing the second copper electrode 1210 and the second cooling sleeve 1220. The bolt nut is located outside the fixing hole 1212, but before tightening the bolt, the position of the second copper electrode 1210 on the top of the second cooling sleeve 1220 can be slightly adjusted (rotated by a small angle). This slight adjustment does not affect the bolt's ability to pass through the fixing hole 1212 and tighten into the fixing screw hole 1222. Figure 1 As shown, the bottom end of the second cooling sleeve 1220 is fixedly connected to the first flange 1000, wherein, referring to Figure 2 The second copper electrode 1210, the first copper electrode, and the third copper electrode 1310 are all provided with a second flange 1211 on their outer periphery, as shown in the reference. Figure 2 The second cooling sleeve 1220, the first cooling sleeve and the third cooling sleeve 1320 are all provided with a third flange 1221 on their outer periphery.

[0065] Regarding the assembly of the first heating element 2100, combined with Figure 4 As shown, the first heating element 2100 has a first mounting hole, through which the first graphite electrode 1110 passes, and the nut is screwed into the threaded section at the end of the first graphite electrode 1110.

[0066] Regarding the assembly of the second heating element 2200, in combination Figures 5 to 10As shown, the second heating element 2200 is a cylindrical structure with three sets of second mounting holes 2210 at the upper end. Each set has three second mounting holes 2210. Each second graphite electrode 1240 has a first sub-fixing block 1241 and a second sub-fixing block 1243 at its end. The three first mating holes 1242 on the first sub-fixing block 1241 are arranged at intervals, and the three first locking holes 1244 on the second sub-fixing block 1243 are arranged at intervals. The three first mating holes 1242 and the three first locking holes 1244 correspond one-to-one. A connecting limiting groove 1245 and a stress relief groove 1246 are formed between the first sub-fixing block 1241 and the second sub-fixing block 1243. The radial dimension of the stress relief groove 1246 is smaller than the radial dimension of the limiting groove 1245. The first mating hole 1242 is a countersunk hole, the first locking hole 1244 is a threaded hole, the second heating element 2200 is inserted into the limiting groove 1245, the first screw passes through the first mating hole 1242 and the second mounting hole 2210 and is screwed into the first locking hole 1244, and the stress relief groove 1246 can prevent excessive stress from damaging the second graphite electrode 1240 and the graphite second heating element 2200 when tightening.

[0067] Regarding the assembly of the third heating element 2300, combined with Figures 11 to 14 As shown, the third heating element 2300 has a cylindrical structure and three sets of third mounting holes 2310 at the upper end. Each set has two third mounting holes 2310. The lower end of each third graphite electrode 1340 is connected to a graphite connecting plate 1350 by a second screw. The third mounting hole 2310 is a threaded hole, and the graphite connecting plate 1350 is provided with a countersunk hole. The third screw passes through the countersunk hole of the graphite connecting plate 1350 and is screwed into the threaded hole of the third heating element 2300.

[0068] To facilitate understanding, the installation process of each heating element will be described in detail below with reference to the specific structure of each mounting component. To improve the installation efficiency of the first heating element 2100 and the second heating element 2200, in some embodiments, [the following is a detailed description of the installation process of each heating element]. Figure 1 , Figure 4 and Figure 5As shown, the mounting device includes a first mounting member 100 and a second mounting member 200. The first mounting member 100 has a plurality of through holes 110, each of which corresponds to a copper electrode in a plurality of electrode assemblies. An adjustment gap is provided between the sidewall of the through hole 110 and the outer sidewall of the corresponding copper electrode. The first mounting member 100 is configured such that when the plurality of copper electrodes pass through the plurality of through holes 110, the first graphite electrode 1110 in the first electrode assembly 1100 can pass through the first mounting hole of the first heating element 2100. In other words, a number of through holes 110 correspond one-to-one with two first copper electrodes, three second copper electrodes 1210, and three third copper electrodes 1310, and there is an adjustment gap between the sidewall of the through hole 110 and the outer sidewall of the corresponding copper electrode. When the two first copper electrodes, three second copper electrodes 1210, and three third copper electrodes 1310 are all inserted through the corresponding through holes 110, the position of the first graphite electrode 1110 connected to the first copper electrode by the first molybdenum electrode is roughly determined, and the first graphite electrode 1110 can be inserted into the first mounting hole of the first heating element 2100. The first mounting hole extends along the axial direction of the first graphite electrode 1110.

[0069] The second mounting member 200 includes a first ring member 210, which has a first limiting hole 211. The first ring member 210 is configured to pass through the limiting groove 1245 of the second graphite electrode 1240 in the second electrode assembly 1200, and the first limiting hole 211 is configured to replace the second mounting hole 2210 of the second heating member 2200, and is directly opposite to the first mating hole 1242 of the second graphite electrode 1240 in the second electrode assembly 1200 when the second graphite electrode 1240 is rotated to the first mounting angle. Figure 6 The second mounting hole 2210 extends along a direction perpendicular to the axis of the second graphite electrode 1240.

[0070] It should be noted that, in order to facilitate the rotation of the copper electrode and ensure the accuracy of the copper electrode, the sidewall of the through hole 110 and the corresponding outer sidewall of the copper electrode have an adjustment gap of less than or equal to 1 mm.

[0071] The placement of the first mounting component 100 and the second mounting component 200 ensures precise positioning of the first heating element 2100 and the second heating element 2200. The first mounting component 100 determines the approximate positions of several copper electrodes, particularly the approximate position of the first graphite electrode 1110, thus guaranteeing the installation accuracy of the first heating element 2100. The second mounting component 200, through the first ring component 210, limits the angle of the second graphite electrode 1240, thereby ensuring the precise positioning of the second heating element 2200 during installation. When the second graphite electrode 1240 is in place, the second heating element 2200 can be inserted into the limiting groove 1245 of the second graphite electrode 1240, and the second mounting hole 2210 and the first mating hole 1242 are precisely matched, which can ensure the installation accuracy of the second heating element 2200, avoid the risk of deformation or breakage of the first heating element 2100 or the second heating element 2200, ensure the heating power, thereby ensuring the uniformity of heating temperature in the process chamber and ensuring the heating quality of semiconductor products; in addition, it avoids repeated debugging and improves installation efficiency.

[0072] In some embodiments, combined with Figure 5 and Figure 9 As shown, the second mounting component 200 also includes a second ring component 220 coaxially connected to the first ring component 210. At least a portion of the inner diameter of the second ring component 220 is larger than the outer diameter of the second heating element 2200. A first support component 221 is provided on the inner side of the second ring component 220, and the first support component 221 is configured to support the second heating element 2200 placed inside the second ring component 220. During installation, the second heating element 2200 is placed in the second ring component 220 and supported by the first support component 221, reducing debugging time and improving the installation efficiency of the second heating element 2200.

[0073] Specifically, the first support member 221 is a boss formed by extending along the inner sidewall of the second ring member 220 towards the center of the second ring member 220. There are several first support members 221, and the several first support members 221 are arranged at intervals around the axis of the second ring member 220 to improve the stability of supporting the second heating member 2200.

[0074] Since the axial dimension of the second ring 220 is smaller than that of the second heating element 2200, in order to prevent the second heating element 2200 from shaking, in some embodiments, combined with Figure 7As shown, the second mounting member 200 also includes a third ring member 230 and a first support member 240. Along the axial direction of the second heating member 2200, the third ring member 230 and the second ring member 220 are arranged at intervals. The first support member 240 is located between the second ring member 220 and the third ring member 230 and is located on the outer periphery of the second heating member 2200. The third ring member 230 is configured to be sleeved on the end of the second heating member 2200 away from the second ring member 220 to radially constrain the second heating member 2200, thereby preventing the second heating member 2200 from shaking outward, reducing the risk of deformation and the difficulty of docking the second heating member 2200 and the limiting groove 1245 during the installation process.

[0075] To further prevent the second heating element 2200 from wobbling in the radial direction of the second mounting member 200, in some embodiments, combined with Figure 8 and Figure 9 As shown, the second mounting member 200 also includes an auxiliary member 250, which is detachably connected to the interior of the second mounting member 200, such that the outer side wall of the auxiliary member 250 and the inner side wall of the third ring member 230 form an annular cavity for accommodating the second heating member 2200. The auxiliary member 250 supports the inner side wall of the second heating member 2200, and the inner side wall of the third ring member 230 supports the outer side wall of the second heating member 2200, thereby preventing it from wobbling in the axial direction, ensuring the shape of the second heating member 2200, and improving the efficiency of installing the second heating member 2200 into the limiting groove 1245.

[0076] Specifically, the auxiliary component 250 includes a fourth ring 251, a fifth ring 252, a second support 253, and a sixth ring 254. The fourth ring 251 and the fifth ring 252 are coaxially connected. The outer diameter of the fourth ring 251 is smaller than the outer diameter of the fifth ring 252, and the first bearing member 221 supports the fifth ring 252. One end of the second support 253 is connected to the fifth ring 252. Along the axial direction of the second heating element 2200, the sixth ring 254 and the fifth ring 252 are arranged at intervals, and the other end of the second support 253 is connected to the sixth ring 254. This arrangement allows the auxiliary component 250 to form a hollow frame structure, which is lightweight and easy to operate.

[0077] To ensure the connection stability of the auxiliary component 250 and the second mounting component 200 and prevent them from separating, in some embodiments, a limiting component 255 is provided on the outer side of the fourth ring component 251, and the first bearing component 221 is sandwiched between the fifth ring component 252 and the limiting component 255. The limiting component 255 is a protrusion on the outer periphery of the fourth ring component 251. During installation, the auxiliary component 250 is placed in the second ring component 220, and the limiting component 255 moves from a position between adjacent first bearing components 221 to below the first bearing component 221. Then, the auxiliary component 250 is rotated so that the limiting component 255 rotates to directly below the first bearing component 221.

[0078] To facilitate the installation of the graphite connecting plate 1350 and the third heating element 2300, in some embodiments, combined with Figure 11 and Figure 12 As shown, the mounting device includes a third mounting member 300, which includes a seventh ring member 310. The seventh ring member 310 has a second limiting hole 311 extending radially through it. The second limiting hole 311 is used to engage with the second mating hole 1341 of the third graphite electrode 1340 to limit the relative position of the third graphite electrode 1340 to correspond to the first connecting hole 1351 of the graphite connecting plate 1350. In other words, the second limiting hole 311 is configured to replace the first connecting hole 1351 of the graphite connecting plate 1350 so that it is directly opposite the second mating hole 1341 of the third graphite electrode 1340 when the third graphite electrode 1340 is rotated to the second mounting angle. The seventh ring 310 is sleeved around the outer periphery of the plurality of third graphite electrodes 1340, and the third graphite electrodes 1340 are adjusted so that the second limiting hole 311 of the seventh ring 310 and the second mating hole 1341 of the third graphite electrode 1340 are aligned. The second screw passes through the third limiting hole 321 and is screwed into the second mating hole 1341 of the third graphite electrode 1340. Then the bolt between the third copper electrode 1310 and the third cooling sleeve 1320 is tightened to fix the third copper electrode 1310 and the third cooling sleeve 1320. Finally, the second screw in the third limiting hole 321 and the second mating hole 1341 is unscrewed, and the second screw passes through the first connecting hole 1351 of the graphite connecting plate 1350 and is screwed into the second mating hole 1341 to complete the connection between the graphite connecting plate 1350 and the third graphite electrode 1340.

[0079] Combination Figure 13As shown, the third mounting component 300 also includes an eighth ring component 320 coaxially connected to the seventh ring component 310. The outer diameter of the eighth ring component 320 is smaller than that of the seventh ring component 310. The eighth ring component 320 has a third limiting hole 321 extending radially through it. The third limiting hole 321 is used to mate with the second connecting hole 1352 of the graphite connecting plate 1350 to limit the relative position of the graphite connecting plate 1350 to correspond to the third mounting hole 2310 of the third heating element 2300. In other words, the third limiting hole 321 is configured to replace the third mounting hole 2310 of the third heating element 2300 so that it is directly opposite the second connecting hole 1352 of the graphite connecting plate 1350 when the third graphite electrode 1340 rotates to the third mounting angle. The third mounting angle can be the same as the second mounting angle. When the third limiting hole 321 is directly opposite the second connecting hole 1352, the normal assembly of the third heating element 2300 and the graphite connecting plate 1350 can be guaranteed. If the third limiting hole 321 cannot be aligned with the second connecting hole 1352, first loosen the bolts between the third copper electrode 1310 and the third cooling sleeve 1320, then rotate the graphite connecting plate 1350 so that the third limiting hole 321 can be aligned with the second connecting hole 1352, and then tighten the bolts between the third copper electrode 1310 and the third cooling sleeve 1320. The third mounting hole 2310 is perpendicular to the axial direction of the third graphite electrode 1340.

[0080] Combination Figure 14 As shown, the inner sidewall of the seventh ring 310 is provided with a second support member 312 for supporting the third heating element 2300. The third heating element 2300 is placed in the seventh ring 310 and supported by the second support member 312. The third heating element 2300 is moved by the seventh support member to cooperate with the graphite connecting plate 1350, thereby reducing the debugging time and improving the installation efficiency of the third heating element 2300.

[0081] For ease of connection, combined Figure 12 As shown, the seventh ring 310 has a clearance opening 313, which is configured to avoid the portion of the graphite connecting plate 1350 where the second connecting hole 1352 is located. Simultaneously, the projection of the third mounting hole 2310 is located within the clearance opening 313 along its own axial direction to prevent the seventh ring 310 from impacting the graphite connecting plate 1350 and to avoid the relatively brittle graphite connecting plate 1350 from breaking upon impact. The third screw passes through the second connecting hole 1352 and is screwed into the third mounting hole 2310.

[0082] During installation, the first heating element 2100 can be fixed using the first mounting part 100. All copper electrodes are inserted into the corresponding through holes 110, allowing for coarse positioning of all copper electrodes, including the two first copper electrodes. Then, the orientation of the two first copper electrodes is simply adjusted so that the ends of the two first graphite electrodes 1110 can pass through the first mounting holes of the first heating element 2100. Finally, the nut is tightened into the threaded engagement of the end of the first graphite electrode 1110. The outer periphery of the end of the first graphite electrode 1110 has a stop portion, and the first heating element 2100 is clamped between the stop portion and the nut.

[0083] During installation, the second heating element 2200 is first replaced by the first ring 210 of the second mounting component 200. The first ring 210 is inserted into the limiting groove 1245 of the second graphite electrode 1240, and the angle of the second copper electrode 1210 is adjusted to rotate the second graphite electrode 1240 so that the first mating hole 1242 and the first limiting hole 211 on the second graphite electrode 1240 are aligned. Then, the first screw is passed through the first mating hole 1242 and the first limiting hole 211 on the first sub-fixing block 1241 and screwed into the first locking hole 1244 of the second sub-fixing block 1243. Finally, the first... The bolts between the second copper electrode 1210 and the second cooling sleeve 1220 are used to fix the second copper electrode 1210 and the second cooling sleeve 1220. The first screw is removed, the second mounting piece 200 is inverted, and the second heating element 2200 is placed inside the second ring 220. The second heating element 2200 is supported by the first bearing piece 221. The second heating element 2200 is assembled into the limiting groove 1245 of the second graphite electrode 1240 through the second mounting piece 200. The first screw is passed through the first mating hole 1242 and the second mounting hole 2210 on the second mounting piece 200 in sequence and screwed into the first locking hole 1244.

[0084] During installation, the third heating element 2300 is first fitted onto the outside of the three third graphite electrodes 1340 via the seventh ring 310. The third copper electrode 1310 is then adjusted to rotate the third graphite electrode 1340, aligning the second limiting hole 311 of the seventh ring 310 with the second mating hole 1341 of the third graphite electrode 1340. A second screw is then passed through the third limiting hole 321 and screwed into the second mating hole 1341 of the third graphite electrode 1340. The bolts between the third copper electrode 1310 and the third cooling sleeve 1320 are then tightened to fix them. Finally, the second screws in the third limiting hole 321 and the second mating hole 1341 are unscrewed, and the second screws are passed through the first connecting hole 1351 of the graphite connecting plate 1350 and screwed into the second mating hole 1341, completing the connection between the graphite connecting plate 1350 and the third graphite electrode 1340.

[0085] Then, the third mounting component 300 is inverted, and the eighth ring component 320 is placed between the three graphite connecting plates 1350. At this time, the third limiting hole 321 of the eighth ring component 320 replaces the third mounting hole 2310 of the third heating component 2300. If the third mounting hole 2310 and the second connecting hole 1352 on the graphite connecting plate 1350 are aligned, it indicates that the third heating component 2300 can be accurately installed. If the third mounting hole 2310 and the second connecting hole 1352 of the graphite connecting plate 1350 cannot be aligned, the bolts between the third copper electrode 1310 and the third cooling sleeve 1320 are loosened, and then the third copper electrode 1310 is rotated to drive the graphite connecting plate 1350 to rotate so that the third limiting hole 321 can be aligned with the second connecting hole 1352. Then the bolts between the third copper electrode 1310 and the third cooling sleeve 1320 are tightened.

[0086] Then, the third mounting component 300 is flipped over, and the third heating component 2300 is placed in the seventh ring component 310 and supported by the second bearing component 312. The seventh bearing component drives the third heating component 2300 to move so as to cooperate with the graphite connecting plate 1350. The fourth screw passes through the second connecting hole 1352 and is screwed into the third mounting hole 2310. The final installation effect is as follows. Figure 15 As shown.

[0087] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A mounting device for positioning electrode assemblies of a semiconductor process apparatus to align heating elements of the semiconductor process apparatus, characterized in that: A first mounting member has a plurality of through holes for inserting one end of one plurality of electrode assemblies into the first end of the electrode assembly in a one-to-one correspondence, thereby restricting the second end of the electrode assembly to be located in a pre-fixed area. An adjustment gap is provided between at least one of the through holes and the corresponding first end of the electrode assembly to adjust the position of the second end of at least one electrode assembly in the pre-fixed area to correspond to the first mounting hole of the heating element. The second mounting component includes a first ring, which has a plurality of first limiting holes for engaging with the second end of the electrode assembly located at least partially in the pre-fixed region, thereby limiting the relative position of the second end of the at least partially electrode assembly to correspond to the second mounting hole of the heating element.

2. The installation device according to claim 1, characterized in that, The heating element includes a second heating element, and the second mounting element further includes a second ring element coaxially connected to the first ring element. At least a portion of the inner diameter of the second ring element is larger than the outer diameter of the second heating element. A first bearing element is provided on the inner side of the second ring element, and the first bearing element is configured to bear the second heating element placed inside the second ring element.

3. The installation device according to claim 2, characterized in that, The first support member is a boss extending along the inner sidewall of the second ring member toward the center of the second ring member; and / or, The first carrier has a plurality of components, which are arranged at intervals around the axis of the second ring component.

4. The installation device according to claim 2, characterized in that, The axial dimension of the second ring is smaller than that of the second heating element. The second mounting element also includes a third ring and a first support. The third ring and the second ring are arranged at intervals along the axial direction of the second heating element. The first support is disposed between the second ring and the third ring and is located on the outer periphery of the second heating element. The third ring is configured to be sleeved on the end of the second heating element away from the second ring to radially constrain the second heating element.

5. The installation device according to claim 4, characterized in that, The second mounting component further includes an auxiliary component, which is detachably connected to the interior of the second mounting component such that the outer side wall of the auxiliary component and the inner side wall of the third ring component form an annular cavity for accommodating the second heating element.

6. The installation device according to claim 5, characterized in that, The auxiliary components include: A fourth ring and a fifth ring are coaxially connected; the outer diameter of the fourth ring is smaller than the outer diameter of the fifth ring, and the first bearing member supports the fifth ring. The second support member has one end connected to the fifth ring member; The sixth ring is arranged along the axial direction of the second heating element, and the sixth ring is spaced apart from the fifth ring. The other end of the second support is connected to the sixth ring.

7. The installation device according to claim 6, characterized in that, The fourth ring is provided with a limiting member on its outer side, and the first bearing member is sandwiched between the fifth ring and the limiting member.

8. The installation device according to any one of claims 1-7, characterized in that, The electrode assembly further includes a third electrode assembly, and the heating element further includes a third heating element. The third electrode assembly includes a third graphite electrode and a graphite connecting plate connected between the third heating element and the third graphite electrode. The mounting device includes a third mounting member, which includes a seventh ring member. The seventh ring member has a second limiting hole extending radially through it. The second limiting hole is used to engage with the second mating hole of the third graphite electrode to limit the relative position of the third graphite electrode to correspond to the first connecting hole of the graphite connecting plate.

9. The installation device according to claim 8, characterized in that, The third mounting component further includes an eighth ring coaxially connected to the seventh ring, the outer diameter of the eighth ring being smaller than that of the seventh ring, and the eighth ring having a third limiting hole extending radially through it. The third limiting hole is used to engage with the second connecting hole of the graphite connecting plate to restrict the relative position of the graphite connecting plate to correspond to the third mounting hole of the third heating element; and / or, The inner wall of the seventh ring is provided with a second support member for supporting the third heating element.

10. The installation device according to claim 8, characterized in that, The seventh ring is provided with a clearance opening, which is configured to avoid the portion of the graphite connecting plate where the second connecting hole is located.

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