Telescopic water diversion rod for soft throwing machine

Abstract

The utility model relates to the technical field of semiconductor equipment discloses a telescopic water distribution rod for soft throwing machine, including fixed disc, the fixed disc is fixed in soft throwing machine workstation top, the hollow pipe diameter is arranged below the fixed disc, the water inlet is arranged on the upper end of hollow pipe diameter, the water distribution disc is connected to the lower end of hollow pipe diameter, the water distribution disc includes upper water distribution block and lower water distribution block, the bottom of upper water distribution block is recessed, the top of lower water distribution block is convex, upper water distribution block and lower water distribution block are arranged in cooperation up and down, and form the water distribution flow channel between upper water distribution block and lower water distribution block, the hollow pipe diameter, upper water distribution block and water distribution flow channel are communicated and set up. The utility model can control the even flow from the water distribution disc, flexible regulation telescopic length, not easy to deform, convenient to use.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a telescopic water divider for a soft polishing machine. Background Technology

[0002] In LED semiconductor manufacturing technology, one crucial step is wafer polishing. The scratches on polished wafers can be several micrometers deep, necessitating the use of a soft polishing machine. Soft polishing achieves a mirror-like finish after the process: polishing fluid is sprayed from the machine, its even dispersion and friction between the polishing pad and the wafer surface remove scratches, resulting in a smooth, mirror-like finish. Figure 1 As shown, pipe spraying is generally used in soft polishing machines. However, pipe spraying results in uneven water flow and easily causes liquid splashing. In addition, the pipe material is prone to deformation. Furthermore, the pipe spraying structure is fixed and the height cannot be adjusted, making it inconvenient to use. Utility Model Content

[0003] Purpose of the utility model: In view of the problems existing in the prior art, this utility model provides a telescopic water distribution bar for a soft polishing machine. This utility model can control the flow rate to flow evenly from the water distribution plate, flexibly adjust the telescopic length, is not easily deformed, and is easy to use.

[0004] Technical Solution: This utility model provides a telescopic water-distributing rod for a soft-shot polisher, including a fixed plate, which is fixed to the top of the soft-shot polisher's workbench. A hollow pipe is provided below the fixed plate, with a water inlet at the upper end of the hollow pipe and a water-distributing plate connected to the lower end of the hollow pipe. The water-distributing plate includes an upper water-distributing block and a lower water-distributing block. The bottom of the upper water-distributing block is concave, and the top of the lower water-distributing block is convex. The upper and lower water-distributing blocks are arranged in a vertically fitted manner, forming a water-distributing channel between them. The hollow pipe, the upper water-distributing block, and the water-distributing channel are connected.

[0005] Furthermore, the hollow tube diameter includes a fixed tube diameter and a movable tube diameter disposed at the lower end of the fixed tube diameter. The movable tube diameter is sleeved on the lower end of the fixed tube diameter and can move up and down relative to the fixed tube diameter.

[0006] Furthermore, the fixed plate is fixedly connected to the fixed pipe diameter.

[0007] Furthermore, several adjustment and positioning holes are vertically distributed at the lower end of the fixed pipe diameter and on the outer wall of the fixed pipe diameter; a through hole matching the adjustment and positioning holes is provided at the upper end of the movable pipe diameter; the fixed pipe diameter and the movable pipe diameter are connected by a screw passing through the through hole and fixed in the adjustment and positioning hole.

[0008] Furthermore, there is a certain distance between each of the adjustment and positioning holes.

[0009] Furthermore, the upper water distribution block and the lower water distribution block are connected by a fixed column.

[0010] Furthermore, both the upper water distribution block and the hollow pipe diameter are provided with threads at their connection points, and the upper water distribution block and the hollow pipe diameter are movably connected through the threads.

[0011] Furthermore, the upper water distribution block is also provided with a set screw, and the upper water distribution block is fastened to the hollow pipe diameter by the set screw.

[0012] Beneficial effects: The telescopic water distribution bar for a soft polisher provided by this utility model can control the flow rate to flow evenly from the water distribution plate, flexibly adjust the telescopic length, is not easily deformed, and is easy to use. Compared with the prior art, the specific beneficial effects are as follows: 1. A water distribution plate is installed, allowing the flow rate to be evenly distributed from the water distribution channels of the plate, and the flow rate is controllable; 2. Set fixed and movable pipe diameters. The up and down movement of the movable pipe diameter on the fixed pipe diameter can control the up and down extension and retraction of the water distribution rod. The length of the rod is adjustable, making it more flexible to use. By controlling the flow rate and the height between the flow rate and the soft polisher's worktable, splashing can be reduced. 3. The water distribution plate and the hollow pipe are connected by a threaded connection, which facilitates disassembly and repair later; 4. The water distribution plate and the hollow pipe diameter are connected by a threaded connection, and the upper water distribution block is also equipped with a set screw. By rotating the entire water distribution plate, the height of the water distribution plate can be further adjusted. At the same time, the set screw can ensure the tightness between the water distribution plate and the hollow pipe diameter. 5. The telescopic water-dividing rod for soft-shot propellers can be made of durable materials such as metal, and the structure is not easily deformed. Attached image description:

[0013] Figure 1 This is a schematic diagram of a conventional soft-shot sprayer with tubular spraying. Figure 2 A schematic diagram of the overall structure of the telescopic water-dividing rod for the soft-slinging machine provided by this utility model; Figure 3 A schematic diagram of the hollow tube diameter in the telescopic water distribution bar for the soft polisher provided by this utility model; Figure 4 A schematic diagram of the water distribution plate in the telescopic water distribution bar for the soft blasting machine provided by this utility model; Illustration: 1. Soft polishing machine workbench; 2. Fixed plate; 3. Hollow pipe diameter; 301. Fixed pipe diameter; 302. Movable pipe diameter; 303. Adjustment and positioning hole; 304. Screw; 4. Water distribution plate; 401. Upper water distribution block; 402. Lower water distribution block; 403. Water distribution channel; 404. Set screw; 405. Fixed column; 406. Thread; 5. Water inlet. Detailed Implementation

[0014] The present invention will now be described in detail with reference to the embodiments.

[0015] This utility model provides a telescopic water-dividing rod for a soft-slinging machine, such as Figures 2 to 4 As shown, the details are as follows: The telescopic water distribution bar of the soft polishing machine includes a fixed plate 2, which is fixed to the top of the soft polishing machine workbench 1. A hollow pipe 3 is set below the fixed plate 2. A water inlet 5 is set at the upper end of the hollow pipe 3, and the lower end of the hollow pipe 3 is connected to the water distribution plate 4. The hollow pipe diameter 3 includes a fixed pipe diameter 301 and a movable pipe diameter 302 sleeved at the lower end of the fixed pipe diameter 301. The upper end of the fixed pipe diameter 301 is connected to the fixed plate 2. Several adjustment and positioning holes 303 are vertically distributed on the lower end of the fixed pipe diameter 301 and on its outer wall. There is a certain distance between each adjustment and positioning hole 303 (the distance is not limited here and can be set according to actual production needs; it can be evenly distributed or have different distances). The upper end of the movable pipe diameter 302 is provided with a through hole that matches the adjustment and positioning hole 303 and a screw 304 that matches the through hole. By passing the screw 304 through the through hole and fixing it in the adjustment and positioning hole 303, the fixed pipe diameter 301 and the movable pipe diameter 302 are connected. The lower end of the movable pipe diameter 302 is connected to the water distribution plate 4. The water distribution plate 4 includes an upper water distribution block 401 and a lower water distribution block 402 connected by a fixing column 405. The upper water distribution block 401 has a through hole and its bottom is concave, while the lower water distribution block 402 has a convex top. The upper water distribution block 401 and the lower water distribution block 402 are arranged in a vertically fitted manner, and there is a gap between the bottom of the upper water distribution block 401 and the top of the lower water distribution block 402. This gap is the water distribution channel 403. The lower end of the movable pipe diameter 302 has an external thread, and the through hole of the upper water distribution block 401 has an internal thread. The external thread of the movable pipe diameter 302 matches the internal thread of the upper water distribution block 401, and the side wall of the upper water distribution block 401 is also provided with a set screw 404. The aforementioned hollow pipe diameter 3, upper water distribution block 401, and water distribution channel 403 are connected and installed.

[0016] The working principle of the telescopic water divider rod of this soft polishing machine is as follows: Loosen the screw 304 between the fixed pipe diameter 301 and the movable pipe diameter 302, slide the movable pipe diameter 302 up and down, adjust the height of the movable pipe diameter 302 until the height of the movable pipe diameter 302 relative to the worktable 1 of the soft polishing machine is appropriate, tighten the screw 304 to fix the movable pipe diameter 302 on the fixed pipe diameter 301; loosen the set screw 404 between the upper water divider block 401 and the movable pipe diameter 302. Rotate the upper water distribution block 401 and adjust the height of the water distribution plate 4 until the height of the water distribution plate 4 relative to the worktable 1 of the soft polishing machine is appropriate. Tighten the set screw 404 to make the water distribution plate 4 and the hollow pipe 3 secure. Open the water inlet 5 to allow the polishing liquid to enter the hollow pipe 3 from the water inlet 5. Then, it enters the water distribution plate 4 from the pipe inside the hollow pipe 3 and flows out through the water distribution channel 403 formed between the upper water distribution block 401 and the lower water distribution block 402, onto the worktable 1 of the soft polishing machine.

[0017] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent transformations or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A telescopic water-dividing rod for a soft-slinging machine, characterized in that, The device includes a fixed plate (2), which is fixed to the top of the soft polishing machine workbench (1). A hollow pipe diameter (3) is provided below the fixed plate (2). A water inlet (5) is provided at the upper end of the hollow pipe diameter (3). The lower end of the hollow pipe diameter (3) is connected to a water distribution plate (4). The water distribution plate (4) includes an upper water distribution block (401) and a lower water distribution block (402). The bottom of the upper water distribution block (401) is concave, and the top of the lower water distribution block (402) is convex. The upper water distribution block (401) and the lower water distribution block (402) are arranged in a vertically fitted manner. A water distribution channel (403) is formed between the upper water distribution block (401) and the lower water distribution block (402). The hollow pipe diameter (3), the upper water distribution block (401) and the water distribution channel (403) are connected.

2. The telescopic water divider for a soft-slinging machine according to claim 1, characterized in that: The hollow tube diameter (3) includes a fixed tube diameter (301) and a movable tube diameter (302) disposed at the lower end of the fixed tube diameter (301). The movable tube diameter (302) is sleeved on the lower end of the fixed tube diameter (301) and can move up and down relative to the fixed tube diameter (301).

3. The telescopic water divider for a soft-slinging machine according to claim 2, characterized in that: The fixed plate (2) is fixedly connected to the fixed pipe diameter (301).

4. The telescopic water divider for a soft-slinging machine according to claim 2, characterized in that: A plurality of adjustment and positioning holes (303) are vertically distributed on the lower end of the fixed pipe diameter (301) and on the outer wall of the fixed pipe diameter (301); a through hole matching the adjustment and positioning hole (303) is provided at the upper end of the movable pipe diameter (302); the fixed pipe diameter (301) and the movable pipe diameter (302) are connected by a screw (304) passing through the through hole and fixed in the adjustment and positioning hole (303).

5. The telescopic water divider for a soft-slinging machine according to claim 4, characterized in that: There is a certain distance between each of the adjustment positioning holes (303).

6. The telescopic water divider for a soft-slinging machine according to claim 1, characterized in that: The upper water distribution block (401) and the lower water distribution block (402) are connected by a fixed column (405).

7. The telescopic water divider for a soft-slinging machine according to claim 1, characterized in that: Both the upper water distribution block (401) and the hollow pipe diameter (3) are provided with threads (406) at their connection points, and the upper water distribution block (401) and the hollow pipe diameter (3) are movably connected by the threads (406).

8. The telescopic water divider for a soft-slinging machine according to claim 7, characterized in that: The upper water distribution block (401) is also provided with a set screw (404), and the upper water distribution block (401) and the hollow pipe diameter (3) are fastened together by the set screw (404).

Images