A grinding machine for probe card tip grinding

Abstract

The utility model relates to the probe card processing technical field discloses a grinding machine for probe card needle grinding processing, the top fixed mounting of processing platform has the slide rail, the top right side of slide rail is provided with the polishing mechanism, the top left side of slide rail is provided with workpiece clamping mechanism, this grinding machine for probe card needle grinding processing, the movable slot of workpiece platform surface provides the moving space for the movable block, and the elastic adjusting effect of cooperation telescopic spring, operating personnel can push the movable block according to the probe length and adjust the position of mounting plate, make mounting plate through groove can accurate matching the clamping demand of different length probe, and the scale line of workpiece platform surface marking provides the explicit reference for position adjustment, need not to replace the anchor clamps to realize the stable clamping of different length probe, improves the equipment adaptation ability of diversification probe processing.

Description

Technical Field

[0001] This utility model belongs to the field of probe card processing technology, specifically, it relates to a grinding machine for processing probe card grinding needles. Background Technology

[0002] In the field of semiconductor testing, probe cards are core testing components, and the accuracy of the probes directly determines the accuracy of the test results. During the manufacturing process, probes need to be polished to ensure that key indicators such as tip shape and surface flatness meet the usage requirements.

[0003] Current grinding equipment used for probe card grinding has significant limitations in practical applications, especially in the probe clamping stage, making it difficult to adapt to probes of different lengths. Specifically, existing equipment often employs a fixed structure design for its workpiece clamping mechanism, with relatively fixed clamping positions and ranges, only capable of clamping probes of a single length. When grinding probes of different lengths is required, operators must disassemble the existing clamps and replace them with suitable specialized clamps. This not only involves cumbersome procedures but also necessitates readjusting the relative positions of the clamps and grinding mechanism to ensure grinding accuracy, resulting in excessively long equipment adjustment time and severely impacting processing efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a grinding machine for processing probe card grinding needles, so as to solve the problems mentioned in the background art.

[0005] A grinding machine for processing probe card grinding needles includes a processing table and a support column fixedly connected to the bottom of the processing table. A slide rail is fixedly installed on the top of the processing table, and a grinding mechanism is provided on the top right side of the slide rail.

[0006] A slider is slidably connected to the top left of the slide rail, and a second sliding table is fixedly connected to the top of the slider. A first bearing seat and a second bearing seat are fixedly installed on the top of the second sliding table. A rotating shaft is connected inside the first and second bearing seats. A rotating plate is fixedly connected to the right end of the rotating shaft. A workpiece table is fixedly connected to the right side of the rotating plate in a triangular shape.

[0007] The upper surface of the workpiece stage is provided with a movable groove. A telescopic spring is fixedly connected to one end of the inner wall of the movable groove. A limit block is fixedly connected to the end of the telescopic spring away from the inner wall of the movable groove. A movable block is fixedly connected to the front of the limit block. A mounting plate is fixedly connected to the top of the movable block. A locking bolt is threaded inside the movable block. A through groove for the probe to pass through is provided on the front of the mounting plate.

[0008] The through groove is threaded with a positioning pin, the bottom of the outer surface of the positioning pin is threaded with a knob locking component, the top of the positioning pin is fixedly connected with an arc-shaped clamp, the left side of the mounting plate is fixedly connected with a fixing component, the inside of the fixing component is fixedly installed with a miniature cylinder, and the output end of the miniature cylinder is connected to a miniature vacuum suction cup.

[0009] In a preferred embodiment of this utility model, ball bearings are installed inside both bearing housing one and bearing housing two. The inner ring of the ball bearing is connected to the outer surface of the rotating shaft, and the left end of the rotating shaft is connected to the output end of an external motor.

[0010] In a preferred embodiment of the present invention, the movable block has a bolt hole that penetrates the movable block and the limiting block, and the upper surface of the workpiece stage is marked with scale lines.

[0011] In a preferred embodiment of this utility model, the grinding mechanism includes a sliding table, a movable plate, a motor, a rotating wheel, a grinding wheel, a grinding wheel, a grinding wheel, a grinding wheel, a transmission belt, and a grinding wheel. The sliding table is connected to the top right side of the slide rail. The movable plate is fixedly connected to the top of the sliding table. The motor is fixedly installed on the right side of the movable plate. The rotating wheel is connected to the output end of the motor. Grinding wheels 1, 2, and 3 are all connected to the left side of the movable plate through bearing seats. Grinding wheels 1, 2, and 3 are respectively fixedly connected to the left center of grinding wheels 1, 2, and 3. Grinding wheels 1, 2, and 3 are connected to each other through a transmission belt.

[0012] In a preferred embodiment of this utility model, the first grinding wheel, the second grinding wheel, and the third grinding wheel are arranged in a triangular pattern, and their central axes are all connected to the inner ring of the ball bearing installed inside the bearing housing. The wrap angle between the transmission belt and the rotating wheel, the first grinding wheel, the second grinding wheel, and the third grinding wheel is greater than 120 degrees.

[0013] In a preferred embodiment of this utility model, a connecting plate is fixedly connected to the top of the sliding table one, a mounting bracket is fixedly connected to the top of the sliding table two, a cylinder is mounted on the left side of the mounting bracket, an extension block is connected to the output end of the cylinder, a connecting block one is fixedly connected to the right end of the extension block, a fan is fixedly connected to the bottom of the connecting block one, a connecting block two is fixedly installed on the top right side of the fan, and a telescopic rod is fixedly connected to the left side of the connecting plate.

[0014] In a preferred embodiment of this utility model, both the cylinder and the blower are electrically connected to an external power source via a PLC program, and the end of the telescopic rod away from the connecting plate is fixedly connected to the right side of the connecting block two.

[0015] Compared with the prior art, the present invention has the following advantages:

[0016] 1. This grinding machine for processing probe card grinding needles, through the workpiece clamping mechanism, provides moving space for the movable block through the movable groove on the surface of the workpiece table. With the elastic adjustment of the telescopic spring, the operator can push the movable block to adjust the position of the mounting plate according to the probe length, so that the through groove of the mounting plate can accurately match the clamping requirements of probes of different lengths. At the same time, the scale lines marked on the surface of the workpiece table provide a clear reference for position adjustment. Stable clamping of probes of different lengths can be achieved without changing the fixture, which improves the equipment's adaptability to processing diverse probes.

[0017] 2. This grinding machine for processing probe card grinding needles can prevent debris from entering the gaps of components such as bearing seats and slide rails by timely cleaning of debris by a fan, thereby reducing the risk of component jamming, wear and other failures, extending the service life of core components of the equipment, reducing the frequency of equipment maintenance and replacement costs, and providing a guarantee for long-term stable production.

[0018] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings. Attached Figure Description

[0019] In the attached diagram:

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the grinding mechanism of this utility model;

[0022] Figure 3 This is a schematic diagram of the rotating plate mounting structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the workpiece stage structure of this utility model;

[0024] Figure 5 This is a schematic diagram of the fan installation structure of this utility model;

[0025] Figure 6 This is a schematic diagram of the mounting plate structure in Embodiment 2 of this utility model;

[0026] Figure 7 This is a schematic diagram of the vacuum suction cup structure of this utility model.

[0027] In the diagram: 1. Machining table; 2. Support column; 3. Slide rail; 4. Slide table one; 401. Movable plate; 402. Motor; 403. Rotating wheel; 404. Grinding wheel one; 405. Grinding wheel two; 406. Grinding wheel three; 407. Transmission belt; 408. Grinding wheel one; 409. Grinding wheel two; 410. Grinding wheel three; 5. Slide table two; 501. Slider; 502. Bearing seat one; 503. Bearing seat two; 504. Rotating plate; 505. Workpiece table; 506. 507. Movable groove; 508. Telescopic spring; 509. Limiting block; 510. Movable block; 511. Locking bolt; 512. Mounting plate; 513. Positioning pin; 514. Knob locking component; 515. Arc clamp; 516. Miniature cylinder; 517. Miniature vacuum suction cup; 518. Fixing component; 6. Mounting bracket; 7. Cylinder; 701. Extension block; 702. Connecting block one; 703. Fan; 704. Connecting block two; 705. Telescopic rod; 706. Connecting plate. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. The following embodiments are used to illustrate this utility model.

[0029] Example 1

[0030] To address the problem in existing probe cards where it's inconvenient to clamp probes of different lengths during the grinding process, such as... Figures 1 to 7 As shown, a grinding machine for processing probe card grinding needles includes a processing table 1 and a support column 2 fixedly connected to the bottom of the processing table 1. A slide rail 3 is fixedly installed on the top of the processing table 1, and a grinding mechanism is provided on the top right side of the slide rail 3.

[0031] A slider 501 is slidably connected to the top left of the slide rail 3. A second slide table 5 is fixedly connected to the top of the slider 501. A first bearing seat 502 and a second bearing seat 503 are fixedly installed on the top of the second slide table 5. A rotating shaft is connected inside the first bearing seat 502 and the second bearing seat 503. A rotating plate 504 is fixedly connected to the right end of the rotating shaft. A workpiece stage 505 is fixedly connected to the right side of the rotating plate 504 in a triangular shape. Ball bearings are installed inside the first bearing seat 502 and the second bearing seat 503. The inner ring of the ball bearing is connected to the outer surface of the rotating shaft. The left end of the rotating shaft is connected to the output end of an external motor.

[0032] The upper surface of the workpiece stage 505 has a movable groove 506. A telescopic spring 507 is fixedly connected to one end of the inner wall of the movable groove 506. A limit block 508 is fixedly connected to the end of the telescopic spring 507 away from the inner wall of the movable groove 506. A movable block 509 is fixedly connected to the front of the limit block 508. A mounting plate 511 is fixedly connected to the top of the movable block 509. A locking bolt 510 is threaded inside the movable block 509. A bolt hole that passes through the movable block 509 and through the limit block 508 is opened inside the movable block 509. A through groove for a probe to pass through is opened on the front of the mounting plate 511. The upper surface of the workpiece stage 505 is marked with scale lines.

[0033] The grinding mechanism includes a sliding table 4, a movable plate 401, a motor 402, a rotating wheel 403, a first grinding wheel 404, a second grinding wheel 405, a third grinding wheel 406, a transmission belt 407, a first grinding wheel 408, a second grinding wheel 409, and a third grinding wheel 410. The sliding table 4 is connected to the top right side of the slide rail 3. The movable plate 401 is fixedly connected to the top of the sliding table 4. The motor 402 is fixedly installed on the right side of the movable plate 401. The rotating wheel 403 is connected to the output end of the motor 402. The first grinding wheel 404, the second grinding wheel 405, and the third grinding wheel 406 are all connected to the movable plate 401 via bearing seats. On the left side, grinding wheels 408, 409, and 410 are fixedly connected to the left center of grinding wheels 404, 405, and 406, respectively. Grinding wheels 404, 405, and 406 are connected by a transmission belt 407. Grinding wheels 404, 405, and 406 are arranged in a triangular pattern, and their central axes are all connected to the inner ring of the ball bearing installed inside the bearing housing. The wrap angle between the transmission belt 407 and the rotating wheel 403, grinding wheel 404, grinding wheel 405, and grinding wheel 406 is greater than 120 degrees.

[0034] Motor 402 is a three-phase asynchronous motor with a power of 1.5-3kW and a speed of 1450r / min. The grinding wheel and the polishing wheel are connected by a flange made of 45# steel with a diameter that matches the grinding wheel. It is fixed with four M6 socket head cap bolts. Spring washers are installed between the bolts and the flange to prevent the bolts from loosening due to grinding vibration, thus ensuring the stability of the grinding wheel during high-speed rotation.

[0035] A positioning pin 512 is threaded into the through groove. A knob locking component 513 is threaded into the bottom of the outer surface of the positioning pin 512. An arc-shaped clamp 514 is fixedly connected to the top of the positioning pin 512. A fixing component 517 is fixedly connected to the left side of the mounting plate 511. A miniature cylinder 515 is fixedly installed inside the fixing component 517. A miniature vacuum suction cup 516 is connected to the output end of the miniature cylinder 515.

[0036] Example 2

[0037] Based on Example 1, a connecting plate 706 is fixedly connected to the top of sliding table 4, and a mounting bracket 6 is fixedly connected to the top of sliding table 5. A cylinder 7 is mounted on the left side of the mounting bracket 6. An extension block 701 is connected to the output end of the cylinder 7. A connecting block 702 is fixedly connected to the right end of the extension block 701. A fan 703 is fixedly connected to the bottom of the connecting block 702. A connecting block 704 is fixedly mounted on the top right side of the fan 703. A telescopic rod 705 is fixedly connected to the left side of the connecting plate 706. Both the cylinder 7 and the fan 703 are electrically connected to an external power source through a PLC program. The end of the telescopic rod 705 away from the connecting plate 706 is fixedly connected to the right side of the connecting block 704. The cylinder 7 is a standard cylinder with a diameter of 50-80mm, a stroke of 100-200mm, and a working pressure of 0.4-0.8MPa.

[0038] Installation and debugging before processing:

[0039] At the center of the top of the processing table 1, a slide rail 3 is fixedly installed along its length. The slide rail 3 must have a smooth surface and meet the straightness requirements to provide precise guidance for subsequent sliding components. First, the slider 501 is fitted and installed on the top left side of the slide rail 3, ensuring that the slider 501 can slide smoothly along the slide rail 3 without significant wobbling; then, the sliding stage 2 5 is fixedly connected to the top of the slider 501, and the levelness of the sliding stage 2 5 is calibrated using a level.

[0040] At the designated position on the top of the sliding table 2 5, symmetrically fix bearing housing 1 502 and bearing housing 2 503, ensuring that the central axes of the two bearing housings are collinear; embed ball bearings into the bearing housing 1 502 and bearing housing 2 503, and then pass the rotating shaft through the inner rings of the two bearings. The left end of the rotating shaft extends to the outside of the sliding table 2 5 to connect to the output end of an external motor, while the right end is fixedly connected to the rotating plate 504. On the right side of the rotating plate 504, weld or bolt three workpiece stages 505 in a triangular structure to ensure that the three workpiece stages 505 have the same height and uniform spacing.

[0041] Each workpiece stage 505 has a movable groove 506 on its upper surface. A telescopic spring 507 is welded to one end of the inner wall of the movable groove 506, and the other end of the telescopic spring 507 is fixed to a limiting block 508. A movable block 509 is welded to the front of the limiting block 508, and a mounting plate 511 is bolted to the top of the movable block 509. A bolt hole extending from the limiting block 508 is also made inside the movable block 509, into which a locking bolt 510 is threaded. Furthermore, scale lines are laser-engraved on the upper surface of the workpiece stage 505 for precise adjustment of the probe clamping position.

[0042] Install sliding table 4 on the top right side of slide rail 3, keeping it parallel to sliding table 5 on the left side; fix movable plate 401 on top of sliding table 4, and install motor 402 on the right side of movable plate 401 via motor bracket. The output end of motor 402 is connected to rotating wheel 403. On the left side of movable plate 401, install three auxiliary bearing seats in a triangular arrangement. Embed the central shafts of grinding wheel 404, grinding wheel 405, and grinding wheel 406 into the inner rings of the ball bearings of the corresponding bearing seats to ensure that the three grinding wheels can rotate freely; weld or bolt grinding wheel 408, grinding wheel 409, and grinding wheel 410 to the center position on the left side of grinding wheel 404, grinding wheel 405, and grinding wheel 406, respectively, and the surface of the grinding wheels must be flattened.

[0043] Use the transmission belt 407 to sequentially wind around the rotating wheel 403, grinding wheel one 404, grinding wheel two 405, and grinding wheel three 406. Adjust the position of each wheel so that the wrap angle between the transmission belt 407 and each wheel is greater than 120 degrees to ensure that there is no slippage during transmission.

[0044] A connecting plate 706 is welded to one side of the top of sliding table 4, and a mounting bracket 6 is welded to the top of sliding table 5. A cylinder 7 is fixed to the left side of the mounting bracket 6 via a cylinder bracket. The output end of cylinder 7 is connected to an extension block 701. A connecting block 702 is welded to the right end of extension block 701. A fan 703 is bolted to the bottom of connecting block 702. A connecting block 704 is welded to the top right side of the fan 703. A telescopic rod 705 is welded to the left side of connecting plate 706. The end of telescopic rod 705 furthest from connecting plate 706 is fixedly connected to the right side of connecting block 704. Finally, cylinder 7 and fan 703 are connected to an external PLC control system and power supply via wires to ensure stable signal transmission and power supply.

[0045] Connect the external power supply and start motor 402 through the PLC program. Observe the rotation of grinding wheel 1 404, grinding wheel 2 405, and grinding wheel 3 406 to ensure uniform speed and no abnormal noise. Start the external motor and check whether the rotation of the rotating plate 504 drives the workpiece table 505 to rotate smoothly and whether the rotation angle control is accurate. Control the extension and retraction of cylinder 7 and observe whether the fan 703 moves smoothly and whether its position can be accurately adjusted with the assistance of the extension rod 705. At the same time, push sliding table 1 4 and sliding table 2 5 to check whether they slide smoothly along the slide rail 3 without any jamming.

[0046] Select standard probes of different lengths and pass them through the slots in the mounting plate 511. Adjust the clamping position by pushing the movable block 509 according to the scale lines on the workpiece stage 505. After the position is determined, tighten the locking bolt 510 to fix the probe. Control the sliding table 5 to move through the PLC program, so that the probe is close to the grinding wheel of the grinding mechanism. Start the grinding mechanism and the blower 703 to perform trial grinding and check whether the grinding effect of the grinding wheel on the probe is uniform and whether the blower 703 cleans the grinding debris thoroughly. At the same time, test the accuracy of the rotating plate 504 when switching between different workpiece stages 505 to ensure smooth connection of multi-station processing.

[0047] At the threaded hole pre-set on the inner wall of the through groove of the mounting plate 511, screw the positioning pin 512 clockwise into the threaded hole until the arc-shaped clip 514 at the top of the positioning pin 512 is fully inserted into the through groove; then put the knob locking part 513 into the bottom of the positioning pin 512 and tighten it clockwise so that the upper surface of the knob locking part 513 fits tightly against the lower surface of the mounting plate 511, and initially fixes the position of the positioning pin 512.

[0048] Select a standard probe with a diameter of 0.3mm, pass it through the through groove, rotate the positioning pin 512 to adjust the angle of the arc clamp 514 so that the inner arc surface of the arc clamp 514 is completely in contact with the outer surface of the probe, ensuring that the probe does not wobble radially in the through groove; tighten the knob locking part 513 again to lock the positioning pin 512 by the thread friction.

[0049] Replace the standard probes with diameters of 0.1mm and 0.5mm respectively, and repeat the above calibration steps to verify whether the thread adjustment range of the positioning pin 512 can cover the probe diameter range of 0.1-0.5mm. After each probe replacement, use a dial indicator to check the radial displacement of the probe, which must be ≤0.002mm to meet the clamping requirements of high-precision grinding.

[0050] At the pre-set mounting hole on the left side of the mounting plate 511, fix the fastener 517 with bolts to ensure that the mounting surface of the fastener 517 is perpendicular to the side of the mounting plate 511; insert the miniature cylinder 515 into the slot inside the fastener 517 and lock it with hex bolts to ensure that the output shaft axis of the miniature cylinder 515 is parallel to the center line of the through slot. Miniature cylinder model: CDJ2B6-5, cylinder diameter 6mm, stroke 5mm.

[0051] Connect the miniature vacuum suction cup 516 to the output end of the miniature cylinder 515 via a quick connector, ensuring the connector is sealed and leak-free; then connect the bottom of the suction cup to the miniature vacuum pump using a 1mm diameter PU vacuum tube. The miniature vacuum pump model is MVP010, with a vacuum level of -80kPa.

[0052] Functional test: Connect the external air source and vacuum pump power supply, and control the micro cylinder 515 to extend through the PLC program so that the vacuum suction cup 516 fits against the surface of the standard probe in the through groove; start the vacuum pump and use a vacuum pressure gauge to check the vacuum degree at the suction cup, which should be stable at -75 to -80 kPa; maintain the adsorption state for 5 minutes, observe whether the probe is displaced, and at the same time check the air leakage rate of the suction cup, which should be ≤0.5 kPa / min.

[0053] The miniature cylinder and vacuum pump were interfaced with the existing PLC control system, and a linkage control program was written: after the probe passes through the slot and is initially fixed by the positioning pin and arc clamp assembly, the PLC automatically triggers the miniature cylinder to extend. After the suction cup adheres to the probe, the vacuum pump starts after a 1-second delay. After grinding is completed, the PLC first shuts off the vacuum pump, and then controls the miniature cylinder to reset after a 2-second delay. The linkage process was repeatedly tested 10 times to ensure that the response time difference of each component is ≤0.5 seconds, with no jamming or malfunction.

[0054] The positioning pin, arc-shaped clamp assembly, miniature cylinder, vacuum suction cup assembly, and original movable block adjustment mechanism are linked together. According to the scale lines on the surface of the workpiece stage 505, the movable block 509 is pushed to adjust the position of the mounting plate 511, simulating the clamping scenario of probes of different lengths. After each adjustment, the process of probe installation, arc-shaped clamp fixing, and suction cup adsorption is repeated. The overall positioning accuracy of the probe is detected by a laser displacement sensor, which must be ≤0.005mm to meet the accuracy requirements of probe tip grinding.

[0055] The probe loading, unloading and grinding simulation operations were performed continuously without actual contact with the grinding wheel. After each operation, the tightness of the positioning pin threads, knob locking parts, cylinder connecting bolts, and the sealing of the vacuum suction tube were checked. After the operation was completed, the positioning accuracy and adsorption force of each component were checked again to ensure that there was no significant attenuation and to verify the long-term stability of the mechanism.

[0056] Working principle: The operator, referring to the scale lines on the workpiece stage 505 and the length of the probe to be processed, loosens the locking bolt 510, pushing the movable block 509 along the movable groove 506. At this time, the limiting block 508 compresses or stretches the telescopic spring 507. When the position of the through groove of the mounting plate 511 matches the required clamping length of the probe, the probe is passed through the through groove, and then the locking bolt 510 is tightened. The friction between the locking bolt 510 and the surface of the workpiece stage 505 fixes the position of the movable block 509 and the limiting block 508, thus achieving stable clamping of the probe. If multiple probes need to be processed simultaneously, the probe clamping operation can be performed separately on three workpiece stages 505 arranged in a triangular pattern.

[0057] The locating pin 512 is threaded to the inner wall of the through groove. By rotating the locating pin 512 clockwise or counterclockwise, the radial position of the arc-shaped clamp 514 in the through groove can be changed. For probes with smaller diameters (such as 0.1mm), rotating the locating pin clockwise moves the arc-shaped clamp toward the center of the through groove, reducing the clamping gap. For probes with larger diameters (such as 0.5mm), rotating the locating pin counterclockwise moves the arc-shaped clamp toward the inner wall of the through groove, expanding the clamping space, thereby adapting to probes of different diameters.

[0058] Fixing principle: The knob locking part 513 and the positioning pin 512 are threaded together. When the position of the arc-shaped clamp is adjusted to the right position, tightening the knob locking part will cause the static friction between it and the lower surface of the mounting plate 511 to counteract the rotation tendency of the positioning pin 512 and lock the position of the arc-shaped clamp. At the same time, the inner arc surface of the arc-shaped clamp 514 adopts a contour design, and the fit with the outer surface of the probe is more than 95%. This can distribute the radial force of the probe to various parts of the arc surface, avoid excessive local pressure that could cause probe deformation, and limit the radial runout of the probe during the grinding process.

[0059] The miniature cylinder 515 controls the extension and retraction of its output shaft by receiving electrical signals from the PLC. After the probe is initially fixed by the arc-shaped clamp, the cylinder output shaft extends, pushing the vacuum chuck 516 towards the probe until the chuck surface is in close contact with the probe. After polishing, the cylinder output shaft retracts, causing the chuck to detach from the probe for easy part removal. The cylinder's stroke can cover the positional differences of probes with different diameters, ensuring that the chuck can always effectively adhere to the probe.

[0060] After the vacuum chuck adheres to the probe, the miniature vacuum pump starts, drawing air from between the chuck and the probe through the vacuum tube to create a negative pressure environment. Under atmospheric pressure, the chuck adheres tightly to the probe surface, generating an adsorption force of 0.8-1.2N. This force works in conjunction with the radial clamping force of the arc-shaped clamp to further restrict the axial movement of the probe. At the same time, the silicone chuck has a certain degree of elasticity, which can buffer the impact force when the cylinder extends, preventing scratches on the probe surface.

[0061] The slider 501 is driven to slide along the slide rail 3 by an external control system, which moves the sliding table 5 and the workpiece table 505 holding the probe as a whole, adjusting the horizontal distance between the probe and the grinding mechanism. At the same time, an external motor can be started, and the motor output drives the rotating shaft to rotate. The rotating shaft drives the three workpiece tables 505 to rotate through the rotating plate 504, rotating the probe to be ground to face the grinding mechanism, realizing the switching of the processing position. In addition, according to the grinding requirements, the cylinder 7 can be extended and retracted by the PLC program. The cylinder 7 pushes the extension block 701 and the connecting block 702 to move the fan 703, and the telescopic rod 705 extends and retracts accordingly, ensuring that the air outlet of the fan 703 is aligned with the grinding area, preparing for the subsequent cleaning of grinding debris.

[0062] When motor 402 is started, its output drives rotating wheel 403 to rotate. Rotating wheel 403 transmits power to grinding wheel 404, grinding wheel 405, and grinding wheel 406 via transmission belt 407. Because the wrap angle between transmission belt 407 and each wheel is greater than 120 degrees, the stability of power transmission is ensured. The three grinding wheels rotate synchronously, driving grinding wheels 408, 409, and 410 on their left sides to rotate at high speed.

[0063] The sliding stage 2 (5) is slowly moved towards the sliding stage 1 (4), gradually bringing the probe closer to the rotating grinding wheel. The abrasive grains on the grinding wheel surface contact the area of ​​the probe to be ground, and the cutting action of the abrasive grains removes excess material from the probe surface, thus achieving the grinding of the probe. Different specifications of grinding wheels can be selected according to the required grinding precision of the probe. The grinding efficiency and effect can be controlled by adjusting the moving speed of the sliding stage 2 (5) and the contact pressure between the probe and the grinding wheel.

[0064] Simultaneously with the start of the grinding mechanism, the blower 703 is activated via the PLC program. The blower 703 generates a high-speed airflow, which is directed towards the grinding area through the outlet. Metal debris generated during grinding is promptly blown away from the probe and grinding wheel surfaces by the high-speed airflow, preventing debris from adhering to the grinding area and affecting grinding accuracy. It also prevents debris from entering the gaps between components such as the bearing housing and slide rail 3, reducing equipment wear and extending equipment lifespan. After grinding is complete, the motor 402 and blower 703 are turned off, the sliding table 5 is reset, the locking bolt 510 is loosened, and the processed probe is removed. If there are other probes to be processed, the workpiece table 505 can be switched via the rotating plate 504, and the above operations can be repeated for continuous processing.

Claims

1. A grinding machine for processing probe card grinding needles, comprising a processing table (1) and a support column (2) fixedly connected to the bottom of the processing table (1), characterized in that: A slide rail (3) is fixedly installed on the top of the processing table (1), and a grinding mechanism is provided on the top right side of the slide rail (3). A slider (501) is slidably connected to the top left of the slide rail (3). A second sliding table (5) is fixedly connected to the top of the slider (501). A first bearing seat (502) and a second bearing seat (503) are fixedly installed on the top of the second sliding table (5). A rotating shaft is connected inside the first bearing seat (502) and the second bearing seat (503). A rotating plate (504) is fixedly connected to the right end of the rotating shaft. A workpiece stage (505) is fixedly connected to the right side of the rotating plate (504) in a triangular shape. The upper surface of the workpiece stage (505) is provided with a movable groove (506). One end of the inner wall of the movable groove (506) is fixedly connected to a telescopic spring (507). The end of the telescopic spring (507) away from the inner wall of the movable groove (506) is fixedly connected to a limiting block (508). The front of the limiting block (508) is fixedly connected to a movable block (509). The top of the movable block (509) is fixedly connected to a mounting plate (511). The movable block (509) is internally threaded with a locking bolt (510). The front of the mounting plate (511) is provided with a through groove for a probe to pass through. The through slot is threaded with a positioning pin (512), and the bottom of the outer surface of the positioning pin (512) is threaded with a knob locking member (513). The top of the positioning pin (512) is fixedly connected with an arc-shaped clamp (514). The left side of the mounting plate (511) is fixedly connected with a fixing member (517). The inside of the fixing member (517) is fixedly installed with a miniature cylinder (515), and the output end of the miniature cylinder (515) is connected with a miniature vacuum suction cup (516).

2. The grinding machine for processing probe card grinding needles according to claim 1, characterized in that: Both bearing housing 1 (502) and bearing housing 2 (503) are equipped with ball bearings. The inner ring of the ball bearing is connected to the outer surface of the shaft. The left end of the shaft is connected to the output end of an external motor.

3. A grinding machine for processing probe card grinding needles according to claim 1, characterized in that: The movable block (509) has a bolt hole that passes through the movable block (509) and the limiting block (508), and the upper surface of the workpiece stage (505) is marked with scale lines.

4. A grinding machine for processing probe card grinding needles according to claim 1, characterized in that: The grinding mechanism includes a sliding table (4), a movable plate (401), a motor (402), a rotating wheel (403), a grinding wheel (404), a grinding wheel (405), a grinding wheel (406), a transmission belt (407), a grinding wheel (408), a grinding wheel (409), and a grinding wheel (410). The sliding table (4) is connected to the top right side of the slide rail (3). The movable plate (401) is fixedly connected to the top of the sliding table (4). The motor (402) is fixedly installed on the right side of the movable plate (401). The rotating wheel... (403) is connected to the output end of the motor (402). The first grinding wheel (404), the second grinding wheel (405) and the third grinding wheel (406) are all connected to the left side of the movable plate (401) through bearing seats. The first grinding wheel (408), the second grinding wheel (409) and the third grinding wheel (410) are respectively fixedly connected to the left center of the first grinding wheel (404), the second grinding wheel (405) and the third grinding wheel (406). The first grinding wheel (404), the second grinding wheel (405) and the third grinding wheel (406) are connected to each other through a transmission belt (407).

5. A grinding machine for processing probe card grinding needles according to claim 4, characterized in that: The grinding wheels 1 (404), 2 (405) and 3 (406) are arranged in a triangular pattern, and their central axes are all connected to the inner ring of the ball bearing installed inside the bearing housing. The wrap angle between the transmission belt (407) and the rotating wheel (403), grinding wheel 1 (404), grinding wheel 2 (405) and grinding wheel 3 (406) is greater than 120 degrees.

6. A grinding machine for processing probe card grinding needles according to claim 4, characterized in that: A connecting plate (706) is fixedly connected to the top of the sliding platform one (4), and a mounting bracket (6) is fixedly connected to the top of the sliding platform two (5). A cylinder (7) is installed on the left side of the mounting bracket (6). An extension block (701) is connected to the output end of the cylinder (7). A connecting block one (702) is fixedly connected to the right end of the extension block (701). A fan (703) is fixedly connected to the bottom of the connecting block one (702). A connecting block two (704) is fixedly installed on the top right side of the fan (703). A telescopic rod (705) is fixedly connected to the left side of the connecting plate (706).

7. A grinding machine for processing probe card grinding needles according to claim 6, characterized in that: The cylinder (7) and the blower (703) are electrically connected to an external power source through a PLC program. The end of the telescopic rod (705) away from the connecting plate (706) is fixedly connected to the right side of the connecting block two (704).

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