Loading device compatible with square substrates

Abstract

The present application relates to a loading device compatible with square substrate, comprising a box and a box door. The box has an opening and comprises a plurality of trays and a pair of rear positioning ribs, the trays are arranged in parallel stack, and the pair of rear positioning ribs is arranged opposite to the opening. The box door is arranged at the opening and closes the opening. A plurality of grooves corresponding to the plurality of trays are arranged on the inner side of the box door.

Description

[0001] This application claims priority to Taiwan Patent Application No. 114133238, filed on August 29, 2025, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to a front-opening substrate loading box, and more particularly to a loading device compatible with square and round substrates. Background Technology

[0003] In semiconductor or electronic circuit manufacturing processes, substrate containers are often used to transfer or transport substrates, thereby stably delivering the substrates to different process workstations and preventing damage caused by collisions during transportation.

[0004] Currently, the primary substrate used is the wafer. After processing, the wafer is diced into rectangular chips for subsequent packaging. Therefore, after dicing, unusable scrap remains. Emerging AI technologies utilize larger chips, and as AI technology rapidly develops, the size of AI chips is also increasing. Currently, manufacturing larger chips from wafers results in more scrap remaining, thus limiting the efficient use of wafers in AI chip manufacturing.

[0005] To address the aforementioned issues, rectangular substrates have been gradually adopted in AI chip manufacturing processes. The standard size and shape of rectangular substrates differ from current wafers, necessitating the design of separate substrate containers, which are incompatible with current wafers. The coexistence of wafer and rectangular substrate production lines requires the stockpiling of numerous containers to accommodate different specifications, increasing additional equipment management costs.

[0006] In view of this, the applicant has devoted himself to studying the aforementioned prior art and applying theoretical principles to try his best to solve the above-mentioned problems, which has become the target of the applicant's improvement. Utility Model Content

[0007] This application provides a loading device compatible with square and round substrates.

[0008] This application provides a loading device compatible with round and square substrates, comprising a housing and a door. The housing has an opening and includes multiple brackets and a pair of rear positioning ribs. The brackets are stacked parallel to each other, and the pair of rear positioning ribs is configured to correspond to the opening. The door is disposed on the opening and closes the opening. The inner side of the door has multiple channels corresponding to the multiple brackets.

[0009] In one embodiment of this application, a front positioning rib is provided on the inner side of the door, and one end of each channel is respectively configured to correspond to the front positioning rib.

[0010] In one embodiment of this application, the loading device for a compatible square and round substrate further includes a circular frame, which is supported on one of the corresponding brackets. The circular frame has a pair of side truncated edges and a front truncated edge. The bracket of the circular frame is supported below the opposite side truncated edges of the circular frame, and the front truncated edge of the circular frame is inserted into one of the corresponding channels.

[0011] In one embodiment of this application, the circular frame has a rear truncated edge, and the rear truncated edge abuts against the rear positioning rib.

[0012] In one embodiment of this application, the two ends of the back edge are respectively configured with each of the back positioning ribs.

[0013] In one embodiment of this application, the loading device compatible with round and square substrates further includes a square frame, which is supported on one of the corresponding brackets. The square frame has a pair of sides and a front side. The bracket of the corresponding square frame is supported below the opposite side of the square frame, and the front side of the square frame abuts against the inner side of the door.

[0014] In one embodiment of this application, a front positioning rib is provided on the inner side of the door, and a front notch corresponding to the front positioning rib is provided on the front side of the frame, and the front positioning rib is accommodated in the front notch.

[0015] In one embodiment of this application, the frame has a rear side opposite to the front side, and a pair of rear notches corresponding to the rear positioning ribs are provided on the rear side of the frame, and the rear positioning ribs are respectively accommodated in each rear notch.

[0016] In one embodiment of this application, partitions are provided on the upper and lower sides of each channel.

[0017] In one embodiment of this application, a plurality of partitions are provided on the inner side of the door, and each channel is respectively arranged between two adjacent partitions.

[0018] The circular frame of this application has a pair of side sections, the distance between which is equal to the distance between the side sections of the rectangular frame and slightly smaller than the distance between the two side walls of the box. This makes the width of the box interior compatible with both the circular and rectangular frames. The box door of this application has a channel to accommodate the front section of the circular frame, and the rear section of the circular frame abuts against the rear positioning rib. The front and rear sides of the rectangular frame abut against the inner side of the box door and the rear wall of the box, respectively, thereby making the length of the box interior compatible with both the circular and rectangular frames. Attached Figure Description

[0019] Figure 1 This is a perspective view of a loading device for a compatible square and round substrate according to an embodiment of this application.

[0020] Figure 2 This is a perspective view of the door of a loading device for a compatible square and round substrate according to an embodiment of this application.

[0021] Figure 3This is a perspective view of the circular frame of a loading device for a compatible square and round substrate according to an embodiment of this application.

[0022] Figure 4 This is a perspective view of the frame of a loading device for a compatible square and round substrate according to an embodiment of this application.

[0023] Figure 5 This is a perspective view of the circular frame docking door of a loading device for a compatible square and round substrate according to an embodiment of this application.

[0024] Figure 6 This is a perspective view of the square frame docking box door of a loading device for a compatible square and round substrate according to an embodiment of this application.

[0025] Figure 7 This is a side view of the loading state of the circular and square frames of a loading device for a compatible round and square substrate according to an embodiment of this application.

[0026] Figure 8 This is a top view of the loading device for a compatible square and round substrate according to an embodiment of this application, showing its circular frame loading state.

[0027] Figure 9 for Figure 8 The enlarged view of point 9 is shown in the box.

[0028] Figure 10 for Figure 8 The sectional view at section line 10-10 is shown.

[0029] Figure 11 This is a top view of the loading device for a compatible square and round substrate according to an embodiment of this application, showing its square loading state.

[0030] Figure 12 for Figure 11 The enlarged view of point 12 is shown in the box.

[0031] Figure 13 for Figure 11 The enlarged view of section 13 is shown in the box.

[0032] Figure 14 for Figure 11 The sectional view at section line 14-14 is shown.

[0033] Explanation of reference numerals in the attached figures:

[0034] 100: Box;

[0035] 101: Opening;

[0036] 102, 103: Sidewalls;

[0037] 104: Posterior wall;

[0038] 110: Rear positioning rib;

[0039] 110a: Internal angle;

[0040] 120: Bracket;

[0041] 121: Flange;

[0042] 200: Box door;

[0043] 201: Inner side;

[0044] 210: Channel;

[0045] 210a: Internal angle;

[0046] 220: partition;

[0047] 221: Slope;

[0048] 221a, 221b: included angle;

[0049] 222: Spine;

[0050] 230: Front positioning rib;

[0051] 240: Door lock mechanism;

[0052] 300: Circular frame;

[0053] 310: Front cut-off edge;

[0054] 310a: Interior angle;

[0055] 320, 330: Side cut-off edge;

[0056] 340: Backside cutoff;

[0057] 340a: Interior angle;

[0058] 400: Box;

[0059] 410: in front;

[0060] 411: Missing edge;

[0061] 420, 430: Side;

[0062] 440: after;

[0063] 441, 442: The posterior margin is missing. Detailed Implementation

[0064] In the description of this application, it should be understood that the terms "front side", "rear side", "left side", "right side", "front end", "rear end", "end", "longitudinal", "lateral", "vertical", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0065] Unless otherwise defined herein, terms such as "substantially" and "approximately" are used to describe and narrate small changes. When used in the context of an event or situation, these terms may include the exact moment the event or situation occurred, or an approximate point in time. For example, when used in the context of a numerical value, these terms may include a range of variation less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

[0066] The detailed description and technical content of this application will be explained in conjunction with the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application.

[0067] Figure 1 This is a perspective view of a loading device for a compatible square and round substrate according to an embodiment of this application. (See also...) Figure 1 This application provides a loading device compatible with round and square substrates, which includes a housing 100 and a door 200. The door 200 is used to close the housing 100, and the housing 100 and the door 200 are compatible with loading at least one round frame 300 or at least one square frame 400, and can also load a mixture of round frames 300 and square frames 400.

[0068] See Figure 1The box 100 has an opening 101. Specifically, this application relates to a front-opening loading box, wherein the opening 101 is located on one side of the box 100, and the side wall (102, 103) surface inside the box 100 includes a pair of side walls (102, 103) located on both sides of the opening 101 and a rear wall 104 opposite to the opening 101. The width referred to below refers to the structural dimension between the opposite side walls (102, 103) in the direction perpendicular to the opposite side walls (102, 103), and the length referred to below refers to the structural dimension between the opening 101 and the rear wall 104 in the direction perpendicular to the rear side walls (102, 103). The horizontal configuration referred to below means parallel to the bottom surface of the box 100, and the upright configuration or vertical configuration without reference to a specific structure means perpendicular to the bottom surface of the box 100. In this embodiment, a plurality of brackets 120 and a pair of rear positioning ribs 110 are disposed on the sidewalls (102, 103) inside the housing 100. Each bracket 120 is in the form of a flange 121 protruding from the sidewalls (102, 103) inside the housing 100 and is horizontally arranged along the horizontal plane of the sidewalls (102, 103) inside the housing 100. In this embodiment, each bracket 120 includes a pair of flanges 121 opposite to each other on the opposite sidewalls (102, 103). The plurality of brackets 120 are arranged parallel to each other, specifically stacked in a vertical column. The pair of rear positioning ribs 110 are disposed on the rear wall 104 inside the housing 100 opposite to the opening 101, and each rear positioning rib 110 is vertically arranged. The rear positioning rib 110 can be a strip with a square, circular, or elliptical cross-section, and the material can be engineering plastic (e.g., PC, Polycarbonate, PEEK, Polyether etherketone, POM, Polyoxymethylene, PBT, Polybutylene terephthalate) or its alloy resin, or metal (e.g., aluminum alloy). The rear positioning rib 110 can be attached to or embedded in the rear wall 104 of the housing 100. However, this application is not limited to the aforementioned embodiments. For example, the rear positioning rib 110 can also be directly integrally formed on the rear wall 104 of the housing 100. In this embodiment, the rear positioning rib 110 is symmetrically arranged with respect to the center line of the rear wall of the housing 100.

[0069] Figure 2 This is a perspective view of the door 200 of a loading device for a compatible square and round substrate according to an embodiment of this application. (See also...) Figure 1 and Figure 2The door 200 is detachably mounted on the opening 101 and can be closed. The door 200 has an inner side 201, which faces the rear wall 104 of the box body 100 when the opening 101 is closed. Multiple channels 210 and front positioning ribs 230 are provided on the inner side 201 of the door 200. The multiple channels 210 are configured corresponding to the multiple brackets 120. Specifically, each channel 210 extends horizontally, and the top surface of each bracket 120 is aligned with the corresponding channel 210. One end of each channel 210 corresponds to a front positioning rib 230, and the length of each channel 210 is greater than the distance between the rear positioning ribs 110. Multiple partitions 220 are provided on the inner side 201 of the door 200, and a pair of partitions 220 are located on both sides of each channel 210. Each channel 210 is positioned between two adjacent partitions 220. The door 200 is equipped with a door lock mechanism 240 to lock the door 200 in the opening 101 of the box body 100. The rear positioning rib 110 inside the box body 100 can be equipped with counterweights to increase the weight of the rear wall 104, so as to prevent the overall center of gravity of the loading device from shifting due to the excessive weight of the door 200.

[0070] Figure 3 This is a perspective view of the circular frame 300 of a loading device for a compatible square and round substrate according to an embodiment of this application. (See also...) Figure 3 In one embodiment of this application, a circular frame 300 is also included, which is used to set a circular substrate, such as a wafer. A front truncated edge 310, a pair of side truncated edges (320, 330) and a rear truncated edge 340 are provided on the outer edge of the circular frame 300.

[0071] Figure 4 This is a perspective view of the frame 400 of a loading device for a compatible round and square substrate according to an embodiment of this application. (See also...) Figure 4 In one embodiment of this application, a frame 400 is further included, within which a square substrate is disposed. The outer edge of the frame 400 has a pair of opposing side edges (420, 430), a front edge 410, and a rear edge 440 opposite to the front edge 410.

[0072] Figure 5 This is a perspective view of a loading device for a compatible square and round substrate according to an embodiment of this application, wherein the circular frame 300 docks with the box door 200. Figure 6 This is a perspective view of a loading device for a compatible square and round substrate according to an embodiment of this application, wherein the frame 400 is connected to the door 200. Figure 7 This is a side view of the loading device for a compatible round and square substrate according to an embodiment of this application, showing the circular frame 300 and the square frame 400 being loaded. (See also...) Figure 5 and Figure 7The bracket 120 corresponding to the circular frame 300 is supported below the opposite side sections (320, 330) of the circular frame 300, while the front section section 310 of the circular frame 300 is inserted into one of the corresponding channels 210. When the enclosure door 200 is closed, the ramp 221 guides the front section section 310 of the circular frame 300 into the channel 210, thereby preventing the partition 220 from colliding with the circular frame 300 and damaging the wafer. See also Figure 6 and Figure 7 The bracket 120 corresponding to the frame 400 is supported below the opposite side (420, 430) of the frame 400, and the front side 410 abuts against the inner side 201 of the door 200 and is located between the two partitions 220.

[0073] The standard square substrates have different lengths and widths, and neither the length nor the width of the standard square substrate corresponds to the outer diameter of the standard circular substrate. The circular frame 300 of this application has a pair of side sections (320, 330). The spacing between the side sections (320, 330) of the circular frame 300 is equal to the spacing between the side sections (420, 430) of the square frame 400 and slightly smaller than the spacing between the two side walls (102, 103) of the housing 100. This allows the internal width of the housing 100 to be compatible with both the circular frame 300 and the square frame 400. The door 200 of this application is provided with a channel 210 to accommodate the front section 310 of the circular frame 300 and the rear section 340 of the circular frame 300 abuts against the rear positioning rib 110. The front side of the square frame 400 and a pair of rear notches (441, 442) provided at the rear side 440 abut against the inner side 201 of the door 200 and the rear positioning rib 110, thereby making the internal length of the box 100 compatible with the circular frame 300 and the square frame 400.

[0074] Specifically, the circular frame 300 of this application has its width corresponding to that of the rectangular frame 400 by setting side truncated edges (320, 330), and the circular frame 300 is accommodated in the length direction by setting a channel 210 in the door 200. In this way, the internal length of the box 100 is compatible with both the circular frame 300 and the rectangular frame 400.

[0075] Figure 8 This is a top view of the loading device for a compatible square and round substrate according to an embodiment of this application, showing the loading state of its circular frame 300. (See attached image.) Figure 8As shown, the front positioning rib 230 is configured only at one end of the channel 210. In this embodiment, the interior angle 310a connecting the two ends of the front truncated edge 310 with the center of the circular frame 300 is 38 degrees. When the box 100 is loaded with the circular frame 300, the interior angle 210a connecting the two ends of the channel 210 with the center of the circular frame 300 is between 40 and 60 degrees, thereby preventing the channel 210 from interfering with the door lock mechanism 240 inside the box door 200. In this embodiment, the interior angle 340a connecting the two ends of the rear truncated edge 340 of the circular frame 300 with the center of the circular frame 300 is 37 degrees. Therefore, the aforementioned interior angle 110a connecting the rear positioning rib 110 with the center of the circular frame 300 is set to be less than 40 degrees. Moreover, the aforementioned interior angle 110a is greater than 5 degrees to prevent the rear positioning rib 110 from getting too close and thus failing to stably position the rear truncated edge 340. In another embodiment, the center of the circular frame 300 is aligned with the center of the box 100. Figure 9 for Figure 8 The enlarged view of point 9 is shown in the box. Please refer to the relevant section. Figure 9 As shown, the rear end 340 of the circular frame 300 abuts against the rear positioning rib 110. Figure 10 for Figure 8 The sectional view at section line 10-10 is shown in the figure. Figure 10 As shown, both sides of each partition 220 are sloped surfaces 221, and the two sloped surfaces 221 meet at the distal edge of the partition 220 to form a ridge 222, thereby preventing the edge of the partition 220 from unexpectedly colliding with the circular frame 300 and damaging the substrate. Different included angles (221a, 221b) are arranged between the two sloped surfaces 221 at the middle section of each partition 220 corresponding to the channel 210 and at both ends of the partition 220 where there is no corresponding channel 210. Figure 10 The cross-section shown passes through channel 210, so it can be seen that the partition 220 has a small included angle 221a between its two slopes 221 at the corresponding channel 210 to facilitate guiding the front truncated edge 310 of the circular frame 300 into the corresponding channel 210.

[0076] Figure 11 This is a top view of the loading device for a compatible square and round substrate according to an embodiment of this application, with its frame 400 in the loading state. Figure 12 for Figure 11 The enlarged view of point 12 is shown in the box. Figure 13 for Figure 11 The enlarged view of section 13 is shown in the box. Figure 14 for Figure 11 The sectional view at section line 14-14 is shown. (See also...) Figures 11 to 14A front notch 411 corresponding to the front positioning rib 230 is provided on the front side 410 of the frame 400, and the front positioning rib 230 is accommodated in the front notch 411. A pair of rear notches (441, 442) corresponding to the rear positioning ribs 110 are provided on the rear side 440 of the frame 400, and the rear side 440 of the frame 400 abuts against the rear wall 104 of the housing 100, and the pair of rear positioning ribs 110 are respectively accommodated in each of the rear notches (441, 442). In this embodiment, the two rear notches (441, 442) are symmetrically arranged on the rear side 440, while the front notch 411 is offset from one end of the front side 410. The front positioning rib 230 is also configured only at one end of the channel 210. When the box 400 is reversed, the other end of its front side 410 will interfere with the front positioning rib 230, preventing the door 200 from closing. Therefore, the aforementioned asymmetrical configuration avoids the box 400 being reversed, facilitating subsequent automated processes.

[0077] See Figure 8 and Figure 11 Furthermore, box 400 such Figure 8 The circular frame abuts against the rear positioning rib 110, and as Figure 11 The rectangular frame also abuts against the rear positioning rib 110. The rear positioning rib 110 abuts against a specific point on the circular frame 300 or the rectangular frame 400 to prevent the rear wall 104 of the housing 100 from abutting against the rear edge 340 of the circular frame 300 or the rear edge 440 of the rectangular frame 400 as a whole. This reduces the contact area between the housing 100 and the circular frame 300 or the rectangular frame 400, thereby reducing molding and assembly tolerances. Therefore, the aforementioned structure can accurately position the circular frame 300 or the rectangular frame 400.

[0078] The above description is merely a preferred embodiment of this application and is not intended to limit the patent scope of this application. Other equivalent variations that utilize the patent spirit of this application should all fall within the patent scope of this application.

Claims

1. A loading device compatible with square and round substrates, characterized in that, Include: A housing having an opening and comprising multiple brackets and a pair of rear positioning ribs, the multiple brackets being stacked parallel to each other, and the pair of rear positioning ribs being configured opposite to the opening; and A door is provided in the opening and closes the opening. The inner side of the door is provided with multiple channels corresponding to the multiple brackets.

2. The loading device for compatible square and round substrates as described in claim 1, characterized in that, The inner side of the door is provided with a front positioning rib, and one end of each channel is respectively configured to correspond to the front positioning rib.

3. The loading device for compatible square and round substrates as described in claim 1, characterized in that, It also includes a circular frame supported on one of the corresponding brackets, the circular frame having a pair of side sections and a front section, the bracket corresponding to the circular frame being supported below the opposite side sections of the circular frame, and the front section of the circular frame being inserted into one of the corresponding channels.

4. The loading device for compatible square and round substrates as described in claim 3, characterized in that, The circular frame has a rear truncated edge, and the rear truncated edge abuts against the rear positioning rib.

5. The loading device for compatible square and round substrates as described in claim 4, characterized in that, The two ends of the rear truncated edge are respectively configured with the rear positioning ribs.

6. The loading device for compatible square and round substrates as described in claim 1, characterized in that, It also includes a frame supported on one of the corresponding brackets, the frame having a pair of sides and a front side, the bracket corresponding to the frame being supported below the opposite sides of the frame, and the front side of the frame abutting against the inner side of the door.

7. The loading device for compatible square and round substrates as described in claim 6, characterized in that, A front positioning rib is provided on the inner side of the door, and a front notch corresponding to the front positioning rib is provided on the front side of the frame, and the front positioning rib is accommodated in the front notch.

8. The loading device for a compatible square and round substrate as described in claim 6, characterized in that, The frame has a rear side opposite to the front side, and a pair of rear notches corresponding to the rear positioning ribs are provided on the rear side of the frame, and the rear positioning ribs are respectively accommodated in each of the notches.

9. The loading device for compatible square and round substrates as described in claim 1, characterized in that, Each of the aforementioned channels is provided with a partition on its upper and lower sides.

10. The loading device for a compatible square and round substrate as described in claim 1, characterized in that, The inner side of the box door is provided with multiple partitions, and each of the channels is respectively arranged between two adjacent partitions.

11. The loading device for a compatible square and round substrate as described in claim 1, characterized in that, The cabinet door has at least one door lock mechanism to lock the opening, and the rear positioning ribs are provided with a counterweight corresponding to the at least one door lock mechanism.

12. The loading device for a compatible square and round substrate as described in claim 1, characterized in that, The center-to-center distance between the rear positioning ribs is less than the length of each of the channels.

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