A perfluoropolyether purification device for semiconductor heat conduction
Patent Information
- Application Number
- CN202522374147.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-10
- Publication Date
- 2026-10-23
- Estimated Expiration
- 2035-11-10
AI Technical Summary
[0003]然而，在生产、运输和使用过程中，全氟聚醚极易引入金属离子、固体颗粒物、溶解气 体及微量水分等杂质
本实用新型中在对全氟聚醚原料进行纯化时，可以输送泵将原料罐内的原料输送到过滤 器的内部，并由串联的粗过滤器与精过滤器进行二级过滤处理，多级过滤处理使得过滤过程 更加分步和可控，防止过滤器过早堵塞，延长每个过滤器的使用寿命，对原料过滤后会再通 过管道抽送到脱气罐的内部，原料液体通过布液器在脱气罐内均匀分布，再向下流经填料， 形成巨大比表面积的液膜，同时加热管对脱气罐进行加热，抽真空泵将脱气罐内溶解液体中 的气体和微量水分迅速逸出并被真空泵抽出，进而达到与原料进行快速纯化的效果，纯化完 成后的全氟聚醚液体会被输送泵输送到收集罐内，整个纯化过程更加高效。
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Figure CN224877520U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of chemical purification technology, specifically relating to a perfluoropolyether purification device for semiconductor thermal conductivity. Background Technology
[0002] Perfluoropolyethers (PFPEs) are chemical materials with special properties, commonly used in thermal management applications in the semiconductor industry, especially as heat transfer media or coolants. Due to their unique chemical stability, low volatility, and good thermal stability, PFPEs exhibit excellent performance in high-temperature and extreme environments, making them suitable for demanding semiconductor devices.
[0003] However, during production, transportation, and use, perfluoropolyethers are highly susceptible to introducing impurities such as metal ions, solid particles, dissolved gases, and trace amounts of moisture. These impurities significantly reduce their insulation performance, cause electromigration under an electric field, leading to corrosion and short circuits in the metal circuitry of semiconductor components, and form a heat-insulating layer on the heating surface, severely affecting heat dissipation efficiency. Ultimately, this results in decreased chip performance or even failure. Therefore, perfluoropolyethers require purification treatment.
[0004] Existing purification equipment for perfluoropolyethers is complex and requires multiple processes, resulting in long purification cycles, low efficiency, and dispersed units that are prone to secondary contamination during transfer. Furthermore, the long processing time not only reduces production efficiency but also adversely affects the physical properties of perfluoropolyethers, especially in mass production, which can impact the overall production cycle and cost. Utility Model Content
[0005] The purpose of this invention is to provide a perfluoropolyether purification device for semiconductor thermal conductivity, which integrates the purification steps into one unit and can continuously operate the purification process, reducing intermediate transfer, lowering energy loss, avoiding secondary pollution, and achieving high-efficiency purification production.
[0006] The specific technical solution adopted by this utility model is as follows: A perfluoropolyether purification device for semiconductor thermal conductivity includes a raw material tank. At least two stages of filters are installed on one side of the raw material tank, and the filters are connected to the raw material tank via pipes. A degassing tank is installed on one side of the filters, and a collection tank is installed on one side of the degassing tank and connected to an adjacent filter. A delivery pump is installed at the bottom of one side of the degassing tank. The delivery end of the delivery pump is connected to the top of the collection tank via a pipe, and the suction end of the delivery pump is connected to the bottom of the degassing tank via a pipe. A vacuum pump is installed at the front of the degassing tank, and the vacuum pump is connected to the top of the degassing tank via a pipe. A liquid distributor and packing are installed inside the degassing tank.
[0007] Preferably, the surface of the degassing tank is fitted with a jacket, and the inner wall of the jacket is connected to a heating tube, which is spirally wound around the surface of the degassing tank.
[0008] Preferably, the two-stage filter is divided into a coarse filter and a fine filter, wherein the coarse filter has a filtration accuracy of 1-5 μm and the fine filter has a filtration accuracy of 0.1-0.5 μm.
[0009] Preferably, a metal ion detector is connected to the top of the collection tank, and the bottom end of the metal ion detector extends into the interior of the collection tank.
[0010] Preferably, the packing material is honeycomb-shaped and located at the bottom of the liquid distributor.
[0011] Preferably, the top of the raw material tank is connected to a liquid filling pipe, and a cover plate is installed on the top hinge of the liquid filling pipe.
[0012] Preferably, the front side of the collection tank is provided with an observation window, which is made of explosion-proof glass.
[0013] The technical effects achieved by this utility model are as follows: In this invention, when purifying perfluoropolyether raw materials, a transfer pump can transport the raw materials from the raw material tank to the interior of the filter, where a series of coarse and fine filters perform secondary filtration. This multi-stage filtration process makes the filtration process more step-by-step and controllable, preventing premature clogging of the filters and extending the service life of each filter. After filtration, the raw materials are then pumped into the degassing tank through a pipeline. The raw material liquid is evenly distributed in the degassing tank through a distributor and then flows downward through the packing material, forming a liquid film with a large specific surface area. At the same time, the heating tube heats the degassing tank, and a vacuum pump rapidly removes the gas and trace amounts of moisture from the dissolved liquid in the degassing tank, thereby achieving rapid purification of the raw materials. After purification, the perfluoropolyether liquid is transported to the collection tank by a transfer pump, making the entire purification process more efficient. Attached Figure Description
[0014] Figure 1 is a three-dimensional schematic diagram of the overall structure of this utility model; Figure 2 is a three-dimensional schematic diagram of the internal structure of the degassing tank of this utility model; Figure 3 is a three-dimensional side view sectional view of the degassing tank of this utility model; Figure 4 is a three-dimensional schematic diagram of the internal structure of the jacket and degassing tank of this utility model.
[0015] The attached diagram lists the components represented by each number as follows: 1. Raw material tank; 2. Filter; 3. Degassing tank; 301. Liquid distributor; 302. Packing material; 4. Collection tank; 5. Transfer pump; 6. Vacuum pump; 701. Jacket; 702. Heating tube; 8. Metal ion detector; 9. Liquid addition pipe; 10. Observation window. Detailed Implementation
[0016] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.
[0017] As shown in Figure 1- Figure 4 As shown, a perfluoropolyether purification device for semiconductor thermal conductivity includes a raw material tank 1. At least two-stage filters 2 are installed on one side of the raw material tank 1. The filters 2 are connected to the raw material tank 1 via pipes and a liquid pump. The liquid pump is located between the two filters 2 and connected via pipes, delivering the raw material from the raw material tank 1 to the filters 2 respectively. A degassing tank 3 is installed on one side of the filters 2. A collecting tank 4 is installed on one side of the degassing tank 3 and connected to the adjacent filter 2. A transfer pump 5 is installed at the bottom of one side of the degassing tank 3. The liquid delivery end of the transfer pump 5 is connected to the top of the collecting tank 4 via a pipe, and the liquid extraction end of the transfer pump 5 is connected to the bottom of the degassing tank 3 via a pipe. A vacuum pump 6 is installed at the front of the degassing tank 3 and connected to the top of the degassing tank 3 via a pipe. The internal components are equipped with a liquid distributor 301 and packing material 302. Through two processes, filtration and degassing, the purification efficiency of perfluoropolyether can be greatly improved. The filtration process removes large particles and small impurities, while the degassing process removes dissolved gases and moisture. The combination of these two processes accelerates the purification speed, making the entire purification process more efficient and compact. This avoids contamination caused by intermediate transfers and further improves the purification efficiency.
[0018] As shown in Figure 3 and Figure 4 As shown, a jacket 701 is fitted over the surface of the degassing tank 3. A heating tube 702 is connected to the inner wall of the jacket 701. The heating tube 702 is spirally wound around the surface of the degassing tank 3. The purification of perfluoropolyether in the degassing tank 3 requires a degassing reaction at a high temperature. The uniform heating provided by the jacket 701 and the heating tube 702 keeps the temperature controlled at 50-70 degrees Celsius, ensuring that the degassing process is carried out at the optimal temperature. This allows the perfluoropolyether liquid to maintain stable thermodynamic conditions, thereby improving the degassing effect and product quality.
[0019] As shown in Figure 1, the two-stage filter 2 consists of a coarse filter and a fine filter. The coarse filter has a filtration accuracy of 1-5 μm, and the fine filter has a filtration accuracy of 0.1-0.5 μm. When the perfluoropolyether liquid enters the filter 2 for filtration, it first passes through the coarse filter with a filtration accuracy of 1-5 μm to remove larger mechanical impurity particles. Then, it enters the fine filter with a filtration accuracy of 0.1-0.5 μm to effectively remove impurities in stages. This not only improves filtration efficiency but also extends the service life of each filter 2, avoids premature clogging, and reduces maintenance costs.
[0020] As shown in Figure 1, a metal ion detector 8 is connected to the top of the collection tank 4. The bottom of the metal ion detector 8 extends into the interior of the collection tank 4. By installing the metal ion detector 8, the concentration of metal ions can be detected and monitored in real time after the perfluoropolyether is collected into the collection tank 4, ensuring that the purity of the finally collected perfluoropolyether meets the product quality requirements and avoiding the negative impact of metal ions on subsequent semiconductor applications.
[0021] As shown in Figure 3 and Figure 4 As shown, the packing 302 is honeycomb shaped and located at the bottom of the liquid distributor 301. When the perfluoropolyether liquid flows through the honeycomb packing 302, it can form a liquid film with a huge specific surface area, which greatly increases the contact area between the gas and the liquid, effectively improves the degassing effect, helps to remove dissolved gases in the liquid more quickly, improves the gas-liquid contact efficiency, promotes the rapid release of dissolved gases, and enhances the degassing effect.
[0022] As shown in Figure 1, the top of the raw material tank 1 is connected to a liquid addition pipe 9. A cover plate is installed on the top hinge of the liquid addition pipe 9. Through the liquid addition pipe 9, the operator can easily add perfluoropolyether raw material into the raw material tank 1, making the addition of perfluoropolyether liquid faster and more convenient, without having to open the entire raw material tank 1 for operation. The cover plate can tightly seal the opening of the liquid addition pipe 9 to prevent air, dust or other impurities from entering the raw material tank 1, thereby ensuring the cleanliness and quality of the raw material in the tank.
[0023] As shown in Figure 1, an observation window 10 is provided on the front side of the collection tank 4. The observation window 10 is made of explosion-proof glass. Through the observation window 10, the staff can clearly see the perfluoropolyether liquid inside the collection tank 4, avoiding the need for the staff to open the collection tank 4 for inspection. Moreover, the explosion-proof glass material usually has strong corrosion resistance, avoiding the deterioration or damage of the explosion-proof glass surface due to corrosion, thereby extending the service life of the observation window 10 and reducing maintenance and replacement costs.
[0024] The working principle of this utility model is as follows: When purifying perfluoropolyether raw materials, a liquid pump can be used to transport the raw materials in the raw material tank 1 to the interior of the filter 2, where a series of coarse and fine filters perform secondary filtration. This multi-stage filtration process makes the filtration process more step-by-step and controllable, preventing premature clogging of the filter 2 and extending the service life of each filter 2. After filtration, the raw material is pumped into the degassing tank 3 through a pipeline and a delivery pump 5. The raw material liquid is evenly distributed in the degassing tank 3 through a liquid distributor 301, and then flows downward through the packing 302 to form a liquid film with a large specific surface area. At the same time, the heating tube 702 heats the degassing tank 3, and the vacuum pump 6 rapidly removes the gas and trace amounts of water in the dissolved liquid in the degassing tank 3, thereby achieving rapid purification of the raw materials. After purification, the perfluoropolyether liquid is transported to the collection tank 4 by the delivery pump 5, making the entire purification process more efficient.
[0025] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.
Claims
1. A perfluoropolyether purification device for semiconductor thermal conductivity, characterized in that: The system includes a raw material tank (1), with at least two-stage filters (2) on one side of the raw material tank (1). The filters (2) are connected to the raw material tank (1) via a pipe. A degassing tank (3) is provided on one side of the filters (2). A collection tank (4) is provided on one side of the degassing tank (3) and is connected to the adjacent filter (2). A delivery pump (5) is installed at the bottom of one side of the degassing tank (3). The delivery end of the delivery pump (5) is connected to the top of the collection tank (4) via a pipe. The pumping end of the delivery pump (5) is connected to the bottom of the degassing tank (3) via a pipe. A vacuum pump (6) is installed on the front side of the degassing tank (3). The vacuum pump (6) is connected to the top of the degassing tank (3) via a pipe. A liquid distributor (301) and packing (302) are installed inside the degassing tank (3).
2. The perfluoropolyether purification device for semiconductor thermal conductivity according to claim 1, characterized in that: The surface of the degassing tank (3) is fitted with a jacket (701), and the inner wall of the jacket (701) is connected to a heating tube (702), which is spirally wound around the surface of the degassing tank (3).
3. The perfluoropolyether purification device for semiconductor thermal conductivity according to claim 1, characterized in that: The two-stage filter (2) is divided into a coarse filter and a fine filter. The coarse filter has a filtration accuracy of 1-5 μm, and the fine filter has a filtration accuracy of 0.1-0.5 μm.
4. The perfluoropolyether purification device for semiconductor thermal conductivity according to claim 1, characterized in that: A metal ion detector (8) is connected to the top of the collection tank (4), and the bottom end of the metal ion detector (8) extends through the collection tank. (4) inside.
5. The perfluoropolyether purification device for semiconductor thermal conductivity according to claim 1, characterized in that: The packing (302) is honeycomb shaped, and the packing (302) is located at the bottom of the liquid distributor (301).
6. The perfluoropolyether purification device for semiconductor thermal conductivity according to claim 1, characterized in that: The top of the raw material tank (1) is connected to a liquid addition pipe (9), and a cover plate is installed on the top hinge of the liquid addition pipe (9).
7. The perfluoropolyether purification device for semiconductor thermal conductivity according to claim 1, characterized in that: The front side of the collection tank (4) is provided with an observation window (10), which is made of explosion-proof glass.