Probe card micro-via processing mechanism

Abstract

The utility model relates to the probe card technical field, concretely speaking is a kind of probe card micro -hole processing mechanism, including processing station, processing assembly and guide component, the top of processing station is connected with support frame by bolt, the bottom of support frame is provided with processing assembly, the top of processing station is located in the bottom of processing assembly and is provided with guide component;The processing assembly includes mounting bracket, the bottom of mounting bracket is connected with suction nozzle by bolt, one side of mounting bracket is connected with recovery groove by bolt, the bottom of recovery groove is connected with suction pump by bolt, and the air inlet end of suction pump is located in recovery groove;By increasing auxiliary cleaning mechanism, utilize suction, and blow mode, while micro -hole processing, carry out auxiliary cleaning to micro -hole, remove the chip remaining in hole wall, to improve use effect.

Description

Technical Field

[0001] This utility model relates to the field of probe card technology, and specifically to a probe card micro-hole processing mechanism. Background Technology

[0002] Probe cards are essential equipment for wafer-level inspection in semiconductor manufacturing. They serve as the interface between the chip under test and the testing machine in semiconductor wafer testing. They are mainly used to perform preliminary testing of the electrical performance of the chip before packaging. Micro-hole processing of probe cards is a critical step in the manufacturing process, requiring extremely high precision and typically necessitating ultra-high precision processing equipment.

[0003] Currently, micro-hole machining mechanisms lack auxiliary cleaning mechanisms. Typically, during the micro-hole machining of probe cards, the workpiece material vaporizes or melts due to high temperatures. Unremoved molten material cools and forms solid debris, requiring subsequent cleaning through rinsing or other methods. This not only increases micro-hole machining time but also causes probes to become stuck, misaligned, or even unable to be installed, affecting the positional accuracy of the probe array. Therefore, this paper proposes a probe card micro-hole machining mechanism to incorporate an auxiliary cleaning mechanism. Utilizing suction and blowing methods, the mechanism simultaneously cleans the micro-holes, removing residual debris from the hole walls and improving overall performance. Utility Model Content

[0004] To address the problems in the existing technology, this utility model provides a probe card micro-hole processing mechanism, which facilitates the simultaneous auxiliary cleaning of micro-holes by suction and blowing, thereby improving the usage effect.

[0005] The technical solution adopted by this utility model to solve its technical problem is a probe card micro-hole processing mechanism, including a processing table, a processing component and a guide component. The top of the processing table is connected to a support frame by bolts, the bottom of the support frame is provided with the processing component, and the top of the processing table is located at the bottom of the processing component and the guide component is provided. The processing assembly includes a mounting frame, with an air extraction nozzle bolted to the bottom of the mounting frame, a recovery tank bolted to one side of the mounting frame, and an air pump bolted to the bottom of the recovery tank, with the air inlet of the air pump located inside the recovery tank.

[0006] By adopting the above technical solution and adding an auxiliary cleaning mechanism, the residual debris in the micropores can be cleaned by means of suction, negative pressure and diversion.

[0007] Specifically, the guide assembly includes a slide table, a rotating frame is mounted on the top of the slide table via a bearing, support plates are slidably connected to both sides of the top of the rotating frame, and a positioning plate is rotatably connected to the top of the support plate via a damping shaft. The positioning plate includes a flat surface and an arc surface.

[0008] Specifically, the recycling tank is equipped with filter plates and activated carbon filter plates, and a laser is bolted to the top of the mounting frame.

[0009] Specifically, a double-threaded rod is installed inside the rotating frame via bearings, and a corresponding second ball slider is sleeved around the double-threaded rod. The second ball slider is connected to the support plate by bolts. A rotating rod is provided on one side of the rotating frame, and the rotating rod is connected to the double-threaded rod by bolts.

[0010] Specifically, the top of the slide is connected to the bottom of the rotating frame by bolts with a guide ring, and the air outlet of the air pump is connected to the guide ring through a hose. The surface of the rotating frame is provided with through holes.

[0011] Specifically, a lead screw is installed in the processing table via bearings, a ball bearing slider is sleeved around the lead screw, and the ball bearing slider is connected to the slide table via bolts. One end of the lead screw is connected to a transmission gear via bolts. A drive gear is rotatably connected to the bottom of the transmission gear in the processing table via a rotating shaft. A stepper motor is connected to the processing table via bolts, and the stepper motor is connected to the drive gear via a drive shaft.

[0012] The beneficial effects of this utility model are: (1) The micro-hole processing mechanism for probe cards described in this utility model, through the setting of processing table, mounting frame, air pump, recovery tank and air pump, adds an auxiliary cleaning mechanism. By using suction, negative pressure and flow guidance, it can assist in cleaning the debris remaining in the micro-hole while processing the probe card, reduce the impact of debris residue on subsequent processing effect, thereby improving the processing quality and efficiency of the probe card.

[0013] (2) The probe card micro-hole processing mechanism described in this utility model can add an auxiliary positioning mechanism by setting a slide table, rotating frame, support plate, positioning plate, plane and arc surface, and perform clamping and fixing treatment according to the actual probe card size and shape. It is not only convenient to operate, but also improves the flexibility of use. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a cross-sectional view of the processing component of this utility model; Figure 3 This is a schematic diagram of the guide component structure of this utility model; Figure 4 This is a schematic diagram of the support plate and positioning plate structure of this utility model; Figure 5 This is a cross-sectional view of the rotating frame of this utility model; Figure 6 This is a cross-sectional view of the processing table of this utility model; In the diagram: 1. Machining table; 101. Lead screw; 102. Ball bearing slider; 103. Transmission gear; 104. Drive gear; 105. Stepper motor; 2. Support frame; 3. Machining components; 301. Mounting frame; 302. Air extraction nozzle; 303. Recovery tank; 304. Air pump; 305. Filter plate; 306. Activated carbon filter plate; 307. Laser; 4. Guide assembly; 401. Slide table; 402. Rotating frame; 403. Support plate; 404. Positioning plate; 405. Flat surface; 406. Arc surface; 407. Double threaded rod; 408. Second ball bearing slider; 409. Rotating rod; 410. Guide ring; 411. Through hole. Detailed Implementation

[0016] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0017] To facilitate the simultaneous auxiliary cleaning of micropores using suction and blowing methods, thereby improving the effectiveness of use, such as... Figure 1-3 As shown, the micro-hole processing mechanism for probe cards of this utility model includes a processing table 1, a processing component 3 and a guide component 4. The top of the processing table 1 is connected to a support frame 2 by bolts, the bottom of the support frame 2 is provided with the processing component 3, and the top of the processing table 1 is located at the bottom of the processing component 3, where the guide component 4 is provided. The processing component 3 includes a mounting frame 301. An air extraction nozzle 302 is bolted to the bottom of the mounting frame 301. A recovery tank 303 is bolted to one side of the mounting frame 301. An air extraction pump 304 is bolted to the bottom of the recovery tank 303, and the air inlet of the air extraction pump 304 is located inside the recovery tank 303.

[0018] During use, an auxiliary cleaning mechanism is added through the mounting bracket 301, the air extraction nozzle 302, the recovery tank 303 and the air pump 304. By using suction, negative pressure and flow guidance, the residual debris in the micro-holes is cleaned while the probe card is being processed for micro-holes.

[0019] The top of the support frame 2 is connected to the electric push rod by bolts, and the output end of the electric push rod is connected to the mounting frame 301 by bolts.

[0020] To improve the flexibility of use, for example, such as Figure 3 , Figure 4 As shown, the present invention also includes a guide assembly 4 comprising a slide table 401, a rotating frame 402 mounted on the top of the slide table 401 via a bearing, a support plate 403 slidably connected to both sides of the top of the rotating frame 402, and a positioning plate 404 rotatably connected to the top of the support plate 403 via a damping shaft, the positioning plate 404 comprising a flat surface 405 and an arc surface 406.

[0021] In use, the slide table 401, rotating frame 402, support plate 403, positioning plate 404, flat surface 405 and curved surface 406 can be used to add an auxiliary positioning mechanism to clamp and fix the probe card according to its actual size and shape, thereby improving the flexibility of use. The slide table 401 is connected to the second stepper motor by bolts, and the second stepper motor is connected to the rotating frame 402 by a drive shaft.

[0022] For example, such as Figure 2 As shown, the present invention also includes a filter plate 305 and an activated carbon filter plate 306 disposed in the recycling tank 303, and a laser 307 is bolted to the top of the mounting frame 301.

[0023] During use, the filter plate 305 and activated carbon filter plate 306 facilitate the filtration of extracted debris and exhaust gas. The laser 307 facilitates the micro-pore processing of the probe card using laser. Both filter plate 305 and activated carbon filter plate 306 are quick-release structures, making it convenient for subsequent operators to disassemble and maintain them.

[0024] For example, such as Figure 5 As shown, the present invention also includes a double threaded rod 407 installed in the rotating frame 402 via a bearing, a corresponding second ball slider 408 sleeved around the double threaded rod 407, and the second ball slider 408 connected to the support plate 403 by bolts. A rotating rod 409 is provided on one side of the rotating frame 402, and the rotating rod 409 is connected to the double threaded rod 407 by bolts.

[0025] During use, the double threaded rod 407, the second ball slider 408, and the rotating rod 409 facilitate the control and adjustment of the position and spacing of the support plate 403.

[0026] For example, such as Figure 3 As shown, the present invention also includes a guide ring 410 bolted to the top of the slide table 401 at the bottom of the rotating frame 402, and the air outlet of the air pump 304 is connected to the guide ring 410 through a hose. A through hole 411 is provided on the surface of the rotating frame 402.

[0027] During use, the airflow generated by the suction through the guide ring 410 and the through hole 411 can be used to blow away the processed micropores, further improving the cleaning quality. The bottom of the rotating frame 402 and the top of the guide ring 410 are both provided with openings, and the rotating frame 402 has a hollow structure.

[0028] For example, such as Figure 6 As shown, this utility model also includes a lead screw 101 mounted in the processing table 1 via bearings, a ball bearing slider 102 sleeved around the lead screw 101, and the ball bearing slider 102 connected to the slide table 401 via bolts. One end of the lead screw 101 is connected to a transmission gear 103 via bolts. A drive gear 104 is rotatably connected to the bottom of the transmission gear 103 in the processing table 1 via a rotating shaft. A stepper motor 105 is connected to the processing table 1 via bolts, and the stepper motor 105 is connected to the drive gear 104 via a drive shaft.

[0029] During use, the horizontal machining position of the workpiece can be controlled and adjusted by means of the lead screw 101, ball slider 102, transmission gear 103, drive gear 104 and stepper motor 105. The machining table 1 includes a controller. The stepper motor 105, the second stepper motor, the air pump 304 and the laser 307 are electrically connected to the controller by wires. Operators can apply grease to the surfaces of the lead screw 101, transmission gear 103, drive gear 104 and double threaded rod 407 for regular maintenance.

[0030] When using this utility model, the operator first places the probe card on the support plate 403 at the top of the rotating frame 402. According to the actual shape and size of the probe card, the rotating rod 409 is rotated to drive the double threaded rod 407 to rotate. The second ball slider 408 drives the support plate 403 to slide relative to each other. The positioning plate 404 is used for clamping and fixing. In order to improve the fixing effect of the circular probe card, the arc surface 406 can be rotated to the inside in advance. The arc surface 406 is used to contact the workpiece to increase the clamping area, thereby improving the stability of the workpiece. Next, the electric push rod is manually activated to drive the mounting bracket 301 to slide vertically downwards. The probe card is then laser-processed by the laser 307. Depending on the processing position, the stepper motor 105 drives the drive gear 104 to rotate, which in turn drives the lead screw 101 to rotate via the transmission gear 103. The ball slider 102 can move the workpiece horizontally, and the second stepper motor can drive the rotating frame 402 to rotate, thereby adjusting the micro-hole processing position. At the same time, the vacuum pump 304 can be activated, and the vacuum nozzle 302 can be used to pump the waste residue remaining in the micro-hole after processing into the recovery tank 303 and then through the filter plate 305 for recycling. The extracted gas is filtered through the activated carbon filter plate 306 and then enters the guide ring 410 and the rotating frame 302. Finally, it is sprayed out into the micro-hole through the through hole 411, thereby playing an auxiliary blowing effect, further improving the auxiliary cleaning quality, and also helping to improve the processing quality of the probe card.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The descriptions of the above embodiments and specifications are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection claimed by this utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A probe card micro-hole processing mechanism, characterized in that, It includes a processing table (1), a processing component (3) and a guide component (4). The top of the processing table (1) is connected to a support frame (2) by bolts. The bottom of the support frame (2) is provided with the processing component (3). The top of the processing table (1) is located at the bottom of the processing component (3) and the guide component (4) is provided. The processing component (3) includes a mounting bracket (301), the bottom of which is bolted to an air extraction nozzle (302), and one side of which is bolted to a recovery tank (303). The bottom of the recovery tank (303) is bolted to an air extraction pump (304), and the air inlet of the air extraction pump (304) is located inside the recovery tank (303).

2. The probe card micro-hole processing mechanism according to claim 1, characterized in that, The guide assembly (4) includes a slide (401), a rotating frame (402) is mounted on the top of the slide (401) via a bearing, and support plates (403) are slidably connected to both sides of the top of the rotating frame (402). A positioning plate (404) is rotatably connected to the top of the support plate (403) via a damping shaft. The positioning plate (404) includes a flat surface (405) and an arc surface (406).

3. The probe card micro-hole processing mechanism according to claim 1, characterized in that, The recycling tank (303) is equipped with a filter plate (305) and an activated carbon filter plate (306), and a laser (307) is bolted to the top of the mounting frame (301).

4. The probe card micro-hole processing mechanism according to claim 2, characterized in that, A double threaded rod (407) is installed inside the rotating frame (402) via a bearing. A corresponding second ball slider (408) is sleeved around the double threaded rod (407), and the second ball slider (408) is connected to the support plate (403) by bolts. A rotating rod (409) is provided on one side of the rotating frame (402), and the rotating rod (409) is connected to the double threaded rod (407) by bolts.

5. The probe card micro-hole processing mechanism according to claim 2, characterized in that, The top of the slide (401) is located at the bottom of the rotating frame (402) and is connected to the guide ring (410) by bolts. The air outlet of the air pump (304) is connected to the guide ring (410) through a hose. The surface of the rotating frame (402) is provided with a through hole (411).

6. The probe card micro-hole processing mechanism according to claim 1, characterized in that, A lead screw (101) is installed in the processing table (1) via bearings. A ball block (102) is sleeved around the lead screw (101), and the ball block (102) is connected to the slide table (401) via bolts. One end of the lead screw (101) is connected to a transmission gear (103) via bolts. A drive gear (104) is rotatably connected to the bottom of the transmission gear (103) in the processing table (1) via a rotating shaft. A stepper motor (105) is connected to the processing table (1) via bolts, and the stepper motor (105) is connected to the drive gear (104) via a drive shaft.

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