A cleaning device for a crane rail surface in a semiconductor factory

Abstract

The utility model discloses a kind of semiconductor workshop overhead travelling crane track surface cleaning devices, including bottom plate, frame is equipped on bottom plate, first negative pressure fan and second negative pressure fan are equipped in frame;Upward extending negative pressure exhaust longitudinal cylinder is equipped in frame, negative pressure exhaust longitudinal cylinder bottom end is connected with first negative pressure fan, second negative pressure fan by pipeline conduction, negative pressure exhaust longitudinal cylinder top end is equipped with negative pressure exhaust horizontal cylinder, negative pressure exhaust horizontal cylinder is vertically set in negative pressure exhaust longitudinal cylinder top end, negative pressure exhaust horizontal cylinder is connected with negative pressure exhaust longitudinal cylinder conduction, the both ends of negative pressure exhaust horizontal cylinder are respectively equipped with downward protruding, matching symmetrical dust removal module, dust removal module includes dust removal head cavity, two isolated cavities are equipped in dust removal head cavity inside, positive pressure chamber, negative pressure cavity, negative pressure cavity is arranged on the outside of positive pressure chamber. The present application is cleaned by non-contact type suspension positive and negative airway, realizes the efficient automation cleaning of semiconductor workshop overhead travelling crane track surface, effectively improves the cleanliness of semiconductor production environment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a crane track surface cleaning device in a semiconductor workshop, which efficiently cleans the dust generated on the crane track surface of an OHT (Overhead Unmanned Transport System) crane transportation system during operation. Background Technology

[0002] A wafer is the silicon material used in the fabrication of silicon semiconductor integrated circuits, specifically for producing integrated circuit chips. In semiconductor manufacturing, the OHT (Overhead Traveling Automated Guided Transport) system is primarily responsible for precisely transporting semiconductor wafer cassettes to designated locations, reducing human error and offering advantages in flexibility and scalability. Its cleanliness directly determines the product yield of the chips. During wafer transport, the OHT trolley 72 runs on track 71, transporting materials from different process stages (see appendix). Figure 9 The high-speed friction between the OHT cart 72 and the track 71 surface easily generates ultrafine dust. Simultaneously, the repeated transport by the OHT cart 72 over long periods causes the floating dust to gradually compact into highly adhesive, stubborn dust. This stubborn dust can easily re-suspend as particles due to equipment vibration. Therefore, in semiconductor workshops, the amount of dust on the track surface is large, and the dust properties are complex (dust particles are fine and divided into airborne dust and stubborn dust). Dust falling onto the surface of workshop equipment or entering the interior through equipment gaps can significantly reduce the yield rate during wafer processing. To maintain the cleanliness of the semiconductor workshop and preserve chip yield, the track 71 surface needs to be cleaned regularly. Current semiconductor production processes mostly rely on manual cleaning methods, requiring manual wiping, which affects the normal operation of other machines. Furthermore, manual cleaning is unstable, inefficient, has poor cleaning results, and low automation.

[0003] Wafers are made of silicon material used in the fabrication of silicon semiconductor integrated circuits. In semiconductor manufacturing, the Out-of-Touch (OHT) transport system is primarily responsible for precisely transporting semiconductor wafer cassettes to designated locations, reducing human error and offering advantages in flexibility and scalability. Its cleanliness directly determines the product yield of the chips. During wafer production, ultrafine dust is easily generated, which falls to the ground. During OHT transport, friction with the rail surface generates dust, causing it to be stirred up. Simultaneously, the repeated transport by the OHT trolley over long periods gradually compacts the floating dust into highly adhesive, stubborn dust. This stubborn dust can easily re-suspend as particles due to equipment vibration. Furthermore, dust generated during transport by the OHT overhead crane also freely falls onto the rail surface. Therefore, in semiconductor workshops, the amount of dust on the rail surface is large, and the dust properties are complex (dust particles are fine and can be divided into airborne dust and stubborn dust). The presence of dust can significantly reduce the yield rate during wafer production. To maintain the cleanliness of the semiconductor workshop and ensure high wafer production yield, the rail surface must be cleaned regularly. Currently, most semiconductor manufacturing processes rely on manual cleaning methods, which require manual wiping, affecting the normal operation of other machines. Furthermore, manual cleaning is unstable and has a low degree of automation. Utility Model Content

[0004] To address the problems of existing technologies, such as low cleaning efficiency and low automation, the present invention aims to provide an automated cleaning device for the track surface of semiconductor chip production that is highly efficient, non-destructive, thorough, and maintains consistent cleanliness. The device can automatically clean the track surface using a non-contact suspended positive and negative airway cleaning method. At the same time, the cleaning device achieves air-electric isolation and independent operation, thereby improving the stability and yield of product processing.

[0005] A cleaning device for overhead crane track surfaces in a semiconductor workshop includes a base plate, a frame on the base plate, a first negative pressure fan and a second negative pressure fan within the frame; an upwardly extending negative pressure exhaust vertical cylinder within the frame, the bottom end of which is connected to the first and second negative pressure fans via a pipe; and a negative pressure exhaust horizontal cylinder at the top of the negative pressure exhaust vertical cylinder, which is vertically positioned at the top of the negative pressure exhaust vertical cylinder and is connected to it.

[0006] The negative pressure exhaust cylinder has downward protruding and symmetrical dust removal modules at both ends. The dust removal module includes a dust removal head cavity, which contains two isolated cavities: a positive pressure chamber and a negative pressure chamber. The negative pressure chamber is located outside the positive pressure chamber.

[0007] The top of the negative pressure chamber extends to the top of the dust removal head chamber, and the top of the negative pressure chamber is connected to the negative pressure exhaust horizontal cylinder.

[0008] Furthermore, in some embodiments, the bottom of the dust removal head cavity is provided with a bottom panel, the side wall of the positive pressure chamber is vertically arranged from the bottom panel inside the dust removal head cavity, and the top of the positive pressure chamber is separated from the top of the dust removal head cavity by a separation gap; there is an empty space between the outer wall of the positive pressure chamber and the inner wall of the dust removal head cavity, and the spaced cavity between the inner wall of the dust removal head cavity and the outer wall of the positive pressure chamber forms a negative pressure chamber, which is arranged outside the periphery of the positive pressure chamber and covers the positive pressure chamber;

[0009] A narrow dust-blowing slit is opened in the flat area of ​​the bottom panel of the positive pressure chamber, and four narrow suction slits are opened around the bottom panel of the negative pressure chamber.

[0010] Furthermore, in some embodiments, the dust removal head cavity is provided with an air inlet pipe that protrudes towards the negative pressure exhaust vertical cylinder on the side near the negative pressure exhaust vertical cylinder. The air inlet pipe passes through the negative pressure cavity and is connected to the side wall of the positive pressure chamber. The air inlet pipe is in continuous connection with the positive pressure chamber.

[0011] The positive pressure chamber includes an upper air guide wall and a lower horn cavity. The upper air guide wall and the air inlet pipe are set perpendicular to each other. The air guide wall is located in the upper part of the positive pressure chamber away from the bottom panel. The horn cavity that opens towards the bottom panel is located below the air guide wall. A positive pressure fan is installed on the outside of the negative pressure exhaust cross tube. The positive pressure fan is connected to the air inlet pipe through a pipe.

[0012] A dust blowing slit is provided in the middle of the bottom panel of the positive pressure chamber, and the dust blowing slit is set parallel to the air inlet pipe. Four suction slits are provided around the bottom panel of the negative pressure chamber, and the four suction slits are set around the dust blowing slit.

[0013] Furthermore, in some embodiments, the first negative pressure fan and the second negative pressure fan are connected to the frame via a negative pressure fan mounting plate; a silencer box is provided below the first negative pressure fan and the second negative pressure fan, the air outlet of the first negative pressure fan and the second negative pressure fan are connected to the silencer box, a negative pressure high-efficiency filter chamber is provided on the side of the first negative pressure fan and the second negative pressure fan, and the air inlet of the first negative pressure fan and the second negative pressure fan are connected to the negative pressure high-efficiency filter chamber.

[0014] Furthermore, in some embodiments, a Y-shaped air guide branch pipe is provided at one end of the negative pressure exhaust vertical cylinder near the frame. The two branches of the Y-shaped air guide branch pipe are connected to the first negative pressure fan and the second negative pressure fan respectively after passing through the negative pressure high-efficiency filter chamber. The end of the negative pressure exhaust vertical cylinder away from the Y-shaped air guide branch pipe is connected to the negative pressure exhaust horizontal cylinder.

[0015] Furthermore, in some embodiments, the side of the air guide wall near the negative pressure exhaust vertical cylinder is provided with an air inlet pipe that protrudes towards the negative pressure exhaust vertical cylinder, and the air inlet pipe extends to the outside of the side wall of the dust removal head cavity after passing through the negative pressure cavity.

[0016] Furthermore, in some embodiments, the silencing box is provided with two isolated cavities, a first silencing cavity and a second silencing cavity. The side walls of the first silencing cavity and the second silencing cavity are provided with a plurality of honeycomb holes, and the side walls of the first silencing cavity and the second silencing cavity are honeycomb-shaped.

[0017] The top of the first silencing chamber is provided with a first negative pressure silencing air inlet, which is connected to the air outlet of the first negative pressure fan. Below the first negative pressure silencing air inlet in the first silencing chamber is a first U-shaped air guide groove, which surrounds the first negative pressure silencing air inlet. A U-shaped air guide channel is formed between the first U-shaped air guide groove and the inner wall of the first silencing chamber. The tail end of the U-shaped air guide channel between the first U-shaped air guide groove and the inner wall of the first silencing chamber is provided with a first air outlet channel. Several honeycomb holes are opened on the side wall of the first air outlet channel. The air outlet end of the first air outlet channel is provided with a first negative pressure silencing air outlet. A first negative pressure air outlet matching the first negative pressure silencing air outlet is opened on the bottom plate. The first negative pressure air outlet is connected to the first negative pressure silencing air outlet.

[0018] Furthermore, in some embodiments, a second negative pressure silencing air inlet is provided at the top of the second silencing cavity, and the second negative pressure silencing air inlet is connected to the air outlet of the second negative pressure fan; a second U-shaped air guide groove is provided below the second negative pressure silencing air inlet in the second silencing cavity, and several honeycomb holes are provided on the long sidewalls of the second U-shaped air guide groove; the second U-shaped air guide groove is arranged to surround the second negative pressure silencing air inlet, and a U-shaped air guide channel is formed between the second U-shaped air guide groove and the inner wall of the second silencing cavity; a second air outlet channel is provided at the end of the U-shaped air guide channel between the second U-shaped air guide groove and the inner wall of the second silencing cavity, and several honeycomb holes are provided on the sidewall of the second air outlet channel; a second negative pressure silencing air outlet is provided at the end of the air outlet of the second air outlet channel; a second negative pressure air outlet is provided on the bottom plate to match the second negative pressure silencing air outlet; the second negative pressure air outlet and the second negative pressure silencing air outlet are connected in a through manner.

[0019] The first negative pressure silencer air outlet and the second negative pressure silencer air outlet are offset.

[0020] Furthermore, in some embodiments, the dust blowing slits opened in the bottom panel of the positive pressure chamber are configured as multi-stage pulse dust blowing slits, and the dust blowing slits are arranged sequentially from the inside to the outside (from top to bottom): air inlet spacing D1, first narrowing airway spacing D2, first stage expansion cavity spacing D3 of the dual-stage expansion airway cavity, second narrowing airway spacing D4, second stage expansion cavity spacing D5 of the dual-stage expansion airway cavity, and dust blowing spacing D6.

[0021] The air gap spacing on the dust blowing seam is the same as follows: the air inlet spacing D1, the first stage expansion cavity spacing D3, and the second stage expansion cavity spacing D5 of the dual-stage expansion airway are the same; the first narrowing airway spacing D2, the second narrowing airway spacing D4, and the dust blowing spacing D6 are the same, and the spacing D1:D2 ratio is 1:1.5~2.

[0022] The ratio of the height of the positive pressure chamber to the height of the dust collector head cavity is 2 / 3 to 3 / 4:1;

[0023] The ratio of air volume at the dust blowing gap to that at the suction gap is 1:1.5~2;

[0024] The ratio of the pressure at the dust blowing gap to the pressure at the suction gap is 8~12:1.

[0025] This invention provides an automated cleaning device for semiconductor chip production track surfaces that is efficient, non-destructive, thorough, and maintains consistent cleanliness. It automatically cleans 71 track surfaces, avoiding the instability and randomness of manual cleaning. Through structural design, it achieves isolation between the airflow system and the electrical system, improving operational safety and stability.

[0026] This utility model adopts a non-contact suspended + air-electric isolation design. It uses high-frequency fluctuating airflow to blow away dust and then uses an air curtain (negative pressure suction) to close off the dust removal working space. The suction fan (negative pressure fan) is equipped with a high-efficiency filter to filter the dust. Three fans provide positive or negative pressure air sources, eliminating the need for an external air source. In addition, it is powered by OHT, so no external power supply is required.

[0027] The dust removal head (blow-suction head) of this utility model cleans the dust by blowing through the central dust-blowing slit and drawing it in through the suction slits on both sides, preventing dust from leaking out. The dust removal head is suspended on the track and does not contact the track surface. The central dust-blowing slit blows while the suction slits on both sides draw in the dust, preventing dust from escaping. The negative pressure suction (suction slits) on both sides also prevents air leakage and keeps dust from drifting out.

[0028] This application achieves highly efficient and automated cleaning of the overhead crane track surface in semiconductor workshops through non-contact suspended positive and negative air duct cleaning, combined with high-efficiency filtration and intelligent control, effectively improving the cleanliness of the semiconductor production environment. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0030] Figure 2 This is a schematic diagram of the structure of the negative pressure exhaust cross cylinder in an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the dust removal module in an embodiment of the present invention;

[0032] Figure 4This is an exploded view of an embodiment of the present utility model;

[0033] Figure 5 This is an assembly diagram of an embodiment of the present utility model;

[0034] Figure 6 This is a schematic diagram of the assembly of the base plate portion according to an embodiment of the present utility model;

[0035] Figure 7 This is a schematic diagram of the silencer box portion of an embodiment of the present utility model;

[0036] Figure 8 This is a schematic diagram of the structure of the dual-stage expansion airway cavity in an embodiment of the present invention;

[0037] Figure 9 This is a schematic diagram of the overhead crane transport track;

[0038] Figure 10 This is a schematic diagram of the OHT vehicle.

[0039] Explanation of the labels in the diagram:

[0040] 11. Base plate, 12. Frame, 13. Negative pressure exhaust vertical cylinder, 14. Negative pressure high-efficiency filter chamber, 15. First negative pressure fan, 16. Dust removal module, 17. Silencer box, 18. Second negative pressure fan, 19. Positive pressure fan, 21. First negative pressure air outlet, 22. Second negative pressure air outlet, 23. Negative pressure fan mounting plate, 24. Y-shaped air guide branch pipe, 26. First negative pressure silencer air inlet, 27. Second negative pressure silencer air inlet, 28. First negative pressure silencer air outlet, 29. Second negative pressure silencer air outlet. Air vent 29, negative pressure exhaust cross tube 31, dust removal head cavity 33, positive pressure chamber 34, bottom panel 35, negative pressure cavity 36, suction slit 37, air inlet pipe 38, air guide screen wall 39, horn cavity 41, dust blowing slit 42, first silencer cavity 43, first U-shaped air guide groove 44, second silencer cavity 45, second U-shaped air guide groove 46, first air outlet channel 47, second air outlet channel 48, dual-stage expansion air duct cavity 49, track 71, OHT trolley 72. Detailed Implementation

[0041] To make the objectives, applications, and advantages of this utility model clearer, the present utility model application will be clearly and completely described below with reference to specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0042] In the description of this utility model, it should be noted that the terms "lateral," "upper," "lower," "front," "rear," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly defined.

[0043] See appendix Figure 10 As shown, the OHT trolley 72 serves as the main transport vehicle in the semiconductor workshop. The OHT trolley 72 is installed above the track 71 and transports materials from different process stages within the semiconductor workshop. This invention achieves movement by combining the OHT trolley 72 with the cleaning device (main body). The cleaning device is mounted on the OHT trolley 72, and the OHT trolley 72 drives the cleaning device to perform dust removal work on the track 71.

[0044] This utility model includes a base plate 11, on which a frame 12 is provided. A first negative pressure fan 15 and a second negative pressure fan 18 are provided in the frame 12. The first negative pressure fan 15 and the second negative pressure fan 18 are connected to the frame 12 through a negative pressure fan mounting plate 23. A silencer box 17 is provided below the first negative pressure fan 15 and the second negative pressure fan 18. The air outlets of the first negative pressure fan 15 and the second negative pressure fan 18 are connected to the silencer box 17. A negative pressure high-efficiency filter chamber 14 is provided on the side of the first negative pressure fan 15 and the second negative pressure fan 18. The air inlet of the first negative pressure fan 15 and the second negative pressure fan 18 is connected to the negative pressure high-efficiency filter chamber 14.

[0045] Furthermore, in one embodiment, the frame 12 is provided with an upwardly extending negative pressure exhaust vertical cylinder 13. The negative pressure exhaust vertical cylinder 13 is provided with a Y-shaped air guide branch pipe 24 at one end near the frame 12. The two branches of the Y-shaped air guide branch pipe 24 are connected to the first negative pressure fan 15 and the second negative pressure fan 18 respectively after passing through the negative pressure high-efficiency filter chamber 14. The negative pressure exhaust horizontal cylinder 31 is provided at one end of the negative pressure exhaust vertical cylinder 13 away from the Y-shaped air guide branch pipe 24. The negative pressure exhaust horizontal cylinder 31 is vertically arranged at the top of the negative pressure exhaust vertical cylinder 13 and is electrically connected to the negative pressure exhaust vertical cylinder 13.

[0046] The negative pressure exhaust cylinder 31 has downward protruding and symmetrically matched dust removal modules 16 (dust removal mechanism, dust removal head) at both ends. The dust removal module 16 includes a dust removal head cavity 33. The top of the dust removal head cavity 33 is connected to the negative pressure exhaust cylinder 31. The bottom of the dust removal head cavity 33 is provided with a bottom panel 35. The dust removal head cavity 33 has two spaced cavities: a positive pressure chamber 34 and a negative pressure chamber 36.

[0047] Furthermore, in one embodiment, a positive pressure chamber 34 is provided in the dust removal head cavity 33. There is an empty space between the outer wall of the positive pressure chamber 34 and the inner wall of the dust removal head cavity 33. The space between the inner wall of the dust removal head cavity 33 and the outer wall of the positive pressure chamber 34 forms a negative pressure cavity 36. The negative pressure cavity 36 is located outside the periphery of the positive pressure chamber 34 and covers the positive pressure chamber 34. The negative pressure cavity 36 and the positive pressure chamber 34 are isolated from each other and do not communicate with each other.

[0048] The positive pressure chamber 34 adopts a side air intake because the space for installing the dust removal module on the OHT trolley is limited and there are height restrictions, so it is not convenient to use an upper air intake structure. Therefore, a side air intake structure is selected. The side air intake airflow impacts the inner wall of the air guide wall 39 (vertical). Since the air guide wall 39 and the horn cavity 41 are closed cavities, the airflow will accelerate and blow downwards.

[0049] The positive pressure chamber 34 includes an upper air guide wall 39 and a lower horn cavity 41 (expanded conical cavity). The air guide wall 39 is approximately vertically positioned and located in the upper part of the positive pressure chamber 34 away from the bottom panel 35. Below the air guide wall 39 is a horn cavity 41 that extends towards the bottom panel 35. On the side of the air guide wall 39 near the negative pressure exhaust duct 13, there is an air inlet pipe 38 extending and protruding towards the negative pressure exhaust duct 13. After passing through the dust removal head cavity 33, the air inlet pipe 38 extends to the outside of the side wall of the dust removal head cavity 33. The air inlet pipe 38 is connected to the positive pressure chamber 34. The air inlet pipe 38 is set approximately perpendicular to the air guide screen wall 39. A dust blowing slit 42 is opened in the middle of the bottom panel 35 at the bottom of the positive pressure chamber 34. The dust blowing slit 42 is set parallel to the air inlet pipe 38. Four suction slits 37 are opened around the bottom panel 35 at the bottom of the negative pressure cavity 36. The four suction slits 37 are set around the dust blowing slit 42.

[0050] A positive pressure fan 19 is provided on the outside of the negative pressure exhaust cylinder 31, and the positive pressure fan 19 is connected to the air inlet pipe 38 through a pipe.

[0051] The bottom panel 35 of the dust collector head cavity 33 has a suction slit 37 (narrow suction channel) around each of its four sides. The width of the suction slit 37 is greater than the width of the dust blowing slit 42. The air blown down from the dust blowing slit 42 in the middle of the dust collector head cavity 33 (working gun) will diffuse to both sides. Each of the four sides is equipped with a suction slit 37 air curtain, which then sucks away the dust. The suction slits 37 on both sides form a suction air curtain. This prevents dust from spreading out of the dust blowing gun, improves cleaning efficiency, and enhances the automation level of the equipment.

[0052] This invention aims to solve the problem of low efficiency in manual removal of fine dust, and provides a dust removal head cavity 33 structure that can generate high-frequency and high-speed pulse airflow and air curtain barrier. The high-frequency and high-speed undulating airflow is generated by the cavity self-excited oscillation of the double-stage expansion air passage cavity 49 (variable cross-section channel), which blows up fine dust; the air curtain is formed by the surrounding suction slits 37 to attract dust and prevent dust from escaping into the air.

[0053] This invention aims to solve the problems of preventing damage to the surface of the track 71 and generating static electricity during cleaning. It provides a non-contact suspended + gas-electric isolation design scheme to enable the dust removal module 16 of this invention to be suspended on the track 71 without contact with the track surface, thus avoiding the risk of damage to the track surface.

[0054] In order to address the shortcomings of traditional cleaning methods, the purpose of this utility model is to provide a multi-functional cleaning device based on the OHT trolley 72 system. The cleaning device is divided into three parts: a front-end combined dust removal module 16, a rear-end negative pressure high-efficiency filter chamber 14, and a control module.

[0055] Dust removal module 16: The dust removal module 16 at both ends of the negative pressure exhaust cylinder 31 includes a dust removal head cavity 33 and a positive pressure fan 19.

[0056] The silencing box 17 has two isolated cavities: a first silencing cavity 43 and a second silencing cavity 45. The side walls of both the first silencing cavity 43 and the second silencing cavity 45 are provided with a number of honeycomb-shaped perforations. The side walls of the first silencing cavity 43 and the second silencing cavity 45 are honeycomb-shaped. The top of the first silencing cavity 43 is provided with a first negative pressure silencing air inlet 26, which is connected to the air outlet of the first negative pressure fan 15. The top of the second silencing cavity 45 is provided with a second negative pressure silencing air inlet 27, which is connected to the air outlet of the second negative pressure fan 18. Below the second negative pressure silencing air inlet 27 in the second silencing cavity 45, there is a second U-shaped air guide channel 46. The long side walls of the second U-shaped air guide channel 46 are provided with a number of honeycomb-shaped perforations, and the long side walls of the second U-shaped air guide channel 46 form honeycomb-shaped side baffles. The silencing holes on the side wall of the second silencing chamber 45 and the side wall of the second U-shaped air guide 46 are designed to reduce the speed of the exhaust airflow in order to reduce noise.

[0057] The second U-shaped air guide trough 46 surrounds the second negative pressure silencer air inlet 27, forming a loop-shaped air guide channel between the second U-shaped air guide trough 46 and the inner wall of the second silencer cavity 45. The air guide channel also reduces speed and noise, and the side walls of the air guide channel are all perforated. At the end of the loop-shaped air guide channel between the second U-shaped air guide trough 46 and the inner wall of the second silencer cavity 45, there is a second air outlet channel 48. The side walls of the second air outlet channel 48 are perforated, and the air outlet end of the second air outlet channel 48 is provided with a second negative pressure silencer air outlet 29. A second negative pressure air outlet 22 matching the second negative pressure silencer air outlet 29 is provided on the bottom plate 11, and the second negative pressure air outlet 22 and the second negative pressure silencer air outlet 29 are connected through each other.

[0058] Below the first negative pressure silencing air inlet 26 in the first silencing cavity 43, a first U-shaped air guide groove 44 is provided. The first U-shaped air guide groove 44 surrounds the first negative pressure silencing air inlet 26, and a U-shaped air guide channel is formed between the first U-shaped air guide groove 44 and the inner wall of the first silencing cavity 43. The air guide channel also reduces speed and noise, and the side walls of the air guide channel are all perforated. At the end of the U-shaped air guide channel between the first U-shaped air guide groove 44 and the inner wall of the first silencing cavity 43, a first air outlet channel 47 is provided. The side walls of the first air outlet channel 47 are provided with several perforations. At the end of the first air outlet channel 47, a first negative pressure silencing air outlet 28 is provided. A first negative pressure air outlet 21 matching the first negative pressure silencing air outlet 28 is provided on the bottom plate 11. The first negative pressure air outlet 21 and the first negative pressure silencing air outlet 28 are connected through each other. The first negative pressure silencer air outlet 28 and the second negative pressure silencer air outlet 29 are staggered: they are staggered laterally and spaced apart front and back, and have a longitudinal separation gap.

[0059] Furthermore, in one embodiment, the dust-blowing slit 42 opened in the bottom panel 35 of the positive pressure chamber 34 is configured as a multi-stage pulse dust-blowing slit. The dust-blowing slit 42, from the inside out (from top to bottom), is sequentially configured with: an air inlet spacing D1, a first narrowing airway spacing D2, a first-stage expansion cavity spacing D3 of the dual-stage expansion airway cavity 49, a second narrowing airway spacing D4, a second-stage expansion cavity spacing D5 of the dual-stage expansion airway cavity 49, and a dust-blowing spacing D6. The air gap spacing on the dust-blowing slit 42 (multi-stage pulse dust-blowing slit) is such that: the air inlet spacing D1, the first-stage expansion cavity spacing D3 of the dual-stage expansion airway cavity 49, and the second-stage expansion cavity spacing D5 of the dual-stage expansion airway cavity 49 are the same (D1=D3=D5); the first narrowing airway spacing D2, the second narrowing airway spacing D3, the second narrowing airway spacing D4, the first-stage expansion cavity spacing D5, and the second-stage expansion cavity spacing D6 are the same. The channel spacing D4 and the dust blowing spacing D6 are the same (D2=D4=D6), and the spacing D1:D2 ratio is 1:1.5~2 (D1:D2=1:1.5~2). The airflow passes through D1→D2→D3→D4→D5→D6, and the airflow fluctuates from wide to narrow D2→wide D3→narrow D4→wide D5→narrow D6. When the airflow enters the wide airflow from the narrow airflow, the airflow on both sides of the airflow develops into a free shear flow, forming a large vortex in the wide airflow. The main airflow continues to flow downward and merges with the airflow in the wide airflow at the channel opening and continues to move downward, resulting in a high-frequency, high-speed pulsed airflow. The airflow pulse frequency reaches the ultrasonic frequency, and the dust blowing gap 42 (multi-stage pulse dust blowing gap) air outlet (dust blowing spacing D6) performs impact dust blowing and sweeping.

[0060] This utility model employs an ultrasonic dust removal device structure comprising two identical dust removal modules 16 (dust removal head chambers 33). The bottom of each dust removal head chamber 33 has a bottom panel 35, which is integrally formed with the bottom panel 35. The top of each dust removal head chamber 33 is directly connected to a negative pressure exhaust cylinder 31, which serves as both a sealing cover for the dust removal head chamber 33 and a cavity for negative pressure gas flow. A positive pressure chamber 34 is provided inside the dust removal head chamber 33, and the sidewalls of the positive pressure chamber 34 are formed by the dust removal head chamber. The bottom panel 35 inside the dust collector 33 is vertically oriented, and the top of the positive pressure chamber 34 is separated from the top of the dust collector head cavity 33 by a separation gap. Furthermore, there is an empty gap between the outer wall of the positive pressure chamber 34 and the inner wall of the dust collector head cavity 33. The cavity between the inner wall of the dust collector head cavity 33 and the outer wall of the positive pressure chamber 34 forms a negative pressure cavity 36, which surrounds the positive pressure chamber 34 and is located in the dust collector head cavity 33. A narrow dust blowing slit 42 is opened in the planar area of ​​the bottom panel 35 of the positive pressure chamber 34 (positive pressure cavity). The negative pressure cavity 36 is connected to the negative pressure exhaust vertical cylinder 13 (air cavity), and four narrow suction slits 37 (narrow suction slits) are opened in the bottom panel 35 (bottom) of the negative pressure cavity 36.

[0061] The positive pressure chamber 34 and the negative pressure chamber are respectively located in the dust removal head cavity 33, and the positive pressure chamber 34 and the negative pressure chamber are isolated from each other and do not communicate with each other.

[0062] The ratio of the height of the positive pressure chamber 34 to the height of the dust collector head cavity 33 is 2 / 3 to 3 / 4:1;

[0063] The ratio of air volume at the dust blowing slit 42 to that at the suction slit 37 is 1:1.5~2;

[0064] The pressure ratio between the blowing gap 42 and the suction gap 37 is 8~12:1.

[0065] This invention employs a side-entry positive pressure chamber 34, where the airflow enters from the side. The airflow impacts the upper guide wall 39 of the positive pressure chamber 34, facilitating the formation of a stable separation zone, promoting the development of the shear layer, and enhancing the periodic generation and collision of vortex rings. The airflow is then injected downwards into the horn cavity 41, achieving a high-intensity, high-stability pulse jet. The side-entry method facilitates duct connection and overall device installation; simultaneously, it reduces the area occupied by the positive pressure chamber 34, allowing for a larger negative pressure cavity 36 area, increasing the provided airflow and improving dust removal efficiency.

[0066] The integrated positive pressure design places the positive pressure fan 19 on the negative pressure exhaust cylinder 31 and integrates it next to the ultrasonic dust removal module 16. The first negative pressure fan 15 and the second negative pressure fan 18 are housed in the frame 12. Because the airflow transmission distance between the positive pressure fan 19 and the dust removal module 16 is significantly shortened (due to the shortened length of the connecting hose), this design effectively reduces energy loss from the airflow through the dust outlet 42 to the dust removal module 16. Furthermore, this design integrates the negative pressure fan with the dust collection chamber, making it suitable for production environments with high dust generation and helping to reduce the frequency of cleaning and maintenance.

[0067] In summary, this invention significantly enhances adaptability to different scenarios. Furthermore, thanks to reduced energy loss during airflow transmission, the required fan power is lowered to achieve the same dust collector outlet airflow conditions. This improvement not only enhances the flexibility of fan selection but also makes it possible to use more compact fan models.

[0068] The installation method of this utility model is as follows: A base plate 11 and a frame 12 are installed, with the frame 12 positioned above the base plate 11. A touch screen is installed within the frame 12, which also houses a first negative pressure fan 15 and a second negative pressure fan 18 assembly, an embedded controller, and a negative pressure high-efficiency filter chamber 14. The first negative pressure fan 15 and the second negative pressure fan 18 are located on the side of the negative pressure high-efficiency filter chamber 14. The negative pressure fans are connected to the frame 12 via a negative pressure fan mounting plate 23. A negative pressure fan inlet shell is fitted around the outside of the negative pressure fans, and a negative pressure fan exhaust shell is fitted around the top of the negative pressure fans. The negative pressure high-efficiency filter chamber 14 is connected to the negative pressure cavity 36 on the dust removal module 16 via a negative pressure exhaust vertical cylinder 13 and a negative pressure exhaust horizontal cylinder 31. The outlets of the first negative pressure fan 15 and the second negative pressure fan 18 are connected to a silencer box 17.

[0069] To address the space and dust removal needs of different semiconductor workshops, this utility model innovatively proposes a powered front-end combined dust removal module solution.

[0070] The powered front-end combined dust removal module solution places the positive pressure fan 19 on the negative pressure exhaust cross-section 31, while the first negative pressure fan 15 and the second negative pressure fan 18 are housed within the frame 12. Because the airflow transmission distance between the positive pressure fan 19 and the dust removal module 16 is significantly shortened (due to the shortened length of the connecting hose), this design effectively reduces energy loss from the positive pressure fan 19 to the dust removal module 16 through the dust-blowing slit 42 (air outlet). Furthermore, this solution integrates the negative pressure fan with the negative pressure high-efficiency filter chamber 14, making it suitable for production environments with high dust generation and helping to reduce the frequency of cleaning and maintenance.

[0071] In summary, this invention significantly enhances adaptability. Furthermore, thanks to reduced energy loss during airflow transmission, the required fan power is lowered to achieve the same dust collector outlet airflow conditions. This improvement not only enhances the flexibility of fan selection but also makes it possible to use more compact fan models.

[0072] The ultrasonic dust removal device of this utility model includes two identical dust removal head cavities 33. A bottom panel 35 is provided at the bottom of each dust removal head cavity 33, and the dust removal head cavity 33 and the bottom panel 35 are integrally formed. The top of each dust removal head cavity 33 is directly connected to a negative pressure exhaust horizontal cylinder 31, which serves as both a sealing cover for the dust removal head and a cavity for negative pressure gas flow. A positive pressure chamber 34 is provided inside each dust removal head cavity 33, and the sidewall of the positive pressure chamber 34 is formed by the dust removal head cavity 33. The bottom panel 35 is vertically oriented, and the top of the positive pressure chamber 34 is separated from the top of the dust removal head cavity 33 by a separation gap. Furthermore, there is an empty gap between the outer wall of the positive pressure chamber 34 and the inner wall of the dust removal head cavity 33, forming a negative pressure chamber. A negative pressure cavity 36 is located outside the positive pressure chamber 34 and is situated within the dust removal head cavity 33. A narrow dust-blowing slit 42 is opened in the planar area of ​​the bottom panel 35 of the positive pressure chamber 34. The negative pressure cavity 36 is connected to a negative pressure exhaust cross-section 31, and four narrow suction slits 37 are opened around the bottom panel 35 of the negative pressure cavity 36.

[0073] The width of the dust blowing slit 42 in this invention is smaller than that of the suction slit 37. The dust blowing airflow is confined within the air curtain formed by the suction airflow, effectively preventing dust from escaping. The pressure ratio is designed such that the pressure ratio between the blowing slit and the suction slit reaches 8~12:1, ensuring that the dust is completely captured.

[0074] The combination of the air guide wall 39 and the horn cavity 41 generates cavity self-excited oscillation, forming a high-frequency and high-speed undulating airflow, which effectively removes stubborn dust with strong adhesion.

[0075] The silencing box 17 has a first U-shaped air guide groove 44 set in the first silencing cavity 43 and a second U-shaped air guide groove 46 set in the second silencing cavity 45. The side wall of the air guide groove adopts a honeycomb structure to form a loop-shaped air guide channel, which effectively reduces the noise of the fan operation.

[0076] This invention employs a non-contact dust removal head for cleaning, utilizing automated cleaning equipment. The non-contact, non-destructive cleaning method of this invention involves: the dust removal head suspended above the track surface, avoiding direct contact with the track surface through a non-contact design; a high-frequency undulating airflow blowing dust and an air curtain (negative pressure suction) sealing the dust removal working space; the dust removal module 16 blows and cleans through the central dust-blowing slit 42, while the suction slits 37 on both sides attract dust to prevent leakage; the air blown out from the central dust-blowing slit 42 diffuses to both sides, and the suction slits 37 on all four sides form an air curtain to suck away the dust; the suction slits 37 on both sides form an suction air curtain to prevent dust from spreading out of the dust-blowing gun; a high-frequency, high-speed undulating airflow is generated through the cavity self-excited oscillation of the variable cross-section channel, blowing up fine dust particles, which are then attracted by the air curtain formed by the suction slits 37 on both sides, preventing dust from escaping into the air.

[0077] The above-described embodiments are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model (such as replacing the negative pressure exhaust horizontal cylinder 31 and negative pressure exhaust vertical cylinder 13 with flexible hoses depending on the different working conditions of fixing and installing the dust removal module 16), and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the appended claims.

Claims

1. A cleaning device for overhead crane track surfaces in a semiconductor workshop, comprising: A base plate (11) is provided with a frame (12) on the base plate (11), and a first negative pressure fan (15) and a second negative pressure fan (18) are provided in the frame (12); characterized in that the frame (12) is provided with an upwardly extending negative pressure exhaust vertical cylinder (13), and the bottom end of the negative pressure exhaust vertical cylinder (13) is connected to the first negative pressure fan (15) and the second negative pressure fan (18) through a pipe; a negative pressure exhaust horizontal cylinder (31) is provided at the top of the negative pressure exhaust vertical cylinder (13), and the negative pressure exhaust horizontal cylinder (31) is vertically set at the top of the negative pressure exhaust vertical cylinder (13), and the negative pressure exhaust horizontal cylinder (31) is connected to the negative pressure exhaust vertical cylinder (13); The negative pressure exhaust cylinder (31) has downward protruding and symmetrical dust removal modules (16) at both ends. The dust removal module (16) includes a dust removal head cavity (33). The dust removal head cavity (33) has two isolated cavities: a positive pressure chamber (34) and a negative pressure chamber (36). The negative pressure chamber (36) is located outside the positive pressure chamber (34). The top of the negative pressure chamber (36) extends to the top of the dust removal head chamber (33), and the top of the negative pressure chamber (36) is connected to the negative pressure exhaust cylinder (31).

2. The overhead crane track surface cleaning device in a semiconductor workshop according to claim 1, characterized in that, The bottom of the dust removal head cavity (33) is provided with a bottom panel (35). The side wall of the positive pressure chamber (34) is vertically arranged from the bottom panel (35) inside the dust removal head cavity (33). The top of the positive pressure chamber (34) is separated from the top of the dust removal head cavity (33). There is an empty space between the outer wall of the positive pressure chamber (34) and the inner wall of the dust removal head cavity (33). The space between the inner wall of the dust removal head cavity (33) and the outer wall of the positive pressure chamber (34) forms a negative pressure cavity (36). The negative pressure cavity (36) is located outside the periphery of the positive pressure chamber (34) and covers the positive pressure chamber (34). A long, narrow dust-blowing slit (42) is opened on the bottom panel (35) of the positive pressure chamber (34), and four long, narrow suction slits (37) are opened around the bottom panel (35) of the negative pressure chamber (36).

3. The overhead crane track surface cleaning device in a semiconductor workshop according to claim 1, characterized in that, The dust removal head cavity (33) is provided with an air inlet pipe (38) extending towards the negative pressure exhaust vertical cylinder (13) on the side near the negative pressure exhaust vertical cylinder (13). The air inlet pipe (38) passes through the negative pressure cavity (36) and connects to the side wall of the positive pressure chamber (34). The air inlet pipe (38) and the positive pressure chamber (34) are connected in a through manner. The positive pressure chamber (34) includes an upper air guide wall (39) and a lower horn cavity (41). The upper air guide wall (39) and the air inlet pipe (38) are arranged perpendicular to each other. The air guide wall (39) is located in the upper part of the positive pressure chamber (34) away from the bottom panel (35). The air guide wall (39) has a horn cavity (41) that opens towards the bottom panel (35) below it. A positive pressure fan (19) is provided on the outside of the negative pressure exhaust cross tube (31). The positive pressure fan (19) is connected to the air inlet pipe (38) through a pipe. A dust blowing slit (42) is provided in the middle of the bottom panel (35) at the bottom of the positive pressure chamber (34). The dust blowing slit (42) is set parallel to the air inlet pipe (38). Four suction slits (37) are provided around the bottom panel (35) at the bottom of the negative pressure chamber (36). The four suction slits (37) are set around the dust blowing slit (42).

4. The overhead crane track surface cleaning device in a semiconductor workshop according to claim 1, characterized in that, The first negative pressure fan (15) and the second negative pressure fan (18) are connected to the frame (12) through the negative pressure fan mounting plate (23); a silencer box (17) is provided below the first negative pressure fan (15) and the second negative pressure fan (18), the air outlet of the first negative pressure fan (15) and the second negative pressure fan (18) is connected to the silencer box (17), a negative pressure high-efficiency filter chamber (14) is provided on the side of the first negative pressure fan (15) and the second negative pressure fan (18), and the air inlet of the first negative pressure fan (15) and the second negative pressure fan (18) is connected to the negative pressure high-efficiency filter chamber (14).

5. A cleaning device for overhead crane track surfaces in a semiconductor workshop according to claim 1, characterized in that, The negative pressure exhaust vertical cylinder (13) is provided with a Y-shaped air guide branch pipe (24) at one end near the frame (12). The two branches of the Y-shaped air guide branch pipe (24) are connected to the first negative pressure fan (15) and the second negative pressure fan (18) respectively after passing through the negative pressure high-efficiency filter chamber (14). The end of the negative pressure exhaust vertical cylinder (13) away from the Y-shaped air guide branch pipe (24) is connected to the negative pressure exhaust horizontal cylinder (31).

6. A cleaning device for overhead crane track surfaces in a semiconductor workshop according to claim 3, characterized in that, The air guide wall (39) is provided with an air inlet pipe (38) that protrudes towards the negative pressure exhaust vertical cylinder (13) on the side near the negative pressure exhaust vertical cylinder (13). The air inlet pipe (38) passes through the negative pressure cavity (36) and extends to the outside of the side wall of the dust removal head cavity (33).

7. A cleaning device for overhead crane track surfaces in a semiconductor workshop according to claim 4, characterized in that, The silencing box (17) is provided with two isolated cavities, a first silencing cavity (43) and a second silencing cavity (45). The side walls of the first silencing cavity (43) and the second silencing cavity (45) are provided with several honeycomb holes. The side walls of the first silencing cavity (43) and the second silencing cavity (45) are honeycomb-shaped. The top of the first silencing chamber (43) is provided with a first negative pressure silencing air inlet (26), which is connected to the air outlet of the first negative pressure fan (15); a first U-shaped air guide groove (44) is provided below the first negative pressure silencing air inlet (26) in the first silencing chamber (43), which surrounds the first negative pressure silencing air inlet (26), and a U-shaped air guide channel is formed between the first U-shaped air guide groove (44) and the inner wall of the first silencing chamber (43); The end of the U-shaped air guide channel between the U-shaped air guide channel (44) and the inner wall of the first silencing cavity (43) is provided with a first air outlet channel (47). The side wall of the first air outlet channel (47) is provided with several honeycomb holes. The air outlet end of the first air outlet channel (47) is provided with a first negative pressure silencing air outlet (28). The bottom plate (11) is provided with a first negative pressure air outlet (21) that matches the first negative pressure silencing air outlet (28). The first negative pressure air outlet (21) and the first negative pressure silencing air outlet (28) are connected in a continuous manner.

8. A cleaning device for overhead crane track surfaces in a semiconductor workshop according to claim 7, characterized in that, The top of the second silencing cavity (45) is provided with a second negative pressure silencing air inlet (27), which is connected to the air outlet of the second negative pressure fan (18). Below the second negative pressure silencing air inlet (27) in the second silencing cavity (45) is a second U-shaped air guide groove (46), and several honeycomb holes are provided on the long sidewalls of the second U-shaped air guide groove (46). The second U-shaped air guide groove (46) is arranged to surround the second negative pressure silencing air inlet (27), and a gap is formed between the second U-shaped air guide groove (46) and the inner wall of the second silencing cavity (45). A loop-shaped air guide channel is formed; a second air outlet channel (48) is provided at the end of the loop-shaped air guide channel between the second U-shaped air guide channel (46) and the inner wall of the second silencing cavity (45). Several honeycomb holes are opened on the side wall of the second air outlet channel (48). A second negative pressure silencing air outlet (29) is provided at the end of the air outlet of the second air outlet channel (48). A second negative pressure air outlet (22) matching the second negative pressure silencing air outlet (29) is opened on the bottom plate (11). The second negative pressure air outlet (22) and the second negative pressure silencing air outlet (29) are connected in a through manner. The first negative pressure silencer air outlet (28) and the second negative pressure silencer air outlet (29) are set out in a staggered manner.

9. A cleaning device for overhead crane track surfaces in a semiconductor workshop according to claim 2, characterized in that, The dust blowing slit (42) opened in the bottom panel (35) of the positive pressure chamber (34) is set as a multi-stage pulse dust blowing slit. The dust blowing slit (42) is provided with the following from the inside to the outside: air inlet spacing D1, first narrowing airway spacing D2, first stage expansion cavity spacing D3 of the double-stage expansion airway cavity (49), second narrowing airway spacing D4, second stage expansion cavity spacing D5 of the double-stage expansion airway cavity (49), and dust blowing spacing D6. The air gap spacing on the dust blowing slit (42) is the same as: the air inlet spacing D1, the first stage expansion cavity spacing D3 of the double-stage expansion airway cavity (49), and the second stage expansion cavity spacing D5 of the double-stage expansion airway cavity (49); the first narrowing airway spacing D2, the second narrowing airway spacing D4, and the dust blowing spacing D6 are the same, and the spacing D1:D2 ratio is 1:1.5~2; The ratio of the height of the positive pressure chamber (34) to the height of the dust collector head cavity (33) is 2 / 3 to 3 / 4:1; The ratio of the air volume of the dust blowing gap (42) to the air volume of the suction gap (37) is 1:1.5~2; The pressure ratio between the dust blowing seam (42) and the suction seam (37) is 8~12:1.

Images