A film forming apparatus

Abstract

The application belongs to the field of inkjet printing technology and relates to a film forming device which comprises a transfer mechanism, a film forming mechanism and a control mechanism, wherein the control mechanism is electrically connected with the film forming mechanism and the transfer mechanism respectively. The film forming device can realize full automation to complete the whole spin coating process, thereby simplifying process operation and improving efficiency.

Description

Technical Field

[0001] This application relates to the field of display technology, and more particularly to a film-forming device. Background Technology

[0002] The manufacturing process of displays includes spin coating; however, existing spin coating processes involve manual operation of the substrate, leading to unstable device performance. Therefore, the existing technology needs further improvement and development. Utility Model Content

[0003] In view of the above, this application provides a film-forming device that adopts the following technical solution:

[0004] A film-forming apparatus, comprising:

[0005] A transfer mechanism is used to transport the workpiece to be processed to the film-forming mechanism;

[0006] A film-forming mechanism is used to spin-coat the workpiece for film formation.

[0007] The control mechanism is electrically connected to the film-forming mechanism and the transfer mechanism, respectively.

[0008] Compared with the prior art, this application has the following main advantages:

[0009] The film-forming equipment of this application can achieve fully automated completion of the entire spin coating process, thereby simplifying the process operation and improving efficiency. Attached Figure Description

[0010] To more clearly illustrate the solution of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0011] Figure 1 This is a schematic diagram of the structure of the film-forming device according to an embodiment of this application;

[0012] Figure 2 This is a schematic diagram of the pipetting mechanism according to an embodiment of this application;

[0013] Figure 3 This is a schematic diagram of the structure of the control unit according to an embodiment of this application;

[0014] Figure 4 This is a schematic diagram of the structure of the breathable membrane according to an embodiment of this application;

[0015] Figure 5 This is a schematic diagram of the transfer mechanism according to an embodiment of this application.

[0016] Reference numerals: 100, workpiece to be processed; 200, spin coater; 300, control unit; 400, fixture; 1, housing; 11, vacuum drying chamber; 12, baking chamber; 13, receiving cavity; 2, piston; 3, breathable membrane; 31, micropore; 4, connecting rod; 41, liquid dispensing nozzle; 42, nozzle connector; 5, crossbeam; 51, first air bearing; 52, first crossbar; 6, fixture body; 61, sliding component; 62, second driving component; 63, second air bearing; 7, conveying device; 71, jig; 8, membrane removal mechanism; 81, maintenance mechanism; 9, control system. Detailed Implementation

[0017] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0018] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. Furthermore, it should be understood that the specific embodiments described herein are only for illustration and explanation of this application and are not intended to limit this application.

[0020] In this application, unless otherwise stated, directional terms such as "upper" and "lower" generally refer to the upper and lower positions of the device in its actual use or operating state, specifically the orientation shown in the accompanying drawings; while "inner" and "outer" refer to the outline of the device. Furthermore, in the description of this application, the term "comprising" means "including but not limited to". The terms first, second, third, etc., are used merely as illustrative purposes and do not impose numerical requirements or establish a numerical order.

[0021] In this application, "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. A and B can be singular or plural.

[0022] In this application, "at least one" means one or more, and "more than one" means two or more. "At least one," "at least one of the following," or similar expressions refer to any combination of these items, including any combination of single or multiple items. For example, "at least one of a, b, or c," or "at least one of a, b, and c," can both mean: a, b, c, ab (i.e., a and b), ac, bc, or abc, where a, b, and c can be single or multiple.

[0023] Various embodiments of this application may exist in the form of a range; it should be understood that the description in the form of a range is merely for convenience and brevity and should not be construed as a hard limitation on the scope of this application; therefore, it should be considered that the range description has specifically disclosed all possible sub-ranges and single numerical values ​​within that range. For example, it should be considered that the range description from 1 to 6 has specifically disclosed sub-ranges such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6, etc., and single numbers within the range, such as 1, 2, 3, 4, 5, and 6, regardless of the range. Furthermore, whenever a numerical range is referred to herein, it means including any referenced number (fraction or integer) within the referred range.

[0024] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0025] As attached Figure 1 To be continued Figure 5 As shown in the figure, this application provides a film-forming device that adopts the following technical solution:

[0026] A film-forming apparatus, comprising:

[0027] The transfer mechanism is used to transport the workpiece 100 to the film forming mechanism;

[0028] A film-forming mechanism is used to spin-coat a film-forming process on the workpiece 100 to be processed.

[0029] The control mechanism is electrically connected to the film-forming mechanism and the transfer mechanism, respectively.

[0030] The film-forming equipment of this application can automatically control the spin coating, liquid transfer, film formation, and transfer processes through the control mechanism, so that the film-forming equipment can complete the entire spin coating process in a fully automated manner, thereby simplifying the process operation and improving efficiency.

[0031] Furthermore, the control mechanism includes a control system 9, which includes a computer. The control system 9 is electrically connected to the film-forming mechanism, the transfer mechanism, and the control unit 300. This electrical connection includes wired and wireless connections. Wired connections utilize network cables, optical fibers, coaxial cables, etc., to transmit electrical signals and enable communication between the computer and the film-forming mechanism, transfer mechanism, and other equipment. These physical media provide a stable channel for signal transmission, ensuring high-speed, stable, and reliable data transmission. Wireless connections include Wi-Fi, Bluetooth, cellular network, etc., eliminating the need for physical cables and offering high flexibility and ease of use. The control system 9 is responsible for controlling the entire process flow of the device and the transmission control between mechanisms, thereby controlling the film-forming equipment to automatically perform processing and fully automate the entire spin coating process.

[0032] Furthermore, the workpiece 100 to be processed includes a substrate, on which ITO glass or other film layers are typically disposed, such as a hole functional layer, a light-emitting layer, an electronic functional layer, etc.

[0033] As attached Figure 1 As shown, in some embodiments, the film-forming mechanism includes a spin-coating assembly for spin-coating the workpiece 100 and a film-forming assembly for drying the spin-coated workpiece 100 to form a film. Preferably, the spin-coating assembly includes a spin coater 200; the film-forming assembly includes a vacuum drying chamber 11 and a baking chamber 12. The vacuum drying chamber 11 is used to dry the spin-coated workpiece 100, and the baking chamber 12 is used to bake the workpiece 100 after drying in the vacuum drying chamber 11, so that the droplets on the workpiece 100 form a film. Simultaneously, the film-forming mechanism integrates the spin coater 200, the vacuum drying chamber 11, and the baking chamber 12, realizing the automation and controllability of the process flow. The film-forming equipment can achieve fully automated completion of the entire spin-coating process, thereby simplifying process operations and improving efficiency.

[0034] As attached Figure 4As shown, in some embodiments, the film-forming device further includes a pipetting mechanism for providing spin coating liquid to the film-forming mechanism. The pipetting mechanism includes a pipetting tip 41 and a control unit 300 connected to the pipetting tip 41 for controlling the amount of liquid taken during liquid taking. The control mechanism is electrically connected to the control unit 300. The control unit 300 includes a housing 1 and a piston 2. The housing 1 is provided with a receiving cavity 13. The piston 2 is disposed in the receiving cavity 13 to reciprocate along the cavity wall of the receiving cavity 13. At least one breathable membrane 3 is also disposed in the receiving cavity 13 between the piston 2 and the pipetting tip 41. The breathable membrane 3 is provided with a plurality of micropores 31. When the piston 2 moves, gas passes through the micropores 31. By adjusting the size, number, and shape of the micropores 31 and the number of the breathable membranes 3, precise control of the gas flow rate can be achieved, improving the dripping accuracy. At the same time, the presence of the breathable membranes 3 and the micropores 31 can buffer and stabilize the pressure. When the piston 2 moves rapidly and causes a sudden change in gas flow rate, the breathable membranes 3 can make the change in gas flow rate relatively smooth through their own deformation and adjustment of the micropores 31, avoiding drastic fluctuations in gas pressure. This achieves a large range while ensuring a continuous, stable, and accurate output of the droplets.

[0035] Furthermore, each time the piston 2 moves to the top of the uppermost breathable membrane 3, it stops. By setting different numbers of breathable membranes 3, the amount of ink that ultimately enters the liquid dispensing head 41 is also different, thereby allowing for more precise control of the drip volume range and achieving a larger range and more accurate dripping precision.

[0036] Furthermore, the liquid dispensing nozzle 41 is connected to the receiving cavity 13 via the nozzle connector 42, facilitating the replacement of the liquid dispensing nozzle 41. The liquid dispensing nozzle 41 can precisely control the droplet size, avoiding waste caused by drawing too much liquid at once or causing ink to overflow from the pixel opening due to excessive liquid dripping at once, thus finely controlling the droplet volume and improving the dripping accuracy.

[0037] Furthermore, the breathable membrane 3 is a selectively permeable film material that allows gases (such as water vapor and air) to pass through freely while maintaining waterproof and dustproof functions. The breathable membrane 3 achieves this function through its micropore structure 31. The diameter of the micropores 31 is typically between 0.1 micrometers and several micrometers, much smaller than the size of a water droplet (minimum diameter approximately 20 micrometers), but larger than water vapor molecules (diameter approximately 0.0004 micrometers). Water vapor molecules can diffuse through the micropores, while liquid water cannot pass through due to surface tension, thus achieving waterproofing and breathability. Simultaneously, the micropores 31 can also block dust and other particulate matter, achieving a dustproof effect. The breathable membrane 3 is made of polymer materials such as PET, PP, PE, PI, PU, ​​and ePTFE. The micropores 31 are manufactured using laser processing. During drip control, the breathable membrane 3 can regulate the gas flow rate, thereby precisely controlling the drip volume, improving drip accuracy, and enhancing device stability.

[0038] As attached Figure 3 To be continued Figure 4 As shown, in some embodiments, the average pore size of the micropores 31 is 60–200 μm; when the number of breathable membranes 3 is greater than one, at least some of the micropores 31 on two adjacent breathable membranes 3 are staggered; the distance between two adjacent breathable membranes 3 is 1–2 mm. By adjusting the size of the micropores 31, adjusting the distribution of the micropores 31, and / or adjusting the distance between adjacent breathable membranes 3, further fine control of gas flow can be achieved, improving dripping accuracy. At the same time, the presence of the breathable membranes 3 and the micropores 31 can play a buffering and pressure stabilizing role. When the piston 2 moves rapidly, causing a sudden change in gas flow, the breathable membranes 3 can make the change in gas flow relatively smooth through their own deformation and adjustment of the micropores 31, avoiding sharp fluctuations in gas pressure, achieving a large range while ensuring a continuous, stable, and accurate output of the droplet volume.

[0039] It is understood that the average pore size of the micropore 31 is a range formed by any one or any two of the following values: 60um, 61um, 62um, 63um, 64um, 65um, 66um, 67um, 68um, 69um, 70um, 71um, 72um, 73um, 74um, 75um, 76um, 77um, 78um, 79um, 80um, 81um, 82um, 83um, 84um, 85um, 86um, 87um, 88um, 89um, 90um, 91um, 92um, 93um, 94um, 95um, 96um, 97um, 98um, 99um, and 100um. The distance between adjacent breathable membranes 3 is a range formed by any one or any two of the following values: 1.0 mm, 1.1 mm, 1.2 mm, 1.3 mm, 1.4 mm, 1.5 mm, 1.6 mm, 1.7 mm, 1.8 mm, 1.9 mm, and 2.0 mm.

[0040] Furthermore, the pore size of the micropores 31 can be determined using the bubble point method. The membrane is immersed in a specific liquid (such as water or isopropanol), and gas is introduced from one side. As the gas pressure gradually increases, when the pressure is sufficient to overcome the capillary force of the liquid in the largest pore, the gas begins to escape from the largest pore, forming continuous bubbles. The pressure at this point is called the "bubble point pressure." The maximum pore size can be calculated using the Laplace equation: dmax = 4γcosθ / Pb, where dmax is the maximum pore size (μm), γ is the liquid surface tension (N / m), θ is the contact angle between the liquid and the membrane (usually assumed to be 0°, i.e., complete wetting), and Pb is the bubble point pressure (Pa). Alternatively, a scanning electron microscope (SEM) can be used to scan the membrane surface or cross-section, directly observing the micropore morphology and size. The average pore size can then be calculated by summing all the pore size values.

[0041] As attached Figure 2 To be continued Figure 3 As shown, in some embodiments, the pipetting mechanism further includes a first driving member, which is connected to the piston 2 via a connecting rod 4 to reciprocate along the wall of the receiving cavity 13 within the receiving cavity 13. The first driving member can precisely control the movement position of the piston 2, thereby ensuring relatively smooth changes in gas flow rate, avoiding drastic fluctuations in gas pressure, achieving a large volume range while ensuring a continuous, stable, and accurate output of the drip volume.

[0042] Furthermore, the first driving component is configured as a servo motor. The servo motor features high-precision positioning capability, fast response speed, high stability, and high flexibility, and can achieve precise control of the movement position of the piston 2 through feedback devices such as encoders.

[0043] As attached Figure 2 As shown, in some embodiments, the film-forming device further includes a crossbeam 5, and the pipetting mechanism further includes a first air-bearing bearing 51. The first air-bearing bearing 51 is slidably disposed on the crossbeam 5, and the control unit 300 is disposed on the first air-bearing bearing 51. The first air-bearing bearing 51 utilizes gases such as air or nitrogen to form an air film between the first air-bearing bearing 51 and the crossbeam 5, keeping them in a non-contact state. This non-contact support method ensures that the first air-bearing bearing 51 on the crossbeam 5 is almost unaffected by friction during movement, thereby achieving micron-level or even higher positional accuracy control. Simultaneously, the first air-bearing bearing 51 can move smoothly and without vibration in a straight line, exhibiting high stability and preventing ink from spilling from the pipetting mechanism during movement.

[0044] Furthermore, the control unit 300 is connected to the first air bearing 51 via the first crossbar 52, thereby increasing the liquid-taking range of the pipetting mechanism.

[0045] As attached Figure 5 As shown, in some embodiments, the transfer mechanism includes a clamp 400 and a slider 61. The clamp 400 is slidably mounted on the crossbeam 5 via the slider 61. The clamp 400 includes a clamp body 6 and a second driving member 62. The clamp body 6 is rotatably connected to the slider 61 via the second driving member 62. The clamp 400 can adapt to different sizes and shapes of workpieces, facilitating workpiece loading, unloading, and operation. The flexible movement of the slider 61 allows for quick adjustment of the clamp 400's position, meeting the requirements of different clamping positions and angles, improving the versatility of the transfer mechanism, and enhancing the accuracy and quality of spin coating.

[0046] As attached Figure 5 As shown, in some embodiments, the transfer mechanism further includes a second air bearing 63, which is slidably mounted on the crossbeam 5. The clamp 400 is mounted on the second air bearing 63 via the sliding member 61. The second drive member 62 can drive the clamp 400 to move up and down to adapt to different working positions and distances. Simultaneously, the extension and retraction of the second drive member 62 can precisely control the position of the clamp 400, accelerating the clamping and disassembly of the workpiece 100 and improving production efficiency. The second air bearing 63 can achieve micron-level or even higher positional accuracy control, allowing for smooth, vibration-free linear movement with high stability, preventing ink spillage from the pipetting mechanism during movement.

[0047] Furthermore, the second drive member 62 is configured as a telescopic rod, which can move the clamp 400 up and down to adapt to different working positions and distances. The second drive member 62 is connected to the second air bearing 63 through the sliding member 61, thereby increasing the clamping range of the transfer mechanism.

[0048] As attached Figure 1 As shown, in some embodiments, the transfer mechanism includes a conveying device 7 and a fixture 71. The fixture 71 is mounted on the conveying device 7 and is used to fix the workpiece 100 to be processed. The conveying device 7 is located within the working area of ​​the spin coater 200. The conveying device 7 can automatically and continuously transport the workpiece 100 to the working position of the fixture 400 without frequent manual handling and placement. This ensures the positional accuracy and stability of the workpiece 100 during processing or handling, reduces human error, greatly saves clamping and positioning time, and improves production efficiency.

[0049] As attached Figure 1 As shown, in some embodiments, the film-forming equipment further includes a film removal mechanism 8 disposed at a downstream station of the film-forming mechanism;

[0050] The film-forming equipment also includes a maintenance mechanism 81 for maintaining the pipetting mechanism. The maintenance mechanism 81 includes a placement rack, a pipette tip detection device for inspecting and maintaining the pipette tip 41, and a cleaning device for cleaning the pipette tip 41.

[0051] The film removal mechanism 8 can automatically remove the film material from the edge of the device, effectively avoiding the problems of low efficiency and inaccurate film removal caused by manual operation in the prior art. It improves the edge removal effect of spin coating and avoids problems such as non-conductivity in subsequent device testing, thereby improving the quality of the spin coating process. The maintenance mechanism 81 is located on one side of the spin coating assembly. The maintenance mechanism 81 can perform cleaning, maintenance, storage and management of ink or the liquid dispensing nozzle 41. The cleaning device includes a rinsing nozzle, which regularly cleans the liquid dispensing nozzle 41, infusion pipeline and other components to remove residual ink impurities and dried ink marks, prevent the liquid dispensing nozzle 41 from clogging and the infusion pipeline from clogging, and keep the ink system unobstructed. At the same time, the nozzle detection device can place the liquid dispensing nozzle 41 and perform performance testing and calibration on the liquid dispensing nozzle 41 to improve the dripping accuracy, extend the service life of the liquid dispensing nozzle 41 and ensure the quality and stability of spin coating. The rack holds multiple ink cartridges and dispensing tips 41 for use by the pipetting mechanism. The different ink cartridges are positioned in fixed and independent locations to hold different inks, ensuring ink stability and facilitating dispensing. Similarly, the different dispensing tips 41 are positioned in fixed and independent locations to prevent them from scattering or coming into contact with dust, thus avoiding contamination. After spin-coating the workpiece 100, a large amount of solvent remains. Therefore, it first enters the vacuum drying chamber 11 for drying to remove this solvent, allowing the spin-coated material to initially form a relatively complete film. During the drying process, as the solvent evaporates, the material molecules gradually align more closely, laying the foundation for subsequent baking and other processes. The workpiece 100 then enters the baking chamber 12 for baking. Baking can more thoroughly remove any remaining small amounts of solvent and moisture at higher temperatures. At the same time, baking can also cause the ink solutes to cross-link in a high-temperature environment, allowing the materials to rearrange further for uniform film formation. The drying mechanism and the baking mechanism are respectively equipped with automatic chamber door opening and closing, air extraction, or heating functions. The control mechanism controls the drying process to proceed automatically, improving production efficiency.

[0052] Furthermore, the film removal mechanism 8 includes a cotton fabric, a rotating fabric, a wiping head, a wiping head connecting rod, a stepper motor, a solvent spraying device, a solvent supply chamber, and a solvent collection chamber. The stepper motor is connected to the connecting rod and drives the wiping head connecting rod to move up and down to adjust the pressure of the wiping head on the photoelectric device. After spin coating, a photoelectric device is formed on the photoelectric device. During film removal, the solvent spraying device sprays solvent onto the cotton fabric at the edge of the wiping head. After the cotton fabric is wetted, the film removal mechanism 8 moves the wiping head to the edge of the photoelectric device. The film removal mechanism 8 can use coordinate positions to stop the wiping head at the starting position at the edge of the photoelectric device. The pressure of the wiping head is set according to a program, for example, the pressure is 100nm. The wiping head moves from the starting position to the ending position. At this time, the solvent will press the edge of the photoelectric device... The film material is dissolved and removed, exposing the metal leads inside the optoelectronic device, and there is no film material residue on the surface of the optoelectronic device. Then, power can be supplied to the metal leads to light up and test the optoelectronic device. The film material removal mechanism 8 can rotate clockwise or counterclockwise, generally set to rotate 90°. When one edge of the optoelectronic device is wiped on the film material removal mechanism 8, the fixture 71 rotates once, the optoelectronic device switches to the other side, and the wiping head of the film material removal mechanism 8 then removes the film material from this side until all four sides are removed.

[0053] Obviously, the embodiments described above are only some embodiments of this application, not all embodiments. The accompanying drawings show preferred embodiments of this application, but do not limit the patent scope of this application. This application can be implemented in many different forms; rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this application's specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the scope of patent protection of this application.

Claims

1. A film-forming device, characterized in that, include: A transfer mechanism is used to transport the workpiece (100) to the film forming mechanism; A film-forming mechanism is used to spin-coat the workpiece (100) for film formation. The control mechanism is electrically connected to the film-forming mechanism and the transfer mechanism, respectively.

2. The film-forming equipment according to claim 1, characterized in that, The film-forming mechanism includes a spin coating assembly for spin coating the workpiece (100) and a film-forming assembly for drying the workpiece (100) that has undergone spin coating; preferably, the spin coating assembly includes a spin coater (200); the film-forming assembly includes a vacuum drying chamber (11) and a baking chamber (12).

3. The film-forming equipment according to claim 1, characterized in that, The film-forming device further includes a pipetting mechanism for providing spin coating liquid to the film-forming mechanism. The pipetting mechanism includes a pipetting tip (41) and a control unit (300) connected to the pipetting tip (41) for controlling the amount of liquid taken during liquid taking. The control mechanism is electrically connected to the control unit (300). The control unit (300) includes a housing (1) and a piston (2). The housing (1) is provided with a receiving cavity (13). The piston (2) is disposed in the receiving cavity (13) to reciprocate along the cavity wall of the receiving cavity (13). At least one breathable membrane (3) is also provided in the receiving cavity (13) between the piston (2) and the pipetting tip (41). The breathable membrane (3) is provided with a plurality of micropores (31).

4. The film-forming equipment according to claim 3, characterized in that, The average pore size of the micropores (31) is 60-200 μm; when the number of breathable membranes (3) is greater than one, at least some of the micropores (31) on two adjacent breathable membranes (3) are staggered; the distance between two adjacent breathable membranes (3) is 1-2 mm.

5. The film-forming equipment according to claim 4, characterized in that, The pipetting mechanism further includes a first driving member, which is connected to the piston (2) via a connecting rod (4) to reciprocate along the cavity wall of the receiving cavity (13) within the receiving cavity (13).

6. The film-forming apparatus according to any one of claims 3-5, characterized in that, It also includes a crossbeam (5), and the liquid transfer mechanism also includes a first air bearing (51), the first air bearing (51) is slidably disposed on the crossbeam (5), and the control unit (300) is disposed on the first air bearing (51).

7. The film-forming equipment according to claim 6, characterized in that, The transfer mechanism includes a clamp (400) and a sliding member (61). The clamp (400) is slidably mounted on the crossbeam (5) via the sliding member (61). The clamp (400) includes a clamp body (6) and a second drive member (62). The clamp body (6) is rotatably connected to the sliding member (61) via the second drive member (62).

8. The film-forming equipment according to claim 7, characterized in that, The transfer mechanism also includes a second air bearing (63), which is slidably mounted on the crossbeam (5), and the clamp (400) is mounted on the second air bearing (63) via the sliding member (61).

9. The film-forming equipment according to claim 6, characterized in that, The transfer mechanism includes a conveying device (7) and a fixture (71). The fixture (71) is disposed on the conveying device (7) and is used to fix the workpiece (100) to be processed.

10. The film-forming equipment according to claim 3, characterized in that, The film-forming equipment also includes a film removal mechanism (8) located at a downstream station of the film-forming mechanism; The film-forming equipment also includes a maintenance mechanism (81) for maintaining the pipetting mechanism. The maintenance mechanism (81) includes a placement rack, a pipette tip detection device for inspecting and maintaining the pipette tip (41), and a cleaning device for cleaning the pipette tip (41).

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