A dynamic stirring anti-bubble device for glue mixing

Abstract

This utility model discloses a dynamic stirring and anti-bubble device for adhesive mixing, including a stirring tank and an anti-bubble stirring component. The anti-bubble stirring component includes a rotating shaft installed at the center of the stirring tank, with cross-helical blades on the surface of the rotating shaft. Bearings are installed on both sides of the rotating shaft, and a motor is connected to one side of the rotating shaft. This utility model improves the stirring rod by using a bidirectional cross-helical blade as the stirring structure. During stirring, the narrow contact surface of the helical blades makes it difficult for bubbles to form under impact. Furthermore, if bubbles are still generated, the bubble-removing component uses a cylinder to pull a piston, creating negative pressure inside a conical tube, thereby indirectly achieving a suction effect through the cotton plug and directly extracting the bubbles generated inside the device through negative pressure.

Description

Technical Field

[0001] This utility model relates to the field of photoresist stirring technology, and in particular to a dynamic stirring and anti-bubble device for mixing adhesives. Background Technology

[0002] Photoresist mixing is a critical process in semiconductor manufacturing. Precise control of mixing speed, temperature, and time ensures uniform mixing of the photoresist components and eliminates air bubbles, thereby guaranteeing the pattern transfer accuracy of subsequent photolithography processes. This process must be carried out in a cleanroom environment to prevent impurities from affecting the stability of the colloid and to prevent over-mixing from damaging the colloid's molecular structure. Uniform colloid distribution directly affects the clarity and yield of chip circuitry; therefore, intelligent control of the mixing equipment and strict matching of process parameters have become one of the core technical requirements of modern semiconductor production lines.

[0003] Chinese Patent CN213670234U discloses a device for quantitative dispensing of AB glue. This patent includes a fixed plate, with an AB glue dynamic stirring device fixedly connected to its front. A dynamic stirring motor is fixedly connected to the top of the AB glue dynamic stirring device, and a dynamic mixing tube is fixedly connected to its bottom. A connecting plate is fixedly connected to the bottom of the dynamic mixing tube, and a micro-dispensing valve is fixedly connected to the bottom of the AB glue dynamic stirring device, located on the side of the dynamic mixing tube. This utility model relates to the field of AB glue dispensing technology. By setting a connecting plate and connecting its interior to the dynamic mixing tube, intermediate tank, and micro-dispensing valve, the mixed AB glue can enter the intermediate tank. Through a first level sensor and a second level sensor, the AB glue can be continuously replenished without stopping the machine for feeding, thereby improving start-up efficiency and working efficiency.

[0004] In the prior art, photoresist needs to be stirred before use. However, the stirring rod used in the prior art is prone to mixing in air bubbles during the stirring process, which results in the finished photoresist containing a large number of air bubbles and affecting the performance. Therefore, improvements are needed. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a dynamic stirring and anti-bubble device for adhesive mixing.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A dynamic stirring and anti-bubble device for adhesive mixing includes a stirring tank and further includes: The anti-foaming mixing assembly includes a rotating shaft installed at the center of the mixing tank. The surface of the rotating shaft is provided with cross-spiral blades, bearings are provided on both sides of the rotating shaft, and a motor is connected to one side of the rotating shaft.

[0007] Further technical solutions also include: The de-aeration assembly includes a bent pipe installed on one side of the mixing tank, a conical pipe installed on one side of the bent pipe, and an anti-backflow plug inserted into the opening of the conical pipe. The anti-backflow plug is made of cotton padding material.

[0008] A further technical solution includes a piston plate slidably mounted on the belly of a tapered tube, with a pull rod connected to one side of the piston plate and a cylinder connected to one side of the pull rod.

[0009] A further technical solution is that the mixing tank is a one-piece cast structure of a rotating body, with a rotating drum in the middle part of the mixing tank and tapering structures at both ends of the mixing tank.

[0010] A further technical solution involves inserting bearings on both sides of the shaft into the inside of the constriction, with a cap installed on one side of the constriction.

[0011] Further technical solutions also include: Accessories include a feed pipe installed on one side of the mixing tank and a discharge pipe on the other side of the mixing tank. Both the feed pipe and the discharge pipe are filled with rubber plugs during operation.

[0012] A further technical solution involves leaving a millimeter-level gap between the radial dimension of the cross-spiral blades and the inner wall of the mixing tank, with the cross-spiral blades made of stainless steel.

[0013] Compared with the prior art, this utility model provides a dynamic stirring and anti-bubble device for adhesive mixing, which has the following beneficial effects: This invention features a de-bubbling component and an anti-bubbling stirring component. The anti-bubbling stirring component improves the stirring rod by employing bidirectional cross-spiral blades as the stirring structure. During stirring, the narrow contact surface of the spiral blades prevents bubbles from forming due to impact. Furthermore, if bubbles do form, the de-bubbling component uses a cylinder to pull a piston, creating negative pressure inside a conical tube. This indirectly removes the bubbles through the cotton plug, directly extracting them from the device and preventing them from remaining inside the photoresist. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a dynamic stirring and anti-bubble device for adhesive mixing proposed in this utility model; Figure 2 This is a schematic diagram of the longitudinal section of a dynamic stirring and anti-bubble device for adhesive mixing proposed in this utility model; Figure 3 This is an exploded view of the structure of a dynamic stirring and anti-bubble device for adhesive mixing proposed in this utility model; Figure 4 This is a side view of a dynamic stirring and anti-bubble device for mixing adhesives proposed in this utility model.

[0015] In the diagram: 1. Mixing tank; 2. Air-evacuation assembly; 3. Accessories; 4. Anti-foaming mixing assembly; 5. Rotating shaft; 6. Crossed spiral blades; 7. Bearing; 8. Motor; 9. Bend; 10. Conical tube; 11. Anti-backflow plug; 11-1. Piston plate; 12. Pull rod; 13. Cylinder; 14. Feed pipe; 15. Discharge pipe; 16. Rotating drum; 17. Closure; 18. Cover. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model. In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of the present utility model.

[0017] Example 1: Refer to Figure 1 - Figure 4 A dynamic stirring and anti-bubble device for mixing adhesives includes a stirring tank 1, the interior of which is the area for mixing the adhesive. It also includes: The anti-foaming stirring assembly 4 includes a rotating shaft 5 installed at the center of the stirring tank 1. The rotating shaft 5 rotates at the center of the stirring tank 1 under the control of a motor 8. The intersecting spiral blades 6 do not generate significant impact force during rotation, yet the stirring effect is no less than that of the stirring rod, thus preventing the formation of air bubbles. The rotating shaft 5 has intersecting spiral blades 6 on its surface, bearings 7 on both sides of the rotating shaft 5, and a motor 8 is mounted on one side of the rotating shaft 5.

[0018] The aforementioned dynamic stirring and anti-bubble device for adhesive mixing further includes: The de-aeration assembly 2 includes a bent pipe 9 connected to one side of the mixing tank 1. A conical pipe 10 connected to one side of the bent pipe 9 is filled with an anti-backflow plug 11, primarily to prevent backflow during negative pressure de-aeration. The conical pipe 10 is connected to one side of the bent pipe 9, and the anti-backflow plug 11 is inserted into the opening of the conical pipe 10. The anti-backflow plug 11 is made of cotton padding material.

[0019] The aforementioned dynamic stirring and anti-bubble device for adhesive mixing includes a de-bubble assembly 2 further comprising a piston plate 11-1 slidably mounted on the underside of a conical tube 10. The piston plate 11-1 is pulled inside the conical tube 10 under the action of a cylinder 13 and a pull rod 12, thereby creating a negative pressure effect inside the conical tube 10. A pull rod 12 is connected to one side of the piston plate 11-1, and a cylinder 13 is connected to one side of the pull rod 12.

[0020] The aforementioned dynamic stirring and anti-bubble device for adhesive mixing includes a stirring tank 1, which is a rotating, integrally cast structure. Its main function is to ensure the tightness of the stirring tank 1 structure and prevent air leakage. The rotating drum 16 is the stirring part, and the constricted ends 17 on both sides are where the bearings 7 are installed. The rotating drum 16 is located in the middle of the stirring tank 1, and the constricted ends 17 are located at both ends of the stirring tank 1.

[0021] The aforementioned dynamic stirring and anti-bubble device for adhesive mixing includes bearings 7 on both sides of the rotating shaft 5, which are inserted into the interior of the constriction 17, forming the basic structure for the bearings 7. A cap 18 is fitted onto one side of the constriction 17 to enhance the sealing effect.

[0022] The aforementioned dynamic stirring and anti-bubble device for adhesive mixing further includes: Accessory 3 includes a feed pipe 14 that is connected to one side of the mixing tank 1. The feed pipe 14 and the discharge pipe 15 are the input and output points for photoresist material. The discharge pipe 15 is provided on the other side of the mixing tank 1. The feed pipe 14 and the discharge pipe 15 are filled with glue plugs during operation.

[0023] The aforementioned dynamic stirring and anti-bubble device for adhesive mixing has a millimeter-level gap between the radial dimension of the cross-spiral blade 6 and the inner wall of the mixing tank 1 to avoid scratching and ensure effective stirring. The cross-spiral blade 6 is made of stainless steel.

[0024] In the actual design process of this utility model, in order to avoid the following defects existing in the prior art: "In the prior art, photoresist needs to be stirred before use. However, the stirring rod used in the prior art is prone to mixing in air bubbles during the stirring process of photoresist, which results in a large number of air bubbles inside the finished photoresist and affects the use effect. Therefore, it needs to be improved." Therefore, the air bubble removal component 2, accessory 3 and anti-foaming stirring component 4 are specifically proposed.

[0025] Bubble removal component 2: During use, the component uses a motor 8 to control the rotation of the shaft 5 at the center of the mixing tank 1; the shaft 5 stirs the photoresist inside the mixing tank 1 during rotation. The spiral motion avoids the problem of excessive impact force from the stirring rod in existing technologies, making it less likely for air bubbles to form inside the adhesive, thus minimizing air bubble formation. Bearings 7 on both sides of the shaft 5 ensure effective support for its rotation.

[0026] Accessory 3: It mainly includes a feed pipe 14 and a discharge pipe 15 for loading and unloading photoresist, and a cap 18 for sealing; the constriction 17 on both sides of the mixing tank 1 is the part where the bearing 7 is embedded.

[0027] Bubble removal component 2: This component uses cylinder 13 and lever 12 to pull piston 11-1 in the opposite direction inside tapered tube 10, thereby creating negative pressure inside tapered tube 10 and causing air bubbles inside the photoresist to be extracted. Because the neck of tapered tube 10 is filled with cotton plug, the problem of photoresist backflow can be avoided.

[0028] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. The above description is merely a preferred embodiment of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.

Claims

1. A dynamic stirring and anti-bubble device for mixing adhesives, comprising a stirring tank (1), characterized in that, Also includes: An anti-foaming stirring assembly (4) includes a rotating shaft (5) installed at the axial center of the stirring tank (1). The surface of the rotating shaft (5) is provided with cross spiral blades (6). Bearings (7) are provided on both sides of the rotating shaft (5). A motor (8) is installed on one side of the rotating shaft (5).

2. The dynamic stirring and anti-bubble device for adhesive mixing according to claim 1, characterized in that, Also includes: The bubble extraction assembly (2) includes a bent pipe (9) installed on one side of the mixing tank (1), a conical pipe (10) installed on one side of the bent pipe (9), and an anti-backflow plug (11) inserted into the opening of the conical pipe (10). The anti-backflow plug (11) is made of cotton pad material.

3. The dynamic stirring and anti-bubble device for adhesive mixing according to claim 2, characterized in that, The bubble extraction assembly (2) further includes a piston plate (11-1) slidably mounted on the belly of the tapered tube (10), a pull rod (12) is connected to one side of the piston plate (11-1), and a cylinder (13) is connected to one side of the pull rod (12).

4. The dynamic stirring and anti-bubble device for adhesive mixing according to claim 1, characterized in that, The mixing tank (1) is a rotating integral casting structure. A rotating drum (16) is provided in the middle part of the mixing tank (1), and a tapering (17) structure is provided at both ends of the mixing tank (1).

5. A dynamic stirring and anti-bubble device for adhesive mixing according to claim 4, characterized in that, The bearings (7) on both sides of the rotating shaft (5) are inserted into the inside of the constriction (17), and a cover (18) is installed on one side of the constriction (17).

6. The dynamic stirring and anti-bubble device for adhesive mixing according to claim 1, characterized in that, Also includes: Accessory (3), the accessory (3) includes a feed pipe (14) installed on one side of the mixing tank (1), and a discharge pipe (15) provided on the other side of the mixing tank (1). The feed pipe (14) and the discharge pipe (15) are filled with rubber plugs in the operating state.

7. The dynamic stirring and anti-bubble device for adhesive mixing according to claim 1, characterized in that, The radial dimension of the cross spiral blade (6) is reserved with a millimeter-level gap between it and the inner wall of the mixing tank (1). The cross spiral blade (6) is made of stainless steel.

Images