Rare earth polishing solution filtering, regenerating and recycling equipment
Patent Information
- Application Number
- CN202522583341.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-05
- Publication Date
- 2026-10-23
- Estimated Expiration
- 2035-12-05
AI Technical Summary
[0005]为解决现有的稀土抛光液过滤再生循环利用设备不便于对过滤物进行清理排放的技术问题,本实用新型提供一种稀土抛光液过滤再生循环利用设备
[0015]本实用新型提供一种稀土抛光液过滤再生循环利用设备,通过下液管可以将储液箱内的稀土抛光液导入过滤箱内,通过滤网可以对稀土抛光液进行过滤,通过导液斗可以将过滤后的稀土抛光液导入过滤箱的底部内壁上进行沉淀,通过刮除机构可以将滤网上的过滤物沿清理开口刮向收集盒的内部,通过清液抽离机构可以抽出沉淀后的清液,通过拧下密封盖并通过排渣口可以排出收集盒内收集的过滤物,通过第一伺服电机和锥齿轮带动横轴转动,横轴通过转动板带动盖板转动,从而控制盖板的开合,通过第二伺服电机带动螺杆转动,通过螺杆转动可以带动滑动板和刮板横向移动,通过刮板可以将滤网上的过滤物沿清理开口刮向收集盒的内部,通过电动缸可以带动L型板、抽液泵和浊度传感器上下移动,通过浊度传感器可以对稀土抛光液的浊度进行监测,从而将抽液泵伸入至稀土抛光液沉淀层和清液层之间,通过抽液泵将清液抽出并通过排液管排出,通过空气泵和加压管可以将空气注入储液箱内,从而提升储液箱内的气压,使稀土抛光液能够更为快速的通过滤网,从而提升过滤效率,通过进液管将稀土抛光液导入储液箱内,通过进液阀可以控制进液管的通断,通过雷达液位传感器可以对储液箱内的液位进行监测,通过排渣管可以排出过滤箱内的沉淀物,通过排渣阀可以控制排渣管的通断。
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Figure CN224877545U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of rare earth polishing fluid filtration and regeneration technology, and in particular to a rare earth polishing fluid filtration, regeneration and recycling device. Background Technology
[0002] Rare earth polishing slurry is a high-performance polishing material formulated with rare earth oxides (such as cerium oxide and lanthanum oxide) as the core abrasive. Due to its unique chemical activity and excellent mechanical grinding performance, it is widely used in the surface processing of precision workpieces such as optical glass, semiconductor wafers, and LCD displays. It can efficiently remove micro-defects while creating an ultra-smooth surface, and features high polishing speed, high precision, and long service life. Through circulating filtration and regeneration technology, its core components can be recycled at a high rate, significantly reducing resource consumption and production costs, making it an indispensable key consumable in modern high-end manufacturing. The filtration and regeneration process of rare earth polishing slurry requires the use of rare earth polishing slurry filtration, regeneration, and recycling equipment.
[0003] However, existing rare earth polishing fluid filtration, regeneration, and recycling equipment is inconvenient for cleaning and discharging the filtered material.
[0004] Therefore, it is necessary to provide a rare earth polishing fluid filtration, regeneration, and recycling device to solve the above-mentioned technical problems. Utility Model Content
[0005] To address the technical problem that existing rare earth polishing slurry filtration, regeneration, and recycling equipment is inconvenient for cleaning and discharging the filtered material, this utility model provides a rare earth polishing slurry filtration, regeneration, and recycling equipment.
[0006] The rare earth polishing fluid filtration, regeneration, and recycling equipment provided by this utility model includes: a filter box with a storage tank fixedly installed on the top; a liquid drain pipe located at the bottom of the storage tank and extending into the interior of the filter box; a filter screen and a liquid guide hopper installed on the inner wall of the filter box; a cleaning opening opened on one side of the filter box; a collection box fixedly installed on one side of the filter box; a scraping mechanism installed on the inner wall of the filter box for scraping the filter material on the filter screen; and a clear liquid extraction mechanism installed on the inner wall of the storage tank for extracting the clear liquid after sedimentation.
[0007] Preferably, the bottom of the collection box is provided with a slag discharge port, and a sealing cap is installed on the slag discharge port.
[0008] Preferably, the inner wall of the collection box is provided with a shielding mechanism, the shielding mechanism comprising: a horizontal shaft rotatably mounted on the inner wall of the collection box; a rotating plate fixedly sleeved on the horizontal shaft; a cover plate fixedly mounted on the rotating plate; a first servo motor fixedly mounted on the inner wall of the collection box; and a bevel gear fixedly mounted on the output shaft of the first servo motor and meshing with the horizontal shaft.
[0009] Preferably, the scraping mechanism includes: a screw rotatably mounted on the inner wall of the filter box; a second servo motor fixedly mounted on one side of the filter box and connected to the screw via a coupling; a sliding plate threaded onto the screw; a scraper fixedly mounted on the bottom of the sliding plate; and a limiting rod fixedly mounted on the inner wall of the filter box and slidably connected to the sliding plate.
[0010] Preferably, the clear liquid extraction mechanism includes: an electric cylinder fixedly installed on the inner wall of the filter box; an L-shaped plate fixedly installed on the output rod of the electric cylinder; a liquid extraction pump installed at the bottom of the L-shaped plate; a drain pipe disposed at the liquid outlet end of the liquid extraction pump and extending to the outside of the filter box; and a turbidity sensor installed on the liquid extraction pump.
[0011] Preferably, the top of the liquid storage tank is provided with a pressurizing mechanism, which includes: an air pump fixedly installed on the top of the liquid storage tank; a pressurizing pipe provided at the exhaust end of the air pump and connected to the liquid storage tank; a one-way valve provided on the pressurizing pipe; and an exhaust pipe with an exhaust valve installed on the liquid storage tank.
[0012] Preferably, the liquid storage tank is provided with a liquid inlet pipe, the liquid inlet pipe is provided with a liquid inlet valve, and a radar liquid level sensor is provided on the inner wall of the top of the liquid storage tank.
[0013] Preferably, the filter box is equipped with a slag discharge pipe, the slag discharge pipe is equipped with a slag discharge valve, and the liquid storage tank is equipped with a controller.
[0014] Compared with related technologies, the rare earth polishing fluid filtration, regeneration, and recycling equipment provided by this utility model has the following beneficial effects:
[0015] This invention provides a rare earth polishing liquid filtration, regeneration, and recycling device. Rare earth polishing liquid from a storage tank is introduced into a filter box via a drain pipe. The liquid is filtered through a filter screen, and the filtered liquid is guided to the bottom inner wall of the filter box for sedimentation via a guide bucket. A scraping mechanism scrapes the filter material on the filter screen along the cleaning opening into the collection box. A clear liquid extraction mechanism extracts the settled clear liquid. The collected filter material is discharged from the collection box by unscrewing the sealing cap and through the slag discharge port. A first servo motor and bevel gear drive a horizontal shaft to rotate, which in turn drives a cover plate to rotate, controlling the opening and closing of the cover plate. A second servo motor drives a screw to rotate, which in turn moves a sliding plate and a scraper laterally. The scraper removes the filter material... The filter material on the screen is scraped into the collection box through the cleaning opening. An electric cylinder moves the L-shaped plate, the liquid pump, and the turbidity sensor up and down. The turbidity sensor monitors the turbidity of the rare earth polishing solution, allowing the liquid pump to be inserted between the sediment layer and the clear liquid layer. The clear liquid is then extracted and discharged through the drain pipe. An air pump and a pressurization pipe inject air into the storage tank, increasing the air pressure inside the tank and allowing the rare earth polishing solution to pass through the filter screen more quickly, thus improving filtration efficiency. The rare earth polishing solution is introduced into the storage tank through the inlet pipe, and the inlet valve controls the opening and closing of the inlet pipe. A radar level sensor monitors the liquid level in the storage tank. The sediment in the filter box is discharged through the slag discharge pipe, and the slag discharge valve controls the opening and closing of the slag discharge pipe. Attached Figure Description
[0016] Figure 1 A schematic diagram of a preferred embodiment of the rare earth polishing fluid filtration, regeneration and recycling equipment provided by this utility model;
[0017] Figure 2 for Figure 1 An enlarged schematic diagram of part A shown in the image;
[0018] Figure 3 for Figure 1 An enlarged schematic diagram of part B shown in the image;
[0019] Figure 4 for Figure 1 An enlarged schematic diagram of part C shown in the figure.
[0020] The following are the labels in the diagram: 1. Filter box; 2. Storage tank; 3. Downflow pipe; 4. Filter screen; 5. Guide hopper; 6. Cleaning opening; 7. Collection box; 8. Slag discharge port; 9. Sealing cover; 10. Horizontal shaft; 11. Rotating plate; 12. Cover plate; 13. First servo motor; 14. Bevel gear; 15. Screw; 16. Second servo motor; 17. Sliding plate; 18. Scraper; 19. Limiting rod; 20. Electric cylinder; 21. L-shaped plate; 22. Liquid pump; 23. Drain pipe; 24. Turbidity sensor; 25. Air pump; 26. Pressurization pipe; 27. Check valve; 28. Exhaust pipe; 29. Exhaust valve; 30. Inlet pipe; 31. Inlet valve; 32. Radar level sensor; 33. Slag discharge pipe; 34. Slag discharge valve. Detailed Implementation
[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0022] Please refer to the following: Figure 1-4 ,in, Figure 1 A schematic diagram of a preferred embodiment of the rare earth polishing fluid filtration, regeneration and recycling equipment provided by this utility model; Figure 2 for Figure 1 An enlarged schematic diagram of part A shown in the image; Figure 3 for Figure 1 An enlarged schematic diagram of part B shown in the image; Figure 4 for Figure 1 The enlarged schematic diagram of section C shown in the figure. The rare earth polishing slurry filtration, regeneration, and recycling equipment includes: a filter box 1 with a storage tank 2 fixedly installed on the top; a downcomer pipe 3 located at the bottom of the storage tank 2 and extending into the filter box 1; a filter screen 4 and a guide bucket 5 installed on the inner wall of the filter box 1; a cleaning opening 6 opened on one side of the filter box 1; a collection box 7 fixedly installed on one side of the filter box 1; a scraping mechanism installed on the inner wall of the filter box 1 for scraping the filter material on the filter screen 4; and a clear liquid extraction mechanism installed on the inner wall of the storage tank 2 for extracting the clear liquid after sedimentation. The rare earth polishing slurry in the storage tank 2 can be introduced into the filter box 1 through the downcomer pipe 3. The rare earth polishing slurry can be filtered through the filter screen 4. The filtered rare earth polishing slurry can be introduced into the bottom inner wall of the filter box 1 for sedimentation through the guide bucket 5. The filter material on the filter screen 4 can be scraped along the cleaning opening 6 into the collection box 7 through the scraping mechanism. The clear liquid after sedimentation can be extracted through the clear liquid extraction mechanism.
[0023] The bottom of the collection box 7 is provided with a slag discharge port 8, and a sealing cover 9 is installed on the slag discharge port 8. By unscrewing the sealing cover 9 and discharging the filter material collected in the collection box 7 through the slag discharge port 8, the filter material can be discharged.
[0024] The inner wall of the collection box 7 is provided with a shielding mechanism, which includes: a horizontal shaft 10 rotatably mounted on the inner wall of the collection box 7; a rotating plate 11 fixedly sleeved on the horizontal shaft 10; a cover plate 12 fixedly mounted on the rotating plate 11; a first servo motor 13 fixedly mounted on the inner wall of the collection box 7, the first servo motor 13 being of model ECMA-C20807RS; and a bevel gear 14 fixedly mounted on the output shaft of the first servo motor 13 and meshing with the horizontal shaft 10. The first servo motor 13 and the bevel gear 14 drive the horizontal shaft 10 to rotate, and the horizontal shaft 10 drives the cover plate 12 to rotate through the rotating plate 11, thereby controlling the opening and closing of the cover plate 12.
[0025] The scraping mechanism includes: a screw 15 rotatably mounted on the inner wall of the filter box 1; a second servo motor 16 fixedly mounted on one side of the filter box 1 and connected to the screw 15 via a coupling, the second servo motor 16 being an MSMF102L1U; a sliding plate 17 threaded onto the screw 15; a scraper 18 fixedly mounted on the bottom of the sliding plate 17; and a limiting rod 19 fixedly mounted on the inner wall of the filter box 1 and slidably connected to the sliding plate 17. The second servo motor 16 drives the screw 15 to rotate, and the rotation of the screw 15 causes the sliding plate 17 and the scraper 18 to move laterally. The scraper 18 scrapes the filtered material on the filter screen 4 along the cleaning opening 6 into the collection box 7.
[0026] The clear liquid extraction mechanism includes: an electric cylinder 20 fixedly installed on the inner wall of the filter box 1; an L-shaped plate 21 fixedly installed on the output rod of the electric cylinder 20; a liquid pump 22 installed at the bottom of the L-shaped plate 21; a drain pipe 23 located at the outlet end of the liquid pump 22 and extending to the outside of the filter box 1; and a turbidity sensor 24 installed on the liquid pump 22. The turbidity sensor 24 is a TSW-10 model. The electric cylinder 20 can drive the L-shaped plate 21, the liquid pump 22, and the turbidity sensor 24 to move up and down. The turbidity sensor 24 can monitor the turbidity of the rare earth polishing liquid, thereby extending the liquid pump 22 between the rare earth polishing liquid sediment layer and the clear liquid layer, and extracting the clear liquid through the liquid pump 22 and discharging it through the drain pipe 23.
[0027] The top of the liquid storage tank 2 is equipped with a pressurization mechanism, which includes: an air pump 25 fixedly installed on the top of the liquid storage tank 2; a pressurization pipe 26 located at the exhaust end of the air pump 25 and connected to the liquid storage tank 2; a one-way valve 27 located on the pressurization pipe 26; and an exhaust pipe 28 with an exhaust valve 29 installed on the liquid storage tank 2. Air can be injected into the liquid storage tank 2 through the air pump 25 and the pressurization pipe 26, thereby increasing the air pressure inside the liquid storage tank 2, allowing the rare earth polishing liquid to pass through the filter screen 4 more quickly, thereby improving the filtration efficiency.
[0028] The storage tank 2 is equipped with an inlet pipe 30 and an inlet valve 31. A radar level sensor 32, model 001-V-LD1, is installed on the inner top wall of the storage tank 2. Rare earth polishing liquid is introduced into the storage tank 2 through the inlet pipe 30. The inlet valve 31 can control the opening and closing of the inlet pipe 30. The radar level sensor 32 can monitor the liquid level in the storage tank 2.
[0029] The filter box 1 is equipped with a slag discharge pipe 33 and a slag discharge valve 34. The liquid storage tank 2 is equipped with a controller. The slag in the filter box 1 can be discharged through the slag discharge pipe 33, and the opening and closing of the slag discharge pipe 33 can be controlled by the slag discharge valve 34.
[0030] The working principle of the rare earth polishing fluid filtration, regeneration, and recycling equipment provided by this utility model is as follows:
[0031] Rare earth polishing slurry is introduced into the storage tank 2 through the inlet pipe 30. The inlet valve 31 controls the opening and closing of the inlet pipe 30. The radar level sensor 32 monitors the liquid level in the storage tank 2. The rare earth polishing slurry in the storage tank 2 is introduced into the filter box 1 through the outlet pipe 3. The rare earth polishing slurry is filtered through the filter screen 4. The filtered rare earth polishing slurry is guided to the bottom inner wall of the filter box 1 for sedimentation through the guide funnel 5. Air is injected into the storage tank 2 through the air pump 25 and the pressurization pipe 26, thereby increasing the air pressure in the storage tank 2 and enabling the rare earth polishing slurry to be processed more quickly. The material passes quickly through the filter screen 4, thereby improving the filtration efficiency. When it is necessary to clean the filter material on the filter screen 4, the first servo motor 13 and the bevel gear 14 drive the horizontal shaft 10 to rotate. The horizontal shaft 10 drives the cover plate 12 to rotate through the rotating plate 11, thereby opening the cover plate 12. The second servo motor 16 drives the screw 15 to rotate. The rotation of the screw 15 can drive the sliding plate 17 and the scraper 18 to move laterally. The scraper 18 can scrape the filter material on the filter screen 4 along the cleaning opening 6 into the collection box 7. The filter material collected in the collection box 7 can be discharged by unscrewing the sealing cover 9 and through the slag discharge port 8.
[0032] After the rare earth polishing slurry settles in the filter box 1, the electric cylinder 20 can drive the L-shaped plate 21, the pump 22 and the turbidity sensor 24 to move up and down. The turbidity of the rare earth polishing slurry can be monitored by the turbidity sensor 24. The pump 22 is then inserted between the sediment layer and the clear liquid layer of the rare earth polishing slurry. The clear liquid is then extracted by the pump 22 and discharged through the drain pipe 23.
[0033] The sediment in the filter box 1 can be discharged through the slag discharge pipe 33, and the opening and closing of the slag discharge pipe 33 can be controlled by the slag discharge valve 34.
[0034] Compared with related technologies, the rare earth polishing fluid filtration, regeneration, and recycling equipment provided by this utility model has the following beneficial effects:
[0035] This utility model provides a rare earth polishing liquid filtration, regeneration, and recycling device. The rare earth polishing liquid in the storage tank 2 is introduced into the filter box 1 through the liquid outlet pipe 3. The rare earth polishing liquid is filtered through the filter screen 4. The filtered rare earth polishing liquid is guided to the bottom inner wall of the filter box 1 for sedimentation through the guide hopper 5. A scraping mechanism scrapes the filter material on the filter screen 4 along the cleaning opening 6 into the collection box 7. A clear liquid extraction mechanism extracts the sedimented clear liquid. The collected filter material in the collection box 7 is discharged through the discharge port 8 by unscrewing the sealing cap 9. A first servo motor 13 and a bevel gear 14 drive the horizontal shaft 10 to rotate. The horizontal shaft 10 drives the cover plate 12 to rotate through the rotating plate 11, thereby controlling the opening and closing of the cover plate 12. A second servo motor 16 drives the screw 15 to rotate. The rotation of the screw 15 causes the sliding plate 17 and the scraper 18 to move laterally. The scraper 18 removes the sediment from the filter screen 4. The filtered material is scraped along the cleaning opening 6 into the collection box 7. The electric cylinder 20 can drive the L-shaped plate 21, the liquid pump 22, and the turbidity sensor 24 to move up and down. The turbidity sensor 24 can monitor the turbidity of the rare earth polishing liquid. The liquid pump 22 is then inserted between the rare earth polishing liquid sediment layer and the clear liquid layer. The liquid pump 22 draws out the clear liquid and discharges it through the drain pipe 23. Air can be injected into the storage tank 2 through the air pump 25 and the pressurization pipe 26, thereby increasing the air pressure in the storage tank 2 and allowing the rare earth polishing liquid to pass through the filter screen 4 more quickly, thereby improving the filtration efficiency. The rare earth polishing liquid is introduced into the storage tank 2 through the liquid inlet pipe 30. The liquid inlet valve 31 can control the opening and closing of the liquid inlet pipe 30. The radar liquid level sensor 32 can monitor the liquid level in the storage tank 2. The sediment in the filter box 1 can be discharged through the slag discharge pipe 33. The slag discharge valve 34 can control the opening and closing of the slag discharge pipe 33.
[0036] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A rare earth polishing fluid filtration, regeneration, and recycling device, characterized in that, include: A filter box with a liquid storage tank fixedly installed on top; A drain pipe is installed at the bottom of the storage tank and extends into the interior of the filter box; The filter screen and liquid guide hopper are installed on the inner wall of the filter box; A cleaning opening is provided on one side of the filter box; A collection box fixedly installed on one side of the filter box; A scraping mechanism installed on the inner wall of the filter box for scraping off the filtered material on the filter screen; A clear liquid extraction mechanism is installed on the inner wall of the storage tank for extracting the clear liquid after sedimentation.
2. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 1, characterized in that, The bottom of the collection box has a slag discharge port, and a sealing cap is installed on the slag discharge port.
3. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 2, characterized in that, The inner wall of the collection box is provided with a shielding mechanism, the shielding mechanism comprising: Rotate the horizontal shaft installed on the inner wall of the collection box; A rotating plate fixedly sleeved on the horizontal axis; A cover plate fixedly installed on the rotating plate; A first servo motor is fixedly installed on the inner wall of the collection box; A bevel gear that is fixedly installed on the output shaft of the first servo motor and meshes with the horizontal shaft.
4. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 1, characterized in that, The scraping mechanism includes: Rotate the screw installed on the inner wall of the filter box; A second servo motor is fixedly installed on one side of the filter box and connected to the screw via a coupling; A sliding plate threaded onto the screw; A scraper fixedly installed at the bottom of the sliding plate; A limiting rod is fixedly installed on the inner wall of the filter box and slidably connected to the sliding plate.
5. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 1, characterized in that, The clear liquid extraction mechanism includes: An electric cylinder fixedly installed on the inner wall of the filter box; An L-shaped plate fixedly installed on the output rod of the electric cylinder; A liquid pump installed at the bottom of the L-shaped plate; A drain pipe is installed at the outlet end of the pump and extends to the outside of the filter box; A turbidity sensor is installed on the liquid pump.
6. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 1, characterized in that, The top of the liquid storage tank is equipped with a pressurization mechanism, which includes: An air pump is fixedly installed on the top of the liquid storage tank; A pressurization pipe is installed at the exhaust end of the air pump and connected to the liquid storage tank; A one-way valve is installed on the pressurization pipe; An exhaust pipe with an exhaust valve is installed on the liquid storage tank.
7. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 1, characterized in that, The liquid storage tank is equipped with an inlet pipe, an inlet valve, and a radar level sensor on the top inner wall of the liquid storage tank.
8. The rare earth polishing fluid filtration, regeneration, and recycling equipment according to claim 1, characterized in that, The filter box is equipped with a slag discharge pipe, the slag discharge pipe is equipped with a slag discharge valve, and the liquid storage tank is equipped with a controller.