Vacuum deaeration apparatus

Abstract

The application relates to a vacuum defoaming device, which comprises a plurality of defoaming chambers, a vacuum switching system connected with the plurality of defoaming chambers, the vacuum switching system being used for adjusting the vacuum degree of the defoaming chambers, and a plurality of temperature control mechanisms, the plurality of temperature control mechanisms being arranged in one-to-one correspondence with the plurality of defoaming chambers, and the temperature control mechanisms being used for controlling the temperature in the defoaming chambers. The application can realize the operation of independently controlling the temperature of each defoaming chamber by arranging the plurality of defoaming chambers and arranging the temperature control mechanisms in one-to-one correspondence with the defoaming chambers, that is, a plurality of batches of materials of different formulations can be simultaneously treated at the same time, the defoaming of the materials is adapted to the temperature requirements of the materials, and therefore the production efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of degassing technology, and in particular to a vacuum degassing device. Background Technology

[0002] Vacuum degassing machines are key equipment in fields such as electronic packaging, polymer material preparation, precision optical device manufacturing, and biomedical material processing. Their core function is to remove air bubbles from the interior of materials through a vacuum negative pressure environment, thereby improving the density and performance stability of products. However, existing degassing equipment has the following drawbacks: it cannot process multiple batches of materials / multiple formulations of materials simultaneously; that is, it cannot adapt to the temperature requirements of different materials for degassing at the same time, resulting in extremely low production efficiency. Utility Model Content

[0003] Therefore, this application needs to provide a vacuum degassing device that can improve production efficiency.

[0004] The vacuum degassing equipment provided in this application includes:

[0005] Multiple defoaming chambers;

[0006] A vacuum switching system, connected to multiple degassing chambers, is used to adjust the vacuum level of the degassing chambers; and

[0007] Multiple temperature control mechanisms are provided, and each of the multiple temperature control mechanisms is configured in a one-to-one correspondence with a multiple defoaming chamber. The temperature control mechanisms are used to control the temperature inside the defoaming chamber.

[0008] In one embodiment, the degassing chamber is provided with a vacuum interface and a pressure dividing hood, the vacuum interface being connected to the pressure dividing hood and the vacuum switching system; when the vacuum switching system is running, the pressure dividing hood is used to disperse the gas in the degassing chamber to form an annular laminar flow.

[0009] In one embodiment, the pressure divider is mounted in an arched shape at the vacuum interface.

[0010] In one embodiment, the number of the plurality of defoaming chambers is eight.

[0011] In one embodiment, the vacuum switching system includes a low vacuum adjustment module, a high vacuum adjustment module, multiple low vacuum valves, and multiple high vacuum valves; the low vacuum adjustment module is used to adjust the degassing chamber to a low vacuum state, and the high vacuum adjustment module is used to adjust the degassing chamber to a high vacuum state.

[0012] The low vacuum regulating module is connected to the degassing chambers one by one through multiple low vacuum valves, and the high vacuum regulating module is connected to the degassing chambers one by one through multiple high vacuum valves.

[0013] In one embodiment, the temperature control mechanism includes: a temperature sensor, a heater, and a temperature control module; both the temperature sensor and the heater are disposed within the degassing chamber; wherein,

[0014] The temperature control module is connected to the temperature sensor and the heater. The temperature sensor is used to monitor the real-time temperature inside the degassing chamber, and the heater is used to heat the degassing chamber. The temperature control module is used to control the heater to heat the degassing chamber according to the real-time temperature.

[0015] In one embodiment, the vacuum degassing equipment further includes a nitrogen supply system and a plurality of nitrogen valves, wherein the plurality of nitrogen valves are configured one-to-one with the plurality of degassing chambers, and the nitrogen supply system is used to keep the degassing chambers in a nitrogen state.

[0016] In one embodiment, the degassing chamber includes a chamber body and a sealing cover disposed on the chamber body; when the vacuum degassing device is in operation, the sealing cover is locked to the chamber body by a quick clamp.

[0017] In one embodiment, a sealing groove is provided on the inner wall of the chamber body, and a fluororubber sealing ring is provided in the sealing groove.

[0018] In one embodiment, the defoaming chamber is equipped with a vacuum gauge.

[0019] The vacuum degassing equipment provided in this application has multiple degassing chambers, each equipped with a corresponding temperature control mechanism. This allows for independent temperature control of each degassing chamber, enabling degassing to be performed simultaneously to meet the temperature requirements of different materials, thereby improving production efficiency. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the first structure of the vacuum degassing device provided in the embodiments of this application.

[0022] Figure 2 This is a schematic diagram of a second structure of the vacuum degassing device provided in the embodiments of this application.

[0023] Figure 3 This is a schematic diagram of a third structure of the vacuum degassing device provided in the embodiments of this application.

[0024] Figure 4 This is a schematic diagram of a fourth structure of the vacuum degassing device provided in the embodiments of this application.

[0025] Figure 5 This is a first-view schematic diagram of the vacuum degassing device provided in the embodiments of this application.

[0026] Figure 6 This is a first-view schematic diagram of the vacuum degassing device provided in the embodiments of this application.

[0027] Figure 7 This is a schematic diagram of the structure of a degassing chamber in a vacuum degassing device provided in an embodiment of this application. Detailed Implementation

[0028] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0029] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intervening component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0030] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application's specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0031] Please see Figure 1 , Figure 1 This is a schematic diagram of a first structure of the vacuum degassing device provided in an embodiment of this application. Figure 1As shown, the vacuum degassing device 1000 provided in this embodiment includes multiple degassing chambers 100, a vacuum switching system 200, and multiple temperature control mechanisms 300. The vacuum switching system 200 is connected to the multiple degassing chambers 100. The vacuum switching system 200 is used to adjust the vacuum level of the degassing chambers 100. The multiple temperature control mechanisms 300 are configured in a one-to-one correspondence with the multiple degassing chambers 100; that is, each degassing chamber 100 is equipped with a corresponding temperature control mechanism 300, and each degassing chamber 100 is independently temperature-controlled. The temperature control mechanisms 300 are used to control the temperature within the degassing chambers 100.

[0032] The vacuum switching system 200 refers to a set of equipment or components responsible for generating and maintaining a vacuum, typically including a vacuum pump, connecting pipes, valves, and possibly a control system. A vacuum state refers to a condition where the gas pressure inside the degassing chamber 100 is significantly lower than standard atmospheric pressure. This gas pressure level needs to meet the requirements of the degassing process, for example, it may be a high vacuum, low vacuum, and / or medium vacuum range.

[0033] The temperature control mechanism 300 refers to a device or component specifically designed to regulate and maintain temperature, typically including a heating element, a temperature sensor, and a temperature controller. In some embodiments, the temperature controller can receive signals from the temperature sensor, compare them with a user-set target temperature, and calculate control commands using a specific algorithm, sending these commands to the heating element. This allows for more precise temperature control within the degassing chamber 100, adapting to the temperature sensitivity of different materials. For example, this specific algorithm could be a PID algorithm.

[0034] Furthermore, the vacuum degassing device 1000 provided in this application embodiment can be configured with multiple degassing chambers 100 and multiple temperature control mechanisms 300 according to actual needs. For example, the number of multiple degassing chambers 100 and multiple temperature control mechanisms 300 in this application embodiment can be 4, 8, 10, 16, etc., and is not limited here.

[0035] The vacuum degassing equipment 1000 provided in this application embodiment has multiple degassing chambers 100, and each degassing chamber 100 is equipped with a corresponding temperature control mechanism 300, so that the temperature of each degassing chamber 100 can be controlled independently; that is, at the same time, multiple batches / multiple formulations of materials can be processed simultaneously, and the degassing can be adapted to the temperature requirements of different materials, thereby improving production efficiency.

[0036] In the vacuum degassing equipment 1000 provided in this application embodiment, different degassing chambers 100 can process different batches of materials simultaneously, significantly improving the output per unit time. Different formulations or types of materials often require different optimal degassing temperatures. At this time, each degassing chamber 100 can independently set and precisely control the most suitable degassing temperature according to the characteristics of the materials inside, avoiding the problem that a single degassing chamber 100 can only be set to one temperature, which leads to some materials not being able to be degassed under optimal conditions.

[0037] In some embodiments, please refer to Figure 2 , Figure 2 This is a schematic diagram of a second structure of the vacuum degassing device provided in an embodiment of this application. (See attached diagram.) Figure 2 As shown, in the vacuum degassing equipment 2000 provided in this embodiment, the vacuum switching system 200 includes a low vacuum module 2001, a high vacuum module 2002, multiple low vacuum valves 2003, and multiple high vacuum valves 2004. The low vacuum adjustment module 2001 is used to adjust the degassing chamber 100 to a low vacuum state, and the high vacuum adjustment module 2002 is used to adjust the degassing chamber 100 to a high vacuum state.

[0038] It should be noted that low vacuum and high vacuum refer to the gas pressure inside the degassing chamber 100 being maintained within a specific range. For example, the user can set the vacuum level inside the degassing chamber 100 to be stable between -70 kPa and -80 kPa under low vacuum conditions; and can set the vacuum level inside the degassing chamber 100 to reach 5 × 10^-2 Pa under high vacuum conditions.

[0039] The low vacuum regulating module 2001 is connected to multiple degassing chambers 100 one-to-one via multiple low vacuum valves 2003, and the high vacuum regulating module 2002 is connected to multiple degassing chambers 100 one-to-one via multiple high vacuum valves 2004. That is, each degassing chamber 100 is equipped with a corresponding low vacuum valve 2003 and a high vacuum valve 2004, and the user can open the corresponding low vacuum valve 2003 and high vacuum valve 2004 of the degassing chamber 100 as needed.

[0040] In practical use, using only the low vacuum module 2001 is insufficient to completely remove microbubbles, resulting in poor degassing. Using only the high vacuum module 2002 causes large bubbles inside the material to expand too rapidly, leading to material splashing, slow pre-evacuation, and a lengthy overall process. Therefore, the vacuum degassing equipment 2000 provided in this embodiment can first pre-evacuate the degassing chamber 100 for a preset time using the low vacuum module 2001. This quickly removes most of the large bubbles in the material, thereby improving the overall degassing efficiency. Then, the high vacuum module 2002 performs a deep evacuation of the degassing chamber 100 for a preset time, precisely removing the remaining microbubbles and ensuring the degassing quality of high-purity materials.

[0041] In some embodiments, the low-vacuum module 2001 can be externally connected to the factory's low-vacuum pipeline network; this eliminates the need for a separate coarse pump, allowing direct use of the factory's centralized low-vacuum source, saving costs on the vacuum degassing equipment 2000, reducing floor space, energy consumption, and maintenance requirements. The high-vacuum module 2002 can be a built-in vane vacuum pump; using a vane pump is a mature technology, highly reliable, and relatively simple to maintain, capable of stably achieving the high vacuum required for degassing. Integrating it into the vacuum degassing equipment 2000 results in high integration and convenient operation. The pre-evacuation time of the low-vacuum module 2001 and the deep evacuation time of the high-vacuum module 2001 can be set according to actual needs. The pre-evacuation time is adjustable, allowing for a reasonable pre-evacuation time to be set based on material characteristics (such as viscosity, initial gas content, and volatile components), with the goal of rapidly evacuating the degassing chamber 100 from atmospheric pressure to an intermediate pressure, preventing violent boiling or splashing of the material. The deep vacuum time is adjustable. It can be set to achieve the target high vacuum and maintain degassing according to the material's requirements for the final vacuum level, the difficulty of bubble removal, and the process efficiency requirements. This ensures sufficient degassing while avoiding excessive vacuuming that could lead to changes in material properties or energy waste.

[0042] The vacuum degassing equipment 2000 provided in this application embodiment, by setting up multiple degassing chambers 100, and each degassing chamber 100 being equipped with a corresponding temperature control mechanism 300, can achieve independent temperature control of each degassing chamber 100, thereby improving production efficiency. Furthermore, the vacuum degassing equipment 2000 provided in this application embodiment uses a low-vacuum module 2001 and a high-vacuum module 2002 to perform vacuuming treatment on the degassing chambers 100, improving the overall degassing efficiency and ensuring the degassing quality of high-purity materials.

[0043] In some embodiments, please refer to Figure 3 , Figure 3 This is a schematic diagram of a third structure of the vacuum degassing device provided in an embodiment of this application. Figure 3As shown, in the vacuum degassing equipment 3000 provided in this embodiment, the temperature control mechanism 300 includes a temperature sensor 3001, a heater 3002, and a temperature control module 3003. The temperature control module 3003 is connected to the temperature sensor 3001 and the heater 3002. The temperature sensor 3001 is used to monitor the real-time temperature inside the degassing chamber 100, the heater 3002 is used to heat the degassing chamber 100, and the temperature control module 3003 is used to control the heater 3002 to heat the degassing chamber 100 according to the real-time temperature.

[0044] The temperature sensor 3001 can be a type K thermocouple temperature sensor, and a type K thermocouple temperature sensor is embedded in the stage within each degassing chamber 100. The heater 3002 can be a PTC24VDC low-pressure heater, embedded in the bottom heating element of the stage within each degassing chamber 100. The temperature control module 3003 can be a temperature control instrument with PID self-tuning function, which can display the current temperature and the set temperature in real time.

[0045] In practical use, the temperature inside each degassing chamber 100 is controlled by its own temperature control mechanism 300. That is, the temperature sensor 3001 detects the real-time temperature inside the degassing chamber 100 and sends the real-time temperature to the temperature control module 3003. The temperature control module 3003 sends a control command to the heater 3002 based on the real-time temperature. The heater 3002 heats the degassing chamber 100 based on the control command, thereby enabling independent temperature control of each degassing chamber 100. In other words, multiple batches / formulas of materials can be processed simultaneously, adapting to the temperature requirements of different materials for degassing, thereby improving production efficiency.

[0046] The vacuum degassing equipment 3000 provided in this application embodiment has multiple degassing chambers 100, and each degassing chamber 100 is equipped with a temperature sensor 3001, a heater 3002 and a temperature control module 3003, thereby enabling independent temperature control of each degassing chamber 100 and improving production efficiency.

[0047] In some embodiments, please refer to Figure 4 , Figure 4 This is a schematic diagram of a fourth structure of the vacuum degassing device provided in an embodiment of this application. Figure 4 As shown, in the vacuum degassing device 4000 provided in the embodiments of this application, the vacuum degassing device 4000 also includes a nitrogen supply system 400 and a plurality of nitrogen valves 4001. The nitrogen supply system 400 is used to keep the degassing chamber 100 in a nitrogen state.

[0048] It should be noted that the nitrogen supply system 400 refers to a set of equipment or components responsible for generating and maintaining the nitrogen state, typically including a nitrogen source, supply pipelines, etc. The nitrogen state refers to the gas environment inside the degassing chamber 100 being primarily nitrogen.

[0049] Multiple nitrogen valves 4001 are configured one-to-one with multiple degassing chambers 100. That is, each degassing chamber 100 is equipped with a corresponding nitrogen valve 4001. The nitrogen supply system 400 is connected to the corresponding degassing chamber 100 through the nitrogen valves 4001. Users can open the nitrogen valves 4001 corresponding to the degassing chamber 100 as needed.

[0050] In actual use, after the material in the degassing chamber 100 has been degassed, the nitrogen valve 4001 corresponding to the degassing chamber 100 will be opened, and nitrogen will be released into the degassing chamber 100 through the nitrogen supply system 400. When a certain amount of nitrogen is released, the nitrogen valve 4001 will be automatically closed, thereby maintaining a nitrogen state in the degassing chamber 100, protecting the material from the adverse effects of oxygen, and ensuring the safety of the degassing process and product quality.

[0051] The nitrogen protection mechanism provided in this application is not simply a "nitrogen purging" step, but a crucial closed-loop link in the vacuum degassing process that ensures safety, improves quality, and maintains effectiveness. Together with the previously mentioned multi-chamber independent temperature control, modular vacuum system (external low vacuum + built-in high vacuum pump), and programmable vacuum timing sequence, it constitutes a highly automated, safe, reliable, flexible, and efficient advanced vacuum degassing solution capable of handling high-end sensitive materials.

[0052] The vacuum degassing equipment 4000 provided in this application embodiment, by setting up multiple degassing chambers 100, and each degassing chamber 100 being equipped with a corresponding temperature control mechanism 300, can achieve independent temperature control of each degassing chamber 100, thereby improving production efficiency. Furthermore, the vacuum degassing equipment 4000 provided in this application embodiment, by setting up a nitrogen supply system 400 and multiple nitrogen valves 4001, maintains a nitrogen state within the degassing chambers 100, protecting the materials from the adverse effects of oxygen and ensuring the safety of the degassing process and product quality.

[0053] In some embodiments, each degassing chamber 100 is equipped with a vacuum gauge. The vacuum gauge can display the vacuum level within the degassing chamber 100 in real time. The temperature control mechanism 300 can also display the temperature within the degassing chamber 100 in real time. The vacuum degassing equipment provided in this application embodiment, by monitoring the vacuum level and temperature of each degassing chamber 100 in real time, can avoid poor product consistency caused by fluctuations in process parameters, and can more accurately understand the vacuum and temperature conditions within each degassing chamber 100, thereby improving product consistency.

[0054] This application embodiment achieves transparency in the degassing process by independently configuring a vacuum gauge for each degassing chamber 100, i.e., real-time monitoring of the key process status of each degassing chamber 100; achieves precise control, i.e., ensuring that the set vacuum level and temperature are accurately executed and eliminating fluctuations; achieves consistent quality, i.e., minimizing differences between degassing chambers and batch-to-batch fluctuations to ensure high product consistency; achieves data traceability, i.e., meeting the needs of quality management and process optimization; and achieves reliable operation, i.e., assisting in equipment diagnosis and maintenance.

[0055] The following explanation assumes there are 8 defoaming chambers. Please refer to [link / reference]. Figure 5 , Figure 6 , Figure 5 This is a first-view schematic diagram of the vacuum degassing equipment provided in the embodiments of this application. Figure 6 This is a second-view schematic diagram of the vacuum degassing device provided in the embodiments of this application.

[0056] like Figure 5 , Figure 6 As shown in the figure, the vacuum degassing equipment provided in this application embodiment includes a degassing equipment body 1100 and eight degassing chambers 100 disposed on the degassing equipment body 1100. The degassing equipment body 1100 is constructed of high-quality industrial aluminum profiles with a powder-coated surface, making it aesthetically pleasing and corrosion-resistant. The eight degassing chambers 100 are distributed in a 2*4 matrix on the top of the degassing equipment body 1100. The bottom of the degassing equipment body 1100 is equipped with universal casters 600 with brakes and leveling pads 500, thereby ensuring the flexibility of the vacuum degassing equipment during movement and the stability during positioning.

[0057] This embodiment of the application, by incorporating omnidirectional casters 600 with brakes, allows the vacuum degassing equipment to move easily in any direction on a horizontal plane. This enables the vacuum degassing equipment to be repositioned or its layout adjusted within a limited space as needed, significantly reducing the force required to move the equipment and improving work efficiency and safety. Once the vacuum degassing equipment has reached the target position, the wheels can be locked by pressing the brake device, preventing them from rolling or rotating. Locking the wheels provides a stable foundation for the vacuum degassing equipment, preventing accidental slippage or movement during operation.

[0058] This embodiment of the application sets leveling pads 500 so that the vacuum degassing equipment can adapt to uneven ground; that is, by independently adjusting the height of the leveling pads at the four corners of the vacuum degassing equipment, the unevenness of the ground can be compensated, so that the support surface of the vacuum degassing equipment can be restored to a horizontal state.

[0059] The vacuum degassing equipment is equipped with swivel casters 600 and leveling pads 500 at each of its four diagonal points. Those skilled in the art can adjust the number of swivel casters 600 and leveling pads 500 according to actual needs.

[0060] This embodiment of the application combines the use of swivel casters 600 with brakes and leveling pads 500. When the vacuum degassing equipment needs to be moved, all the swivel casters 600 can be released to easily move the vacuum degassing equipment to a new position. When the vacuum degassing equipment needs to work stably, all the swivel casters 600 can be stepped down to lock the wheels and prevent them from rolling. The height of each leveling pad 500 can be adjusted until the vacuum degassing equipment is stably and horizontally supported on the ground. This ensures that the vacuum degassing equipment is in an extremely stable and horizontal state, suitable for precision operation, measurement, and processing, ensuring safe operation and avoiding accidents or errors caused by shaking or slipping.

[0061] For further details, please refer to Figure 7 , Figure 7 This is a schematic diagram of the structure of a degassing chamber in the vacuum degassing equipment provided in an embodiment of this application. Figure 7 As shown, the degassing chamber 100 includes a chamber body 101 and a sealing cover 102 disposed on the chamber body 101. The chamber body 101 provides a pressure-bearing space, connects to a vacuum source, and forms a sealing base; the sealing cover 102 provides a sealing interface, supports the sealing ring, is equipped with a locking mechanism to ensure airtightness, and can integrate an observation window and safety devices. That is, the chamber body 101 and the sealing cover 102 are inseparable, together constituting the airtight, pressure-resistant, and controllable vacuum environment necessary to achieve efficient vacuum degassing.

[0062] The chamber body 101 is the main space where the entire degassing process takes place, and it needs to accommodate the material to be processed. During the degassing process, the interior of the chamber body 101 needs to be evacuated to a vacuum, and the chamber body 101 must have sufficient structural hardness and rigidity. For example, the chamber body 101 can be made of hard aluminum in one piece and subjected to natural oxidation treatment to enhance structural strength and corrosion resistance.

[0063] During operation of the vacuum degassing equipment, the sealing cap 102 is locked to the chamber body 101 via the quick-release clamp 103. The quick-release clamp 103 is the core mechanism for achieving rapid, powerful, and reliable locking of the sealing cap 102 to the chamber body 101. It utilizes the mechanical gain principle of an eccentric wheel or cam to convert the operator's relatively small operating force into a huge sealing clamping force, effectively resisting the upward pressure of atmospheric pressure during vacuum operation and ensuring the absolute airtightness of the degassing chamber during the degassing process. Its rapid operation significantly improves work efficiency, while the self-locking design and safety interlock ensure the safety of equipment operation.

[0064] In some embodiments, a sealing groove 104 is provided on the inner wall of the chamber body 101, and a fluororubber sealing ring 105 is disposed within the sealing groove 104. The sealing groove 104 on the inner wall of the chamber provides precise positioning, compression control, anti-extrusion protection, and safe containment space for the sealing ring. The fluororubber sealing ring 105, with its excellent vacuum sealing performance, chemical resistance, temperature resistance, and low gas release, becomes an ideal barrier against high pressure differentials and harsh media environments. The sealing groove 104 and the fluororubber sealing ring 105 work together to form a highly intact static sealing interface, which is the core guarantee for ensuring that the equipment maintains zero leakage for a long time under repeated vacuuming, high temperature, and chemical exposure conditions.

[0065] In actual use, the fluororubber sealing ring 105 is precisely embedded in the sealing groove 104 on the inner wall of the chamber, secured by its own elasticity or a small amount of adhesive. The sealing cap 102 is pressed against the chamber body 101 by a quick-release clamp 103. The clamping force causes the sealing ring 105 to elastically deform within the sealing groove 104. During vacuuming, the external atmospheric pressure presses the sealing cap 102 more forcefully against the chamber body 101, further strengthening the seal. The low permeability of the fluororubber sealing ring 105 prevents gas leakage, and its low release rate maintains the purity of the chamber. The sealing groove 104 constrains the fluororubber sealing ring 105, preventing it from being squeezed out under high pressure gradients. After degassing, the quick-release clamp 103 is released, and the fluororubber sealing ring 105, relying on its elastic rebound, disengages from the tight contact with the sealing cap 102, facilitating easy opening of the cap.

[0066] Specifically, the chamber body 101 is equipped with a material platform 106, a vacuum interface 107, a pressure divider hood 108, a chamber heating element interface 109, a temperature sensor interface 110, and a chamber door switch 111. The material platform 106 is used to hold the material to be degassed. The vacuum interface 107 can be connected to a low vacuum regulating module via a pipe and a low vacuum valve 2003, and can also be connected to a high vacuum regulating module via a pipe and a high vacuum valve 2004. Furthermore, the vacuum interface 107 can be connected to a nitrogen atmosphere maintaining mechanism via a pipe and a nitrogen valve 4001. The chamber heating element interface 108 can be connected to a heating wire channel. A temperature sensor can be installed at the temperature sensor interface 110.

[0067] It should be noted that the figure only illustrates that the low vacuum regulation module, high vacuum regulation module, and nitrogen atmosphere maintenance mechanism share a single vacuum interface 107 and a single pipe. Those skilled in the art can adjust the number of vacuum interfaces 107 and pipes as needed. For example, the low vacuum regulation module, high vacuum regulation module, and nitrogen atmosphere maintenance mechanism may each have their own corresponding vacuum interface 107 and pipe; alternatively, the low vacuum regulation module and high vacuum regulation module may share a single vacuum interface 107 and a single pipe, while the nitrogen atmosphere maintenance mechanism may have its own independent vacuum interface 107 and pipe.

[0068] The vacuum interface 107 is connected to the pressure divider shroud 108 and the vacuum switching system. When the vacuum switching system is running, the pressure divider shroud 108 disperses the gas in the degassing chamber 100 to form an annular laminar flow. When the vacuum switching system is running, the gas in the chamber body 100 gathers towards the vacuum interface 107. At this time, the airflow velocity directly impacts the product is 15 m / s. Installing the pressure divider shroud 108 allows the atmosphere to disperse around the material carrier 106 to form an annular laminar flow, reducing the airflow velocity to below 3 m / s. This effectively prevents small materials from bouncing and scratching the product during initial evacuation, ensuring product yield.

[0069] The pressure divider shroud 108 is arched and installed at the vacuum interface 107. That is, the pressure divider shroud 108 adopts an arched fluid guiding structure design. The pressure divider shroud 108 directly covers the top of the vacuum interface 107, forming a physical shield. When the vacuum switching system is running, the gas in the chamber body 101, which would normally accelerate linearly towards the suction port, is forcibly split into two streams by the pressure divider shroud 108. These streams diffuse along the curved surface of the pressure divider shroud 108 around the material platform 106. The dispersed airflow forms a uniform annular laminar flow along the edge of the material platform 106, avoiding turbulence or localized high-pressure areas. This pressure divider shroud 108 reconstructs the airflow path through its arched structure, physically transforming the destructive linear airflow into a gentle annular laminar flow, fundamentally solving the problem of material damage in the initial stage of vacuum operation.

[0070] Furthermore, the pressure divider shroud 108 is made of tetrafluoroethylene (PTFE). PTFE has a coefficient of friction of less than 0.04, resulting in extremely low airflow resistance, reducing pressure loss and energy consumption. PTFE has a temperature resistance range of -200℃ to 260℃, enabling it to withstand vacuum thermal cycling and resist thermal deformation. PTFE is resistant to all solvent corrosion, tolerates cleaning agents, and does not contaminate the chamber environment. PTFE has extremely low surface energy, preventing the adsorption of particles and reducing sources of airflow disturbance. PTFE's ultra-low gas release rate maintains high vacuum cleanliness, avoiding contamination of materials.

[0071] The vacuum degassing equipment provided in this application embodiment, by setting up multiple degassing chambers 100, and each degassing chamber 100 corresponding to a temperature control mechanism 300, can achieve independent temperature control of each degassing chamber 100, thereby improving production efficiency. Furthermore, the vacuum degassing equipment 4000 provided in this application embodiment, by setting up a pressure-dividing hood 108, can fundamentally solve the problem of material damage in the initial stage of vacuum.

[0072] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0073] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. A vacuum degassing device, characterized in that, include: Multiple defoaming chambers; A vacuum switching system is provided, which is connected to multiple degassing chambers and is used to adjust the vacuum level of the degassing chambers. as well as Multiple temperature control mechanisms are provided, and each of the multiple temperature control mechanisms is configured in a one-to-one correspondence with a multiple defoaming chamber. The temperature control mechanisms are used to control the temperature inside the defoaming chamber.

2. The vacuum degassing equipment according to claim 1, characterized in that, The degassing chamber is equipped with a vacuum interface and a pressure dividing hood. The vacuum interface is connected to the pressure dividing hood and the vacuum switching system. When the vacuum switching system is running, the pressure dividing hood is used to disperse the gas in the degassing chamber to form an annular laminar flow.

3. The vacuum degassing equipment according to claim 2, characterized in that, The pressure divider is installed in an arch shape at the vacuum interface.

4. The vacuum degassing equipment according to claim 1, characterized in that, The number of defoaming chambers is 8.

5. The vacuum degassing equipment according to claim 1, characterized in that, The vacuum switching system includes a low vacuum adjustment module, a high vacuum adjustment module, multiple low vacuum valves, and multiple high vacuum valves; the low vacuum adjustment module is used to adjust the degassing chamber to a low vacuum state, and the high vacuum adjustment module is used to adjust the degassing chamber to a high vacuum state. The low vacuum regulating module is connected to the degassing chambers one by one through multiple low vacuum valves, and the high vacuum regulating module is connected to the degassing chambers one by one through multiple high vacuum valves.

6. The vacuum degassing equipment according to claim 1, characterized in that, The temperature control mechanism includes: a temperature sensor, a heater, and a temperature control module; wherein... The temperature control module is connected to the temperature sensor and the heater. The temperature sensor is used to monitor the real-time temperature inside the degassing chamber, and the heater is used to heat the degassing chamber. The temperature control module is used to control the heater to heat the degassing chamber according to the real-time temperature.

7. The vacuum degassing equipment according to claim 1, characterized in that, The vacuum degassing equipment also includes a nitrogen supply system and multiple nitrogen valves, with each nitrogen valve corresponding to one of the multiple degassing chambers. The nitrogen supply system is used to keep the degassing chambers in a nitrogen state.

8. The vacuum degassing equipment according to claim 1, characterized in that, The degassing chamber includes a chamber body and a sealing cover disposed on the chamber body; when the vacuum degassing equipment is running, the sealing cover is locked to the chamber body by a quick clamp.

9. The vacuum degassing equipment according to claim 8, characterized in that, A sealing groove is provided on the inner wall of the chamber body, and a fluororubber sealing ring is provided in the sealing groove.

10. The vacuum degassing equipment according to claim 1, characterized in that, The defoaming chamber is equipped with a vacuum gauge.

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