A silane production system

Abstract

The utility model discloses a silane production system, including chlorosilane separation tower upper portion connection chlorosilane separation tower condenser, monochloro dichloro separation tower, lower portion connection chlorosilane separation tower reboiler, monochloro dichloro separation tower upper portion connection monochloro dichloro separation tower condenser, monochlorosilane light removal tower, lower portion connection monochloro dichloro separation tower reboiler, dichlorosilane light removal tower, monochlorosilane light removal tower upper portion connection monochlorosilane light removal tower condenser, lower portion connection monochlorosilane light removal tower reboiler, monochlorosilane heavy removal tower, monochlorosilane heavy removal tower upper portion connection monochlorosilane heavy removal tower condenser, monochlorosilane product buffer tank are connected to lower portion of monochlorosilane heavy removal tower reboiler, dichlorosilane light removal tower upper portion connection dichlorosilane light removal tower condenser, lower portion connection dichlorosilane light removal tower reboiler, dichlorosilane heavy removal tower of dichlorosilane, dichlorosilane heavy removal tower upper portion connection dichlorosilane heavy removal tower condenser, dichlorosilane product buffer tank are connected to lower portion of dichlorosilane heavy removal tower reboiler.

Description

Technical Field

[0001] This utility model relates to the field of machinery, and in particular to a silane production system. Background Technology

[0002] In the process of realizing this utility model, it was discovered that existing dichlorosilane and monochlorotrichlorosilane products are directly synthesized and then separated and purified. There is currently no production system for high-purity dichlorosilane and monochlorosilane using intermediate products from the silane gas production process. Utility Model Content

[0003] In view of this, the present invention provides a silane production system that can produce high-purity dichlorosilane and monochlorosilane by distillation, adsorption and other methods on some intermediate products in the silane production process, thereby effectively enriching the product types.

[0004] To achieve the above objectives, an embodiment of this utility model provides a silane production system, including a chlorosilane separation tower, with an upper part connected to a chlorosilane separation tower condenser and a monochlorodichloro separation tower, and a lower part connected to a chlorosilane separation tower reboiler, for receiving and conveying mixed chlorosilanes; the chlorosilane separation tower condenser is used to control the temperature in the chlorosilane separation tower within a preset range and to recover the chlorosilanes in the chlorosilane separation tower back to the chlorosilane separation tower; the chlorosilane separation tower reboiler is used to control the pressure in the chlorosilane separation tower within a preset range; the monochlorodichloro separation tower is connected to a monochlorodichloro separation tower condenser and a monochlorosilane light removal tower at the upper part, and a monochlorodichloro separation tower reboiler and a dichlorosilane light removal tower at the lower part; the monochlorodichloro separation tower condenser is used to recover the monochlorosilanes from the chlorosilanes in the chlorosilane separation tower back to the chlorosilane separation tower. The temperature in the dichlorosilane separation tower is controlled within a preset range, and chlorosilanes in the dichlorosilane separation tower are recovered and returned to the dichlorosilane separation tower. The dichlorosilane separation tower reboiler is used to control the pressure in the dichlorosilane separation tower within a preset range. The dichlorosilane light silane removal tower is connected to a condenser at the top and to a reboiler and a heavy silane removal tower at the bottom. The dichlorosilane light silane removal tower condenser is used to control the temperature in the dichlorosilane light silane removal tower within a preset range and to recover chlorosilanes in the dichlorosilane light silane removal tower. The dichlorosilane light silane removal tower reboiler is used to control the pressure in the dichlorosilane light silane removal tower within a preset range. The dichlorosilane heavy silane removal tower is connected to a condenser and a product buffer tank at the top and to a... A reboiler for a monochlorosilane de-weighting tower; a condenser for a monochlorosilane de-weighting tower, used to control the temperature in the monochlorosilane de-weighting tower within a preset range and to recover chlorosilane from the monochlorosilane de-weighting tower back to the monochlorosilane de-weighting tower; a monochlorosilane product buffer tank, used to store or buffer the material in the monochlorosilane de-weighting tower; a monochlorosilane product cooler, located between the monochlorosilane de-weighting tower and the monochlorosilane product buffer tank; a reboiler for a monochlorosilane de-weighting tower, used to control the pressure in the monochlorosilane de-weighting tower within a preset range; a dichlorosilane de-lighting tower, connected at the top to a condenser for a dichlorosilane de-lighting tower, and connected at the bottom to both a reboiler for a dichlorosilane de-lighting tower and a dichlorosilane de-weighting tower; a condenser for a dichlorosilane de-lighting tower, used to control the temperature in the dichlorosilane de-lighting tower within a preset range and to recover chlorosilane from the dichlorosilane de-lighting tower. The dichlorosilanes in the dichlorosilane de-lightening tower are recovered to the dichlorosilane de-lightening tower; the dichlorosilane de-lightening tower reboiler is used to control the pressure in the dichlorosilane de-heavyening tower within a preset range; the dichlorosilane de-heavyening tower is connected to the dichlorosilane de-heavyening tower condenser and the dichlorosilane product buffer tank at the top, and to the dichlorosilane de-heavyening tower reboiler at the bottom; the dichlorosilane de-lightening tower bottom pump is located between the dichlorosilane de-lightening tower and the dichlorosilane de-heavyening tower; the dichlorosilane de-heavyening tower condenser is used to control the temperature in the dichlorosilane de-heavyening tower within a preset range and to recover the chlorosilanes in the dichlorosilane de-heavyening tower back to the dichlorosilane de-heavyening tower; the dichlorosilane product buffer tank is used to store or buffer the material in the dichlorosilane de-heavyening tower; the dichlorosilane de-heavyening tower reboiler is used to control the pressure in the dichlorosilane de-heavyening tower within a preset range.

[0005] Optionally, it includes: a chlorosilane feed adsorption column, which is connected to a pipeline for conveying mixed chlorosilanes and a chlorosilane separation tower, respectively, for removing impurities from the mixed chlorosilanes and then transferring them to the chlorosilane separation tower.

[0006] Optionally, it includes: a reflux tank for the monochlorodichloro separation tower, which is connected to the condenser of the monochlorodichloro separation tower and the reflux pump for the monochlorodichloro separation tower, for recovering chlorosilane in the condenser of the monochlorodichloro separation tower to the monochlorodichloro separation tower via the reflux pump; and a reflux pump for the monochlorodichloro separation tower, which is connected to the reflux tank for the monochlorodichloro separation tower and the monochlorodichloro separation tower.

[0007] Optionally, it includes a monochlorosilane feed adsorption column and is disposed between a monochlorodichloro separation tower and a monochlorosilane light removal tower; it also includes: a monochlorodichloro separation tower bottom pump and a dichlorosilane feed adsorption column, wherein the monochlorodichloro separation tower bottom pump is connected to the bottom of the monochlorodichloro separation tower and the dichlorosilane feed adsorption column, and the dichlorosilane feed adsorption column is connected to the dichlorosilane light removal tower.

[0008] Optionally, it includes: a reflux tank for the monochlorosilane light tower, connected to the monochlorosilane light tower condenser and the monochlorosilane light tower reflux pump, for recovering chlorosilane in the monochlorosilane light tower condenser to the monochlorosilane light tower via the reflux pump; and a monochlorosilane light tower reflux pump connected to the reflux tank and the monochlorosilane light tower.

[0009] It also includes: a dichlorosilane light tower reflux tank, which is connected to the dichlorosilane light tower condenser and the dichlorosilane light tower reflux pump, respectively, for recovering chlorosilane in the dichlorosilane light tower condenser to the dichlorosilane light tower through the dichlorosilane light tower reflux pump; and a dichlorosilane light tower reflux pump, which is connected to the dichlorosilane light tower reflux tank and the dichlorosilane light tower.

[0010] Optionally, it includes a bottom pump for the monochlorosilane light removal tower and is disposed between the monochlorosilane light removal tower and the monochlorosilane heavy removal tower.

[0011] Optionally, it includes: a reflux tank for the monochlorosilane de-burdening tower, connected to the condenser of the monochlorosilane de-burdening tower and the reflux pump of the monochlorosilane de-burdening tower, for recovering chlorosilane in the condenser of the monochlorosilane de-burdening tower to the monochlorosilane de-burdening tower via the reflux pump; and a reflux pump for the monochlorosilane de-burdening tower, connected to the reflux tank and the monochlorosilane de-burdening tower.

[0012] It also includes: a dichlorosilane de-weighting tower reflux tank, which is connected to the dichlorosilane de-weighting tower condenser and the dichlorosilane de-weighting tower reflux pump, respectively, for recovering chlorosilane in the dichlorosilane de-weighting tower condenser to the dichlorosilane de-weighting tower through the dichlorosilane de-weighting tower reflux pump; and a dichlorosilane de-weighting tower reflux pump, which is connected to the dichlorosilane de-weighting tower reflux tank and the dichlorosilane de-weighting tower.

[0013] Optionally, a heater may be added to the bottom of the monochlorosilane product buffer tank, and a heater may be added to the bottom of the dichlorosilane product buffer tank.

[0014] Optionally, it includes: a bottom pump for a monochlorosilane deweighting tower, connected to the bottom of the monochlorosilane deweighting tower, for pressurizing the bottom material of the monochlorosilane deweighting tower for recycling;

[0015] It also includes: a dichlorosilane deweighting tower bottom pump, connected to the bottom of the dichlorosilane deweighting tower, used to pressurize the bottom material of the dichlorosilane deweighting tower for recycling.

[0016] One embodiment of the above-mentioned utility model has the following advantages or beneficial effects: This utility model provides a method to separate and purify some intermediate products of the original silane production system through distillation, adsorption and other methods to produce high-purity dichlorosilane and monochlorosilane, thereby increasing the production of other products in the process of silane production, enriching the product types of enterprises, and at the same time, it will not damage the original silane production system. The separated non-condensable gas or heavy components can be returned to the original silane production system for recycling.

[0017] The further effects of the aforementioned unconventional alternative methods will be explained below in conjunction with specific implementation methods. Attached Figure Description

[0018] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0019] Figure 1 This is a schematic diagram of the structure of a silane production system according to an embodiment of the present invention. Detailed Implementation

[0020] The following description, in conjunction with the accompanying drawings, illustrates exemplary embodiments of the present invention, including various details to aid understanding. These embodiments should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0021] At least one embodiment of this utility model provides a silane production system, such as Figure 1The silane production system may include a chlorosilane separation tower 1, a chlorosilane separation tower condenser 8, a chlorosilane separation tower reboiler 7, a monochlorodichloro separation tower 2, a monochlorodichloro separation tower condenser 10, a monochlorodichloro separation tower reboiler 9, a monochlorosilane light-weight removal tower 3, a monochlorosilane light-weight removal tower condenser 13, a monochlorosilane light-weight removal tower reboiler 12, a monochlorosilane heavy-weight removal tower 4, a monochlorosilane heavy-weight removal tower condenser 16, a monochlorosilane product cooler 18, a monochlorosilane product buffer tank 19, a monochlorosilane heavy-weight removal tower reboiler 15, a dichlorosilane light-weight removal tower 5, a dichlorosilane light-weight removal tower condenser 21, a dichlorosilane light-weight removal tower reboiler 20, a dichlorosilane heavy-weight removal tower 6, a dichlorosilane light-weight removal tower bottom pump 38, a dichlorosilane heavy-weight removal tower condenser 24, a dichlorosilane product buffer tank 26, and a dichlorosilane heavy-weight removal tower reboiler 23.

[0022] In this embodiment, the upper part of the chlorosilane separation tower 1 is connected to the chlorosilane separation tower condenser 8 and the monochlorodichloro separation tower 2, respectively, and the lower part of the chlorosilane separation tower 1 is connected to the chlorosilane separation tower reboiler 7. The chlorosilane separation tower 1 is capable of receiving the transported mixed chlorosilanes. Preferably, the transported mixed chlorosilanes can be from an existing original silane production system. Figure 1 This refers to some intermediate products of the original system (abbreviated as the original system).

[0023] The condenser 8 of the chlorosilane separation tower controls the temperature in the chlorosilane separation tower 1 within a preset range and recovers the chlorosilanes from the chlorosilane separation tower 1. The reboiler 7 of the chlorosilane separation tower controls the pressure in the chlorosilane separation tower 1 within a preset range. The upper part of the monochlorodichloro separation tower 2 is connected to the monochlorodichloro separation tower condenser 10 and the monochlorosilane light silane removal tower 3, and the lower part of the monochlorodichloro separation tower 2 is connected to the monochlorodichloro separation tower reboiler 9 and the dichlorosilane light silane removal tower 5. The monochlorodichloro separation tower condenser 10 controls the temperature in the monochlorodichloro separation tower 2 within a preset range and recovers the chlorosilanes from the monochlorodichloro separation tower 2. The monochlorodichloro separation tower reboiler 9 controls the pressure in the monochlorodichloro separation tower 2 within a preset range.

[0024] The upper part of the monochlorosilane light-weight removal tower 3 is connected to the monochlorosilane light-weight removal tower condenser 13, and the lower part of the monochlorosilane light-weight removal tower 3 is connected to the monochlorosilane light-weight removal tower reboiler 12 and the monochlorosilane heavy-weight removal tower 4. The monochlorosilane light-weight removal tower condenser 13 can control the temperature in the monochlorosilane light-weight removal tower 3 within a preset range and recover the chlorosilane in the monochlorosilane light-weight removal tower 3 back to the monochlorosilane light-weight removal tower 3. The monochlorosilane light-weight removal tower reboiler 12 can control the pressure in the monochlorosilane light-weight removal tower 3 within a preset range. The upper part of the monochlorosilane heavy-weight removal tower 4 is connected to the monochlorosilane heavy-weight removal tower condenser 16 and the monochlorosilane product buffer tank 19, and the lower part of the monochlorosilane heavy-weight removal tower 4 is connected to the monochlorosilane heavy-weight removal tower reboiler 15. The condenser 16 of the monochlorosilane de-weighting tower can control the temperature in the monochlorosilane de-weighting tower within a preset range and recover the chlorosilane in the monochlorosilane de-weighting tower 4. The monochlorosilane product buffer tank 19 stores or buffers the material in the monochlorosilane de-weighting tower 4. The reboiler 15 of the monochlorosilane de-weighting tower can control the pressure in the monochlorosilane de-weighting tower 4 within a preset range.

[0025] The upper part of the dichlorosilane light-weight removal tower 5 is connected to the dichlorosilane light-weight removal tower condenser 21, and the lower part of the dichlorosilane light-weight removal tower 5 is connected to the dichlorosilane light-weight removal tower reboiler 20 and the dichlorosilane heavy-weight removal tower 6. The dichlorosilane light-weight removal tower condenser 21 can control the temperature in the dichlorosilane light-weight removal tower 5 within a preset range and recover the chlorosilane in the dichlorosilane light-weight removal tower 5 back to the dichlorosilane light-weight removal tower 5. The dichlorosilane light-weight removal tower reboiler 20 can control the pressure in the dichlorosilane heavy-weight removal tower 6 within a preset range. The upper part of the dichlorosilane heavy-weight removal tower 6 is connected to the dichlorosilane heavy-weight removal tower condenser 24 and the dichlorosilane product buffer tank 26, and the lower part of the dichlorosilane heavy-weight removal tower 6 is connected to the dichlorosilane heavy-weight removal tower reboiler 23. The condenser 24 of the dichlorosilane de-burdening tower 6 controls the temperature within a preset range and recovers the chlorosilanes from the tower. The dichlorosilane product buffer tank 26 stores or buffers the material in the dichlorosilane de-burdening tower 6. The reboiler 23 of the dichlorosilane de-burdening tower 6 controls the pressure within a preset range.

[0026] A monochlorosilane product cooler 18 is installed between the monochlorosilane de-burdening tower and the monochlorosilane product buffer tank 19. For example: the pressure of the monochlorosilane de-burdening tower 4 is controlled at 0.5~1.2 MPag by the reboiler 15, and the temperature is controlled at 20~50℃ by the condenser 16, allowing monochlorosilane to be recovered to the reflux tank 17. Forced external reflux is achieved by the reflux pump 35. A portion of the material, as product, is cooled to -10℃ by the monochlorosilane product cooler 18 and then sent to the buffer tank 19 for storage or buffering. The heat source for the reboiler 15 is a heat transfer fluid, the cold source for the condenser 16 is a refrigerant, and the cold source for the cooler 18 is a refrigerant.

[0027] The dichlorosilane light component removal tower bottom pump 38 is located between the dichlorosilane light component removal tower 5 and the dichlorosilane heavy component removal tower 6. Example: The bottom material of the dichlorosilane light component removal tower 5 is pressurized by the dichlorosilane light component removal tower bottom pump 38 and then sent to the dichlorosilane heavy component removal tower 6 for heavy component removal.

[0028] It should be noted that the silane production system described in this utility model, such as Figure 1 The system also includes a chlorosilane feed adsorption column 27, which is connected to a pipeline for conveying mixed chlorosilanes and a chlorosilane separation tower 1. The chlorosilane feed adsorption column 27 can remove impurities from the mixed chlorosilanes and then transfer them to the chlorosilane separation tower 1.

[0029] Example: Chlorosilane feed adsorption column 27 receives feed from an existing virgin silane production system ( Figure 1 The intermediate product of the original system (hereinafter referred to as the original system) is a mixed chlorosilane. After most of the boron / phosphorus impurities are removed by the chlorosilane feed adsorption column 27, the chlorosilane feed enters the chlorosilane separation tower 1 for further processing. The pressure of the chlorosilane separation tower 1 is controlled at 1~2 MPag by the reboiler 7, and the temperature is controlled at -10~-20℃ by the condenser 8 to recover the chlorosilane from the chlorosilane separation tower 1. To allow the silane and monochlorosilane to be returned as the mixed chlorosilane to be processed in this invention for reuse, the top of the chlorosilane separation tower 1 is non-condensable. Furthermore, the heat source for the reboiler 7 is a heat transfer fluid, and the cold source for the condenser 8 is a refrigerant.

[0030] Furthermore, it should be noted that the dichlorosilane product buffer tank 26 in the silane production system described in this utility model can be configured in two or more ways, depending on the downstream buffering time and requirements. Additionally, a condenser or cooler can be installed at the top of the dichlorosilane product buffer tank 26, and this condenser or cooler can be directly connected to the dichlorosilane product buffer tank 26. An electric heater or other heater can also be added to the bottom of the dichlorosilane product buffer tank 26, thereby maintaining the pressure and temperature of the dichlorosilane product buffer tank 26 together through the condenser and the heater. Furthermore, this utility model may also include an adsorption column, and the adsorption column is positioned after the dichlorosilane product buffer tank 26 to ensure the product quality of monochlorosilane and dichlorosilane.

[0031] It is also worth noting that the silane production system described in this utility model, such as Figure 1 The invention also includes a bottom pump 30 for the chlorosilane separation tower, which is connected to the bottom of the chlorosilane separation tower 1. The bottom pump 30 can pressurize the mixed chlorosilanes in the bottom of the chlorosilane separation tower 1 for recycling. For example, the mixed chlorosilanes (mainly dichlorosilane and trichlorosilane) in the bottom of the chlorosilane separation tower 1 are pressurized by the bottom pump 30 and returned as mixed chlorosilanes to be processed in this invention for reuse.

[0032] As some other embodiments of this utility model, the silane production system described herein, such as Figure 1 The aforementioned structure includes a reflux tank 11 for the monochlorodichloro separation tower, which is connected to both the condenser 10 and the reflux pump 31. The reflux tank 11 can recover chlorosilanes from the condenser 10 and return them to the monochlorodichloro separation tower 2 via the reflux pump 31. The reflux pump 31 can be connected to both the reflux tank 11 and the monochlorodichloro separation tower 2.

[0033] Example: The material from the side stream of chlorosilane separation tower 1 is sent to monochlorodichloro separation tower 2 via pressure differential as the driving force for coarse separation of monochlorosilane and dichlorosilane. The pressure of monochlorodichloro separation tower 2 is controlled at 1~2 MPag by reboiler 9, and the temperature is controlled at 20~50℃ by condenser 10, allowing chlorosilane to be recovered to reflux tank 11. Forced external reflux is carried out by reflux pump 31. The light component (mainly monochlorosilane) at the top of monochlorodichloro separation tower 2 is returned to the existing original silane production system. Figure 1 The original system (hereinafter referred to as the original system) is reused. The heat source for the reboiler 9 of the monochlorodichloro separation tower comes from the heat carrier, and the cold source for the condenser 10 of the monochlorodichloro separation tower comes from the refrigerant.

[0034] In some preferred embodiments, the silane production system of this invention, such as... Figure 1 The system also includes a monochlorosilane feed adsorption column 28, which is disposed between the monochlorodichloro separation tower 2 and the monochlorosilane light removal tower 3.

[0035] As other embodiments of this utility model, such as Figure 1 The silane production system of this utility model further includes a monochlorosilane light tower reflux tank 14 and a monochlorosilane light tower reflux pump 33. Specifically, the monochlorosilane light tower reflux tank 14 is connected to the monochlorosilane light tower condenser 13 and the monochlorosilane light tower reflux pump 33, respectively. The monochlorosilane light tower reflux pump 33 is connected to the monochlorosilane light tower reflux tank 14 and the monochlorosilane light tower 3, respectively. The monochlorosilane light tower reflux tank 14 recovers the chlorosilane in the monochlorosilane light tower condenser 13 to the monochlorosilane light tower 3 through the monochlorosilane light tower reflux pump 33.

[0036] Example: The material from the side stream of the monochlorodichloro separation tower 2 is driven by pressure difference and further treated with boron / phosphorus impurities by the monochlorosilane feed adsorption column 28. It is then conveyed to the monochlorosilane light component removal tower 3 for removal of light components from the monochlorosilane product. The pressure of the monochlorosilane light component removal tower 3 is controlled at 0.6~1.2 MPag by the reboiler 12, and the temperature is controlled at 20~50℃ by the condenser 13, allowing the chlorosilane to be recovered to the chlorosilane light component removal tower reflux tank 14. Forced external reflux is achieved by the chlorosilane light component removal tower reflux pump 33, and a portion of the material (mainly monochlorosilane) is returned to the existing original silane production system. Figure 1 The original system (hereinafter referred to as the original system) is reused. The heat source of the monochlorosilane light removal tower reboiler 12 comes from the heat carrier, and the cold source of the monochlorosilane light removal tower condenser 13 comes from the refrigerant.

[0037] In addition, in some preferred embodiments, the silane production system of this invention, such as... Figure 1 The system also includes a bottom pump 32 for the monochlorodichloro separation tower and a dichlorosilane feed adsorption column 29. The bottom pump 32 is connected to the bottom of the monochlorodichloro separation tower 2 and the dichlorosilane feed adsorption column 29, respectively. The dichlorosilane feed adsorption column 29 is connected to the dichlorosilane light component removal tower 5. For example, the bottom material of the monochlorodichloro separation tower 2, after being further treated with boron / phosphorus impurities by the bottom pump 32 and the dichlorosilane feed adsorption column 29, is then transported to the dichlorosilane light component removal tower 5 for the removal of light components from the dichlorosilane product.

[0038] And, as some other embodiments of this utility model, such as Figure 1The silane production system of this utility model further includes a dichlorosilane light tower reflux tank 22 and a dichlorosilane light tower reflux pump 37. Specifically, the dichlorosilane light tower reflux tank 22 is connected to the dichlorosilane light tower condenser 21 and the dichlorosilane light tower reflux pump 37, respectively. The dichlorosilane light tower reflux pump 37 is connected to the dichlorosilane light tower reflux tank 22 and the dichlorosilane light tower 5, respectively. The dichlorosilane light tower reflux tank 22 recovers the chlorosilane in the dichlorosilane light tower condenser 21 to the dichlorosilane light tower 5 through the dichlorosilane light tower reflux pump 37. Example: The pressure of the dichlorosilane light-light ... Figure 1 The original system (hereinafter referred to as the original system) is reused. The heat source for the reboiler 20 of the dichlorosilane light removal tower comes from the heat carrier, and the cold source for the condenser 21 of the dichlorosilane light removal tower comes from the refrigerant.

[0039] As a further embodiment of this utility model, such as Figure 1 The silane production system of this invention includes a bottom pump 34 for a monochlorosilane light component removal tower, and is disposed between a monochlorosilane light component removal tower 3 and a monochlorosilane heavy component removal tower 4. For example, the bottom material of the monochlorosilane light component removal tower 3 is pressurized by the bottom pump 34 and then sent to the monochlorosilane heavy component removal tower 4 for heavy component removal.

[0040] As some other embodiments of this utility model, such as Figure 1 The silane production system of this invention includes a monochlorosilane de-weighting tower reflux tank 17, which is connected to a monochlorosilane de-weighting tower condenser 16 and a monochlorosilane de-weighting tower reflux pump 35. The monochlorosilane de-weighting tower reflux tank 17 can recover the chlorosilane in the monochlorosilane de-weighting tower condenser 16 to the monochlorosilane de-weighting tower 4 via the monochlorosilane de-weighting tower reflux pump 35. Another material path of the monochlorosilane de-weighting tower reflux pump 35 is used as product, which is then stored as product in a monochlorosilane product cooler 18 and then in a monochlorosilane product storage tank 19. The monochlorosilane de-weighting tower reflux pump 35 is connected to the monochlorosilane de-weighting tower reflux tank 17, the monochlorosilane de-weighting tower 4, and the monochlorosilane product cooler 18.

[0041] In a further embodiment, the monochlorosilane product buffer tank 19 in the silane production system of this invention can be provided in two or more configurations, depending on the downstream buffering time and requirements. Furthermore, a condenser can be installed at the top of the monochlorosilane product buffer tank 19, and this condenser can be directly connected to the monochlorosilane product buffer tank 19. An electric heater or other heater can also be added to the bottom of the monochlorosilane product buffer tank 19, with the condenser and heater working together to maintain the pressure and temperature of the monochlorosilane product buffer tank 19. Additionally, this invention may also include an adsorption column, and the adsorption column is positioned after the monochlorosilane product buffer tank 19 to ensure the quality of the monochlorosilane and dichlorosilane products.

[0042] As some other embodiments of this utility model, such as Figure 1 The silane production system of this utility model further includes a dichlorosilane deweighting tower reflux tank 25, which is connected to a dichlorosilane deweighting tower condenser 24 and a dichlorosilane deweighting tower reflux pump 39. The dichlorosilane deweighting tower reflux tank 25 can recover the chlorosilane in the dichlorosilane deweighting tower condenser 24 to the dichlorosilane deweighting tower 6 through the dichlorosilane deweighting tower reflux pump 39. The dichlorosilane deweighting tower reflux pump 39 is connected to the dichlorosilane deweighting tower reflux tank 25, the dichlorosilane deweighting tower 6, and the dichlorosilane product buffer tank 26. For example: The pressure of the dichlorosilane de-burdening tower 6 is controlled at 0.1~0.6 MPag by the reboiler 23 of the dichlorosilane de-burdening tower, and the temperature is controlled at 20~50℃ by the condenser 24 of the dichlorosilane de-burdening tower, so that dichlorosilane is recovered to the reflux tank 25 of the dichlorosilane de-burdening tower. Forced external reflux is carried out by the reflux pump 39 of the dichlorosilane de-burdening tower. A portion of the material is sent as product to the dichlorosilane product buffer tank 26 for storage or buffering. The heat source of the reboiler 23 of the dichlorosilane de-burdening tower comes from the heat carrier, and the cold source of the condenser 24 of the dichlorosilane de-burdening tower comes from the refrigerant.

[0043] In addition, there are some embodiments, such as Figure 1 The silane production system described in this utility model includes a bottom pump 36 for a monochlorosilane deweighting tower, which is connected to the bottom of the monochlorosilane deweighting tower 4. This pump can pressurize the bottom material of the monochlorosilane deweighting tower 4 for recycling. For example, the bottom material of the monochlorosilane deweighting tower 4, after being pressurized by the bottom pump 36, is returned to the existing original silane production system. Figure 1 The original system (referred to as the original system in Chinese) is reused.

[0044] As some examples, such as Figure 1The silane production system described in this utility model further includes a dichlorosilane deweighting tower bottom pump 40, which is connected to the bottom of the dichlorosilane deweighting tower 6, enabling the bottom material of the dichlorosilane deweighting tower 6 to be pressurized and recycled. For example: the bottom material of the dichlorosilane deweighting tower 6, after being pressurized by the dichlorosilane deweighting tower bottom pump 40, is returned to the existing original silane production system (…). Figure 1 The original system (referred to as the original system in Chinese) is reused.

[0045] As can be seen, in the silane production system described in this utility model, some materials are adsorbed and distilled, and multiple light and heavy component removal systems are used to produce high-purity monochlorosilane and dichlorosilane. This achieves the increase of product variety without affecting silane production, and also realizes the ultimate recycling of light and heavy components.

[0046] Preferably, the tower bodies of the chlorosilane separation tower condenser 8, monochlorodichloro separation tower condenser 10, monochlorosilane light-weight removal tower condenser 13, monochlorosilane heavy-weight removal tower condenser 16, dichlorosilane light-weight removal tower condenser 21, and dichlorosilane heavy-weight removal tower condenser 24 in the silane production system of this invention can be directly connected to the top of the corresponding chlorosilane separation tower 1, monochlorodichloro separation tower 2, monochlorosilane light-weight removal tower 3, monochlorosilane heavy-weight removal tower 4, dichlorosilane light-weight removal tower 5, and dichlorosilane heavy-weight removal tower 6 for internal reflux control. Furthermore, the light or heavy components at the top or bottom of the monochlorodichloro separation tower 2, monochlorosilane light-weight removal tower 3, monochlorosilane heavy-weight removal tower 4, dichlorosilane light-weight removal tower 5, and dichlorosilane heavy-weight removal tower 6 in the silane production system of this invention can be recovered. Alternatively, depending on the actual recovery situation, they can be discharged to a waste gas treatment system for processing.

[0047] It is also worth noting that, such as Figure 1 The heat source in the silane production system described in this utility model can be heat transfer oil, steam, or other heating media as the heat carrier for use in the reboilers 7 and 9 of the chlorosilane separation tower, 12 of the chlorosilane light-removal tower, 15 of the chlorosilane heavy-removal tower, 20 of the dichlorosilane light-removal tower, and 23 of the dichlorosilane heavy-removal tower. The coolant can be low-temperature methanol-water, propylene glycol aqueous solution, or other low-temperature media as the coolant for use in the condensers 8 and 10 of the chlorosilane separation tower, 13 of the MCS light-removal tower, 16 of the MCS heavy-removal tower, 18 of the MCS product cooler, 21 of the DCS light-removal tower, and 24 of the DCS heavy-removal tower.

[0048] Furthermore, it is worth noting that the chlorosilane feed adsorption column 27, monochlorosilane feed adsorption column 28, and dichlorosilane feed adsorption column 29 in the silane production system of this invention can be set in two or more, and can be switched when adsorption is saturated. The chlorosilane feed adsorption column 27, monochlorosilane feed adsorption column 28, and dichlorosilane feed adsorption column 29 in the silane production system are mainly used for boron and phosphorus adsorption, but other element adsorption columns can also be used, and resin, molecular sieve, or other more efficient adsorption materials can be used.

[0049] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can occur depending on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A silane production system, characterized in that, include: The upper part of the chlorosilane separation tower is connected to the chlorosilane separation tower condenser and the monochlorodichloro separation tower, and the lower part is connected to the chlorosilane separation tower reboiler, and receives the conveyed mixed chlorosilanes. A condenser for a chlorosilane separation tower is used to control the temperature in the chlorosilane separation tower within a preset range and to recover the chlorosilanes in the chlorosilane separation tower back to the chlorosilane separation tower. A reboiler for a chlorosilane separation tower is used to control the pressure in the chlorosilane separation tower within a preset range. The upper part of the monochlorodichloro separation tower is connected to the monochlorodichloro separation tower condenser and the monochlorosilane light removal tower, and the lower part is connected to the monochlorodichloro separation tower reboiler and the dichlorosilane light removal tower. A condenser for a monochlorodichloro separation tower is used to control the temperature in the monochlorodichloro separation tower within a preset range and to recover chlorosilanes in the monochlorodichloro separation tower back to the monochlorodichloro separation tower. The reboiler for the monochlorodichloro separation tower is used to control the pressure in the monochlorodichloro separation tower within a preset range. The monochlorosilane light-weight removal tower is connected to the condenser of the monochlorosilane light-weight removal tower at the top, and to the reboiler and the heavy-weight removal tower of the monochlorosilane light-weight removal tower at the bottom, respectively. A condenser for a monochlorosilane light removal tower is used to control the temperature in the monochlorosilane light removal tower within a preset range and to recover the chlorosilane in the monochlorosilane light removal tower back to the monochlorosilane light removal tower. A reboiler for a monochlorosilane light removal tower is used to control the pressure in the monochlorosilane light removal tower within a preset range. The upper part of the monochlorosilane deweighting tower is connected to the monochlorosilane deweighting tower condenser and the monochlorosilane product buffer tank, and the lower part is connected to the monochlorosilane deweighting tower reboiler. A condenser for a monochlorosilane de-weighting tower is used to control the temperature in the monochlorosilane de-weighting tower within a preset range and to recover the chlorosilane in the monochlorosilane de-weighting tower back to the monochlorosilane de-weighting tower. A monochlorosilane product buffer tank is used to store or buffer materials in a monochlorosilane deweighting tower. A monochlorosilane product cooler is installed between the monochlorosilane deweighting tower and the monochlorosilane product buffer tank; A reboiler for a monochlorosilane deweighting tower is used to control the pressure in the monochlorosilane deweighting tower within a preset range. The dichlorosilane light-weight removal tower is connected to the condenser of the dichlorosilane light-weight removal tower at the top, and to the reboiler and the heavy-weight removal tower of the dichlorosilane light-weight removal tower at the bottom. The dichlorosilane light-light-removal tower condenser is used to control the temperature in the dichlorosilane light-light-removal tower within a preset range and to recover the chlorosilane in the dichlorosilane light-light-removal tower back to the dichlorosilane light-light-removal tower. The reboiler for the dichlorosilane light removal tower is used to control the pressure in the dichlorosilane heavy removal tower within a preset range. The upper part of the dichlorosilane deweighting tower is connected to the dichlorosilane deweighting tower condenser and the dichlorosilane product buffer tank, and the lower part is connected to the dichlorosilane deweighting tower reboiler. The dichlorosilane light removal tower bottom pump is located between the dichlorosilane light removal tower and the dichlorosilane heavy removal tower; The condenser for the dichlorosilane de-weighting tower is used to control the temperature in the dichlorosilane de-weighting tower within a preset range and to recover the chlorosilane in the dichlorosilane de-weighting tower back to the dichlorosilane de-weighting tower. Dichlorosilane product buffer tank, used to store or buffer materials in dichlorosilane deweighting tower; The reboiler for the dichlorosilane deweighting tower is used to control the pressure in the dichlorosilane deweighting tower within a preset range.

2. The silane production system according to claim 1, characterized in that, include: The chlorosilane feed adsorption column is connected to the pipeline that transports the mixed chlorosilane and the chlorosilane separation tower, respectively, to remove impurities in the mixed chlorosilane and then transfer it to the chlorosilane separation tower.

3. The silane production system according to claim 1, characterized in that, include: A bottom pump for a chlorosilane separation tower is connected to the bottom of the chlorosilane separation tower and is used to pressurize the mixed chlorosilanes in the bottom of the chlorosilane separation tower for recycling.

4. The silane production system according to claim 1, characterized in that, include: The reflux tank of the monochlorodichloro separation tower is connected to the condenser of the monochlorodichloro separation tower and the reflux pump of the monochlorodichloro separation tower, and is used to recover the chlorosilane in the condenser of the monochlorodichloro separation tower back to the monochlorodichloro separation tower through the reflux pump of the monochlorodichloro separation tower. The reflux pump for the monochlorodichloro separation tower is connected to the reflux tank of the monochlorodichloro separation tower and the monochlorodichloro separation tower, respectively.

5. The silane production system according to claim 1, characterized in that, It includes a monochlorosilane feed adsorption column, and is installed between a monochlorodichloro separation tower and a monochlorosilane light removal tower; It also includes: a bottom pump for a monochlorodichloro separation tower and a dichlorosilane feed adsorption column, wherein the bottom pump for the monochlorodichloro separation tower is connected to the bottom of the monochlorodichloro separation tower and the dichlorosilane feed adsorption column, respectively, and the dichlorosilane feed adsorption column is connected to the dichlorosilane light removal tower.

6. The silane production system according to claim 1, characterized in that, include: The monochlorosilane light tower reflux tank is connected to the monochlorosilane light tower condenser and the monochlorosilane light tower reflux pump, respectively, and is used to recover the chlorosilane in the monochlorosilane light tower condenser to the monochlorosilane light tower through the monochlorosilane light tower reflux pump. The reflux pump for the monochlorosilane light removal tower is connected to the reflux tank and the monochlorosilane light removal tower, respectively. It also includes: a dichlorosilane light tower reflux tank, which is connected to the dichlorosilane light tower condenser and the dichlorosilane light tower reflux pump respectively, and is used to recover the chlorosilane in the dichlorosilane light tower condenser to the dichlorosilane light tower through the dichlorosilane light tower reflux pump; The dichlorosilane light tower reflux pump is connected to the dichlorosilane light tower reflux tank and the dichlorosilane light tower, respectively.

7. The silane production system according to claim 1, characterized in that, It includes a bottom pump for the monochlorosilane light removal tower and is installed between the monochlorosilane light removal tower and the monochlorosilane heavy removal tower.

8. The silane production system according to claim 1, characterized in that, include: The reflux tank of the monochlorosilane de-weighting tower is connected to the condenser of the monochlorosilane de-weighting tower and the reflux pump of the monochlorosilane de-weighting tower, respectively, and is used to recover the chlorosilane in the condenser of the monochlorosilane de-weighting tower to the monochlorosilane de-weighting tower through the reflux pump of the monochlorosilane de-weighting tower. The reflux pump for the monochlorosilane deweighting tower is connected to the reflux tank and the monochlorosilane deweighting tower, respectively. It also includes: a dichlorosilane de-weighting tower reflux tank, which is connected to the dichlorosilane de-weighting tower condenser and the dichlorosilane de-weighting tower reflux pump respectively, and is used to recover the chlorosilane in the dichlorosilane de-weighting tower condenser to the dichlorosilane de-weighting tower through the dichlorosilane de-weighting tower reflux pump; The dichlorosilane deweighting tower reflux pump is connected to the dichlorosilane deweighting tower reflux tank and the dichlorosilane deweighting tower, respectively.

9. The silane production system according to claim 1, characterized in that, This includes adding a heater to the bottom of a buffer tank for monochlorosilane products, and adding a heater to the bottom of a buffer tank for dichlorosilane products.

10. The silane production system according to claim 1, characterized in that, include: The bottom pump of the monochlorosilane deweighting tower is connected to the bottom of the monochlorosilane deweighting tower and is used to pressurize the bottom material of the monochlorosilane deweighting tower for recycling. It also includes: a dichlorosilane deweighting tower bottom pump, connected to the bottom of the dichlorosilane deweighting tower, used to pressurize the bottom material of the dichlorosilane deweighting tower for recycling.

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