A press for hot-press sintering of silicon carbide

CN224880900UActive Publication Date: 2026-10-23ZHUOCHENG MICROELECTRONICS (SUZHOU) CO LTD
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Patent Information

Application Number
CN202521932819.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-09
Publication Date
2026-10-23
Estimated Expiration
2035-09-09

AI Technical Summary

Technical Problem

[0002]目前用于碳化硅热压烧结的常规设备多采用液压压力机在升温保压阶段完成合模与保压,但液压系统存在能耗高、液压油泄漏导致的污染风险以及对洁净环境的不利影响;此外液压回路与阀件的滞后、非线性与调节精度限制,使得合模力与保压压力的可控性和重复精度难以满足车载碳化硅芯片在烧结与塑封工序中对精确合模压力、可重复性和环境洁净度的严格要求

Benefits of technology

[0010]本实用新型的有益效果在于:通过丝杠驱动机构驱动升降座沿竖向移动,升降座的竖向位移经连接杆、第一曲柄连杆与第二曲柄连杆组成的肘节机构按几何关系放大并转换为作用于活动台板的合模压力;一体式机架底座提供整体刚性并简化结构,相比于将底座与机架分设的传统方案能降低装配难度与制造成本;固定台板与导向立柱保证活动台板沿既定方向精确往复移动以维持模具对位,丝杠驱动机构为升降座提供稳定、可控的位移输入,肘节机构在特定合模角度处呈现有利的自锁几何状态,从而在合模保持阶段减小持续输入力要求并提高能效、降低污染。

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Abstract

The application relates to a press machine for hot-press sintering of silicon carbide, which comprises an integrated frame base, a fixed platen, a movable platen, a screw driving mechanism and a toggle mechanism. The fixed platen is arranged above the integrated frame base, a plurality of guide columns are arranged between the fixed platen and the integrated frame base, and an upper die is arranged on the fixed platen. The movable platen is arranged below the fixed platen and can reciprocate along the guide columns, and a lower die is arranged on the movable platen. The screw driving mechanism is arranged on the integrated frame base and comprises a lifting seat which can reciprocate vertically. The toggle mechanism comprises a connecting rod, a first crank connecting rod and a second crank connecting rod. The connecting rod is arranged on both sides of the lifting seat, and one end of the connecting rod is hinged to the lifting seat. One end of the first crank connecting rod is hinged to the top of the integrated frame base, and the other end of the first crank connecting rod is hinged to the other end of the connecting rod. One end of the second crank connecting rod is hinged to the bottom of the movable platen, and the other end of the second crank connecting rod is hinged to the other end of the connecting rod.
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Description

Technical Field

[0001] This utility model relates to the field of silicon carbide hot pressing sintering technology, specifically to a press for silicon carbide hot pressing sintering. Background Technology

[0002] Currently, conventional equipment for hot pressing sintering of silicon carbide mostly uses hydraulic presses to complete mold closing and pressure holding during the heating and pressure holding stages. However, hydraulic systems have high energy consumption, the risk of pollution caused by hydraulic oil leakage, and adverse effects on the clean environment. In addition, the hysteresis, nonlinearity, and adjustment accuracy limitations of hydraulic circuits and valves make it difficult to meet the strict requirements of precise mold closing pressure, repeatability, and environmental cleanliness for automotive silicon carbide chips in the sintering and molding processes, as well as the controllability and repeatability of mold closing force and pressure holding. Utility Model Content

[0003] The purpose of this invention is to provide a press for hot pressing of silicon carbide, which can achieve stable, controllable and high-precision large mold closing pressure output, while reducing energy consumption and pollution, and improving the reliability and repeatability of mold alignment.

[0004] To achieve the above objectives, this utility model provides a press for hot pressing and sintering silicon carbide, comprising: Integrated rack base; A fixed platform is disposed above the integrated frame base, and a number of guide columns are disposed between the fixed platform and the integrated frame base. An upper mold is disposed on the fixed platform. A movable platform is located below the fixed platform and can reciprocate along the guide column; a lower mold is provided on the movable platform. The lead screw drive mechanism is mounted on the integrated frame base and includes a lifting seat that can reciprocate vertically. Toggle mechanism, including: A connecting rod is provided on both sides of the lifting seat, and one end of the connecting rod is hinged to the lifting seat; The first crank connecting rod has one end hinged to the top of the integrated frame base, and the other end hinged to the other end of the connecting rod. The second crank connecting rod has one end hinged to the bottom of the movable platform, and the other end hinged to the other end of the connecting rod.

[0005] Optionally, the lead screw drive mechanism further includes: The servo motor is mounted on the integrated frame base; A ball screw, wherein the lifting seat is sleeved on the ball screw and threadedly connected to the ball screw; A synchronous belt pulley is mounted on the movable end of the servo motor and on the ball screw. A timing belt is fitted onto the two timing pulleys.

[0006] Optionally, the integrated frame base is provided with limit posts, and the lifting seat is sleeved on the limit posts on both sides.

[0007] Optionally, the first crank connecting rod and the second crank connecting rod are designed as a single piece.

[0008] Optionally, the press for silicon carbide hot pressing sintering further includes: A thin-film pressure sensor is attached to the guide column to detect the mold closing pressure.

[0009] Optionally, the press for silicon carbide hot pressing sintering further includes: The oil pump is used to lubricate the connecting joints between the first crank connecting rod and the second crank connecting rod and the connecting rod, between the movable platform and the guide column, and between the lifting seat and the limiting column.

[0010] The beneficial effects of this utility model are as follows: the lifting seat is driven to move vertically by the screw drive mechanism, and the vertical displacement of the lifting seat is amplified by the toggle mechanism composed of the connecting rod, the first crank connecting rod and the second crank connecting rod according to the geometric relationship and converted into the mold closing pressure acting on the movable table; the integrated frame base provides overall rigidity and simplifies the structure, which can reduce the assembly difficulty and manufacturing cost compared with the traditional solution of separating the base and the frame; the fixed table and the guide column ensure that the movable table moves accurately back and forth in a predetermined direction to maintain the mold alignment; the screw drive mechanism provides stable and controllable displacement input for the lifting seat; the toggle mechanism presents an advantageous self-locking geometry at a specific mold closing angle, thereby reducing the continuous input force requirement and improving energy efficiency and reducing pollution during the mold closing and holding stage.

[0011] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0012] Figure 1 This is a schematic structural diagram of a silicon carbide hot pressing sintering press according to an embodiment of the present invention; Figure 2 This is a first schematic structural diagram of the screw drive mechanism and toggle mechanism of a press for hot pressing of silicon carbide according to an embodiment of the present invention. Figure 3This is a first schematic structural diagram of the screw drive mechanism and toggle mechanism of a press for hot pressing of silicon carbide according to an embodiment of the present invention. In the diagram: 1. Integrated frame base; 2. Fixed platform; 21. Upper mold; 3. Movable platform; 31. Lower mold; 4. Screw drive mechanism; 41. Lifting seat; 42. Servo motor; 43. Ball screw; 44. Synchronous pulley; 45. Synchronous belt; 46. Limiting post; 5. Toggle mechanism; 51. Connecting rod; 52. First crank connecting rod; 53. Second crank connecting rod; 6. Guide column; 7. Oil pump. Detailed Implementation

[0013] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0014] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0015] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0016] Please see Figures 1 to 3A preferred embodiment of this application shows a silicon carbide hot pressing sintering press comprising an integrated frame base 1, a fixed platform 2, a movable platform 3, a screw drive mechanism 4, and a toggle mechanism 5. The fixed platform 2 is positioned above the integrated frame base 1, with several guide columns 6 positioned between the fixed platform 2 and the integrated frame base 1. An upper die 21 is mounted on the fixed platform 2. The movable platform 3 is positioned below the fixed platform 2 and can reciprocate along the guide columns 6. A lower die 31 is mounted on the movable platform 3. The screw drive mechanism 4 is mounted on the integrated frame base 1 and includes a lifting seat 41 that can reciprocate vertically. The toggle mechanism 5 includes a connecting rod 51, a first crank connecting rod 52, and a second crank connecting rod 53. The connecting rod 51 is positioned on both sides of the lifting seat 41, with one end of the connecting rod 51 hinged to the lifting seat 41. One end of the first crank connecting rod 52 is hinged to the top of the integrated frame base 1, and the other end of the first crank connecting rod 52 is hinged to the other end of the connecting rod 51. One end of the second crank connecting rod 53 is hinged to the bottom of the movable platform 3, and the other end of the second crank connecting rod 53 is hinged to the other end of the connecting rod 51.

[0017] According to the embodiment of this utility model, the lifting seat 41 is driven to move vertically by the screw drive mechanism 4. The vertical displacement of the lifting seat 41 is amplified and converted into the mold closing pressure acting on the movable platform 3 by the toggle mechanism 5 composed of the connecting rod 51, the first crank connecting rod 52 and the second crank connecting rod 53 according to the geometric relationship. The integrated frame base 1 provides overall rigidity and simplifies the structure. Compared with the traditional solution of separating the base and the frame, it can reduce the assembly difficulty and manufacturing cost. The fixed platform 2 and the guide column 6 ensure that the movable platform 3 moves accurately back and forth in a predetermined direction to maintain the mold alignment. The screw drive mechanism 4 provides stable and controllable displacement input for the lifting seat 41. The toggle mechanism 5 presents an advantageous self-locking geometry at a specific mold closing angle, thereby reducing the continuous input force requirement and improving energy efficiency and reducing pollution during the mold closing and holding stage.

[0018] The following detailed description uses specific examples: Specifically, please see Figure 2 and Figure 3 The screw drive mechanism 4 also includes a servo motor 42, a ball screw 43, synchronous pulleys 44, and a synchronous belt 45. The servo motor 42 is mounted on the integrated frame base 1, and the lifting seat 41 is fitted onto the ball screw 43 and threadedly connected to it. The synchronous pulleys 44 are located on the movable end of the servo motor 42 and the ball screw 43. The synchronous belt 45 is fitted onto the two synchronous pulleys 44. The servo motor 42 drives the ball screw 43 via the synchronous belt 45, enabling the vertical displacement of the lifting seat 41 to achieve high responsiveness and high positioning accuracy through electric closed-loop control. While maintaining the advantages of no hydraulic pressure and low pollution, it further improves execution accuracy and dynamic response, facilitating process automation and quality tracking.

[0019] Please see Figure 2 and Figure 3 The integrated frame base 1 is equipped with limit posts 46, and the lifting seat 41 is fitted on both sides of the limit posts 46. This structure provides lateral guidance and stroke limit protection for the lifting seat 41, preventing lateral displacement or tilting of the lifting seat 41 during reciprocating motion, ensuring the coaxiality of the toggle mechanism 5 and the movable table 3 and the mold alignment accuracy, and improving the mechanical reliability and safety of the lifting device.

[0020] The first crank connecting rod 52 and the second crank connecting rod 53 are designed as a single piece. Compared with the original method of splicing two parts to form a crank connecting rod, the single-piece crank connecting rod has higher overall strength, less machining and assembly deformation, and better force transmission rigidity. This reduces the transmission backlash and deformation-induced errors of the toggle mechanism 5, which is beneficial for long-term stable output of large mold closing force under high load and extends the life of key components.

[0021] Furthermore, the silicon carbide hot pressing press also includes a thin-film pressure sensor, which is attached to the guide column 6 to detect the mold closing pressure. The thin-film pressure sensor can detect the mold closing pressure through slight deformation of the guide column 6, which is more conducive to adjusting the driving pressure and thus accurately controlling the mold closing pressure.

[0022] Further, please see Figure 1 The silicon carbide hot pressing press also includes an oil pump 7, which is used to lubricate the connecting joints between the first crank connecting rod 52 and the second crank connecting rod 53 and the connecting rod 51, between the movable platform 3 and the guide column 6, and between the lifting seat 41 and the limiting column 46. This oil pump 7 can continuously supply lubricant to the toggle mechanism 5 and each guide / limiting contact surface, reducing friction and wear, decreasing motion damping and hysteresis, improving motion smoothness, and maintaining long-term stable transmission characteristics, thereby helping to maintain the consistency of mold closing action and extend the equipment's lifespan.

[0023] In a complete mold closing-pressure holding-mold opening cycle, the lead screw drive mechanism 4 drives the lifting seat 41 to move smoothly vertically at the limit post 46. One end of the connecting rod 51 on both sides of the lifting seat 41 is hinged to the lifting seat 41. The vertical displacement of the lifting seat 41 drives the connecting rod 51 to move around the hinge point. Its other end is hinged together with the ends of the first crank connecting rod 52 and the second crank connecting rod 53 to form the central point of the toggle mechanism 5. As the lifting seat 41 continues to move, the central point changes in space, causing the first crank connecting rod 52 to rotate around its hinge point at the top of the integrated frame base 1, and forcing the second crank connecting rod 53 to rotate around its hinge point at the bottom of the movable platform 3. The geometric relationship of the three links amplifies the small displacement generated by the lead screw drive mechanism 4 and converts it into a larger mold closing force acting on the movable platform 3 to complete the mold closing. When the toggle mechanism 5 reaches the predetermined mold-closing angle, the toggle geometry enters a favorable self-locking zone, significantly reducing the continuous input required to maintain the mold-closing force. The leverage amplification effect of the toggle mechanism 5 and the rigidity of the integrated crank connecting rod allow for the cascade amplification of the input force of the screw drive mechanism 4 to meet the larger mold-closing load required for hot pressing sintering (in this embodiment, the mold-closing pressure can be amplified from approximately 20 tons to approximately 180 tons). After sintering, the drive direction is reversed, the screw drive mechanism 4 causes the lifting seat 41 to move in the opposite direction, and the toggle mechanism 5 resets and opens the mold in the reverse order. Throughout the reciprocating process, the limit post 46 provides lateral constraint and stroke protection for the lifting seat 41, and the oil pump 7 continuously supplies oil lubrication to key hinges and guide surfaces to reduce wear and maintain smooth operation.

[0024] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0025] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A press for hot pressing and sintering silicon carbide, characterized in that, include: Integrated rack base; A fixed platform is disposed above the integrated frame base, and a number of guide columns are disposed between the fixed platform and the integrated frame base. An upper mold is disposed on the fixed platform. A movable platform is located below the fixed platform and can reciprocate along the guide column; a lower mold is provided on the movable platform. The lead screw drive mechanism is mounted on the integrated frame base and includes a lifting seat that can reciprocate vertically. Toggle mechanism, including: A connecting rod is provided on both sides of the lifting seat, and one end of the connecting rod is hinged to the lifting seat; The first crank connecting rod has one end hinged to the top of the integrated frame base, and the other end hinged to the other end of the connecting rod. The second crank connecting rod has one end hinged to the bottom of the movable platform, and the other end hinged to the other end of the connecting rod.

2. The press for hot pressing and sintering silicon carbide according to claim 1, characterized in that, The lead screw drive mechanism also includes: The servo motor is mounted on the integrated frame base; A ball screw, wherein the lifting seat is sleeved on the ball screw and threadedly connected to the ball screw; A synchronous belt pulley is mounted on the movable end of the servo motor and on the ball screw. A timing belt is fitted onto the two timing pulleys.

3. The press for hot pressing and sintering silicon carbide according to claim 1, characterized in that, The integrated frame base is provided with limit posts, and the lifting seat is fitted on both sides of the limit posts.

4. The press for hot pressing and sintering silicon carbide according to claim 1, characterized in that, The first crank connecting rod and the second crank connecting rod are designed to be machined as a single piece.

5. The press for hot pressing and sintering silicon carbide according to claim 1, characterized in that, Also includes: A thin-film pressure sensor is attached to the guide column to detect the mold closing pressure.

6. The press for silicon carbide hot pressing sintering according to claim 3, characterized in that, Also includes: The oil pump is used to lubricate the connecting joints between the first crank connecting rod and the second crank connecting rod and the connecting rod, between the movable platform and the guide column, and between the lifting seat and the limiting column.