Wafer lifting mechanism with multi-dimensional adjustment

Abstract

The utility model discloses a wafer lifting mechanism of multi -dimensional regulation relates to wafer testing technical field. The utility model discloses a bottom plate, and the bottom plate top is provided with the transverse shift subassembly, and the transverse shift subassembly top is installed with the longitudinal shift subassembly, and the longitudinal shift subassembly top is installed with the lifting subassembly, and the lifting subassembly includes the support seat of installation in the longitudinal shift subassembly top, and the support seat one side is installed with the displacement motor, and the middle portion sliding connection has the control high bottom piece, and the control high bottom piece top inclined plane sliding connection has the control high top piece, and the control high top piece top is installed with the test base, and the test base along the circumferential side surface with support seat in vertical direction sliding connection has a plurality of limit rods. The utility model discloses through the lifting platform of the control of the inclined plane movement through the installation on the top of transverse shift subassembly and longitudinal shift subassembly realizes the accurate space positioning function of wafer lifting mechanism.

Description

Technical Field

[0001] This utility model belongs to the field of wafer testing technology, specifically relating to a multi-dimensional adjustable wafer lifting mechanism. Background Technology

[0002] Wafer testing is an electrical screening of chips on a wafer after the front-end process is completed but before it is cut and packaged. It is used to preemptively eliminate possible faults in the chips on the wafer, avoiding expensive subsequent packaging and final testing costs, thereby directly improving yield and reducing costs. During testing, the wafer needs to be positioned, which requires the use of corresponding lifting devices.

[0003] The patent specification with announcement number CN215731653U describes a semiconductor device wafer support and lifting mechanism, in which a threaded column is installed on the lower end face of the support plate, a limit plate is installed on the outer side of the lower end of the threaded column, a fixing block is installed on the inner side of the housing, an inner hydraulic seat is installed in the middle of the lower end face of the fixing block, a rod groove is opened on the inner side of the clamping plate, a gear is installed on the lower end face of the clamping plate, and a chain is installed on the outer side of the gear. The lifting mechanism uses a manually operated throttle to rotate a transmission rod, which is then connected to a groove. A chain and gears then drive a threaded column to rotate, controlling the lifting and lowering of the support plate. However, this technology relies on manual rotation as the power source and uses a low-precision chain and threaded column for transmission. In actual wafer testing, precise positioning of extremely small individual chips is required, demanding millimeter-level accuracy. The uncontrollable power source combined with the low-precision lifting structure makes it difficult to position the wafer at the required testing location.

[0004] No effective solutions have yet been proposed to address the problems in the relevant technologies. Utility Model Content

[0005] The purpose of this utility model is to provide a multi-dimensional adjustable wafer lifting mechanism. The technical problem to be solved is as follows: the existing wafer lifting mechanism has insufficient positioning accuracy.

[0006] The objective of this utility model can be achieved through the following technical solutions: A multi-dimensional adjustable wafer lifting mechanism includes a base plate, a horizontal moving component at the top of the base plate, a vertical moving component at the top of the horizontal moving component, and a lifting component at the top of the vertical moving component. The lifting component includes a support base mounted on the top of the vertical moving component. A displacement motor is mounted on one side of the support base, and a height control bottom component is slidably connected to the middle of the support base. A height control top component is slidably connected to the top inclined surface of the height control bottom component. A test base is mounted on the top of the height control top component. Multiple limit rods are slidably connected to the support base in the vertical direction along the circumferential side of the test base.

[0007] As a further embodiment of this utility model: the transverse moving component includes two slide rails fixedly connected to the top of the base plate, two slide blocks slidably connected to the top of the slide rails, a support plate fixedly connected between the tops of the four slide blocks, a linear motor installed between the bottom surface of the support plate and the base plate, and the longitudinal moving component installed on the top of the support plate.

[0008] As a further embodiment of this utility model: the longitudinal movement component includes two slide rails two fixedly connected to the top of the support plate, two slide blocks two slidably connected to the top of the slide rails two, a lifting platform fixedly connected between the tops of the four slide blocks two, a linear motor two installed between the bottom surface of the lifting platform and the support plate, and the lifting component installed on the top of the lifting platform.

[0009] As a further embodiment of this utility model: two rotating seats are installed at the top center of the support base, and a lead screw is rotatably connected between the two rotating seats. The lead screw is fixedly connected to the output end of the shifting motor.

[0010] As a further embodiment of this utility model: the height control base includes two slide rails three fixedly connected to the bottom of the support base, a height control base is slidably connected between the two slide rails three, the middle part of the height control base is threadedly connected to the lead screw, the side of the height control base is a right triangle, and slide rails four are fixedly connected to both sides of the top of the height control base, and the height control top component is installed between the two slide rails four.

[0011] As a further embodiment of this utility model: the height control top component includes a height control top block fixedly connected to the bottom of the test base. The side of the height control top block is a right-angled triangle. Four sliding blocks are fixedly connected to the inclined surface of the bottom surface of the height control top block. The sliding blocks are slidably connected to the slide rails on the adjacent side below.

[0012] The beneficial effects of this utility model are: By installing a horizontal moving component at the top of the base plate, a vertical moving component at the top of the horizontal moving component, and a lifting component at the top of the vertical moving component, the device operates by using a shift motor to drive a lead screw to rotate. The height control base connected to the lead screw moves along the slide rail. During the movement, the height control block connected to the inclined surface at the top moves, and the height control block drives the test base at the top to move vertically along the limit rod. Combined with the horizontal positioning of the horizontal and vertical moving components, the device achieves arbitrary spatial positioning of the wafer stage mounted on the top of the test base. Furthermore, the use of linear motors and servo motors, along with multiple sets of slide rails and slide blocks and the limiting movement of the limit rod, makes the spatial positioning accuracy of the device higher and more efficient. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings.

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a top view of the exploded view of the lifting component of this utility model; Figure 3 This is a bottom view of the exploded view of the lifting component of this utility model.

[0015] In the diagram: 1. Base plate; 2. Lateral movement assembly; 21. Slide rail one; 22. Slide seat one; 23. Support plate; 24. Linear motor one; 3. Longitudinal movement assembly; 31. Slide rail two; 32. Slide seat two; 33. Lifting platform; 34. Linear motor two; 4. Lifting assembly; 41. Support seat; 42. Shifting motor; 43. Height control base; 431. Slide rail three; 432. Height control base; 433. Slide rail four; 44. Height control top component; 441. Height control top block; 442. Slide seat three; 45. Test base; 46. Limit rod; 47. Rotating seat; 48. Lead screw. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0017] like Figures 1 to 3 As shown, a multi-dimensional adjustable wafer lifting mechanism includes a base plate 1, a horizontal moving component 2 is provided at the top of the base plate 1, a vertical moving component 3 is installed at the top of the horizontal moving component 2, a lifting component 4 is installed at the top of the vertical moving component 3, the lifting component 4 includes a support base 41 installed at the top of the vertical moving component 3, a shifting motor 42 is installed on one side of the support base 41, and a height control bottom component 43 is slidably connected to the middle, a height control top component 44 is slidably connected to the top inclined surface of the height control bottom component 43, a test base 45 is installed at the top of the height control top component 44, and four limit rods 46 are slidably connected to the support base 41 in the vertical direction along the circumferential side of the test base 45; It should be noted that the shift motor 42 is preferably a servo motor, which has the characteristics of high dynamic accuracy and strong anti-interference ability, and is suitable for the high-precision positioning required by wafers. An L-shaped side plate is fixedly connected to one side of the support base 41 for mounting the shift motor 42. A coupling is installed at the output end of the shift motor 42 to improve transmission stability. The top of the test base 45 is the mounting base of the wafer test stage. A turntable is installed on the top of the test base 45 for mounting the turntable. Multiple bolt connection holes are reserved at the top of the test base 45. The wafer stage is then installed on the top of the turntable. The wafer test is finally performed at the top of the wafer stage.

[0018] The transverse component 2 includes two slide rails 21 fixedly connected to the top of the base plate 1. Two slide blocks 22 are slidably connected to the top of each of the two slide rails 21. A support plate 23 is fixedly connected between the tops of the four slide blocks 22. A linear motor 24 is installed between the bottom surface of the support plate 23 and the base plate 1. The longitudinal component 3 is installed on the top of the support plate 23. The longitudinal movement component 3 includes two slide rails 31 fixedly connected to the top of the support plate 23. Two slide blocks 32 are slidably connected to the top of each of the two slide rails 31. A lifting platform 33 is fixedly connected between the tops of the four slide blocks 32. A linear motor 34 is installed between the bottom surface of the lifting platform 33 and the support plate 23. The lifting component 4 is installed on the top of the lifting platform 33. It should be noted that the two sets of slide rails installed on the horizontal moving component 2 and the vertical moving component 3 are perpendicular to each other. Two linear motors serve as the power source for the moving support plate 23 and the lifting platform 33. Specifically, the moving position is positioned by photoelectric switches, thereby achieving precise horizontal and vertical positioning of the wafer stage finally installed at the top of the device. Combined with the height control of the lifting component 4, it achieves the function of precise positioning of the test wafer.

[0019] Two rotating seats 47 are installed at the top center of the support base 41. A lead screw 48 is rotatably connected between the two rotating seats 47. The lead screw 48 is fixedly connected to the output end of the shift motor 42. The height control base 43 includes two slide rails 431 fixedly connected to the bottom of the support base 41. A height control base 432 is slidably connected between the two slide rails 431. The middle part of the height control base 432 is threadedly connected to the lead screw 48. The side of the height control base 432 is a right triangle. Slide rails 433 are fixedly connected to both sides of the top of the height control base 432. The height control top part 44 is installed between the two slide rails 433. The height control top component 44 includes a height control top block 441 fixedly connected to the bottom of the test base 45. The side of the height control top block 441 is a right-angled triangle. Four slide blocks 442 are fixedly connected to the inclined surface of the bottom surface of the height control top block 441. The slide blocks 442 are slidably connected to the slide rails 433 on the adjacent side. It should be noted that a slide block (not shown) is fixedly connected to the bottom surface of the height control base 432 at the connection point with the slide rail 431. Bushings are fixedly connected to the four corners of the top of the support base 41, serving as fixed base sleeves for the limiting rods 46 inserted into the four corners of the test base 45. Specifically, the rotation of the shift motor 42 drives the lead screw 48 to rotate, which in turn drives the height control base 432 to move along the slide rail 431. During the movement, the top inclined surface pushes the height control block 441 to move, and the movement is limited and prevented from detaching by the slide block 442 and the slide rail 433. When the height control base 432 moves away from the shift motor 42, the test base 45 is simultaneously limited and lifted upwards by the limiting rods 46. When the height control base 432 moves towards the shift motor 42, the test base 45 moves vertically downwards. The shift motor 42 controls the lifting and lowering state of the height control base 432 by switching between forward and reverse rotation.

[0020] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A multi-dimensional adjustable wafer lifting mechanism, comprising a base plate (1), characterized in that, The top of the base plate (1) is provided with a transverse moving component (2), the top of the transverse moving component (2) is provided with a longitudinal moving component (3), the top of the longitudinal moving component (3) is provided with a lifting component (4), the lifting component (4) includes a support base (41) installed on the top of the longitudinal moving component (3), a shifting motor (42) is installed on one side of the support base (41), and a height control bottom component (43) is slidably connected in the middle, a height control top component (44) is slidably connected on the inclined surface of the top of the height control bottom component (43), a test base (45) is installed on the top of the height control top component (44), and a plurality of limit rods (46) are slidably connected to the support base (41) in the vertical direction along the circumferential side of the test base (45).

2. The multi-dimensional adjustable wafer lifting mechanism according to claim 1, characterized in that, The transverse component (2) includes two slide rails (21) fixedly connected to the top of the base plate (1), two slide blocks (22) slidably connected to the top of the slide rails (21), a support plate (23) fixedly connected between the tops of the four slide blocks (22), a linear motor (24) installed between the bottom surface of the support plate (23) and the base plate (1), and the longitudinal component (3) installed on the top of the support plate (23).

3. The multi-dimensional adjustable wafer lifting mechanism according to claim 2, characterized in that, The longitudinal movement component (3) includes two slide rails (31) fixedly connected to the top of the support plate (23). Two slide blocks (32) are slidably connected to the top of the slide rails (31). A lifting platform (33) is fixedly connected between the tops of the four slide blocks (32). A linear motor (34) is installed between the bottom surface of the lifting platform (33) and the support plate (23). The lifting component (4) is installed on the top of the lifting platform (33).

4. The multi-dimensional adjustable wafer lifting mechanism according to claim 1, characterized in that, Two rotating seats (47) are installed at the top center of the support base (41), and a lead screw (48) is rotatably connected between the two rotating seats (47). The lead screw (48) is fixedly connected to the output end of the shift motor (42).

5. The multi-dimensional adjustable wafer lifting mechanism according to claim 4, characterized in that, The height control base (43) includes two slide rails (431) fixedly connected to the bottom of the support base (41), and a height control base (432) is slidably connected between the two slide rails (431). The middle part of the height control base (432) is threadedly connected to the lead screw (48). The side of the height control base (432) is a right triangle. Slide rails (433) are fixedly connected to both sides of the top of the height control base (432). The height control top piece (44) is installed between the two slide rails (433).

6. The multi-dimensional adjustable wafer lifting mechanism according to claim 5, characterized in that, The height control top component (44) includes a height control top block (441) fixedly connected to the bottom of the test base (45). The side of the height control top block (441) is a right triangle. Four sliding blocks (442) are fixedly connected to the inclined surface of the bottom surface of the height control top block (441). The sliding blocks (442) are slidably connected to the sliding rails (433) on the adjacent side below.

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