A cleaning device for a robotic arm

Abstract

The utility model discloses a kind of cleaning equipment for mechanical arm, it is related to single piece washing technical field, and the cleaning equipment for mechanical arm includes the fixed frame for being fixedly connected with mechanical arm, and the support connected with fixed frame, support is equipped with first through hole and second through hole, first through hole is used to supply first pipeline to pass through, the outlet of first pipeline is equipped with first nozzle, first nozzle is used to spray cleaning medium towards the surface of mechanical arm, second through hole is used to supply second pipeline to pass through, the outlet of second pipeline is equipped with second nozzle, and second nozzle is used to spray blowing medium towards the surface of mechanical arm. First nozzle equipped with at the outlet of first pipeline sprays cleaning medium on the surface of mechanical arm, for removing crystallization and acid liquid residue on the surface of mechanical arm, second nozzle equipped with at the outlet of first pipeline sprays blowing medium on the surface of mechanical arm, for drying the surface of mechanical arm, so set, realize the cleaning of the surface of mechanical arm.

Description

Technical Field

[0001] This utility model relates to the field of single-piece cleaning technology, and in particular to a cleaning device for robotic arms. Background Technology

[0002] Single-wafer cleaning equipment is a type of cleaning equipment used in semiconductor manufacturing. It often encounters phenomena such as chemical splashing and acid condensation, which leads to crystallization and acid residue on the surface of the robotic arm.

[0003] Therefore, how to clean the surface of the robotic arm is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide a cleaning device for robotic arms that can clean the surface of the robotic arm.

[0005] To achieve the above objectives, this utility model provides a cleaning device for a robotic arm, including a fixed frame for fixed connection with the robotic arm and a support connected to the fixed frame. The support is provided with a first through hole and a second through hole. The first through hole is for a first pipe to pass through, and a first nozzle is provided at the outlet of the first pipe. The first nozzle is used to spray a cleaning medium onto the surface of the robotic arm. The second through hole is for a second pipe to pass through, and a second nozzle is provided at the outlet of the second pipe. The second nozzle is used to spray a blowing medium onto the surface of the robotic arm.

[0006] In one possible implementation, the mounting bracket includes:

[0007] The base has a receiving slot for the robotic arm to pass through;

[0008] The cover plate is detachably connected to the base, and the cover plate and the base form a ring structure that encircles the robotic arm.

[0009] In one possible implementation, the cover plate has first grooves on both sides;

[0010] The fixing frame also includes two fixing blocks, which are respectively connected to the two sides of the cover plate. A second groove is opened on the side of the fixing block facing the first groove, and the second groove and the first groove form an annular groove.

[0011] The bracket is equipped with a rotating shaft that passes through an annular groove, and a fixing block and a cover plate are used to clamp the rotating shaft.

[0012] In one possible implementation, the cover plate has first connecting holes on both sides, and the fixing block has second connecting holes that correspond one-to-one with the first connecting holes. The connector passes through the second connecting hole and is rotatably connected to the first connecting hole. The connector is used to drive the fixing block and the cover plate away from each other or close to each other.

[0013] In one possible implementation, it also includes:

[0014] The first rotating sleeve is sleeved on the outer periphery of the first pipeline, the first rotating sleeve passes through the first through hole, and the outer peripheral surface of the first rotating sleeve is in clearance fit with the inner wall surface of the first through hole.

[0015] The second rotating sleeve is fitted around the outer periphery of the second pipeline and passes through the second through hole, with the outer peripheral surface of the second rotating sleeve and the inner wall surface of the second through hole having a clearance fit.

[0016] In one possible implementation, the stent further includes:

[0017] The first mounting base is connected to the top of the rotating shaft, and the first mounting base is provided with a first through hole;

[0018] The second mounting base is connected to the bottom of the rotating shaft, and the second mounting base is provided with a second through hole.

[0019] In one possible implementation, the first mounting base is further provided with a first adjustment hole communicating with the first through hole, the first adjustment member is rotatably connected to the first adjustment hole, and the end of the first adjustment member facing the first through hole can be screwed into the first through hole to fix the first rotating sleeve.

[0020] In one possible implementation, the second mounting base is further provided with a second adjusting hole communicating with the second through hole, the second adjusting member is rotatably connected to the second adjusting hole, and one end of the second adjusting member facing the second through hole can be screwed into the second through hole to fix the second rotating sleeve.

[0021] In one possible implementation, the inner wall surface of the first rotating sleeve is interference-fitted with the outer peripheral surface of the first pipeline, and the inner wall surface of the second rotating sleeve is interference-fitted with the outer peripheral surface of the second pipeline.

[0022] In one possible implementation, a first fixing hole is provided on the side of the base facing the cover plate, and a second fixing hole is provided on the cover plate. The second fixing hole corresponds to the first fixing hole, and the axis of the corresponding second fixing hole is collinear with the axis of the first fixing hole. The fixing member passes through the second fixing hole and is connected to the first fixing hole so that the cover plate and the base are fixed relative to each other.

[0023] Compared with the prior art, the technical solution provided by this utility model has at least the following beneficial effects: the fixing frame is installed on the robotic arm, and the bracket with a first through hole and a second through hole is installed on the fixing frame. The first pipe passes through the first through hole, and the second pipe passes through the second through hole. The first nozzle at the outlet of the first pipe sprays the cleaning medium onto the surface of the robotic arm to remove crystals and acid residues on the surface of the robotic arm. The second nozzle at the outlet of the first pipe sprays the purging medium onto the surface of the robotic arm to dry the surface of the robotic arm. With this configuration, the surface of the robotic arm is cleaned. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of the cleaning device for the robotic arm provided in this embodiment of the utility model, installed on the robotic arm.

[0026] Figure 2 This is a schematic diagram of the cleaning device for a robotic arm provided in an embodiment of the present invention, installed on the robotic arm, from another perspective.

[0027] Figure 3 for Figure 2 The main view;

[0028] Figure 4 for Figure 2 Top view;

[0029] Figure 5 for Figure 2 Side view;

[0030] Figure 6 A schematic diagram of the structure of the cleaning device for a robotic arm provided in an embodiment of this utility model;

[0031] Figure 7 A schematic diagram of the cleaning device for a robotic arm provided in an embodiment of this utility model from another perspective;

[0032] Figure 8 for Figure 7 The main view;

[0033] Figure 9 for Figure 7 Top view;

[0034] Figure 10 for Figure 7 Side view;

[0035] Figure 11 This is a schematic diagram of the structure of the bracket provided in an embodiment of the present utility model;

[0036] Figure 12 for Figure 11 The main view;

[0037] Figure 13 for Figure 11 Side view;

[0038] Figure 14 This is a schematic diagram of the structure of the fixing frame provided in an embodiment of the present utility model;

[0039] Figure 15 for Figure 14 The main view;

[0040] Figure 16 for Figure 14 Top view;

[0041] Figure 17 for Figure 14 Side view;

[0042] Figure 18 This is a schematic diagram of the structure of the first rotating sleeve provided in an embodiment of the present utility model;

[0043] Figure 19 for Figure 18 The main view;

[0044] Figure 20 for Figure 18 Top view.

[0045] in:

[0046] 100-robotic arm;

[0047] 200-Fixed frame, 210-Base, 211-Receiving groove, 212-Protruding structure, 220-Cover plate, 221-First groove, 230-Fixing block, 231-Second groove, 240-Connector;

[0048] 300-Bracket, 310-First through hole, 320-Second through hole, 330-Third through hole, 340-Rotating shaft, 350-First mounting base, 360-Second mounting base, 370-First adjusting hole, 380-Second adjusting hole, 390-Third adjusting hole;

[0049] 400 - First pipeline, 410 - First nozzle;

[0050] 500 - Second pipeline, 510 - Second nozzle;

[0051] 600 - Third pipeline, 610 - Third nozzle;

[0052] 700 - First Rotating Sleeve;

[0053] 800 - Second rotating sleeve;

[0054] 900 - Fastener. Detailed Implementation

[0055] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0056] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0057] In the description of this utility model, it should be understood that the terms "inner" and "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the position or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of this utility model.

[0058] The purpose of this invention is to provide a cleaning device for robotic arms that can clean the surface of the robotic arm.

[0059] Please see Figures 1 to 20 To achieve the above objectives, this utility model provides a cleaning device for a robotic arm, including a fixing frame 200 for fixed connection with the robotic arm 100, and a support 300 connected to the fixing frame 200. The support 300 is provided with a first through hole 310 and a second through hole 320. The first through hole 310 is for a first pipe 400 to pass through, and a first nozzle 410 is provided at the outlet of the first pipe 400. The first nozzle 410 is used to spray cleaning medium onto the surface of the robotic arm 100. The second through hole 320 is for a second pipe 500 to pass through, and a second nozzle 510 is provided at the outlet of the second pipe 500. The second nozzle 510 is used to spray blowing medium onto the surface of the robotic arm 100.

[0060] A mounting bracket 200 is installed on the robotic arm 100, and a support 300 with a first through hole 310 and a second through hole 320 is installed on the mounting bracket 200. A first pipe 400 passes through the first through hole 310, and a second pipe 500 passes through the second through hole 320. A first nozzle 410 at the outlet of the first pipe 400 sprays cleaning medium onto the surface of the robotic arm 100 to remove crystals and acid residues from the surface of the robotic arm 100. A second nozzle 510 at the outlet of the first pipe 400 sprays purging medium onto the surface of the robotic arm 100 to dry the surface of the robotic arm 100. This configuration achieves cleaning of the surface of the robotic arm 100.

[0061] It should be noted that the first nozzle 410 is rotatably connected to the first pipe 400 so that the spray direction of the first nozzle 410 can be adjusted, and the second nozzle 510 is rotatably connected to the second pipe 500 so that the spray direction of the second nozzle 510 can be adjusted. The first pipe 400 is fixed after passing through the first through hole 310, and the second pipe 500 is fixed after passing through the second through hole 320, so that the first pipe 400 and the second pipe 500 move with the movement of the robotic arm 100. When the robotic arm 100 moves to the liquid recovery tank, by adjusting the spray direction of the first nozzle 410 and the second nozzle 510, it can be used to rinse and blow the surface of different positions or areas of the robotic arm 100. Compared with spraying only the top of the robotic arm 100 after the robotic arm 100 moves to a specific position, the cleaning effect of the robotic arm 100 can be significantly improved.

[0062] In one possible implementation, the mounting bracket 200 includes a base 210 and a cover plate 220. The base 210 has a receiving groove 211 for the robotic arm 100 to pass through. The cover plate 220 is detachably connected to the base 210, and the cover plate 220 and the base 210 form a ring structure that encircles the robotic arm 100. The base 210 has a first fixing hole on the side facing the cover plate 220, and the cover plate 220 has a second fixing hole. The second fixing holes correspond one-to-one with the first fixing holes, and the axes of the corresponding second fixing holes and the first fixing holes are collinear. A fixing member 900 passes through the second fixing hole and connects to the first fixing hole, thereby fixing the cover plate 220 relative to the base 210. The number of first fixing holes and second fixing holes can be set to multiple, and the first fixing holes and second fixing holes can be, but are not limited to, threaded holes. The fixing member 900 can be, but is not limited to, a screw. When the fixing member 900 is tightened, the base 210 and the cover plate 220 can press the robotic arm 100 together. When the fixing member 900 is loosened, the fixing frame 200 can be moved to adjust the connection position of the fixing frame 200 on the robotic arm 100.

[0063] In this embodiment, a guide structure can be added between the base 210 and the cover plate 220. For example, a guide hole can be provided on the base 210, and a guide rod can be provided on the cover plate 220. During the assembly process of the cover plate 220 and the base 210, the guide rod is inserted into the guide hole to position the cover plate 220 and the base 210. After positioning, the second fixing hole of the cover plate 220 and the first fixing hole of the base 210 are aligned to facilitate the connection of the fastener 900. The guide hole and the first fixing hole can be arranged adjacent to each other on the end face of the base 210 facing the cover plate 220. A protrusion structure 212 flush with the end face of the base 210 facing the cover plate 220 can also be added to the base 210. The guide hole and the first fixing hole can be arranged adjacent to each other on the side of the protrusion structure 212 facing the cover plate 220 to avoid affecting the structural strength of the base 210. It should be noted that the shape of the base 210 and the cover plate 220 can be adjusted according to the cross-sectional shape of the position to be connected to the robotic arm 100. For example, when the cross-sectional shape of the position to be connected to the robotic arm 100 is circular, the base 210 and the cover plate 220 can both be set as semi-circular structures to encircle the position to be connected to the robotic arm 100, and the fixing frame 200 is fixed relative to the robotic arm 100 by the fixing member 900; when the cross-sectional shape of the position to be connected to the robotic arm 100 is square, the base 210 can be set as a U-shaped structure and the cover plate 220 can be set as a plate-shaped structure to encircle the position to be connected to the robotic arm 100, and the fixing frame 200 is fixed relative to the robotic arm 100 by the fixing member 900.

[0064] In one possible implementation, the cover plate 220 has a first groove 221 on both sides, the first groove 221 having a semi-circular structure. The fixing frame 200 also includes two fixing blocks 230, which are respectively connected to the two sides of the cover plate 220. The fixing block 230 has a second groove 231 on the side facing the first groove 221, the second groove 231 also having a semi-circular structure. The second groove 231 and the first groove 221 form an annular groove. The bracket 300 has a rotating shaft 340, which passes through the annular groove. The fixing blocks 230 and the cover plate 220 are used to clamp the rotating shaft 340.

[0065] The cover plate 220 has first connecting holes on both sides, and the fixing block 230 has second connecting holes corresponding to the first connecting holes. The connector 240 passes through the second connecting holes and is rotatably connected to the first connecting holes. The connector 240 is used to drive the fixing block 230 and the cover plate 220 away from each other or closer to each other. The number of first connecting holes and second connecting holes can be multiple, and the first connecting holes and second connecting holes can be, but are not limited to, threaded holes. The connector 240 can be, but is not limited to, a screw. When the connector 240 is tightened, the fixing block 230 and the cover plate 220 can press the rotating shaft 340 to restrict the movement of the rotating shaft 340 in its own axial direction and its rotation around its own axis. When the connector 240 is loosened, the rotating shaft 340 can be moved and rotated to adjust the position and angle of the bracket 300 relative to the fixing frame 200.

[0066] In one possible implementation, the system further includes a first rotating sleeve 700 and a second rotating sleeve 800. The first rotating sleeve 700 is sleeved on the outer periphery of the first pipe 400. The inner wall surface of the first rotating sleeve 700 is interference-fitted with the outer periphery surface of the first pipe 400 to prevent relative movement or sliding between the first rotating sleeve 700 and the first pipe 400. The first rotating sleeve 700 passes through the first through hole 310, and the outer periphery surface of the first rotating sleeve 700 is clearance-fitted with the inner wall surface of the first through hole 310 to prevent the first pipe 400 from directly contacting the inner wall surface of the first through hole 310, thereby reducing wear on the first pipe 400. The second rotating sleeve 800 is sleeved on the outer periphery of the second pipe 500. The inner wall surface of the second rotating sleeve 800 is interference-fitted with the outer periphery surface of the second pipe 500 to prevent the second rotating sleeve 800 and the second pipe 500 from moving or sliding relative to each other. The second rotating sleeve 800 passes through the second through hole 320, and the outer periphery surface of the second rotating sleeve 800 is clearance-fitted with the inner wall surface of the second through hole 320 to avoid the second pipe 500 from directly contacting the inner wall surface of the second through hole 320, thereby reducing the wear of the second pipe 500.

[0067] In one possible implementation, the bracket 300 further includes a first mounting base 350 connected to the top of the rotating shaft 340. The bottom dimension of the first mounting base 350 is larger than the top dimension of the rotating shaft 340 to prevent the bracket 300 from falling from the annular groove when the fastener 900 connector 240 is loosened. The first mounting base 350 is provided with a first through hole 310. The first mounting base 350 is also provided with a first adjustment hole 370 communicating with the first through hole 310. A first adjustment member is rotatably connected to the first adjustment hole 370, and one end of the first adjustment member facing the first through hole 310 can be screwed into the first through hole 310 to fix the first rotating sleeve 700. The first adjusting hole 370 may be, but is not limited to, a threaded hole, and the first adjusting member may be, but is not limited to, a screw, so that the end of the first adjusting member facing the first through hole 310 can be tightened into the first through hole 310 or loosened to be removed from the first through hole 310. When the end of the first adjusting member facing the first through hole 310 is tightened into the first through hole 310 and abuts against the first rotating sleeve 700, the position of the first rotating sleeve 700 in the first through hole 310 is fixed, which restricts the translation of the first rotating sleeve 700 relative to the first through hole 310 in its own axial direction and its rotation around its own axis.

[0068] The bracket 300 also includes a second mounting base 360, which is connected to the bottom of the rotating shaft 340. The top dimension of the second mounting base 360 ​​is larger than the bottom dimension of the rotating shaft 340 to prevent the bracket 300 from being pulled out from the bottom of the annular groove when the fastener 900 and connector 240 are loosened. The second mounting base 360 ​​is provided with a second through hole 320 and a second adjusting hole 380 communicating with the second through hole 320. The second adjusting member is rotatably connected to the second adjusting hole 380, and the end of the second adjusting member facing the second through hole 320 can be screwed into the second through hole 320 to fix the second rotating sleeve 800. The second adjusting hole 380 may be, but is not limited to, a threaded hole, and the second adjusting member may be, but is not limited to, a screw, so that the end of the second adjusting member facing the second through hole 320 can be tightened into the second through hole 320 or loosened to move out of the second through hole 320. When the end of the second adjusting member facing the second through hole 320 is tightened into the second through hole 320 and abuts against the second rotating sleeve 800, the position of the second rotating sleeve 800 in the second through hole 320 is fixed, which restricts the translation of the second rotating sleeve 800 relative to the second through hole 320 in its own axial direction and its rotation around its own axis.

[0069] In addition, a third through hole 330 can be opened on the second mounting base 360 ​​for the third pipeline 600 to pass through. The third rotating sleeve is fitted onto the third pipeline 600. The second mounting base 360 ​​is also provided with a third adjusting hole 390 communicating with the third through hole 330. The third adjusting member is rotatably connected to the third adjusting hole 390, and the end of the third adjusting member facing the third through hole 330 can be screwed into the third through hole 330 to fix the third rotating sleeve. The third adjusting hole 390 may be, but is not limited to, a threaded hole, and the third adjusting member may be, but is not limited to, a screw, so that the end of the third adjusting member facing the third through hole 330 can be tightened into the third through hole 330 or loosened to be removed from the third through hole 330. When the end of the third adjusting member facing the third through hole 330 is tightened into the third through hole 330 and abuts against the third rotating sleeve, the position of the third rotating sleeve in the third through hole 330 is fixed, which restricts the translation of the third rotating sleeve relative to the third through hole 330 in its own axial direction and its rotation around its own axis.

[0070] The second through hole 320 is located between the first through hole 310 and the third through hole 330. The outlet end of the third pipe 600 is provided with a third nozzle 610. The third nozzle 610 can also be configured to spray cleaning medium onto the surface of the robotic arm 100. The cleaning efficiency of the robotic arm 100 is improved by using the first nozzle 410 and the third nozzle 610. In some embodiments, the connection between the first mounting base 350 and the rotating shaft 340 is fixed, and the connection between the second mounting base 360 ​​and the rotating base is fixed, so that the first mounting base 350, the rotating shaft 340, and the second mounting base 360 ​​are a relatively fixed whole. At this time, the axes of the first through hole 310, the second through hole 320, and the third through hole 330 are parallel to each other. Adjusting the angle of the rotating shaft 340 relative to the annular groove can adjust the axial direction of the first through hole 310, the second through hole 320, and the third through hole 330, thereby changing the orientation of the first nozzle 410, the second nozzle 510, and the third nozzle 610. In other embodiments, at least one of the first mounting base 350 and the second mounting base 360 ​​is rotatably connected to the rotating shaft 340, so that the axis of the first through hole 310 is set at an angle to the axes of the second through hole 320 and the third through hole 330. The axial direction of the first through hole 310 or the second through hole 320 can be adjusted individually as needed to change the orientation of the first nozzle 410 or the second nozzle 510. The first mounting base 350 or the second mounting base 360, which has been adjusted relative to the rotating shaft 340, is fixed by a locking member, so that the first mounting base 350, the rotating shaft 340, and the second mounting base 360 ​​are a relatively fixed whole.

[0071] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0072] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0073] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of this utility model.

Claims

1. A cleaning device for a robotic arm, characterized in that, The device includes a mounting bracket (200) for fixed connection with a robotic arm (100) and a support (300) connected to the mounting bracket (200). The support (300) has a first through hole (310) and a second through hole (320). The first through hole (310) is for a first pipeline (400) to pass through. The outlet of the first pipeline (400) is provided with a first nozzle (410) for spraying cleaning medium onto the surface of the robotic arm (100). The second through hole (320) is for a second pipeline (500) to pass through. The outlet of the second pipeline (500) is provided with a second nozzle (510) for spraying purging medium onto the surface of the robotic arm (100).

2. The cleaning device for a robotic arm according to claim 1, characterized in that, The mounting bracket (200) includes: The base (210) is provided with a receiving groove (211) for the robotic arm (100) to pass through; A cover plate (220) is detachably connected to the base (210), and the cover plate (220) and the base (210) form an annular structure that surrounds the robotic arm (100).

3. The cleaning device for a robotic arm according to claim 2, characterized in that, The cover plate (220) has first grooves (221) on both sides; The fixing frame (200) also includes two fixing blocks (230), which are respectively connected to the two sides of the cover plate (220). The fixing block (230) has a second groove (231) on the side facing the first groove (221), and the second groove (231) and the first groove (221) form an annular groove. The bracket (300) is provided with a rotating shaft (340), which passes through the annular groove. The fixing block (230) and the cover plate (220) are used to clamp the rotating shaft (340).

4. The cleaning device for a robotic arm according to claim 3, characterized in that, The cover plate (220) has first connecting holes on both sides, and the fixing block (230) has second connecting holes that correspond one-to-one with the first connecting holes. The connector (240) passes through the second connecting hole and is rotatably connected to the first connecting hole. The connector (240) is used to drive the fixing block (230) and the cover plate (220) to move away from each other or closer to each other.

5. The cleaning device for a robotic arm according to claim 3, characterized in that, Also includes: The first rotating sleeve (700) is sleeved on the outer periphery of the first pipeline (400), the first rotating sleeve (700) passes through the first through hole (310), and the outer peripheral surface of the first rotating sleeve (700) is in clearance fit with the inner wall surface of the first through hole (310). The second rotating sleeve (800) is sleeved on the outer periphery of the second pipeline (500), the second rotating sleeve (800) passes through the second through hole (320), and the outer peripheral surface of the second rotating sleeve (800) is in clearance fit with the inner wall surface of the second through hole (320).

6. The cleaning device for a robotic arm according to claim 5, characterized in that, The support (300) also includes: A first mounting base (350) is connected to the top of the rotating shaft (340), and the first mounting base (350) is provided with the first through hole (310). The second mounting base (360) is connected to the bottom of the rotating shaft (340), and the second mounting base (360) is provided with the second through hole (320).

7. The cleaning device for a robotic arm according to claim 6, characterized in that, The first mounting base (350) is also provided with a first adjustment hole (370) communicating with the first through hole (310). The first adjustment member is rotatably connected to the first adjustment hole (370), and one end of the first adjustment member facing the first through hole (310) can be screwed into the first through hole (310) to fix the first rotating sleeve (700).

8. The cleaning device for a robotic arm according to claim 6, characterized in that, The second mounting base (360) is also provided with a second adjustment hole (380) communicating with the second through hole (320). The second adjustment member is rotatably connected to the second adjustment hole (380), and one end of the second adjustment member facing the second through hole (320) can be screwed into the second through hole (320) to fix the second rotating sleeve (800).

9. The cleaning device for a robotic arm according to any one of claims 5 to 8, characterized in that, The inner wall surface of the first rotating sleeve (700) is interference-fitted with the outer peripheral surface of the first pipeline (400), and the inner wall surface of the second rotating sleeve (800) is interference-fitted with the outer peripheral surface of the second pipeline (500).

10. The cleaning device for a robotic arm according to any one of claims 2 to 8, characterized in that, The base (210) has a first fixing hole on the side facing the cover plate (220), and the cover plate (220) has a second fixing hole. The second fixing hole corresponds to the first fixing hole, and the axis of the corresponding second fixing hole is collinear with the axis of the first fixing hole. The fixing member (900) passes through the second fixing hole and is connected to the first fixing hole so that the cover plate (220) and the base (210) are relatively fixed.

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