Multi-fingered hand based on linear actuation

Abstract

The utility model discloses a multi -fingered manipulator based on linear drive relates to semiconductor wafer handling equipment, include: support seat, set up in the body, with at least two bearing surfaces of relative setting along vertical direction, and form the accommodation cavity between at least two bearing surfaces, at least three drive units have at least two different height's drive level of distribution along vertical direction, and each drive unit includes at least one drive source, each drive source sets up in the accommodation cavity, and presents spatial staggered arrangement in horizontal direction, wherein, each drive level distribution with each bearing surface, the output shaft axial parallel of each drive unit belonging to the same drive level and same direction, and the output shaft axial parallel of drive unit belonging to different drive level but opposite direction. Adopt above -mentioned scheme, avoided the height excessive accumulation caused by traditional longitudinal superposition, also realized the compact arrangement between drive unit.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer handling equipment technology, and in particular to a multi-finger robotic arm based on linear drive. Background Technology

[0002] In the front-end processes of semiconductor manufacturing, efficient wafer transfer between various stages is crucial. As a key piece of equipment for achieving this process, wafer transfer robots need to simultaneously ensure high-speed operation, precise positioning, and reliability in vacuum or clean environments. As semiconductor devices develop towards higher integration and smaller sizes, production line layouts are becoming more compact, placing higher demands on the space occupied and flexibility of robots, which presents new challenges to traditional robot design.

[0003] Existing linear multi-finger manipulators typically employ a radial linear motion structure, combined with rotation and lifting functions, to achieve multi-degree-of-freedom transmission capabilities. Radial extension is often achieved through a synchronous belt mechanism to ensure the end effector extends and retracts along a linear trajectory. However, the internal drive source layout of traditional manipulators is often inefficient, especially when multiple drive sources are stacked in a limited space, resulting in a large volume footprint. This not only increases the overall structural complexity but also limits the manipulator's adaptability in compact spaces.

[0004] In multi-finger robotic arm applications, multiple fingers at different height levels need to be driven independently. Existing technologies generally configure multiple drive sources by vertically stacking them. While this method can achieve independent drive, it inevitably leads to an increase in overall height and occupies too much space, making it difficult to meet the compact layout requirements of modern semiconductor manufacturing. How to overcome the spatial bottleneck caused by the limited layout of drive sources while maintaining multi-degree-of-freedom motion and independent control of multiple fingers has become a core problem that has been difficult to solve in this field for a long time. Utility Model Content

[0005] The purpose of this invention is to provide a multi-finger robotic hand based on linear drive, in order to solve the problem of how to achieve efficient layout of the drive source while ensuring multiple degrees of freedom and independent control of multiple fingers, and to overcome the bottleneck caused by space constraints.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A linearly driven multi-finger robotic hand includes a body and at least three finger units that move relative to the body, and further includes: A support base is disposed within the body and has at least two bearing surfaces arranged opposite each other in a vertical direction, and a receiving cavity formed between the at least two bearing surfaces; At least three drive units have at least two different drive levels distributed along the vertical direction. Each drive unit includes at least one drive source. Each drive source is disposed within the accommodating cavity and is arranged in a spatially staggered manner in the horizontal direction. The drive levels are distributed with the bearing surfaces. The output shafts of drive units belonging to the same drive level are axially parallel and have the same orientation, while the output shafts of drive units belonging to different drive levels are axially parallel but have opposite orientations.

[0007] Furthermore, at least two drive levels include a first drive level and a second drive level located at different drive heights, wherein the output shafts of each drive unit in the first drive level are arranged in a first direction, and the output shafts of each drive unit in the second drive level are arranged in a second direction opposite to the first direction.

[0008] Furthermore, the number of driving units is four, with the first driving level and the second driving level each containing two driving units.

[0009] Furthermore, the support base includes: The center plate extends horizontally; Two side plates are fixedly connected to both sides of the center plate along its length, and the surface of the side plates is perpendicular to the surface of the center plate. The central plate and the two side plates together form an H-shaped structure, which encloses the accommodating cavity inside.

[0010] Furthermore, the drive unit includes a drive source and a power output component connected by transmission, and the center plate has a recessed groove for mounting the drive source.

[0011] Furthermore, the drive unit also includes multiple support plates, with the power source and the power output component located on both sides of the support plates, and the output shaft of the power source passing through the support plates.

[0012] Furthermore, the power output component includes: The drive wheel is coaxially and fixedly connected to the output shaft of the drive source. The first idler wheel and the second idler wheel are rotatably mounted on the support base; An annular synchronous belt is meshed and sleeved on the driving pulley, the first idler pulley, and the second idler pulley to form a closed-loop transmission circuit. The drive block is rigidly connected to the straight section of the synchronous belt and is used to reciprocate along a straight line under the drive of the synchronous belt.

[0013] Furthermore, the driving pulley, the first idler pulley, and the second idler pulley are arranged in a triangle so that the annular synchronous belt forms a tortuous winding path.

[0014] Furthermore, the power output component also includes a tensioning pulley, which is rotatably mounted on the support base and is used to adjust the tension of the annular synchronous belt.

[0015] Furthermore, the side wall of the mounting housing has a number of strip-shaped openings equal to the number of the drive blocks. These strip-shaped openings are positioned at different horizontal heights and are used to allow some of the drive blocks to pass through.

[0016] The beneficial effects of this invention's linearly driven multi-finger robotic hand are as follows: By arranging at least three drive units within the accommodating cavity of the support base and dividing them into at least two drive levels, with drive blocks of different levels having different drive heights, the drive source is rationally layered in the height direction. Drive units belonging to the same drive level maintain parallel and consistent output shafts, which is beneficial for the unified arrangement of the drive structure and transmission stability; while drive units belonging to different drive levels have parallel but opposite output shafts. Combined with the staggered spatial arrangement on the support base, this not only avoids excessive height accumulation caused by traditional longitudinal stacking but also achieves a compact arrangement between drive units. Therefore, multiple drive units can be accommodated simultaneously within a limited installation space, enabling independent linear drive of multiple fingers. This maintains multi-degree-of-freedom and independent control capabilities while effectively improving the space utilization of the drive source and the overall compactness of the robotic hand. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the linearly driven multi-finger robotic hand of this utility model; Figure 2 This is a schematic diagram of the structure of the housing in an embodiment of the present invention; Figure 3 This is a schematic diagram of the internal structure of the housing in an embodiment of the present invention; Figure 4 This is a schematic diagram of the drive unit structure according to an embodiment of the present utility model; Figure 5 This is a schematic diagram of the power output component according to an embodiment of the present utility model; Figure 6 This is a schematic diagram of the power source structure according to an embodiment of the present utility model; Figure 7 This is a schematic diagram of the support structure according to an embodiment of the present utility model; Figure 8 This is a schematic diagram of the support plate structure in an embodiment of the present utility model; Figure 9 This is a schematic diagram of the sinkhole structure in an embodiment of the present invention.

[0018] Reference numerals: 1. Finger unit; 11. Adapter plate; 12. Translation seat; 13. Finger body; 2. Mounting housing; 21. Strip opening; 3. Support seat; 31. Accommodating cavity; 32. Center plate; 321. Sinking groove; 33. Side plate; 331. Mounting groove; 4. Drive source; 41. First motor; 42. Second motor; 43. Third motor; 44. Fourth motor; 5. Power output component; 51. Drive wheel; 52. First idler wheel; 53. Second idler wheel; 54. Annular synchronous belt; 55. Drive block; 551. Clamping part; 552. Extension part; 56. Tensioning wheel; 57. Slide rail; 6. Support plate. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0020] The following is in conjunction with the appendix Figures 1-9 The specific embodiments of this utility model will be further described in detail below.

[0021] like Figures 1-3 As shown, in some embodiments of this utility model, a multi-finger robotic hand based on linear drive includes a main body and at least three finger units that move relative to the main body. The main body includes a mounting housing 2, a support base 3 arranged inside the mounting housing 2, and multiple drive units that are installed in cooperation with the support base 3. The multiple drive units drive the corresponding finger units 1 to move in a linear direction, thereby realizing independent control of multiple finger units 1 in a limited space, taking into account the requirements of multi-degree-of-freedom operation capability and compact layout of drive source 4.

[0022] Reference Figures 4-5In some specific embodiments of this utility model, the support base 3 has at least two bearing surfaces arranged opposite each other in the vertical direction, and a receiving cavity 31 formed between the at least two bearing surfaces. The support base 3 is disposed within the mounting housing 2, and the receiving cavity 31 is used to accommodate at least three drive units. Each drive unit corresponds one-to-one with a finger unit 1, and can independently provide linear driving force, thereby ensuring that the fingers can complete independent operations without interference. Unlike the prior art where the drive units are arranged in a single layer, this utility model divides the drive units into at least two drive levels, and the drive blocks 55 of each level have different drive heights. The layered arrangement achieves an orderly arrangement of the drive sources 4 in a limited height direction. Each drive source is disposed within the receiving cavity and is arranged in a spatially staggered manner in the horizontal direction. Specifically, the finger unit 1 includes a transition plate 11, a translation seat 12, and a finger body 13.

[0023] Reference Figure 6 and Figure 7 In some specific embodiments of this utility model, drive units belonging to the same drive level maintain axial parallelism of their output shafts and face the same direction, which is beneficial to the consistency of the transmission link. Conversely, drive units belonging to different drive levels maintain axial parallelism of their output shafts, but their directions are opposite. Through this alternating design, combined with the staggered spatial arrangement of drive units within the support 3, not only is the height accumulation problem caused by traditional longitudinal stacking effectively avoided, but the space utilization rate is also significantly improved, allowing multiple drive units to be arranged compactly without interfering with each other.

[0024] Reference Figure 3 and Figure 8 In some specific embodiments of this utility model, the drive hierarchy includes a first drive hierarchy and a second drive hierarchy, which are located at different drive height positions. The output shafts of each drive unit in the first drive hierarchy face a first direction D1, and the output shafts of each drive unit in the second drive hierarchy face a second direction D2, which is opposite to the first direction. This achieves a complementary arrangement of multiple motors in adjacent levels, not only realizing reasonable layering in structure but also further improving the balance of the drive path.

[0025] Reference Figure 8 In some other embodiments of this invention, the number of drive units can be four, with the first drive level and the second drive level each containing two drive units, forming a symmetrical arrangement. This configuration maintains compactness while improving mechanical balance and avoiding the off-center load problem caused by asymmetry in the drive structure. For applications requiring more finger units 1, this invention can also be expanded to five or six drive units, achieving a layered arrangement by correspondingly increasing the drive levels; all of these are optional solutions of this invention.

[0026] Reference Figure 9 In some specific embodiments of this utility model, the support base 3 is composed of a central plate 32 and two side plates 33. The central plate 32 extends horizontally, and the two side plates 33 are respectively fixedly connected to both sides of the central plate 32 along its length, with the surface of the side plates 33 perpendicular to the surface of the central plate 32. The three together form an H-shaped structure, and an accommodating cavity 31 is formed inside. The H-shaped support structure is compact and reasonable in terms of space utilization, ensuring the overall installation strength while facilitating the modular and compact arrangement of the internal drive unit.

[0027] In some specific embodiments of this utility model, each drive unit includes a drive source 4, a power output component 5 connected to the drive source 4, and a support plate 6. The power source and the power output component 5 are located on opposite sides of the support plate 6. The drive source 4 is a motor. To ensure the stability of the motor during installation, a recessed groove 321 is provided on the center plate 32. The bottom of the motor can be embedded in the recessed groove 321, thereby reducing the overall height and improving the installation stability of the motor. The output shaft of part of the motor passes through the support plate 6 and the support base 3 and is connected to the power output component 5 to realize power transmission.

[0028] Specifically, the drive source 4 includes a first motor 41, a second motor 42, a third motor 43, and a fourth motor 44. The first motor 41 and the second motor 42 are arranged in the same direction toward the first direction, and the third motor 43 and the fourth motor 44 are arranged in the same direction toward the first direction; the first motor 41 and the third motor 43 are arranged in opposite directions side by side, and the second motor 42 and the fourth motor 44 are arranged in opposite directions side by side; the first motor 41 and the second motor 42 have the same output height but are staggered, and the third motor 43 and the fourth motor 44 have the same output height but are staggered.

[0029] In some specific embodiments of this utility model, the power output component 5 includes a drive wheel 51, a first idler wheel 52, a second idler wheel 53, an annular synchronous belt 54, and a drive block 55. The drive wheel 51 is coaxially and fixedly connected to the output shaft of the motor. The first idler wheel 52 and the second idler wheel 53 are rotatably mounted on the support base 3. The annular synchronous belt 54 is engaged and sleeved on the drive wheel 51, the first idler wheel 52, and the second idler wheel 53, forming a closed-loop transmission circuit. A drive block 55 is provided at the straight section of the synchronous belt. The drive block 55 is rigidly connected to the synchronous belt and can reciprocate with the synchronous belt and output linear displacement, thereby achieving precise driving of the finger unit 1. Specifically, the drive block 55 is connected to a slider, and the slider is slidably connected to a slide rail, which is mounted on the side plate 33. In some specific embodiments of this utility model, the side plate 33 has a mounting groove 331 for mounting the slide rail.

[0030] In some embodiments of this utility model, the transmission chain of the linear multi-fingered manipulator adopts a closed-loop transmission architecture of "drive source 4 - annular synchronous belt 54 - double idler pulleys - slider". Specifically, the output end of the drive source 4 forms a power input relationship with the synchronous belt. When the drive source 4 starts, it drives the annular synchronous belt 54 to generate cyclic motion. When the annular synchronous belt 54 is in a tensioned state, it meshes with the first idler pulley 52 and the second idler pulley 53 in sequence to form a closed-loop transmission path, so that the synchronous belt keeps running smoothly inside the housing.

[0031] In some specific embodiments of this utility model, the drive block 55 is disposed in a specific section of the synchronous belt, and includes an integrally formed clamping part 551 and an extension part 552. The clamping part 551 adopts an embedded structure, and its inner side is provided with a slot that matches the tooth groove of the synchronous belt, so that the tooth surface of the synchronous belt can be tightly fitted into the slot. At the same time, the clamping block is fixedly connected to the drive end by fastening bolts, thereby ensuring a rigid connection between the synchronous belt and the drive block 55. The extension part 552 extends out of the strip-shaped opening 21 of the fixed housing for connecting the external finger unit 1. When the drive source 4 drives the synchronous belt to move linearly, the clamping part 551 reliably transmits the displacement of the synchronous belt to the drive block 55, so that the drive block 55 moves back and forth along the length direction of the slide rail. A linear motion pair is formed between the drive block 55 and the slide rail, ensuring that its motion trajectory extends along the direction of the strip-shaped opening 21. Finally, the linear displacement of the drive block 55 is transmitted to the finger unit 1 through the extension part 552, realizing the extension or retraction of the finger unit 1, thereby completing the transfer of the workpiece.

[0032] In some specific embodiments of this utility model, a specific section of the synchronous belt is rigidly connected to the drive end via a clamping block. Specifically, when the synchronous belt undergoes linear displacement under the drive of the active drive wheel, the clamping block, acting as a transmission medium, transmits the linear motion of the synchronous belt to the drive end, forcing the drive end to perform linear reciprocating motion along the length of the slide rail. The cooperation between the slider and the slide rail forms a linear motion pair, ensuring that the motion trajectory of the drive end extends along the length of the slide rail. Finally, the linear displacement of the drive end is further transmitted to the finger unit 1, enabling the finger unit 1 to extend or retract, thereby completing the transfer of the workpiece between different workstations.

[0033] In some specific embodiments of this utility model, the driving pulley 51, the first idler pulley 52, and the second idler pulley 53 are arranged in a triangle, causing the synchronous belt to form a tortuous winding path. This arrangement can effectively extend the effective travel section of the synchronous belt and make the movement of the drive block 55 more stable in the straight section. To ensure the long-term reliable operation of the synchronous belt, a tensioning pulley 56 is also provided in the power output component 5. The tensioning pulley 56 is rotatably mounted on the support base 3 and is used to adjust the tension of the synchronous belt to avoid a decrease in transmission efficiency due to the slack of the synchronous belt.

[0034] In some specific embodiments of this utility model, a plurality of strip-shaped openings 21 are provided on the side wall of the mounting housing 2, the number of which is consistent with the number of drive blocks 55. To avoid interference between adjacent drive blocks 55, these strip-shaped openings 21 are distributed at different horizontal heights. The drive blocks 55 can pass through the corresponding strip-shaped openings 21 and connect with the external finger unit 1, thereby realizing a stable connection between the power output path of the drive blocks 55 and the finger unit 1.

[0035] In some other embodiments of this utility model, the power output component 5 is not limited to a synchronous belt drive structure, but can also be replaced by a lead screw-nut linear transmission mechanism, a rack and pinion transmission mechanism, or a linear motor. The tensioning structure can also use spring preload or slider clamping instead of the tensioning wheel 56. The shape of the mounting housing 2 is not limited to a rectangular box, but can be designed as a cylindrical, elliptical, or other shapes depending on the application scenario to achieve better spatial adaptability. These variations all fall within the protection scope of this utility model.

[0036] In summary, this utility model solves the problem of traditional robotic arms being unable to achieve independent multi-finger control in a limited space by constructing a multi-motor drive system arranged in layers inside the support base 3 and combining spatial staggering and transmission path optimization, thus ensuring multi-finger drive and structural compactness.

[0037] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A multi-finger robotic hand based on linear drive, comprising a body and at least three finger units (1) that move relative to the body, characterized in that, Also includes: The support base (3) is disposed in the body and has at least two bearing surfaces arranged opposite each other in the vertical direction, and a receiving cavity (31) formed between the at least two bearing surfaces. At least three drive units have at least two different drive levels distributed in the vertical direction. Each drive unit includes at least one drive source. Each drive source is disposed in the accommodating cavity (31) and is arranged in a spatially staggered manner in the horizontal direction. Among them, the output shafts of each drive unit belonging to the same drive level are parallel in axis and face the same direction, while the output shafts of drive units belonging to different drive levels are parallel in axis but face the opposite direction.

2. The multi-finger robotic hand based on linear drive according to claim 1, characterized in that, The at least two drive levels include a first drive level and a second drive level located at different drive heights. The output shafts of each drive unit in the first drive level are arranged in a first direction, and the output shafts of each drive unit in the second drive level are arranged in a second direction opposite to the first direction.

3. The multi-finger robotic hand based on linear drive according to claim 2, characterized in that, The number of driving units is four, with the first driving level and the second driving level each containing two driving units.

4. The multi-finger robotic hand based on linear drive according to claim 1, characterized in that, The support base (3) includes: The center plate (32) extends horizontally; Two side plates (33) are fixedly connected to the two sides of the center plate (32) along the length direction, and the surface of the side plates (33) is perpendicular to the surface of the center plate (32); The central plate (32) and the two side plates (33) together form an H-shaped structure and enclose the cavity (31) inside.

5. The multi-finger robotic hand based on linear drive according to claim 4, characterized in that, The drive unit includes a drive source (4) and a power output component (5) connected by transmission. The center plate (32) has a recessed groove (321) for mounting the drive source (4).

6. The multi-finger robotic hand based on linear drive according to claim 5, characterized in that, The drive unit also includes multiple support plates (6), the drive source (4) and the power output component (5) are located on both sides of the support plate (6), and the output shaft of the drive source (4) passes through the support plate (6).

7. The multi-finger robotic hand based on linear drive according to claim 6, characterized in that, The power output component (5) includes: The drive wheel (51) is coaxially and fixedly connected to the output shaft of the drive source (4); The first idler wheel (52) and the second idler wheel (53) are rotatably mounted on the support base (3); An annular synchronous belt (54) is meshed and sleeved on the driving pulley (51), the first idler pulley (52) and the second idler pulley (53) to form a closed-loop transmission circuit; The drive block (55) is rigidly connected to the straight section of the annular synchronous belt (54) and is used to reciprocate along a straight line under the drive of the synchronous belt.

8. The multi-finger robotic hand based on linear drive according to claim 7, characterized in that, The drive wheel (51), the first idler wheel (52) and the second idler wheel (53) are arranged in a triangle so that the annular synchronous belt (54) forms a tortuous winding path.

9. The multi-finger robotic hand based on linear drive according to claim 7, characterized in that, The power output component (5) also includes a tensioning wheel (56), which is rotatably mounted on the support base (3) and is used to adjust the tension of the annular synchronous belt (54).

10. The multi-finger robotic hand based on linear drive according to claim 7, characterized in that, The main body includes a mounting housing (2), and the side wall of the mounting housing (2) has a number of strip openings (21) equal to the number of the drive blocks (55). The strip openings (21) are set at different horizontal heights and are used for some of the drive blocks (55) to pass through.

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