High-cleanliness nitrogen atmosphere operation cabin based on nitrogen circulation filtration

Abstract

The utility model relates to a kind of high-clean nitrogen atmosphere operation cabin based on nitrogen circulation filtering, including operation cabin body, several nitrogen gas inlets for being communicated with external nitrogen source are distributed on cabin bottom plate;Sealing cover is installed on the outside of cabin top plate, high-efficiency filter is installed in sealing cover, filter installation window for the gas outlet of high-efficiency filter is set in the middle part of cabin top plate, and several mounting holes are set on the cabin top plate in the periphery of high-efficiency filter, sealing cover range, every mounting hole is externally installed with suction fan, and suction pipe is connected to the inside bottom of operation cabin in part mounting hole;Suction fan is located in sealing cover.The utility model uses the above structure, the tiny particulate matter generated in working process can be filtered by the internal circulation of nitrogen and high-efficiency filter in time, ensure that the cleanliness in cabin reaches hundred-grade standard, to meet the processing requirement of high-precision semiconductor electronic product, ensure product qualification rate.

Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor electronic product processing equipment, and in particular relates to a high-cleanliness nitrogen atmosphere working chamber based on nitrogen circulation filtration. Background Technology

[0002] High-precision semiconductor electronic products, such as wafers and chips, require highly demanding welding environments. These environments must be in an inert gas or specific protective atmosphere, and the presence of particulate matter exceeding specified limits is crucial, meeting the requirements of a Class 100 cleanroom. Current equipment often uses a method of continuously filling a sealed space with high-purity nitrogen from top to bottom and exhausting the waste gas from the bottom to meet these requirements. This method consumes a large amount of high-purity nitrogen, resulting in high production costs. Maintaining a fixed amount of nitrogen in the space can lead to oil and gas contamination due to friction between components and the volatilization of lubricating oil. This can cause the sealed space to fail to meet cleanliness requirements within a certain timeframe, potentially contaminating and rendering the products unusable. Therefore, current technology struggles to balance mass production costs and product yield, necessitating improvements. Utility Model Content

[0003] The purpose of this invention is to provide a high-cleanliness nitrogen atmosphere work chamber based on nitrogen circulation filtration, which aims to solve the technical problems of difficulty in removing pollutants such as contaminated gases or fine particulate matter from the work chamber atmosphere and high gas consumption costs in the prior art.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A high-cleanliness nitrogen atmosphere operating chamber based on nitrogen circulation filtration includes a machine base and an operating chamber body mounted on the machine base. The operating chamber body includes a bottom plate mounted on the machine base, a side plate assembly sealed and assembled with the bottom plate, and a top plate sealed and assembled with the side plate assembly. The bottom plate has several nitrogen inlets connected to an external nitrogen source. A sealed cover is installed outside the top plate, and a high-efficiency filter is installed inside the sealed cover. A filter installation window for the high-efficiency filter to exhaust air is opened in the middle of the top plate. Several mounting holes are opened around the high-efficiency filter and within the sealed cover area of ​​the top plate. A suction fan is installed outside each mounting hole, and some mounting holes are connected to suction pipes facing the bottom of the operating chamber. The suction fan is located inside the sealed cover, and an upper air chamber is formed between the sealed cover and the outside and upper part of the high-efficiency filter, communicating with the upper air inlet of the high-efficiency filter. An exhaust port is also provided on the bottom plate, and an exhaust valve connected to the exhaust port is installed.

[0005] The cabin side panel assembly is formed by assembling a cabin frame and multiple sets of sealing plates connected to the cabin frame. The sealing plates include a front cabin panel assembly, a rear cabin panel assembly, a left cabin panel assembly, and a right cabin panel assembly. The front cabin panel assembly and the rear cabin panel assembly are respectively provided with transparent panels that allow the interior to be seen. The transparent panels have glove connection holes and are sealed with operating gloves that can be inserted into the cabin.

[0006] A transfer box assembly is also provided on the upper part of the transparent panel of the front and rear cabin panels. The transfer box assembly includes a box body installed inward on the transparent panel. The front of the box body is provided with an outer box door that can be opened and closed from the outside of the transparent panel. The side of the box body is provided with an inner box door that can be opened and closed from the inside of the transparent panel. The box body is also provided with an exhaust hole and connected to an exhaust pipe to remove air from the box.

[0007] On the outside of the left and right compartment panels of the working compartment body, a feeding hopper assembly and a discharging hopper assembly are respectively installed. That is, the left and right compartment panels are respectively provided with docking windows that are sealed and connected to the feeding hopper assembly and the discharging hopper assembly. The back plates of the feeding hopper assembly and the discharging hopper assembly that are connected to the docking windows are provided with strip material plate channels through which the feeding plates pass, and the back plates are provided with channel doors and channel door drive mechanisms for controlling the opening and closing of the strip material plate channels.

[0008] The front and rear cabin panels each have a sealed frame that is connected to the cabin frame, and the transparent panel is connected to the sealed frame via quick-release fasteners.

[0009] This utility model adopts the above-mentioned structure, and the nitrogen content in the working chamber can maintain a certain high-purity nitrogen atmosphere for a period of time without replenishment, saving the cost of pure nitrogen; at the same time, the tiny particles generated during the working process can be filtered in time through the internal circulation of nitrogen and the high-efficiency filter, ensuring that the cleanliness of the chamber reaches the Class 100 standard, thereby meeting the processing requirements of high-precision semiconductor electronic products and ensuring the product qualification rate. Attached Figure Description

[0010] Figure 1 , Figure 2 This is a schematic diagram of the overall three-dimensional structure and plan view of the device of this utility model; Figure 3 , Figure 4 , Figure 5 These are partial structural schematic diagrams of the device of this utility model (hidden parts); Figure 6 This is a schematic diagram of the back plate structure of the feeding hopper assembly and the discharging hopper assembly in this utility model. Detailed Implementation

[0011] like Figures 1 to 5As shown, this utility model describes a high-cleanliness nitrogen atmosphere operating chamber based on nitrogen circulation filtration, including a machine base 1 and an operating chamber body 2 mounted on the machine base 1. The operating chamber body 2 includes a chamber floor plate 21 mounted on the machine base 1, a chamber side plate assembly sealed and assembled with the chamber floor plate 21, and a chamber top plate 22 sealed and assembled with the chamber side plate assembly. The chamber floor plate 21 has several nitrogen inlets 211 connected to an external nitrogen source. A sealing cover 3 is installed outside the chamber top plate 22, and a high-efficiency filter 4 is installed inside the sealing cover 3. An outlet for the high-efficiency filter 4 is provided in the middle of the chamber top plate 22. The filter has an installation window, and several installation holes 221 are provided on the top plate 22 of the cabin around the HEPA filter 4 and within the range of the sealing cover 3. Each installation hole 221 is equipped with an external suction fan 222, and some installation holes 221 are connected to the bottom of the working cabin with suction pipes 223 (the fan and part of the suction pipe are omitted in the figure). The suction fan is located inside the sealing cover 3, and the sealing cover 3 and the outside and top of the HEPA filter 4 form an upper air chamber that communicates with the upper air inlet of the HEPA filter 4. An exhaust port 212 is also provided on the bottom plate 21 of the cabin, and an exhaust valve (not shown in the figure) is installed on the exhaust port 212.

[0012] Before activating the work chamber, ensuring the chamber is sealed, pure nitrogen is first injected into the chamber from an external nitrogen source or nitrogen storage tank through nitrogen inlet 211. Simultaneously, the exhaust valve is opened. As pure nitrogen is injected, due to its low density, the air inside the chamber will gradually be expelled through the lower exhaust port 212. After a period of time, the suction fan 222 and high-efficiency filter 4 are turned on to further remove any remaining air in the upper chamber. Once the nitrogen concentration inside the chamber meets the requirements, the exhaust valve can be closed and the supply of pure nitrogen stopped. This conserves pure nitrogen and reduces costs; pure nitrogen can be replenished as needed later. Alternatively, before injecting pure nitrogen, a vacuum system can be connected to the exhaust valve to evacuate the chamber and remove any air before closing the exhaust valve and injecting pure nitrogen. During operation, as the various actuators in the chamber work, fine particulate matter or oil and gas contaminants are generated and enter the nitrogen atmosphere. The nitrogen in the chamber is drawn into the upper air chamber by the suction fan 222, and then enters the high-efficiency filter 4 through the upper air inlet to filter out fine particulate matter and oil and gas contaminants. The clean nitrogen then flows back into the working chamber from the bottom air outlet and filter installation window of the high-efficiency filter 4, thereby maintaining a nitrogen atmosphere in the working chamber that meets the cleanliness requirements. Through the above structure, the heavier dust or particulate matter at the bottom of the nitrogen atmosphere can be effectively drawn into the upper air chamber through the suction pipe 223 extending to the bottom of the chamber by the suction fan 222, and the problem of particulate matter accumulating at the bottom and being difficult to remove after long-term operation of the equipment can be solved. The cabin side panel assembly is formed by assembling a cabin frame 23 and multiple sets of sealing plates connected to the cabin frame 23. The sealing plates include a front cabin panel assembly 24, a rear cabin panel assembly 25, a left cabin panel assembly 26, and a right cabin panel assembly 27. The front cabin panel assembly 24 and the rear cabin panel assembly 25 are respectively provided with transparent panels 241 that allow the interior to be seen. The transparent panels 241 have glove connection holes 242 and are sealed with operating gloves that can be extended into the cabin (not shown in the figure). The operation of the equipment inside the cabin can be observed through the transparent panels 241, and the operating gloves can be used to manually intervene in the operating equipment inside the operating cabin.

[0013] A transfer box assembly 28 is also provided above the transparent panels of the front and rear compartment panels 241. The transfer box assembly 28 includes a box body 281 mounted inwardly on the transparent panel 241. The front of the box body 281 has an outer box door 282 that can be opened and closed from the outside of the transparent panel 241, and the side of the box body 281 has an inner box door 283 that can be opened and closed from the inside of the transparent panel. The box body 281 also has an exhaust hole 284 connected to an exhaust pipe to remove air from inside the box. When the transfer box assembly 28 is needed for material transfer, before the items inside the compartment are placed into the box, the inner box door 283 and the outer box... With all doors 282 closed, the air inside the box body 281 is evacuated through the exhaust port connected to the air extraction device. Then, the inner box door 283 is opened, the item is placed inside, the inner box door 283 is closed, and the outer box door 282 is opened to remove the item, thus preventing air from entering the compartment. Conversely, if the item needs to be transferred from the outside to the compartment, the outer box door 282 is opened with the inner box door 283 closed, the item is placed in the transfer box, the outer box door 282 is closed, the air inside the box body is evacuated through the exhaust port connected to the air extraction device, the inner box door 283 is opened, the item is transferred into the compartment using gloves, and the inner box door is closed. Combination Figure 6As shown, a loading bin assembly 5 and a discharging bin assembly 6 are respectively installed on the outer sides of the left and right bin assembly 27 of the working chamber body 2. Specifically, the left and right bin assembly 26 and right bin assembly 27 are respectively provided with docking windows 260 that are sealed and connected to the loading bin assembly 5 and the discharging bin assembly 6. The back plate 50 of the loading bin assembly 5 and the discharging bin assembly 6, which docks with the docking windows, is provided with a strip-shaped material plate channel 501 through which the workpiece tray passes. The back plate 50 is also provided with a channel door 51 and its channel door drive mechanism 52 for controlling the opening and closing of the strip-shaped material plate channel 501. In this embodiment, the channel door drive mechanism... The structure 52 adopts a connection method of cylinder 521, guide rail 522, slide plate 523, connecting rod swing arm 524, and rotating shaft 525. Cylinder 521 drives slide plate 523 to slide along guide rail 522. Slide plate 523 drives channel door 51 to rotate around rotating shaft 525 through connecting rod swing arm 524 and then presses flat on strip material plate channel 501. Even if channel door 51 is pressed closed, strip material plate channel 501 has better air tightness. Channel door 51 is normally closed to prevent too much air from entering the working chamber from the feeding hopper or discharging hopper, thereby maintaining the required concentration atmosphere in the working chamber. Alternatively, exhaust ports can be installed on the bottom plates of the feeding hopper assembly 5 and the discharging hopper assembly 6 respectively. With the passage door 51 closed, the internal air can be exhausted by suction to prevent the internal air from entering the working chamber. After exhausting, the passage door can be opened and the outer doors of the feeding hopper assembly and the discharging hopper assembly can be closed before feeding or discharging operations can be carried out.

[0014] The front and rear cabin panels 24 and 25 each have a sealed frame 243 connected to the cabin frame, and the transparent panel 241 is connected to the sealed frame 243 by a quick-release buckle 244.

[0015] Of course, in this invention, the sealing contact at each connection point can be achieved using conventional methods such as sealing rings and sealant. Furthermore, this invention can also be applied to work chambers with other gas atmospheres, such as inert gases.

[0016] This utility model adopts the above-mentioned structure, and the nitrogen content in the working chamber can maintain a certain high-purity nitrogen atmosphere for a period of time without replenishment, saving the cost of pure nitrogen; at the same time, the tiny particles generated during the working process can be filtered in time through the internal circulation of nitrogen and the high-efficiency filter, ensuring that the cleanliness of the chamber reaches the Class 100 standard, thereby meeting the processing requirements of high-precision semiconductor electronic products and ensuring the product qualification rate.

[0017] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-cleanliness nitrogen atmosphere work chamber based on nitrogen circulation filtration, comprising a machine base and a work chamber body mounted on the machine base, characterized in that: The work chamber body includes a bottom plate mounted on the machine platform, a side plate assembly sealed and assembled with the bottom plate, and a top plate sealed and assembled with the side plate assembly. The bottom plate has several nitrogen inlets connected to an external nitrogen source. A sealed cover is installed outside the top plate, and a high-efficiency filter is installed inside the sealed cover. A filter installation window for the high-efficiency filter to exhaust air is opened in the center of the top plate. Several mounting holes are opened around the high-efficiency filter and within the sealed cover area of ​​the top plate. A suction fan is installed outside each mounting hole, and some mounting holes are connected to suction pipes facing the bottom of the work chamber. The suction fan is located inside the sealed cover, and an upper air chamber is formed between the sealed cover and the outside and upper part of the high-efficiency filter, communicating with the upper air inlet of the high-efficiency filter. An exhaust port is also provided on the bottom plate, and an exhaust valve connected to the exhaust port is installed.

2. The high-cleanliness nitrogen atmosphere work chamber based on nitrogen circulation filtration according to claim 1, characterized in that: The cabin side panel assembly is formed by assembling a cabin frame and multiple sets of sealing plates connected to the cabin frame. The sealing plates include a front cabin panel assembly, a rear cabin panel assembly, a left cabin panel assembly, and a right cabin panel assembly. The front cabin panel assembly and the rear cabin panel assembly are respectively provided with transparent panels that allow the interior to be seen. The transparent panels have glove connection holes and are sealed with operating gloves that can be inserted into the cabin.

3. The high-cleanliness nitrogen atmosphere work chamber based on nitrogen circulation filtration according to claim 2, characterized in that: A transfer box assembly is also provided on the upper part of the transparent panel of the front and rear cabin panels. The transfer box assembly includes a box body installed inward on the transparent panel. The front of the box body is provided with an outer box door that can be opened and closed from the outside of the transparent panel. The side of the box body is provided with an inner box door that can be opened and closed from the inside of the transparent panel. The box body is also provided with an exhaust hole and connected to an exhaust pipe to remove air from the box.

4. The high-cleanliness nitrogen atmosphere work chamber based on nitrogen circulation filtration according to claim 2, characterized in that: On the outside of the left and right compartment panels of the working compartment body, a feeding hopper assembly and a discharging hopper assembly are respectively installed. That is, the left and right compartment panels are respectively provided with docking windows that are sealed and connected to the feeding hopper assembly and the discharging hopper assembly. The back plates of the feeding hopper assembly and the discharging hopper assembly that are connected to the docking windows are provided with strip material plate channels through which the feeding plates pass, and the back plates are provided with channel doors and channel door drive mechanisms for controlling the opening and closing of the strip material plate channels.

5. The high-cleanliness nitrogen atmosphere work chamber based on nitrogen circulation filtration according to claim 2 or 3, characterized in that: The front and rear cabin panels each have a sealed frame that is connected to the cabin frame, and the transparent panel is connected to the sealed frame via quick-release fasteners.

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