A blowing device for removing foreign matter from a silicon seed product

Abstract

The utility model provides a kind of for removing foreign matter of silicon microphone product blowing device, it is related to the technical field of semiconductor packaging equipment, install in ASM wire bonding machine feed inlet, including blowing head, regulating valve group and adjusting frame;The blowing head is fixed in the vicinity of feed inlet by the adjusting frame, and the regulating valve group is connected with blowing head by trachea;The adjusting frame includes position adjusting mechanism for adjusting the distance between blowing head and product surface and rotary adjusting mechanism for adjusting the angle of blowing head.The utility model has realized online active cleaning, can effectively remove MEMS product surface foreign matter without shutdown, significantly improves production efficiency and product yield.Adopt non-contact blowing cleaning, avoid the damage of traditional cleaning mode to product microstructure, ensure the integrity and reliability of product.Blowing parameter and position can be accurately adjusted, can adapt to the cleaning demand of different products, both ensure cleaning effect, and prevent damage to product.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging equipment technology, specifically an air blowing device for removing foreign matter from silicon wafer products. Background Technology

[0002] MEMS chips have micromechanical structures on their surface, making them extremely sensitive to foreign matter such as dust, fibers, and metal shavings. Existing ASM wire bonding machines (such as the AERO, Xpress, and Xtreme series) rely solely on vacuum suction or mechanical guides at the feed position, lacking active cleaning capabilities. Foreign matter, carried by the lead frame or tape into the bonding area, is easily pressed onto the chip surface or under the gold wire balls, causing short circuits, poor soldering, or functional failure. Current practices involving periodic shutdowns for cleaning and maintenance are inefficient and may introduce secondary contamination. Utility Model Content

[0003] In order to overcome the above-mentioned defects of the prior art, this utility model provides an air blowing device for removing foreign objects from silicon wheat products. Without making major modifications to the original machine, a set-point directional micro-pressure air blowing device is added to the feed inlet to achieve real-time non-contact cleaning, blowing away the peeled foreign objects immediately and avoiding secondary pollution.

[0004] To solve the above technical problems, this utility model adopts the following technical solution: An air blowing device for removing foreign matter from silicon wafer products is installed at the feed inlet of an ASM wire bonding machine. It includes an air blowing head, a regulating valve assembly, and an adjustment frame. The air blowing head is fixed near the feed inlet via the adjustment frame, and the regulating valve assembly is connected to the air blowing head via an air pipe. The adjustment frame includes a position adjustment mechanism for adjusting the distance between the air blowing head and the product surface, and a rotation adjustment mechanism for adjusting the angle of the air blowing head.

[0005] In a preferred embodiment, the total length of the air blowing head is 160.96 mm and the height is 52 mm.

[0006] In a preferred embodiment, the air blowing head is provided with multiple air blowing holes, the diameter of the air blowing holes is 1mm, and the center distance between adjacent air blowing holes is 5mm.

[0007] In a preferred embodiment, the position adjustment mechanism and the rotation adjustment mechanism are sliding holes on the adjustment frame, the air blowing head is slidably disposed inside the sliding hole, and a screw hole is provided on one side of the adjustment frame corresponding to the position of the sliding hole, and a fastening adjustment screw is provided in the screw hole.

[0008] In a preferred embodiment, the position adjustment mechanism allows the distance between the air blowing head and the product surface to be continuously adjustable within the range of 15mm to 25mm.

[0009] In a preferred embodiment, the rotary adjustment mechanism allows the air blowing head to rotate around an axis, with a rotational movement range of 0 to 5 mm.

[0010] In a preferred embodiment, the regulating valve assembly includes a pressure regulating valve and a flow regulating valve, wherein the regulating range of the pressure regulating valve is 0-65MPa, and the regulating flow rate of the flow regulating valve is 37L / min.

[0011] In a preferred embodiment, the air blowing head has an internal airflow channel that communicates with the air blowing hole to form a concentrated airflow.

[0012] In a preferred embodiment, the adjustment frame is provided with fixing holes and is fixed to the frame of the ASM wire bonding machine feed inlet by bolts.

[0013] In a preferred embodiment, the regulating valve assembly is connected to an external air source via a high-pressure hose.

[0014] In a preferred embodiment, the air blowing head is made of stainless steel and its surface is polished.

[0015] The technical effects and advantages of this invention are as follows: This invention achieves online active cleaning, effectively removing foreign matter from the surface of MEMS products without stopping production, significantly improving production efficiency and product yield. It employs non-contact air-blowing cleaning, avoiding damage to the product's microstructure caused by traditional cleaning methods, ensuring product integrity and reliability. The air-blowing parameters and position can be precisely adjusted to adapt to the cleaning needs of different products, guaranteeing cleaning effectiveness while preventing product damage. The structure is simple and easy to install, requiring no large-scale modification of existing equipment for immediate use, demonstrating good applicability and economy. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the mating structure of the air blowing head and the adjustment frame of this utility model; In the diagram: 1-air blowing head; 2-regulating valve group; 3-adjusting bracket; 11-air blowing; 31-sliding hole; 32-screw hole; 33-fixing hole. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] like Figure 1 and Figure 2 As shown An air-blowing device for removing foreign matter from MEMS products is installed at the feed inlet of an ASM wire bonding machine. It includes an air-blowing head 1, a regulating valve assembly 2, and an adjusting frame 3. The air-blowing head 1 is fixed near the feed inlet via the adjusting frame 3, and the regulating valve assembly 2 is connected to the air-blowing head 1 via an air pipe. The adjusting frame 3 includes a position adjustment mechanism for adjusting the distance between the air-blowing head 1 and the product surface, and a rotation adjustment mechanism for adjusting the angle of the air-blowing head 1. This invention can clean surface foreign matter from MEMS products during feeding into ASM bonding equipment, effectively removing minute foreign objects from the surface of MEMS products while avoiding damage, thus improving cleaning efficiency and quality. This invention employs a non-contact air-blowing cleaning method, avoiding damage to the microstructure of MEMS products that may be caused by liquid or physical contact in traditional cleaning methods, ensuring that the integrity and performance of the product are not affected.

[0019] The air blowing head 1 is an S-shaped air blowing tube with a total length of 160.96 mm and a height of 52 mm. The air blowing head 1 is provided with multiple air blowing holes 11, each with a diameter of 1 mm and a center distance of 5 mm between adjacent air blowing holes 11. This allows for the generation of high-speed, concentrated airflow, which effectively impacts foreign objects on the surface of MEMS products, causing them to detach.

[0020] The position adjustment mechanism and the rotation adjustment mechanism are both located in the sliding hole 31 on the adjustment frame 3. The air blowing head 1 is slidably positioned inside the sliding hole 31. A screw hole 32 is located on one side of the adjustment frame 3 corresponding to the position of the sliding hole 31, and a fastening adjustment screw (not shown) is installed in the screw hole 32. The position adjustment mechanism allows the distance between the air blowing head 1 and the product surface to be continuously adjustable within the range of 15mm to 25mm to achieve the best air blowing cleaning effect. The rotation adjustment mechanism allows the air blowing head 1 to rotate around its axis, with a rotation range of 0 to 5mm, ensuring comprehensive coverage cleaning of the product surface and improving cleaning efficiency. The air blowing head 1 can be flexibly adjusted in position and angle to adapt to the shape and size of different products, ensuring comprehensive cleaning of all parts of the product surface.

[0021] The regulating valve assembly 2 includes a pressure regulating valve and a flow regulating valve. The pressure regulating valve has an adjustment range of 0-65MPa, and the flow regulating valve has a flow rate of 37L / min. The control system automatically adjusts the gas parameters according to the cleaning requirements of different products, achieving precise control of the cleaning process, ensuring cleaning effectiveness while avoiding damage to the products.

[0022] The air blowing head 1 has an airflow channel inside, which is connected to the air blowing hole 11 to form a concentrated airflow.

[0023] The adjustment frame 3 is provided with fixing holes 33 and is fixed to the frame of the ASM wire bonding machine feed port by bolts (not shown).

[0024] The regulating valve group 2 is connected to the external air source via a high-pressure hose.

[0025] The air nozzle 1 is made of stainless steel with a polished surface, forming a wear-resistant and contamination-resistant structure to ensure the durability of the air nozzle during long-term use and prevent contaminants from adhering to the surface.

[0026] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An air-blowing device for removing foreign matter from silicon wafer products, installed at the feed inlet of an ASM wire bonding machine, characterized in that: It includes an air blowing head (1), a regulating valve assembly (2), and an adjusting frame (3); the air blowing head (1) is fixed near the feed inlet by the adjusting frame (3), and the regulating valve assembly (2) is connected to the air blowing head (1) through an air pipe; the adjusting frame (3) includes a position adjusting mechanism for adjusting the distance between the air blowing head (1) and the product surface and a rotation adjusting mechanism for adjusting the angle of the air blowing head (1).

2. The air blowing device for removing foreign matter from silicon wheat products according to claim 1, characterized in that: The total length of the air blowing head (1) is 160.96 mm and the height is 52 mm.

3. The air blowing device for removing foreign matter from silicon wheat products according to claim 2, characterized in that: The air blowing head (1) is provided with a plurality of air blowing holes (11), the diameter of the air blowing holes (11) is 1mm, and the center distance between adjacent air blowing holes (11) is 5mm.

4. The air blowing device for removing foreign matter from silicon wheat products according to claim 1, characterized in that: The position adjustment mechanism and the rotation adjustment mechanism are sliding holes (31) on the adjustment frame (3). The air blowing head (1) is slidably disposed inside the sliding hole (31). A screw hole (32) is provided on one side of the adjustment frame (3) corresponding to the position of the sliding hole (31). A fastening adjustment screw is provided in the screw hole (32).

5. The air blowing device for removing foreign matter from silicon wheat products according to claim 4, characterized in that: The position adjustment mechanism allows the distance between the air blowing head (1) and the product surface to be continuously adjustable within the range of 15mm to 25mm.

6. The air blowing device for removing foreign matter from silicon wheat products according to claim 4, characterized in that: The rotary adjustment mechanism allows the air blowing head (1) to rotate around an axis, with a rotational movement range of 0 to 5 mm.

7. The air blowing device for removing foreign matter from silicon wheat products according to claim 1, characterized in that: The regulating valve group (2) includes a pressure regulating valve and a flow regulating valve. The regulating range of the pressure regulating valve is 0-65MPa, and the regulating flow rate of the flow regulating valve is 37L / min.

8. The air blowing device for removing foreign matter from silicon wheat products according to claim 1, characterized in that: The air blowing head (1) has an airflow channel inside, which is connected to the air blowing hole (11) to form a concentrated airflow.

9. The air blowing device for removing foreign matter from silicon wheat products according to claim 4, characterized in that: The adjustment frame (3) is provided with fixing holes (33) and is fixed to the frame of the ASM wire bonding machine feed port by bolts.

10. The air blowing device for removing foreign matter from silicon wheat products according to claim 1, characterized in that: The air blowing head (1) is made of stainless steel and the surface is polished.

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