A dismounting tool for a carbonized tantalum coating equipment support jig

Abstract

The utility model discloses a kind of dismounting tool of carbonized tantalum coating equipment support jig, belong to coating equipment auxiliary tool technical field;The supporting jig includes multiple layers, each layer includes annular connecting cylinder, the outer wall of the annular connecting cylinder is uniformly connected with multiple horizontal support rods, and the annular connecting cylinder of each layer is connected by jig center rod screw thread between upper and lower;Dismounting tool includes dismounting cylinder, and the inner side of the dismounting cylinder is provided with dismounting positioning sleeve, and the inner diameter of dismounting positioning sleeve is adapted to the outer diameter of jig center rod;Dismounting handle is symmetrically provided on the lateral wall of dismounting cylinder;When the dismounting tool described in the utility model is used to dismount supporting jig, direct contact carbonized tantalum coating on supporting jig is avoided, and supporting jig is also not damaged, solve the problem that carbonized tantalum coating is not easy to disassemble in the process of coating process supporting jig surface spray carbonized tantalum.

Description

Technical Field

[0001] This utility model relates to the field of auxiliary tooling technology for coating equipment, specifically a disassembly tooling for a tantalum carbide coating equipment support fixture. Background Technology

[0002] TaC is a high-performance material with a melting point as high as 3880℃ and a Mohs hardness of 9-10. It also possesses high thermal conductivity, high strength, low thermal expansion, and corrosion resistance. TaC exhibits excellent chemical and mechanical compatibility with graphite. Plating TaC on graphite parts provides better chemical corrosion resistance than graphite itself, allowing for long-term stable use at 2600℃. Under high-temperature conditions, it can protect the reaction components of SiC crystal growth furnaces and epitaxial furnaces from the effects of hot ammonia, hydrogen, and silicon vapors. It can also effectively inhibit crystal growth and impurity migration during epitaxial processes, making it an indispensable material for the preparation of high-quality SiC wafers and epitaxial wafers.

[0003] Tantalum carbide coating equipment is used to produce tantalum carbide coated products. The tantalum carbide coated products are placed in the coating area using a support fixture for CVD tantalum carbide coating. During the coating process, both the product surface and the support fixture surface are coated with tantalum carbide. After coating is complete, removing the tantalum carbide coated product from the support fixture requires disassembling the fixture in sections. However, because the support fixture surface is also coated with tantalum carbide, disassembly is difficult. Furthermore, the support fixture is made of isostatic graphite, and improper force can damage it, further increasing the difficulty of disassembling it. Utility Model Content

[0004] This invention overcomes the shortcomings of the prior art by proposing a disassembly fixture for a tantalum carbide coating equipment support jig; it solves the problem that the tantalum carbide coating on the support jig surface is difficult to disassemble during the coating process.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: A disassembly fixture for a tantalum carbide coated equipment support jig, the support jig comprising multiple layers, each layer comprising an annular connecting cylinder, the outer wall of the annular connecting cylinder being uniformly connected with multiple horizontal support rods, the upper and lower annular connecting cylinders of each layer being threadedly connected by a central rod of the jig; the disassembly fixture comprising a disassembly cylinder, the inner side of which is provided with a disassembly positioning sleeve, the inner diameter of which is adapted to the outer diameter of the central rod of the jig; and disassembly handles symmetrically provided on the side wall of the disassembly cylinder.

[0006] Furthermore, both the disassembly cylinder and the disassembly positioning sleeve are annular.

[0007] Furthermore, the disassembly cylinder and the disassembly positioning sleeve are coaxially arranged.

[0008] Furthermore, the disassembly cylinder and the disassembly positioning sleeve are connected by multiple evenly arranged connecting rods.

[0009] Furthermore, a disassembly observation hole is formed between two adjacent connecting rods.

[0010] Furthermore, multiple disassembly rods are evenly connected to the bottom of the disassembly cylinder, and the position and number of the disassembly rods correspond to the horizontal support rods.

[0011] Furthermore, a disassembly rod sleeve is provided on the outer wall of the disassembly rod.

[0012] The beneficial effects of this utility model compared to the prior art are as follows: Using the disassembly fixture described in this utility model, the disassembly fixture can be directly fitted onto the central rod of the support fixture. The disassembly observation hole can prevent interference between the disassembly rod and the fixture support rod. Then, the disassembly tool is slowly placed into the support fixture. The disassembly handle is gripped tightly with both hands and rotated evenly to apply force, and the upper part of the support fixture is removed. The same method is then used to remove the middle support fixture and remove the lower coated product.

[0013] When using the disassembly fixture described in this utility model to disassemble the support fixture, direct contact with the tantalum carbide coating on the support fixture is avoided, and the support fixture is not damaged. This solves the problem that the tantalum carbide coating on the support fixture surface is difficult to disassemble during the current coating process. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the disassembly fixture described in this utility model; Figure 2 This is a schematic diagram of the structure of a coating support fixture in the prior art; Figure 3 This is a diagram showing the disassembly relationship between the tooling and the support fixture. Figure 4 This is a front view of the disassembled tooling; In the diagram: 1. Annular connecting cylinder; 2. Horizontal support rod; 3. Fixture center rod; 4. Tantalum carbide coated product; 5. Disassembly cylinder; 6. Disassembly positioning sleeve; 7. Connecting rod; 8. Disassembly observation hole; 9. Disassembly rod; 10. Disassembly rod sheath; 11. Disassembly handle. Detailed Implementation

[0015] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0016] See Figures 1 to 4 This embodiment proposes a disassembly fixture for a tantalum carbide coated equipment support jig, the disassembly fixture being connected to... Figure 2 The coating support fixture shown is used in conjunction with other fixtures for assembling and disassembling the coating support fixture (see [reference]). Figure 3 ); The existing coating support fixture includes multiple layers, each layer including an annular connecting cylinder 1. The outer wall of the annular connecting cylinder 1 is uniformly connected with three horizontal support rods 2. The annular connecting cylinder 1 of each layer is threadedly connected to the upper and lower parts through the central rod 3 of the fixture. An annular tantalum carbide coated product 4 is placed on the three horizontal support rods 2 of each layer. The disassembly fixture includes an annular disassembly cylinder 5, and an annular disassembly positioning sleeve 6 is provided on the inner side of the disassembly cylinder 5. The disassembly cylinder 5 and the disassembly positioning sleeve 6 are coaxially arranged. The disassembly cylinder 5 and the disassembly positioning sleeve 6 are connected by three evenly arranged connecting rods 7. A disassembly observation hole 8 is formed between two adjacent connecting rods 7. The inner diameter of the disassembly positioning sleeve 6 is adapted to the outer diameter of the fixture center rod 3. When in use, the disassembly positioning sleeve 6 is passed through the fixture center rod 3 of the tantalum carbide coated support fixture, so that the center of the disassembly tooling coincides with the center of the support fixture, which can ensure that the force is even when disassembling the support fixture.

[0017] Three disassembly rods 9 are evenly connected to the bottom of the disassembly cylinder 5. The positions of the disassembly rods 9 correspond to the horizontal support rods 2. In use, the position can be determined by the disassembly rods 9 abutting against the corresponding horizontal support rods 2, and they are also used to support the disassembly cylinder 5.

[0018] To prevent the disassembly rod 9 from wearing down the horizontal support rod 2, a disassembly rod sleeve 10 is provided on the outer wall of the disassembly rod 9. The disassembly rod sleeve 10 is made of rubber and is installed on the disassembly rod 9. When the disassembly rod 9 comes into contact with the horizontal support rod 2, it can reduce the force acting on the horizontal support rod 2 and prevent damage to the graphite horizontal support rod 2.

[0019] During the disassembly process, the disassembly rod 9 can be observed through the disassembly observation hole 8 to see if it passes through the support fixture without interference.

[0020] Disassembly handles 11 are symmetrically arranged on the side wall of the disassembly cylinder 5, so that the two hands can bear the force evenly during use, preventing the support fixture from being damaged by the force on one side.

[0021] The method for using the disassembly fixture for a tantalum carbide coated equipment support jig proposed in this embodiment is as follows: The coating support fixture is divided into three parts: upper, middle, and lower, connected by threads. When using the disassembly fixture, remove the top tantalum carbide coated product 4, then put the disassembly sleeve 5 of the disassembly fixture onto the central rod 3 of the support fixture. Prevent the disassembly rod 9 from interfering with the horizontal support rod 2 by using the disassembly observation hole 8. Slowly place the disassembly fixture into the support fixture, grip the disassembly handle 11 with both hands and rotate it evenly to remove the upper support fixture. Then remove the middle tantalum carbide coated product 4 and use the same method to remove the middle support fixture. Finally, remove the lower tantalum carbide coated product 4.

[0022] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A disassembly fixture for a tantalum carbide coated equipment support jig, the support jig comprising multiple layers, each layer comprising an annular connecting cylinder (1), the outer wall of the annular connecting cylinder (1) being uniformly connected with multiple horizontal support rods (2), and the annular connecting cylinders (1) of each layer being threadedly connected vertically via a central rod (3) of the jig; characterized in that, The disassembly fixture includes a disassembly cylinder (5), and a disassembly positioning sleeve (6) is provided on the inner side of the disassembly cylinder (5). The inner diameter of the disassembly positioning sleeve (6) is adapted to the outer diameter of the central rod (3) of the fixture. Disassembly handles (11) are symmetrically provided on the side wall of the disassembly cylinder (5).

2. The disassembly fixture for a tantalum carbide coated equipment support jig according to claim 1, characterized in that, Both the disassembly cylinder (5) and the disassembly positioning sleeve (6) are annular.

3. The disassembly fixture for a tantalum carbide coated equipment support jig according to claim 2, characterized in that, The disassembly cylinder (5) and the disassembly positioning sleeve (6) are coaxially arranged.

4. The disassembly fixture for a tantalum carbide coated equipment support jig according to claim 3, characterized in that, The disassembly cylinder (5) and the disassembly positioning sleeve (6) are connected by multiple evenly arranged connecting rods (7).

5. The disassembly fixture for a tantalum carbide coated equipment support jig according to claim 4, characterized in that, A disassembly observation hole (8) is formed between two adjacent connecting rods (7).

6. The disassembly fixture for a tantalum carbide coated equipment support jig according to claim 1, characterized in that, Multiple disassembly rods (9) are evenly connected to the bottom of the disassembly cylinder (5), and the position and number of the disassembly rods (9) correspond to the horizontal support rods (2).

7. The disassembly fixture for a tantalum carbide coated equipment support jig according to claim 6, characterized in that, The outer wall of the disassembly rod (9) is provided with a disassembly rod sleeve (10).

Images